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Photography
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PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES
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Photomechanical
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G03F7/70891
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Patents Grants
last 30 patents
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Patent Grant
Apparatus and method for determining a condition associated with a...
Patent number
11,906,907
Issue date
Feb 20, 2024
ASML Netherlands B.V.
Derk Servatius Gertruda Brouns
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
System and method for thermal management of reticle in semiconducto...
Patent number
11,899,377
Issue date
Feb 13, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Yueh-Lin Yang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Optical component and clamp used in lithographic apparatus
Patent number
11,892,779
Issue date
Feb 6, 2024
ASML Holding N.V.
Victor Antonio Perez-Falcon
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Temperature control device and temperature control method
Patent number
11,874,609
Issue date
Jan 16, 2024
CHANGXIN MEMORY TECHNOLOGIES, INC.
Enhao Chen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Optical element and lithography system
Patent number
11,874,525
Issue date
Jan 16, 2024
Carl Zeiss SMT GmbH
Eric Eva
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Target debris collection device and extreme ultraviolet light sourc...
Patent number
11,852,984
Issue date
Dec 26, 2023
Samsung Electronics Co., Ltd.
Sunghyup Kim
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Exposure apparatus and method of manufacturing article
Patent number
11,841,624
Issue date
Dec 12, 2023
Canon Kabushiki Kaisha
Masato Homma
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Temperature conditioning system
Patent number
11,835,870
Issue date
Dec 5, 2023
ASML Netherlands B.V.
Güneş Nakiboğlu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Semiconductor processing tool and methods of operation
Patent number
11,822,256
Issue date
Nov 21, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Kai-Chieh Chang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus
Patent number
11,762,304
Issue date
Sep 19, 2023
ASML Netherlands B.V.
Güneş Nakiboğlu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and cooling method
Patent number
11,720,034
Issue date
Aug 8, 2023
ASML Netherlands B.V.
Gosse Charles De Vries
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Light source, EUV lithography system, and method for performing cir...
Patent number
11,703,769
Issue date
Jul 18, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Chi Yang
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
System and method for dynamically controlling temperature of thermo...
Patent number
11,693,326
Issue date
Jul 4, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Tzu-Jung Pan
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Substrate processing method, substrate processing apparatus, and st...
Patent number
11,693,319
Issue date
Jul 4, 2023
Tokyo Electron Limited
Keiichi Tanaka
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for in-situ dynamic protection of a surface and optical asse...
Patent number
11,681,236
Issue date
Jun 20, 2023
Carl Zeiss SMT GmbH
Vitaliy Shklover
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Exposure method, exposure apparatus, article manufacturing method,...
Patent number
11,640,119
Issue date
May 2, 2023
Canon Kabushiki Kaisha
Tetsuya Yamamoto
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Target debris collection device and extreme ultraviolet light sourc...
Patent number
11,599,031
Issue date
Mar 7, 2023
Samsung Electronics Co., Ltd.
Sunghyup Kim
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Lamp, light source device, exposure apparatus, and article manufact...
Patent number
11,586,117
Issue date
Feb 21, 2023
Canon Kabushiki Kaisha
Hiroyuki Tomita
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of reducing effects of lens heating and/or cooling in a lith...
Patent number
11,573,496
Issue date
Feb 7, 2023
ASML Netherlands B.V.
Nick Kant
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Contamination trap
Patent number
11,556,067
Issue date
Jan 17, 2023
ASML Netherlands B.V.
Sander Catharina Reinier Derks
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Method of manufacturing semiconductor device
Patent number
11,543,755
Issue date
Jan 3, 2023
Canon Kabushiki Kaisha
Takehiro Toyoda
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Thermal controlling method in lithography system
Patent number
11,506,986
Issue date
Nov 22, 2022
Taiwan Semiconductor Manufacturing Co., Ltd
Chi Yang
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Exposure apparatus and method of manufacturing article
Patent number
11,487,212
Issue date
Nov 1, 2022
Canon Kabushiki Kaisha
Masato Homma
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Exposure apparatus, exposure method, and method of manufacturing ar...
Patent number
11,474,439
Issue date
Oct 18, 2022
Canon Kabushiki Kaisha
Kouki Miyano
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Beam-forming and illuminating system for a lithography system, lith...
