Membership
Tour
Register
Log in
Temperature
Follow
Industry
CPC
G03F7/70875
This industry / category may be too specific. Please go to a parent level for more data
Parent Industries
G
PHYSICS
G03
Photography
G03F
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES
G03F7/00
Photomechanical
Current Industry
G03F7/70875
Temperature
Industries
Overview
Organizations
People
Information
Impact
Patents Grants
last 30 patents
Information
Patent Grant
Substrate processing system and substrate processing method, and de...
Patent number
11,977,339
Issue date
May 7, 2024
Nikon Corporation
Yuichi Shibazaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Lithographic systems and methods of operating the same
Patent number
11,947,271
Issue date
Apr 2, 2024
KULICKE & SOFFA LITEQ B.V.
Jeroen de Boeij
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Substrate processing apparatus and method of fabricating semiconduc...
Patent number
11,927,890
Issue date
Mar 12, 2024
Samsung Electronics Co., Ltd.
Seok Heo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Single-volume baking chamber for mask clean
Patent number
11,921,422
Issue date
Mar 5, 2024
Applied Materials, Inc.
Banqiu Wu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic systems and methods of operating the same
Patent number
11,921,435
Issue date
Mar 5, 2024
KULICKE & SOFFA LITEQ B.V.
Jeroen de Boeij
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Substrate processing system and substrate processing method, and de...
Patent number
11,921,436
Issue date
Mar 5, 2024
Nikon Corporation
Yuichi Shibazaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
System and method for thermal management of reticle in semiconducto...
Patent number
11,899,377
Issue date
Feb 13, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Yueh-Lin Yang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Temperature control device and temperature control method
Patent number
11,874,609
Issue date
Jan 16, 2024
CHANGXIN MEMORY TECHNOLOGIES, INC.
Enhao Chen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Substrate processing apparatus
Patent number
11,868,056
Issue date
Jan 9, 2024
Tokyo Electron Limited
Kouichi Mizunaga
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Object positioner, method for correcting the shape of an object, li...
Patent number
11,860,554
Issue date
Jan 2, 2024
ASML Netherlands B.V.
Mark Johannes Hermanus Frencken
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Semiconductor processing tool and methods of operation
Patent number
11,822,256
Issue date
Nov 21, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Kai-Chieh Chang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Substrate processing apparatus and processing condition adjustment...
Patent number
11,809,091
Issue date
Nov 7, 2023
Tokyo Electron Limited
Masahide Tadokoro
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method and system for determining overlay
Patent number
11,774,869
Issue date
Oct 3, 2023
ASML Netherlands B.V.
Ruud Hendrikus Martinus Johannes Bloks
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
System and method for dynamically controlling temperature of thermo...
Patent number
11,693,326
Issue date
Jul 4, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Tzu-Jung Pan
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Methods and systems for reducing particulate deposition on photomask
Patent number
11,693,325
Issue date
Jul 4, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Jui Chieh Chen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Apparatus and a method of forming a particle shield
Patent number
11,693,327
Issue date
Jul 4, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Wen-Hao Cheng
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Gas mixing for fast temperature control of a cooling hood
Patent number
11,681,233
Issue date
Jun 20, 2023
ASML Netherlands B.V.
Joost De Hoogh
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
11,669,021
Issue date
Jun 6, 2023
ASML Netherlands B.V.
Koen Jacobus Johannes Maria Zaal
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Support table for a lithographic apparatus, lithographic apparatus...
Patent number
11,650,511
Issue date
May 16, 2023
ASML Netherlands B.V.
Johan Gertrudis Cornelis Kunnen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multi-volume baking chamber for mask clean
Patent number
11,644,748
Issue date
May 9, 2023
Applied Materials, Inc.
Banqiu Wu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and method
Patent number
11,630,399
Issue date
Apr 18, 2023
ASML Netherlands B.V.
Nicolaas Ten Kate
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithography system, method of clamping and wafer table
Patent number
RE49488
Issue date
Apr 11, 2023
ASML Netherlands B.V.
