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G03F7/70541

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GPHYSICS G03Photography G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES G03F7/00Photomechanical

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Industries

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Patents Grantslast 30 patents

Information Patent Grant
Method for the tracking and identification of components of lithogr...
- Patent number 11,927,888
- Issue date Mar 12, 2024
- Carl Zeiss SMT GmbH
- Michael Kamp-Froese
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and apparatus for pattern fidelity control
- Patent number 11,669,020
- Issue date Jun 6, 2023
- ASML Netherlands B.V.
- Tanbir Hasan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus for lithographically forming wafer identification marks a...
- Patent number 11,562,968
- Issue date Jan 24, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Hu-Wei Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for monitoring reflectivity of the collector f...
- Patent number 11,204,556
- Issue date Dec 21, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yu-Chih Huang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Cleaning apparatus, imprint apparatus, lithography apparatus, and c...
- Patent number 10,915,032
- Issue date Feb 9, 2021
- Canon Kabushiki Kaisha
- Shingo Ishida
- B08 - CLEANING
Information Patent Grant
Method and apparatus for pattern fidelity control
- Patent number 10,908,515
- Issue date Feb 2, 2021
- ASML Netherlands B.V.
- Tanbir Hasan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Displacement based overlay or alignment
- Patent number 10,852,646
- Issue date Dec 1, 2020
- ASML Netherlands B.V.
- Marinus Jochemsen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus and method for monitoring reflectivity of the collector f...
- Patent number 10,747,119
- Issue date Aug 18, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yu-Chih Huang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate handling and identification mechanism
- Patent number 10,664,714
- Issue date May 26, 2020
- Rudolph Technologies, Inc.
- Kevin Barr
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Pattern manufacturing apparatus, pattern manufacturing method, and...
- Patent number 10,539,885
- Issue date Jan 21, 2020
- Kantatsu Co., Ltd.
- Eiji Oshima
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Calibration method, measurement apparatus, exposure apparatus, and...
- Patent number 10,401,744
- Issue date Sep 3, 2019
- Canon Kabushiki Kaisha
- Koichi Sentoku
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for lithographically forming wafer identification marks and...
- Patent number 10,283,457
- Issue date May 7, 2019
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Hu-Wei Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Lithography engraving machine for forming water identification mark...
- Patent number 10,283,456
- Issue date May 7, 2019
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Hu-Wei Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Exposure apparatus, exposure method, exposure apparatus maintenance...
- Patent number 10,061,214
- Issue date Aug 28, 2018
- Nikon Corporation
- Natsuko Sagawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for merging multiple geometrical pixel images...
- Patent number 9,291,902
- Issue date Mar 22, 2016
- Mycronic AB
- Lars Ivansen
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Exposure device
- Patent number 9,280,062
- Issue date Mar 8, 2016
- ORC Manufacturing Co., Ltd.
- Duk Lee
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method and apparatus for merging multiple geometrical pixel images...
- Patent number 9,235,127
- Issue date Jan 12, 2016
- Mycronic AB
- Lars Ivansen
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Process of using an imaging element having a photoluminescent tag
- Patent number 8,715,908
- Issue date May 6, 2014
- E I du Pont de Nemours and Company
- Adrian Lungu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Electron beam measurement apparatus
- Patent number 8,575,547
- Issue date Nov 5, 2013
- Hitachi High-Technologies Corporation
- Yasunari Sohda
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and apparatus for merging multiple geometrical pixel images...