Patent number
11,448,968
Issue date
Sep 20, 2022
Carl Zeiss SMT GmbH
Hubert Holderer
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
EUV photolithography system and methods of operating the same
Patent number
11,442,365
Issue date
Sep 13, 2022
Taiwan Semiconductor Manufacturing Company, Ltd
Yu-Kuang Sun
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Method for producing a reflecting optical element of a projection e...
Patent number
11,415,892
Issue date
Aug 16, 2022
Carl Zeiss SMT GmbH
Matthias Kaes
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Light source, EUV lithography system, and method for generating EUV...
Patent number
11,333,983
Issue date
May 17, 2022
TAIWAN SEMICONDUCTOR MANFACTURING COMPANY, LTD.
Chi Yang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method and device for determining the heating state of an optical e...
Patent number
11,320,314
Issue date
May 3, 2022
Carl Zeiss SMT GmbH
Toralf Gruner
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Radiation source and device for feeding back emitted radiation to a...
Patent number
11,303,092
Issue date
Apr 12, 2022
Carl Zeiss SMT GmbH
Udo Dinger
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Patents Applications
last 30 patents
Information
Patent Application
SYSTEM AND METHOD FOR THERMAL MANAGEMENT OF RETICLE IN SEMICONDUCTO...
Publication number
20240134293
Publication date
Apr 25, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Yueh-Lin Yang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PROJECTION EXPOSURE APPARATUS FOR SEMICONDUCTOR LITHOGRAPHY
Publication number
20240111223
Publication date
Apr 4, 2024
Carl Zeiss SMT GMBH
Klaus Rief
G02 - OPTICS
Information
Patent Application
APPARATUS AND METHOD FOR DETERMINING A CONDITION ASSOCIATED WITH A...
Publication number
20240103386
Publication date
Mar 28, 2024
ASML NETHERLANDS B.V.
Derk Servatius Gertruda BROUNS
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Microelectromechanical Apparatus with Heating Element
Publication number
20240085661
Publication date
Mar 14, 2024
ROBERT BOSCH GmbH
Ralf Noltemeyer
G02 - OPTICS
Information
Patent Application
MULTI-CHANNEL LIGHT SOURCE FOR PROJECTION OPTICS HEATING
Publication number
20240077803
Publication date
Mar 7, 2024
ASML NETHERLANDS B.V.
Laurentius Johannes Adrianus VAN BOKHOVEN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
A METHOD AND SYSTEM FOR PREDICTING ABERRATIONS IN A PROJECTION SYSTEM
Publication number
20240077380
Publication date
Mar 7, 2024
ASML NETHERLANDS B.V.
Marinus Maria Johannes VAN DE WAL
G01 - MEASURING TESTING
Information
Patent Application
HEATING ARRANGEMENT AND METHOD FOR HEATING AN OPTICAL ELEMENT
Publication number
20240069453
Publication date
Feb 29, 2024
Carl Zeiss SMT GMBH
Susanne Beder
G02 - OPTICS
Information
Patent Application
VIBRATION ATTENUATION STRUCTURE AND EXPOSURE DEVICE
Publication number
20240027924
Publication date
Jan 25, 2024
CHANGXIN MEMORY TECHNOLOGIES, INC.
Xianyong YU
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD FOR PRODUCING A MIRROR OF A LITHOGRAPHY SYSTEM
Publication number
20240027730
Publication date
Jan 25, 2024
Carl Zeiss SMT GMBH
Christoph Zaczek
G02 - OPTICS
Information
Patent Application
METHOD FOR PRODUCING A MIRROR OF A MICROLITHOGRAPHIC PROJECTION EXP...
Publication number
20240019613
Publication date
Jan 18, 2024
Carl Zeiss SMT GMBH
Christoph Zaczek
G02 - OPTICS
Information
Patent Application
EUV MIRROR WITH IMPROVED OPTICAL STABILITY
Publication number
20240019786
Publication date
Jan 18, 2024
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY
Yung-Yao Lee
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Application
SEMICONDUCTOR PROCESSING TOOL AND METHODS OF OPERATION
Publication number
20240019789
Publication date
Jan 18, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Kai-Chieh CHANG
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
OPTICAL ELEMENT, OPTICAL ARRANGEMENT AND INSERT COMPONENT
Publication number
20240004160
Publication date
Jan 4, 2024
Carl Zeiss SMT GMBH
Eduard Schweigert
G02 - OPTICS
Information
Patent Application
LIGHT SOURCE APPARATUS, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACT...
