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the capacitor and the transistor being in one trench
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Industry
CPC
H01L27/10838
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Parent Industries
H
ELECTRICITY
H01
Electric elements
H01L
SEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
H01L27/00
Devices consisting of a plurality of semiconductor or other solid state components formed in or on a common substrate
Current Industry
H01L27/10838
the capacitor and the transistor being in one trench
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