the electronic processing unit being integrated into an element of the micromechanical structure

Industry

CPC
B81C2203/075

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BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS B81C2203/00Forming micro-structural systems

Current Industry

B81C2203/075the electronic processing unit being integrated into an element of the micromechanical structure

Industries

Patents Grantslast 30 patents

Information Patent Grant
Pressure sensing implant
- Patent number 11,707,230
- Issue date Jul 25, 2023
- ENDOTRONIX, INC.
- Harry Rowland
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Three-dimensional micro devices and method for their production
- Patent number 11,208,321
- Issue date Dec 28, 2021
- Leibniz-Institut fuer Festkoerper-und Werkstoffforschung Dresden e.V.
- Daniil Karnaushenko
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS package with roughend interface
- Patent number 11,192,778
- Issue date Dec 7, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yu-Jui Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing doubly re-entrant microstructures
- Patent number 10,927,005
- Issue date Feb 23, 2021
- The Regents of the University of California
- Muchen Xu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS package with roughend interface
- Patent number 10,710,872
- Issue date Jul 14, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yu-Jui Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Heating system and method for microfluidic and micromechanical appl...
- Patent number 10,654,714
- Issue date May 19, 2020
- STMicroelectronics, Inc.
- Ming Fang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Self-powered piezoelectric energy harvesting microsystem
- Patent number 10,554,152
- Issue date Feb 4, 2020
- Texas Instruments Incorporated
- Cuiling Gong
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Oscillation frequency measuring system and method for a MEMS sensor
- Patent number 10,479,674
- Issue date Nov 19, 2019
- STMicroelectronics S.r.l.
- Alfio Russo
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical component having a diaphragm
- Patent number 9,850,120
- Issue date Dec 26, 2017
- Robert Bosch GmbH
- Uwe Schiller
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Oscillation frequency measuring system and method for a MEMS sensor
- Patent number 9,725,308
- Issue date Aug 8, 2017
- STMicroelectronics S.r.l.
- Alfio Russo
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Self-powered piezoelectric energy harvesting microsystem
- Patent number 9,716,446
- Issue date Jul 25, 2017
- Texas Instruments Incorporated
- Cuiling Gong
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device with constant capacitance
- Patent number 9,659,717
- Issue date May 23, 2017
- Analog Devices Global
- Check F. Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Transducer, and manufacturing method of the transducer
- Patent number 9,564,836
- Issue date Feb 7, 2017
- Seung-Mok Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Hybrid integrated component
- Patent number 9,266,720
- Issue date Feb 23, 2016
- Robert Bosch GmbH
- Johannes Classen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Structures and methods for electrically and mechanically linked mon...
- Patent number 9,159,710
- Issue date Oct 13, 2015
- Cornell University
- Amit Lal
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Epitaxial silicon CMOS-MEMS microphones and method for manufacturing
- Patent number 8,629,011
- Issue date Jan 14, 2014
- Robert Bosch GmbH
- Brett M. Diamond
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Configurable power supply using MEMS switch
- Patent number 8,466,760
- Issue date Jun 18, 2013
- Innovative Micro Technology
- John S. Foster
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of making micro-pixelated fluid-assay precursor structure
- Patent number 8,236,571
- Issue date Aug 7, 2012
- Sharp Laboratories of America, Inc.
- John W. Hartzell
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Piezo-TFT cantilever MEMS fabrication
- Patent number 7,785,912
- Issue date Aug 31, 2010
- Sharp Laboratories of America, Inc.
- Changqing Zhan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical device and method for manufacturing a micromechanic...
- Patent number 7,679,151
- Issue date Mar 16, 2010
- Infineon Technologies AG
- Karlheinz Mueller
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Piezo-TFT cantilever MEMS
- Patent number 7,253,488
- Issue date Aug 7, 2007
- Sharp Laboratories of America, Inc.
- Changqing Zhan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Lithography device for semiconductor circuit pattern generator
- Patent number 7,242,012
- Issue date Jul 10, 2007
- Elm Technology Corporation
- Glenn J Leedy
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods for maskless lithography
- Patent number 7,223,696
- Issue date May 29, 2007
- Elm Technology Corporation
- Glenn J Leedy
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Apparatus and methods for maskless pattern generation
- Patent number 7,176,545
- Issue date Feb 13, 2007
- Elm Technology Corporation
- Glenn J Leedy
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Lithography device for semiconductor circuit pattern generation
- Patent number 6,714,625
- Issue date Mar 30, 2004
- Elm Technology Corporation
- Glenn Joseph Leedy
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of fabricating micromachined structures and devices formed t...
- Patent number 6,458,615
- Issue date Oct 1, 2002
- Carnegie Mellon University
- Gary K. Fedder
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microfabricated filter with specially constructed channel walls, an...
- Patent number 6,044,981
- Issue date Apr 4, 2000
- The Regents of the University of California
- Wen-Hwa Chu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for forming a filter
- Patent number 5,985,164
- Issue date Nov 16, 1999
- Regents of the University of California
- Wen-Hua Chu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microfabricated filter with specially constructed channel walls, an...
- Patent number 5,798,042
- Issue date Aug 25, 1998
- Regents of the University of California
- Wen-Hwa Chu
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
PRESSURE SENSING IMPLANT
- Publication number 20230380764
- Publication date Nov 30, 2023
- ENDOTRONIX, INC.
- Harry ROWLAND
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS PACKAGE WITH ROUGHEND INTERFACE
- Publication number 20200339413
- Publication date Oct 29, 2020
- TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Yu-Jui Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
THREE-DIMENSIONAL MICRO DEVICES AND METHOD FOR THEIR PRODUCTION
- Publication number 20190062154
- Publication date Feb 28, 2019
- Leibniz-Institut fuer Festkoerper-und Werkstoffforschung Dresden E.V.
- Daniil KARNAUSHENKO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS PACKAGE WITH ROUGHEND INTERFACE
- Publication number 20180162720
- Publication date Jun 14, 2018
- TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Yu-Jui Cheng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR MANUFACTURING RE-ENTRANT MICROSTRUCTURES
- Publication number 20180016136
- Publication date Jan 18, 2018
- The Regents of the University of California
- Muchen Xu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
OSCILLATION FREQUENCY MEASURING SYSTEM AND METHOD FOR A MEMS SENSOR
- Publication number 20170297910
- Publication date Oct 19, 2017
- STMicroelectronics S.r.l.
- Alfio Russo
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SELF-POWERED PIEZOELECTRIC ENERGY HARVESTING MICROSYSTEM
- Publication number 20170288576
- Publication date Oct 5, 2017
- TEXAS INSTRUMENTS INCORPORATED
- Cuiling Gong
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
HEATING SYSTEM AND METHOD FOR MICROFLUIDIC AND MICROMECHANICAL APPL...
- Publication number 20160347610
- Publication date Dec 1, 2016
- STMicroelectronics, Inc.
- Ming FANG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PIEZOELECTRIC MICROPHONE WITH INTEGRATED CMOS
- Publication number 20160090300
- Publication date Mar 31, 2016
- InvenSense, Inc.
- Julius Ming-Lin Tsai
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS Device with Constant Capacitance
- Publication number 20150235779
- Publication date Aug 20, 2015
- ANALOG DEVICES GLOBAL
- Check F. Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
OSCILLATION FREQUENCY MEASURING SYSTEM AND METHOD FOR A MEMS SENSOR
- Publication number 20150000402
- Publication date Jan 1, 2015
- STMicroelectronics S.r.l.
- Alfio Russo
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
TRANSDUCER, AND MANUFACTURING METHOD OF THE TRANSDUCER
- Publication number 20140246948
- Publication date Sep 4, 2014
- Seung-Mok Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
HYBRID INTEGRATED COMPONENT
- Publication number 20140117475
- Publication date May 1, 2014
- ROBERT BOSCH GmbH
- Johannes CLASSEN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
STRUCTURES AND METHODS FOR ELECTRICALLY AND MECHANICALLY LINKED MON...
- Publication number 20130328109
- Publication date Dec 12, 2013
- Cornell University
- Amit Lal
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROMECHANICAL COMPONENT HAVING A DIAPHRAGM
- Publication number 20130234140
- Publication date Sep 12, 2013
- ROBERT BOSCH GmbH
- Uwe SCHILLER
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
EPITAXIAL SILICON CMOS-MEMS MICROPHONES AND METHOD FOR MANUFACTURING
- Publication number 20120319219
- Publication date Dec 20, 2012
- ROBERT BOSCH GmbH
- Brett M. Diamond
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Configurable power supply using MEMS switch
- Publication number 20110130721
- Publication date Jun 2, 2011
- Innovative Micro Technology
- John S. Foster
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method of making micro-pixelated fluid-assay precursor structure
- Publication number 20080084363
- Publication date Apr 10, 2008
- Sharp Laboratories of America, Inc.
- John W. Hartzell
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Piezo-TFT cantilever MEMS fabrication
- Publication number 20070287233
- Publication date Dec 13, 2007
- Sharp Laboratories of America, Inc.
- Changqing Zhan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Micromechanical Device And Method For Manufacturing A Micromechanic...
- Publication number 20070184624
- Publication date Aug 9, 2007
- Karlheinz Mueller
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Piezo-TFT cantilever MEMS
- Publication number 20050130360
- Publication date Jun 16, 2005
- Sharp Laboratories of America, Inc.
- Changqing Zhan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Methods for maskless lithography
- Publication number 20050130351
- Publication date Jun 16, 2005
- Elm Technology Corporation
- Glenn Joseph Leedy
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Apparatus and methods for maskless pattern generation
- Publication number 20040192045
- Publication date Sep 30, 2004
- Elm Technology Corporation
- Glenn Joseph Leedy
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Lithography device for semiconductor circuit pattern generator
- Publication number 20030223535
- Publication date Dec 4, 2003
- Glenn Joseph Leedy
- B81 - MICRO-STRUCTURAL TECHNOLOGY

the electronic processing unit being integrated into an element of the micromechanical structure

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Pressure sensing implant

Three-dimensional micro devices and method for their production

MEMS package with roughend interface

Method for manufacturing doubly re-entrant microstructures

MEMS package with roughend interface

Heating system and method for microfluidic and micromechanical appl...

Self-powered piezoelectric energy harvesting microsystem

Oscillation frequency measuring system and method for a MEMS sensor

Micromechanical component having a diaphragm

Oscillation frequency measuring system and method for a MEMS sensor

Self-powered piezoelectric energy harvesting microsystem

MEMS device with constant capacitance

Transducer, and manufacturing method of the transducer

Hybrid integrated component

Structures and methods for electrically and mechanically linked mon...

Epitaxial silicon CMOS-MEMS microphones and method for manufacturing

Configurable power supply using MEMS switch

Method of making micro-pixelated fluid-assay precursor structure

Piezo-TFT cantilever MEMS fabrication

Micromechanical device and method for manufacturing a micromechanic...

Piezo-TFT cantilever MEMS

Lithography device for semiconductor circuit pattern generator

Methods for maskless lithography

Apparatus and methods for maskless pattern generation

Lithography device for semiconductor circuit pattern generation

Method of fabricating micromachined structures and devices formed t...

Microfabricated filter with specially constructed channel walls, an...

Method for forming a filter

Microfabricated filter with specially constructed channel walls, an...

Patents Applicationslast 30 patents

PRESSURE SENSING IMPLANT

MEMS PACKAGE WITH ROUGHEND INTERFACE

THREE-DIMENSIONAL MICRO DEVICES AND METHOD FOR THEIR PRODUCTION

MEMS PACKAGE WITH ROUGHEND INTERFACE

METHOD FOR MANUFACTURING RE-ENTRANT MICROSTRUCTURES

OSCILLATION FREQUENCY MEASURING SYSTEM AND METHOD FOR A MEMS SENSOR

SELF-POWERED PIEZOELECTRIC ENERGY HARVESTING MICROSYSTEM

HEATING SYSTEM AND METHOD FOR MICROFLUIDIC AND MICROMECHANICAL APPL...

PIEZOELECTRIC MICROPHONE WITH INTEGRATED CMOS

MEMS Device with Constant Capacitance

OSCILLATION FREQUENCY MEASURING SYSTEM AND METHOD FOR A MEMS SENSOR

TRANSDUCER, AND MANUFACTURING METHOD OF THE TRANSDUCER

HYBRID INTEGRATED COMPONENT

STRUCTURES AND METHODS FOR ELECTRICALLY AND MECHANICALLY LINKED MON...

MICROMECHANICAL COMPONENT HAVING A DIAPHRAGM

EPITAXIAL SILICON CMOS-MEMS MICROPHONES AND METHOD FOR MANUFACTURING

Configurable power supply using MEMS switch

Method of making micro-pixelated fluid-assay precursor structure

Piezo-TFT cantilever MEMS fabrication

Micromechanical Device And Method For Manufacturing A Micromechanic...

Piezo-TFT cantilever MEMS

Methods for maskless lithography

Apparatus and methods for maskless pattern generation

Lithography device for semiconductor circuit pattern generator