Publication number
20240004306
Publication date
Jan 4, 2024
Canon Kabushiki Kaisha
MAHIRO SAITO
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
GAS RECOVERY SYSTEMS AND METHODS
Publication number
20230407470
Publication date
Dec 21, 2023
RASIRC, Inc.
Jeffrey J. Spiegelman
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Application
CONDITIONING APPARATUS AND METHOD
Publication number
20230400785
Publication date
Dec 14, 2023
ASML NETHERLANDS B.V.
Antonius Johannus VAN DER NET
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
FIELD FACET SYSTEM AND LITHOGRAPHY APPARATUS
Publication number
20230384686
Publication date
Nov 30, 2023
Carl Zeiss SMT GMBH
Arno Schmittner
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
CHAMBER DEVICE, AND ELECTRONIC DEVICE MANUFACTURING METHOD
Publication number
20230387641
Publication date
Nov 30, 2023
Gigaphoton Inc.
Junichi FUJIMOTO
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
CHAMBER DEVICE, GAS LASER DEVICE, AND ELECTRONIC DEVICE MANUFACTURI...
Publication number
20230387642
Publication date
Nov 30, 2023
Gigaphoton Inc.
Junichi FUJIMOTO
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD FOR HEATING AN OPTICAL ELEMENT IN A MICROLITHO-GRAPHIC PROJE...
Publication number
20230350312
Publication date
Nov 2, 2023
Carl Zeiss SMT GMBH
Dirk Hellweg
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
EXPOSURE APPARATUS, EXPOSURE METHOD, AND ARTICLE MANUFACTURING METHOD
Publication number
20230333490
Publication date
Oct 19, 2023
Canon Kabushiki Kaisha
TAKAHIRO TAKIGUCHI
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD FOR PERFORMING LITHOGRAPHY PROCESS, LIGHT SOURCE, AND EUV LI...
Publication number
20230324813
Publication date
Oct 12, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Chi YANG
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
MIRROR, OPTICAL SYSTEM AND METHOD FOR OPERATING AN OPTICAL SYSTEM
Publication number
20230305290
Publication date
Sep 28, 2023
Carl Zeiss SMT GMBH
Hartmut Enkisch
G02 - OPTICS
Information
Patent Application
Correction of Thermal Expansion in a Lithographic Device
Publication number
20230296989
Publication date
Sep 21, 2023
IMS Nanofabrication GmbH
Matthias Liertzer
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD FOR PRODUCING A MAIN BODY OF AN OPTICAL ELEMENT FOR SEMICOND...
Publication number
20230288662
Publication date
Sep 14, 2023
Carl Zeiss SMT GMBH
Franz-Josef STICKEL
B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information
Patent Application
METHOD AND DEVICE FOR DETERMINING THE HEATING STATE OF AN OPTICAL E...
Publication number
20230288260
Publication date
Sep 14, 2023
Carl Zeiss SMT GMBH
Johannes Schurer
G01 - MEASURING TESTING
Information
Patent Application
SYSTEM AND METHOD FOR DYNAMICALLY CONTROLLING TEMPERATURE OF THERMO...
Publication number
20230288819
Publication date
Sep 14, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Tzu-Jung Pan
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
A METHOD AND APPARATUS FOR CALCULATING A SPATIAL MAP ASSOCIATED WIT...
Publication number
20230273527
Publication date
Aug 31, 2023
ASML NETHERLANDS B.V.
Mauritius Gerardus Elisabeth SCHNEIDERS
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Cooling system in exposure machine and the operation method thereof
Publication number
20230266679
Publication date
Aug 24, 2023
United Semiconductor (Xiamen) Co., Ltd.
YiBin Zhou
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
PRODUCTION METHOD AND MEASUREMENT METHOD
Publication number
20230243644
Publication date
Aug 3, 2023
Carl Zeiss SMT GMBH
Hans Michael STIEPAN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY