Temporary protection of devices or parts of the devices during manufacturing

Industry

CPC
B81C2201/05

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BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS B81C2201/00Manufacture or treatment of micro-structural devices or systems

Current Industry

B81C2201/05Temporary protection of devices or parts of the devices during manufacturing

Industries

Patents Grantslast 30 patents

Information Patent Grant
Method for manufacturing an integrated MEMS transducer device and i...
- Patent number 11,878,906
- Issue date Jan 23, 2024
- Sciosense B.V.
- Kailash Vijayakumar
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Protective member forming apparatus
- Patent number 11,794,384
- Issue date Oct 24, 2023
- Disco Corporation
- Yoshinori Kakinuma
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectromechanical microphone with membrane trench reinforcemen...
- Patent number 11,746,001
- Issue date Sep 5, 2023
- TDK ELECTRONICS AG
- Pirmin Hermann Otto Rombach
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Manufacturing method of semiconductor structure
- Patent number 11,708,262
- Issue date Jul 25, 2023
- Taiwan Semiconductor Manufacturing Company Ltd.
- Yi-Hsien Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Structure for integrated microphone
- Patent number 11,678,133
- Issue date Jun 13, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Jung-Huei Peng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method and structure for sensors on glass
- Patent number 11,608,265
- Issue date Mar 21, 2023
- Infineon Technologies AG
- Stephan Pindl
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing an etch stop layer and MEMS sensor compris...
- Patent number 11,572,271
- Issue date Feb 7, 2023
- ams AG
- Alessandro Faes
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing an etch stop layer and MEMS sensor compris...
- Patent number 11,535,512
- Issue date Dec 27, 2022
- ams AG
- Alessandro Faes
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing micromechanical structures in a device wafer
- Patent number 11,524,893
- Issue date Dec 13, 2022
- Murata Manufacturing Co., Ltd.
- Hidetoshi Fujii
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor removing apparatus and operation method thereof
- Patent number 11,505,457
- Issue date Nov 22, 2022
- Xintec Inc.
- Yu-Tang Shen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing an integrated MEMS transducer device and i...
- Patent number 11,492,251
- Issue date Nov 8, 2022
- Sciosense B.V.
- Kailash Vijayakumar
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor package structure and method for manufacturing the same
- Patent number 11,427,466
- Issue date Aug 30, 2022
- Advanced Semiconductor Engineering, Inc.
- Wei-Wei Liu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing MEMS microphone
- Patent number 11,405,737
- Issue date Aug 2, 2022
- AAC Acoustic Technologies (Shenzhen) Co., Ltd.
- Zhenkui Meng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor device, microphone and methods for forming a semicond...
- Patent number 11,352,253
- Issue date Jun 7, 2022
- Infineon Technologies AG
- Markus Kahn
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Manufacturing method of semiconductor structure
- Patent number 11,267,693
- Issue date Mar 8, 2022
- Taiwan Semiconductor Manufacturing Company Ltd.
- Yi-Hsien Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing a MEMS unit for a micromechanical pressure...
- Patent number 11,208,319
- Issue date Dec 28, 2021
- Robert Bosch GmbH
- Arne Dannenberg
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectromechanical system cavity packaging
- Patent number 11,203,524
- Issue date Dec 21, 2021
- Texas Instruments Incorporated
- Jose Antonio Martinez
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Support pillar
- Patent number 10,961,113
- Issue date Mar 30, 2021
- Chien-Chang Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method and apparatus for reducing in-process and in-use stiction fo...
- Patent number 10,870,574
- Issue date Dec 22, 2020
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Lee-Chuan Tseng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor device, microphone and methods for forming a semicond...
- Patent number 10,858,246
- Issue date Dec 8, 2020
- Infineon Technologies AG