- Patent number 8,539,395
- Issue date Sep 17, 2013
- Micronic Laser Systems AB
- Lars Ivansen
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method for marking objects
- Patent number 8,492,072
- Issue date Jul 23, 2013
- Infineon Technologies AG
- Klaus Heinz Sandtner
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Digital exposure method and digital exposure device for performing...
- Patent number 8,477,288
- Issue date Jul 2, 2013
- Samsung Display Co., Ltd.
- Sang-Hyun Yun
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for routing dispatching and routing reticles
- Patent number 8,412,368
- Issue date Apr 2, 2013
- GLOBALFOUNDRIES Inc.
- Diwaskar Adhikari
- G05 - CONTROLLING REGULATING
Information Patent Grant
Method of forming variable patterns using a reticle
- Patent number 8,343,716
- Issue date Jan 1, 2013
- Analog Devices, Inc.
- Lee J. Jacobson
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Securing authenticity of integrated circuit chip
- Patent number 8,255,839
- Issue date Aug 28, 2012
- ASML Holding N.V.
- Juan Ivaldi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of producing a thin layer of semiconductor material
- Patent number 8,101,503
- Issue date Jan 24, 2012
- Commissariat a l'Energie Atomique
- Bernard Aspar
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Information management and tracking system (IMTS)
- Patent number 7,908,581
- Issue date Mar 15, 2011
- Process Relations GmbH
- Dirk Reinhard Ortloff
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Electron beam measurement apparatus
- Patent number 7,884,325
- Issue date Feb 8, 2011
- Hitachi High-Technologies Corporation
- Yasunari Sohda
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Imaging element having a photoluminescent tag and process of using...
- Patent number 7,846,639
- Issue date Dec 7, 2010
- E. I. Du Pont de Nemours and Company
- Adrian Lungu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for personalization of semiconductor
- Patent number 7,842,525
- Issue date Nov 30, 2010
- Micronic Mydata AB
- Torbjorn Sandstrom
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR PRODUCING AN ELECTRONIC COMPONENT ASSEMBLY ON THE FRONT...
- Publication number 20230378085
- Publication date Nov 23, 2023
- Exagan SAS
- Matthieu NONGAILLARD
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
IDENTIFICATION CODES ON SEMICONDUCTOR CHIPS
- Publication number 20230350309
- Publication date Nov 2, 2023
- INFINEON TECHNOLOGIES AG
- Detlef Hofmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD FOR THE TRACKING AND IDENTIFICATION OF COMPONENTS OF LITHOGR...
- Publication number 20220342320
- Publication date Oct 27, 2022
- Carl Zeiss SMT GMBH
- Michael Kamp-Froese
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD AND APPARATUS FOR PATTERN FIDELITY CONTROL
- Publication number 20210181642
- Publication date Jun 17, 2021
- ASML NETHERLANDS B.V.
- Tanbir HASAN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
APPARATUS AND METHOD FOR MONITORING REFLECTIVITY OF THE COLLECTOR F...
- Publication number 20200379357
- Publication date Dec 3, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yu-Chih HUANG
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
APPARATUS FOR LITHOGRAPHICALLY FORMING WAFER IDENTIFICATION MARKS A...
- Publication number 20190259710
- Publication date Aug 22, 2019
- Taiwan Semiconductor Manufacturing Co., LTD
- Hu-Wei Lin
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHY ENGRAVING MACHINE FOR FORMING WAFER IDENTIFICATION MARK...
- Publication number 20180366415
- Publication date Dec 20, 2018
- Taiwan Semiconductor Manufacturing Co., LTD
- Hu-Wei Lin
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS, EXPOSURE METHOD, EXPOSURE APPARATUS MAINTENANCE...
- Publication number 20180364597
- Publication date Dec 20, 2018
- Nikon Corporation
- Natsuko YAMAKAWA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE TREATMENT SYSTEM, SUBSTRATE TRANSFER METHOD, AND COMPUTER...
- Publication number 20180164700
- Publication date Jun 14, 2018
- TOKYO ELECTRON LIMITED
- Takuya MORI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PATTERN MANUFACTURING APPARATUS, PATTERN MANUFACTURING METHOD, AND...
- Publication number 20180088471
- Publication date Mar 29, 2018
- KANTATSU CO., LTD
- Eiji OSHIMA
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
METHOD AND APPARATUS FOR MERGING MULTIPLE GEOMETRICAL PIXEL IMAGES...
- Publication number 20140170566
- Publication date Jun 19, 2014
- Micronic Mydata AB
- Lars IVANSEN
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD AND APPARATUS FOR MERGING MULTIPLE GEOMETRICAL PIXEL IMAGES...
- Publication number 20140137055
- Publication date May 15, 2014
- Micronic Mydata AB
- Lars IVANSEN
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
EXPOSURE DEVICE
- Publication number 20130308111
- Publication date Nov 21, 2013
- ORC MANUFACTURING CO., LTD.
- Duk Lee
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
EXPOSURE APPARATUS, EXPOSURE METHOD, EXPOSURE APPARATUS MAINTENANCE...
- Publication number 20120314193
- Publication date Dec 13, 2012
- Nikon Corporation
- Natsuko Sagawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD OF PRODUCING A THIN LAYER OF SEMICONDUCTOR MATERIAL
- Publication number 20120133028
- Publication date May 31, 2012
- COMMISSARIAT A L'ENERGIE ATOMIQUE (CEA)
- Bernard Aspar
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD AND APPARATUS FOR ROUTING DISPATCHING AND ROUTING RETICLES
- Publication number 20120089245
- Publication date Apr 12, 2012
- Diwaskar Adhikari
- G05 - CONTROLLING REGULATING
Information Patent Application
Method And Apparatus For Merging Multiple Geometrical Pixel Images...
- Publication number 20120060131
- Publication date Mar 8, 2012
- Micronic MyData Systems AB
- Lars Ivansen
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
IMAGING ELEMENT HAVING A PHOTOLUMINESCENT TAG AND PROCESS OF USING...
- Publication number 20120015294
- Publication date Jan 19, 2012
- E.I. du Pont de Nemours and Company
- ADRIAN LUNGU
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Digital Exposure Method and Digital Exposure Device for Performing...
- Publication number 20110205508
- Publication date Aug 25, 2011
- Sang-Hyun Yun
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ELECTRON BEAM MEASUREMENT APPARATUS
- Publication number 20110095183
- Publication date Apr 28, 2011
- Hitachi High-Technologies Corporation
- Yasunari SOHDA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD AND DEVICE FOR MARKING OBJECTS
- Publication number 20100279231
- Publication date Nov 4, 2010
- INFINEON TECHNOLOGIES AG
- Klaus Heinz Sandtner
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
IMAGING ELEMENT HAVING A PHOTOLUMINESCENT TAG AND PROCESS OF USING...
- Publication number 20100136483
- Publication date Jun 3, 2010
- E.I. du Pont de Nemours and Company
- ADRIAN LUNGU
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD OF PERFORMING LITHOGRAPHIC PROCESSES
- Publication number 20090191723
- Publication date Jul 30, 2009
- Chi-Ching Huang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ELECTRON BEAM MEASUREMENT APPARATUS
- Publication number 20090146057
- Publication date Jun 11, 2009
- Yasunari SOHDA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD OF PRODUCING A THIN LAYER OF SEMICONDUCTOR MATERIAL
- Publication number 20090130392
- Publication date May 21, 2009
- COMMISSARIAT A L'ENERGIE ATOMIQUE (CEA)
- Bernard Aspar
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method of Forming Variable Patterns Using a Reticle
- Publication number 20090098487
- Publication date Apr 16, 2009
- Analog Devices, Inc.
- Lee J. Jacobson
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Securing Authenticity of Integrated Circuit Chip
- Publication number 20090100392
- Publication date Apr 16, 2009
- ASML Holding N.V.
- Juan C. IVALDI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
AUTOMATIC PHOTOMASK TRACKING SYSTEM AND METHOD
- Publication number 20080269945
- Publication date Oct 30, 2008
- Tung-Huan Lai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Photomask, exposure method and apparatus that use the same, and sem...
- Publication number 20080106716
- Publication date May 8, 2008
- Elpida Memory, Inc.
- Hidenori Yamaguchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
RETICLE MANAGEMENT SYSTEMS AND METHODS
- Publication number 20080100814
- Publication date May 1, 2008
- Taiwan Semiconductor Manufacturing Co., LTD
- Yung-Ho Chen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Method for the tracking and identification of components of lithogr...