Guido De Boer
Information
Patent Grant
Droplet catcher, droplet catcher system of EUV lithography apparatu...
Patent number
11,599,030
Issue date
Mar 7, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Shih-Yu Tu
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Lithographic systems and methods of operating the same
Patent number
11,550,232
Issue date
Jan 10, 2023
KULICKE & SOFFA LITEQ B.V.
Jeroen de Boeij
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Apparatus for and method of in-situ particle removal in a lithograp...
Patent number
11,550,231
Issue date
Jan 10, 2023
ASML Holding N.V.
Jeffrey John Lombardo
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Extreme ultraviolet (EUV) mask inspection system, a load-lock chamb...
Patent number
11,531,277
Issue date
Dec 20, 2022
Samsung Electronics Co., Ltd.
Jihoon Na
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Apparatus and method for processing substrate
Patent number
11,520,245
Issue date
Dec 6, 2022
Semes Co., Ltd.
Oh Jin Kwon
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and a device manufacturing method
Patent number
RE49297
Issue date
Nov 15, 2022
ASML Netherlands B.V.
Hrishikesh Patel
Information
Patent Grant
Reticle sub-field thermal control
Patent number
11,500,298
Issue date
Nov 15, 2022
ASML Holding N.V.
Eric Justin Monkman
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Apparatus and a method of forming a particle shield
Patent number
11,460,787
Issue date
Oct 4, 2022
Taiwan Semiconductor Manufacturing Company, Ltd
Wen-Hao Cheng
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
PROCESS CELL FOR FILED GUIDED POST EXPOSURE BAKE PROCESS
Publication number
20240160117
Publication date
May 16, 2024
Applied Materials, Inc.
Dmitry LUBOMIRSKY
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS
Publication number
20240160118
Publication date
May 16, 2024
SEMES CO., LTD.
Seojung PARK
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
APPARATUS FOR TREATING A SUBSTRATE AND METHOD FOR IMPROVING COOLING...
Publication number
20240134292
Publication date
Apr 25, 2024
SEMES CO., LTD.
Minhee CHO
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SYSTEM AND METHOD FOR THERMAL MANAGEMENT OF RETICLE IN SEMICONDUCTO...
Publication number
20240134293
Publication date
Apr 25, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Yueh-Lin Yang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD, AND DE...
Publication number
20240134295
Publication date
Apr 25, 2024
Nikon Corporation
Yuichi Shibazaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DETERMINATION METHOD, DETERMINATION APPARATUS, INFORMATION PROCESSI...
Publication number
20240118626
Publication date
Apr 11, 2024
Canon Kabushiki Kaisha
SHUJI SATO
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PHOTO TREATMENT DEVICE
Publication number
20240103371
Publication date
Mar 28, 2024
Ushio Denki Kabushiki Kaisha
Akihiro Shimamoto
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
HEATING UNIT, APPARATUS AND FACILITY FOR PROCESSING SUBSTRATES WITH...
Publication number
20240103388
Publication date
Mar 28, 2024
SEMES CO., LTD.
Jong Seok SEO
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS
Publication number
20240094645
Publication date
Mar 21, 2024
TOKYO ELECTRON LIMITED
Kouichi Mizunaga
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
VACUUM BAKE FOR EUV LITHOGRAPHY
Publication number
20240085810
Publication date
Mar 14, 2024
Applied Materials, Inc.
Huixiong DAI
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PHOTOMASK PROCESSING APPARATUS AND METHOD OF PROCESSING PHOTOMASK
Publication number
20240053685
Publication date
Feb 15, 2024
SEMES CO., LTD.
