Patent Application
20080269945
1. Technical Field
The present invention relates to a photomask tracking system and a method thereof and, more particularly, to an automatic photomask tracking system and a method thereof.
2. Description of Related Art
In a modernized and advanced foundry or fab, photomasks are requisite for producing wafers. The “optical lithography”, which is to be applied to wafer manufacture, involves making a photomask with a designed wire pattern, and accurately duplicates the wire pattern on a wafer by projection of optical image principle. Therefore, photomasks play a crucial role in producing wafers and the quality of the wafer can be significantly affected by the conditions of the photomasks.
Since photomasks are typically expensive in both of their manufacturing costs and selling prices, it would be an important task to extend a use life of photomasks by efficiently managing or recording a photomask handling process.
At present, procedures of photomask handling and transporting depend upon manual recording, which tends to lead mistakes and even a minute mistake in the photomask handling and transporting procedures can adversely affect the quality of the products. Thus, photomasks must be managed with particular accurateness so as to maximally eliminate any possibility of damage thereof.
One primary objective of the present invention is to provide a photomask tracking system and a method thereof, wherein an RFID (Radio Frequency Identification) technology is used to allow a manager to recognize a latest progress of each photomask, and all movements in a handling process of photomasks are directly recorded and provided to a control terminal so as to achieve more effective and real-time management of the photomask handling process.
Another primary objective of the present invention is to provide a photomask tracking system and a method thereof for continuously monitoring a storage status of a photomask.
Another primary objective of the present invention is to provide a photomask tracking system and a method thereof for rapidly identifying a storage position of a photomask pod.
Still another primary objective of the present invention is to provide a photomask tag that is attached to a photomask pod for being automatically sensed so that the photomask is prevented from being damaged while being tracked.
Yet another primary objective of the present invention is to provide a photomask tracking system and a method thereof wherein a database accurately recording photomask data is established and relying on the data in the database, a use life and storage status of photomasks can be improved so as to save costs and enhance managing efficiency.
To achieve these objectives, the present invention firstly provides a photomask tracking system used in a photomask handling system for automatically tracking a photomask during a photomask handling process.
The photomask handling system comprises at least one photomask handling apparatus and at least one photomask pod. The photomask handling apparatus may be a photomask stocker, a photomask cleaner, a photomask transporter, and an exposure apparatus required in an optical lithographic process or other handling apparatuses required in the photomask handling process. The photomask pod may be of two types, namely a photomask transporting pod for carrying a photomask during transportation, and a photomask storage pod for storing a photomask in the photomask stocker.
The disclosed photomask tracking system comprises at least one RFID tag, at least one RFID reader and a control terminal, wherein the RFID tag is deposited on or attached to the photomask pod that is to be combined with the handling apparatuses. The RFID tag transmits a signal through an RFID mechanism. The RFID tag is detachable so that when the photomask is transferred between the photomask transporting pod and the photomask storage pod, the RFID tag can be detached from one said photomask pod where the photomask leaves and reattached to the other said photomask pod where the photomask enters.
The RFID tag transmits a first signal through the RFID mechanism and the first signal expresses data of the photomask carried by the photomask pod. The RFID reader at the handling apparatus receives the first signal from the photomask pod before, while or after handling the photomask and transmits a second signal expressing a latest progress of the photomask at the handling apparatus to the control terminal. The control terminal automatically receives the second signal from the handling apparatus so as to record the handling process of the photomask and track the latest progress of the photomask.
The control terminal may be equipped with a database that automatically records and stores all basic data of all photomasks, such as photomask numbers, photomask types, manufacturing dates and manufacturers, and also records the whole handling process of the photomasks, including duration of each handling step, frequencies of coming in and going out each handling apparatus, and sequence of entering the handling apparatuses.
The present invention further provides a photomask tracking method used in a photomask handling system. The photomask tracking method comprises steps of: providing the photomask tracking system and using an RFID tag to transmit a first signal before, while or after handling apparatuses handle the photomask, using an RFID reader to receive the first signal and transmit a second signal, and using a control terminal to receive the second signal so as to record a handling process of the photomask.