- Markus Kahn
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device and method of manufacturing a MEMS device
- Patent number 10,829,368
- Issue date Nov 10, 2020
- Infineon Technologies AG
- Alfons Dehe
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing micromechanical structures in a device wafer
- Patent number 10,807,863
- Issue date Oct 20, 2020
- Murata Manufacturing Co., Ltd.
- Hidetoshi Fujii
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for producing thin MEMS wafers
- Patent number 10,793,430
- Issue date Oct 6, 2020
- Robert Bosch GmbH
- Sebastien Loiseau
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing a microphone
- Patent number 10,779,100
- Issue date Sep 15, 2020
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Jung-Huei Peng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor structure and manufacturing method thereof
- Patent number 10,737,931
- Issue date Aug 11, 2020
- Taiwan Semiconductor Manufacturing Company Ltd.
- Yi-Hsien Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
System and method for wafer-scale fabrication of free standing mech...
- Patent number 10,727,072
- Issue date Jul 28, 2020
- President and Fellows of Harvard College
- Haig Avedis Atikian
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Release chemical protection for integrated complementary metal-oxid...
- Patent number 10,683,205
- Issue date Jun 16, 2020
- Invensense, Inc.
- Michael J. Daneman
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Elevated MEMS device in a microphone with ingress protection
- Patent number 10,654,712
- Issue date May 19, 2020
- Knowles Electronics, LLC
- John J. Albers
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectromechanical system cavity packaging
- Patent number 10,611,631
- Issue date Apr 7, 2020
- Texas Instruments Incorporated
- Jose Antonio Martinez
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS-device manufacturing method, MEMS device, and MEMS module
- Patent number 10,597,288
- Issue date Mar 24, 2020
- Rohm Co., Ltd.
- Masahiro Sakuragi
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
DIELECTRIC PROTECTION LAYER CONFIGURED TO INCREASE PERFORMANCE OF M...
- Publication number 20230382724
- Publication date Nov 30, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Wen-Chuan Tai
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTROMECHANICAL MICROPHONE WITH MEMBRANE TRENCH REINFORCEMEN...
- Publication number 20230356998
- Publication date Nov 9, 2023
- TDK Corporation
- Pirmin Hermann Otto Rombach
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE MANUFACTURING METHOD
- Publication number 20230348262
- Publication date Nov 2, 2023
- Commissariat A L'Energie Atomique et Aux Energies Alternatives
- Audrey Berthelot
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
TOP NOTCH SLIT PROFILE FOR MEMS DEVICE
- Publication number 20230232159
- Publication date Jul 20, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ting-Jung Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROFLUIDIC CHIP AND FABRICATION METHOD
- Publication number 20230211345
- Publication date Jul 6, 2023
- SHANGHAI TIANMA MICRO-ELECTRONICS CO., LTD.
- Wei LI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for Manufacturing an Integrated MEMS Transducer Device and I...
- Publication number 20230036935
- Publication date Feb 2, 2023
- Sciosense B.V.
- Kailash Vijayakumar
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR ETCHING GAPS OF UNEQUAL WIDTH
- Publication number 20220340415
- Publication date Oct 27, 2022
- Murata Manufacturing Co., Ltd.
- Petteri KILPINEN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEMICONDUCTOR REMOVING APPARATUS AND OPERATION METHOD THEREOF
- Publication number 20220332571
- Publication date Oct 20, 2022
- XINTEC INC.
- Yu-Tang SHEN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MANUFACTURING METHOD OF SEMICONDUCTOR STRUCTURE
- Publication number 20220185656
- Publication date Jun 16, 2022
- Taiwan Semiconductor Manufacturing company Ltd.
- YI-HSIEN CHANG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PROTECTIVE MEMBER FORMING APPARATUS
- Publication number 20220024085
- Publication date Jan 27, 2022
- Disco Corporation
- Yoshinori KAKINUMA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method and Structure for Sensors on Glass
- Publication number 20220009771
- Publication date Jan 13, 2022
- INFINEON TECHNOLOGIES AG
- Stephan Pindl
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for Manufacturing an Integrated MEMS Transducer Device and I...
- Publication number 20210387854
- Publication date Dec 16, 2021
- Sciosense B.V.
- Kailash Vijayakumar
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTROMECHANICAL MICROPHONE WITH MEMBRANE TRENCH REINFORCEMEN...
- Publication number 20210347635
- Publication date Nov 11, 2021
- TDK Electronics AG
- Pirmin Rombach
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD WITH MECHANICAL DICING PROCESS FOR PRODUCING MEMS COMPONENTS
- Publication number 20210253421
- Publication date Aug 19, 2021
- INFINEON TECHNOLOGIES AG
- Andre BROCKMEIER
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEMICONDUCTOR PACKAGE STRUCTURE AND METHOD FOR MANUFACTURING THE SAME
- Publication number 20210017018
- Publication date Jan 21, 2021
- Advanced Semiconductor Engineering, Inc.
- Wei-Wei LIU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR MANUFACTURING MICROMECHANICAL STRUCTURES IN A DEVICE WAFER
- Publication number 20210002131
- Publication date Jan 7, 2021
- Murata Manufacturing Co., Ltd.
- Hidetoshi FUJII
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Semiconductor Device, Microphone and Methods for Forming a Semicond...
- Publication number 20210002132
- Publication date Jan 7, 2021
- INFINEON TECHNOLOGIES AG
- Markus Kahn
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MANUFACTURING METHOD OF SEMICONDUCTOR STRUTURE
- Publication number 20200361763
- Publication date Nov 19, 2020
- Taiwan Semiconductor Manufacturing company Ltd.
- YI-HSIEN CHANG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ELEVATED MEMS DEVICE IN A MICROPHONE WITH INGRESS PROTECTION
- Publication number 20200239301
- Publication date Jul 30, 2020
- KNOWLES ELECTRONICS, LLC
- John J. Albers
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for Manufacturing MEMS Microphone
- Publication number 20200213797
- Publication date Jul 2, 2020
- AAC ACOUSTIC TECHNOLOGIES (SHENZHEN) CO., LTD
- Zhenkui Meng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTROMECHANICAL SYSTEM CAVITY PACKAGING
- Publication number 20200189910
- Publication date Jun 18, 2020
- TEXAS INSTRUMENTS INCORPORATED
- Jose Antonio Martinez
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
LIGHT MODULE
- Publication number 20200049974
- Publication date Feb 13, 2020
- Hamamatsu Photonics K.K.
- Tatsuya SUGIMOTO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR MANUFACTURING A MEMS UNIT FOR A MICROMECHANICAL PRESSURE...
- Publication number 20200024133
- Publication date Jan 23, 2020
- ROBERT BOSCH GmbH
- Arne Dannenberg
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS Device and Method of Manufacturing a MEMS Device
- Publication number 20190330057
- Publication date Oct 31, 2019
- INFINEON TECHNOLOGIES AG
- Alfons Dehe
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD AND APPARATUS FOR REDUCING IN-PROCESS AND IN-USE STICTION FO...
- Publication number 20190241425
- Publication date Aug 8, 2019
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Lee-Chuan Tseng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTROMECHANICAL SYSTEM CAVITY PACKAGING
- Publication number 20190185320
- Publication date Jun 20, 2019
- TEXAS INSTRUMENTS INCORPORATED
- Jose Antonio Martinez
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR PRODUCING THIN MEMS WAFERS
- Publication number 20190092631
- Publication date Mar 28, 2019
- ROBERT BOSCH GmbH
- Sebastien Loiseau
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ELEVATED MEMS DEVICE IN A MICROPHONE WITH INGRESS PROTECTION
- Publication number 20190084828
- Publication date Mar 21, 2019
- KNOWLES ELECTRONICS, LLC
- John J. Albers
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS-DEVICE MANUFACTURING METHOD, MEMS DEVICE, AND MEMS MODULE
- Publication number 20180346322
- Publication date Dec 6, 2018
- Rohm Co., Ltd.
- Masahiro SAKURAGI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR RECESS ETCHING IN MICROMECHANICAL DEVICES
- Publication number 20180346326
- Publication date Dec 6, 2018
- Murata Manufacturing Co., Ltd.
- Hidetoshi FUJII
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Temporary protection of devices or parts of the devices during manufacturing