Method and apparatus for pattern fidelity control

Apparatus for lithographically forming wafer identification marks a...

Apparatus and method for monitoring reflectivity of the collector f...

Cleaning apparatus, imprint apparatus, lithography apparatus, and c...

Method and apparatus for pattern fidelity control

Displacement based overlay or alignment

Apparatus and method for monitoring reflectivity of the collector f...

Substrate handling and identification mechanism

Pattern manufacturing apparatus, pattern manufacturing method, and...

Calibration method, measurement apparatus, exposure apparatus, and...

Method for lithographically forming wafer identification marks and...

Lithography engraving machine for forming water identification mark...

Exposure apparatus, exposure method, exposure apparatus maintenance...

Method and apparatus for merging multiple geometrical pixel images...

Exposure device

Method and apparatus for merging multiple geometrical pixel images...

Process of using an imaging element having a photoluminescent tag

Electron beam measurement apparatus

Method and apparatus for merging multiple geometrical pixel images...

Method for marking objects

Digital exposure method and digital exposure device for performing...

Method and apparatus for routing dispatching and routing reticles

Method of forming variable patterns using a reticle

Securing authenticity of integrated circuit chip

Method of producing a thin layer of semiconductor material

Information management and tracking system (IMTS)

Electron beam measurement apparatus

Imaging element having a photoluminescent tag and process of using...

Method and apparatus for personalization of semiconductor

Patents Applicationslast 30 patents

METHOD FOR PRODUCING AN ELECTRONIC COMPONENT ASSEMBLY ON THE FRONT...

IDENTIFICATION CODES ON SEMICONDUCTOR CHIPS

METHOD FOR THE TRACKING AND IDENTIFICATION OF COMPONENTS OF LITHOGR...

METHOD AND APPARATUS FOR PATTERN FIDELITY CONTROL

APPARATUS AND METHOD FOR MONITORING REFLECTIVITY OF THE COLLECTOR F...

APPARATUS FOR LITHOGRAPHICALLY FORMING WAFER IDENTIFICATION MARKS A...

LITHOGRAPHY ENGRAVING MACHINE FOR FORMING WAFER IDENTIFICATION MARK...

EXPOSURE APPARATUS, EXPOSURE METHOD, EXPOSURE APPARATUS MAINTENANCE...

SUBSTRATE TREATMENT SYSTEM, SUBSTRATE TRANSFER METHOD, AND COMPUTER...

PATTERN MANUFACTURING APPARATUS, PATTERN MANUFACTURING METHOD, AND...

METHOD AND APPARATUS FOR MERGING MULTIPLE GEOMETRICAL PIXEL IMAGES...

METHOD AND APPARATUS FOR MERGING MULTIPLE GEOMETRICAL PIXEL IMAGES...

EXPOSURE DEVICE

EXPOSURE APPARATUS, EXPOSURE METHOD, EXPOSURE APPARATUS MAINTENANCE...

METHOD OF PRODUCING A THIN LAYER OF SEMICONDUCTOR MATERIAL

METHOD AND APPARATUS FOR ROUTING DISPATCHING AND ROUTING RETICLES

Method And Apparatus For Merging Multiple Geometrical Pixel Images...

IMAGING ELEMENT HAVING A PHOTOLUMINESCENT TAG AND PROCESS OF USING...

Digital Exposure Method and Digital Exposure Device for Performing...

ELECTRON BEAM MEASUREMENT APPARATUS

METHOD AND DEVICE FOR MARKING OBJECTS

IMAGING ELEMENT HAVING A PHOTOLUMINESCENT TAG AND PROCESS OF USING...

METHOD OF PERFORMING LITHOGRAPHIC PROCESSES

ELECTRON BEAM MEASUREMENT APPARATUS

METHOD OF PRODUCING A THIN LAYER OF SEMICONDUCTOR MATERIAL

Method of Forming Variable Patterns Using a Reticle

Securing Authenticity of Integrated Circuit Chip

AUTOMATIC PHOTOMASK TRACKING SYSTEM AND METHOD

Photomask, exposure method and apparatus that use the same, and sem...

RETICLE MANAGEMENT SYSTEMS AND METHODS