The proposes of the present invention allow an automatic management of photomasks so as to prevent damage of the photomasks caused by human mistake, and thereby lengthen a use time of the photomasks. Besides, the RFID system used in the present invention can provide a manager with a latest progress of photomasks so that the manager can track the photomask while the photomask is handled and transferred. Furthermore, by accurately recording data of the photomasks, use and storage status of the photomasks can be well managed.
The invention as well as a preferred mode of use, further objectives and advantages thereof, will best be understood by reference to the following detailed description of an illustrative embodiment when read in conjunction with the accompanying drawings, wherein:
While the present invention proposes a photomask tracking system implementing an RFID (Radio Frequency Identification) technology, the accompanying drawings for being read in conjunction with the following descriptions aim to express structural features related to the characteristics of the present invention and thus are not, and do not need to be, made in scale.
First, please refer to
In the conventional photomask handling process 1, an operator places a photomask into the photomask transporting pod 10, and puts the photomask transporting pod 10 into the photomask transporter 20. Then when the photomask transporting pod 10 is transported to the photomask cleaner 30, the operator takes the photomask (not shown) out of the photomask transporting pod 10 and places the photomask into the photomask cleaner 30. After cleaning is performed, the operator puts the photomask into the photomask storage pod 15 and places the photomask storage pod 15 into the photomask stocker 40. In the aforementioned process, all movement, recording and operating have to be manually conducted.
Please refer to
Now referring to
When the photomask is handled by the handling apparatuses, the RFID tag 142 on the photomask storage pod or the photomask transporting pod 140 transmits a first signal to the handling apparatuses 110, 120, and 130 through the RFID mechanism. The first signal is to express data of the photomask carried by the photomask pod 140. Meantime, the RFID readers 112, 122, and 132 on the handling apparatuses 110, 120, and 130 receive the first signal from the photomask pod 140 and transmit a second signal to the control terminal 101 before, while or after the handling apparatuses handle the photomask, wherein the second signal is to express a latest progress of the photomask at the handling apparatuses 110, 120 and 130. The control terminal 101, which further comprises a record device (not shown), receives the second signals from the handling apparatuses 110, 120 and 130 so as to record data of the handling process of the photomask at the handling apparatuses and tracks the latest progress of the photomask. The data of the photomask handling process comprise a cleaning record, a transporting record and a storage time of the photomask.
In the present invention, signal communication between the control terminal 101 as well as the RFID tag 142 and the RFID readers 112, 122 and 132 can be achieved by either a wireless or wired manner. Each said RFID tag 142 has a unique identification code and is recyclable. Furthermore, the RFID tag 142 is detachable, so that when the photomask is transferred between the photomask transporting pod and the photomask storage pod, the RFID tag can be detached from one of the photomask pods 140 where the photomask leaves and reattached to the other photomask pod 140 where the photomask enters.
In another preferred embodiment of the present invention, the RFID tag 142 is switchable. Each said photomask transporting pod 10 and each said photomask storage pod 15 come as a pair and share a common identification code. When the photomask is taken out of the photomask storage pod 15 and transferred to the photomask transporting pod 10, a manager can simply turns off a function switch of the RFID tag 142 on the photomask storage pod 15 and turns on a function switch of the RFID tag 142 on the photomask transporting pod 10 without a need of detaching the RFID tag 142 from the photomask storage pod 15 and reattaching it to the photomask transporting pod 10, thereby allowing the manager to transfer the photomask conveniently.
Referring to
Now the reference is made to
Although the particular embodiments of the invention have been described in detail for purposes of illustration, it will be understood by one of ordinary skill in the art that numerous variations will be possible to the disclosed embodiments without going outside the scope of the invention as disclosed in the claims.
| Number | Date | Country | Kind |
|---|---|---|---|
| 096115029 | Apr 2007 | TW | national |