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Method for manufacturing an integrated MEMS transducer device and i...

Protective member forming apparatus

Microelectromechanical microphone with membrane trench reinforcemen...

Manufacturing method of semiconductor structure

Structure for integrated microphone

Method and structure for sensors on glass

Method for manufacturing an etch stop layer and MEMS sensor compris...

Method for manufacturing an etch stop layer and MEMS sensor compris...

Method for manufacturing micromechanical structures in a device wafer

Semiconductor removing apparatus and operation method thereof

Method for manufacturing an integrated MEMS transducer device and i...

Semiconductor package structure and method for manufacturing the same

Method for manufacturing MEMS microphone

Semiconductor device, microphone and methods for forming a semicond...

Manufacturing method of semiconductor structure

Method for manufacturing a MEMS unit for a micromechanical pressure...

Microelectromechanical system cavity packaging

Support pillar

Method and apparatus for reducing in-process and in-use stiction fo...

Semiconductor device, microphone and methods for forming a semicond...

MEMS device and method of manufacturing a MEMS device

Method for manufacturing micromechanical structures in a device wafer

Method for producing thin MEMS wafers

Method for manufacturing a microphone

Semiconductor structure and manufacturing method thereof

System and method for wafer-scale fabrication of free standing mech...

Release chemical protection for integrated complementary metal-oxid...

Elevated MEMS device in a microphone with ingress protection

Microelectromechanical system cavity packaging

MEMS-device manufacturing method, MEMS device, and MEMS module

Patents Applicationslast 30 patents

DIELECTRIC PROTECTION LAYER CONFIGURED TO INCREASE PERFORMANCE OF M...

MICROELECTROMECHANICAL MICROPHONE WITH MEMBRANE TRENCH REINFORCEMEN...

MEMS DEVICE MANUFACTURING METHOD

TOP NOTCH SLIT PROFILE FOR MEMS DEVICE

MICROFLUIDIC CHIP AND FABRICATION METHOD

Method for Manufacturing an Integrated MEMS Transducer Device and I...

METHOD FOR ETCHING GAPS OF UNEQUAL WIDTH

SEMICONDUCTOR REMOVING APPARATUS AND OPERATION METHOD THEREOF

MANUFACTURING METHOD OF SEMICONDUCTOR STRUCTURE

PROTECTIVE MEMBER FORMING APPARATUS

Method and Structure for Sensors on Glass

Method for Manufacturing an Integrated MEMS Transducer Device and I...

MICROELECTROMECHANICAL MICROPHONE WITH MEMBRANE TRENCH REINFORCEMEN...

METHOD WITH MECHANICAL DICING PROCESS FOR PRODUCING MEMS COMPONENTS

SEMICONDUCTOR PACKAGE STRUCTURE AND METHOD FOR MANUFACTURING THE SAME

METHOD FOR MANUFACTURING MICROMECHANICAL STRUCTURES IN A DEVICE WAFER

Semiconductor Device, Microphone and Methods for Forming a Semicond...

MANUFACTURING METHOD OF SEMICONDUCTOR STRUTURE

ELEVATED MEMS DEVICE IN A MICROPHONE WITH INGRESS PROTECTION

Method for Manufacturing MEMS Microphone

MICROELECTROMECHANICAL SYSTEM CAVITY PACKAGING

LIGHT MODULE

METHOD FOR MANUFACTURING A MEMS UNIT FOR A MICROMECHANICAL PRESSURE...

MEMS Device and Method of Manufacturing a MEMS Device

METHOD AND APPARATUS FOR REDUCING IN-PROCESS AND IN-USE STICTION FO...

MICROELECTROMECHANICAL SYSTEM CAVITY PACKAGING

METHOD FOR PRODUCING THIN MEMS WAFERS

ELEVATED MEMS DEVICE IN A MICROPHONE WITH INGRESS PROTECTION

MEMS-DEVICE MANUFACTURING METHOD, MEMS DEVICE, AND MEMS MODULE

METHOD FOR RECESS ETCHING IN MICROMECHANICAL DEVICES