Youngdae Chung
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SUBSTRATE TREATMENT METHOD, AND COMPUTER STORAGE MEDIUM
Publication number
20240036473
Publication date
Feb 1, 2024
TOKYO ELECTRON LIMITED
Seiji FUJIMOTO
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SEMICONDUCTOR PROCESSING TOOL AND METHODS OF OPERATION
Publication number
20240019789
Publication date
Jan 18, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Kai-Chieh CHANG
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHY SYSTEM AND METHOD INCLUDING THERMAL MANAGEMENT
Publication number
20240004316
Publication date
Jan 4, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Chia-Wei WANG
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
IN-SITU LITHOGRAPHY PATTERN ENHANCEMENT WITH LOCALIZED STRESS TREAT...
Publication number
20230359128
Publication date
Nov 9, 2023
TOKYO ELECTRON LIMITED
Andrew WELOTH
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SYSTEM AND METHOD FOR DYNAMICALLY CONTROLLING TEMPERATURE OF THERMO...
Publication number
20230288819
Publication date
Sep 14, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Tzu-Jung Pan
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHODS AND SYSTEMS FOR REDUCING PARTICULATE DEPOSITION ON PHOTOMASK
Publication number
20230288820
Publication date
Sep 14, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Jui Chieh Chen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SUPPORT TABLE FOR A LITHOGRAPHIC APPARATUS, LITHOGRAPHIC APPARATUS...
Publication number
20230280663
Publication date
Sep 7, 2023
ASML NETHERLANDS B.V.
Johan Gertrudis Cornelis KUNNEN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LITHOGRAPHIC APPARATUS AND METHOD
Publication number
20230273533
Publication date
Aug 31, 2023
ASML NETHERLANDS B.V.
Nicolaas Ten Kate
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
HEATING UNIT AND SUBSTRATE TREATING APPARATUS INCLUDING THE SAME
Publication number
20230268203
Publication date
Aug 24, 2023
SEMES CO., LTD.
Jin Taek Oh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Cooling system in exposure machine and the operation method thereof
Publication number
20230266679
Publication date
Aug 24, 2023
United Semiconductor (Xiamen) Co., Ltd.
YiBin Zhou
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
COOLING UNIT, APPARATUS FOR PROCESSING A SUBSTRATE AND METHOD OF PR...
Publication number
20230207347
Publication date
Jun 29, 2023
SEMES CO, LTD.
Jaeil HYUN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS FOR TREATING SUBSTRATE AND METHOD FOR TREATING A SUBSTRATE
Publication number
20230185206
Publication date
Jun 15, 2023
SEMES CO., LTD.
TAE HEE KIM
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS
Publication number
20230120387
Publication date
Apr 20, 2023
TOKYO ELECTRON LIMITED
Kouichi Mizunaga
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LITHOGRAPHIC SYSTEMS AND METHODS OF OPERATING THE SAME
Publication number
20230095872
Publication date
Mar 30, 2023
KULICKE & SOFFA LITEQ B.V.
Jeroen de Boeij
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD FOR PREPARING A SUBSTRATE AND LITHOGRAPHIC APPARATUS
Publication number
20230095108
Publication date
Mar 30, 2023
ASML NETHERLANDS B.V.
Dennis Dominic VAN DER VOORT
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC SYSTEMS AND METHODS OF OPERATING THE SAME
Publication number
20230094792
Publication date
Mar 30, 2023
KULICKE & SOFFA LITEQ B.V.
Jeroen de Boeij
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHODS AND SYSTEMS FOR PHOTOPATTERNING AND MINIATURIZATION
Publication number
20230084088
Publication date
Mar 16, 2023
DUKE UNIVERSITY
Xin Song
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD OF USING A DUAL STAGE LITHOGRAPHIC APPARATUS AND LITHOGRAPHI...
Publication number
20230010584
Publication date
Jan 12, 2023
ASML NETHERLANDS B.V.
Wouter Jan Cornelis VIJSELAAR
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SEMICONDUCTOR PROCESSING TOOL AND METHODS OF OPERATION
Publication number
20220413398
Publication date
Dec 29, 2022
Taiwan Semiconductor Manufacturing Company, Ltd.
Cheng Hung TSAI
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY