the flow of the reactive gases

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CPC
C30B25/165

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CCHEMISTRY METALLURGY C30Crystal growth C30BSINGLE-CRYSTAL-GROWTH UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL REFINING BY ZONE-MELTING OF MATERIAL PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH D... C30B25/00Single-crystal growth by chemical reaction of reactive gases

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C30B25/165the flow of the reactive gases

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Patents Grantslast 30 patents

Information Patent Grant
Method of fabricating hexagonal boron nitride
- Patent number 12,180,584
- Issue date Dec 31, 2024
- Samsung Electronics Co., Ltd.
- Changseok Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
SiC epitaxial wafer and method for manufacturing SIC epitaxial wafer
- Patent number 12,166,087
- Issue date Dec 10, 2024
- Resonac Corporation
- Naoto Ishibashi
- C30 - CRYSTAL GROWTH
Information Patent Grant
Temperature-controlled chemical delivery system and reactor system...
- Patent number 12,163,225
- Issue date Dec 10, 2024
- ASM IP Holding B.V.
- Carl Louis White
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Superlattice layer, LED epitaxial structure, display device, and me...
- Patent number 12,057,521
- Issue date Aug 6, 2024
- CHONGQING KONKA PHOTOELECTRIC TECHNOLOGY RESEARCH INSTITUTE CO., LTD.
- Wen Yang Huang
- C30 - CRYSTAL GROWTH
Information Patent Grant
Methods for silicon germanium uniformity control using multiple pre...
- Patent number 12,057,314
- Issue date Aug 6, 2024
- ASM IP Holding B.V.
- Amir Kajbafvala
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for the deposition of monocrystalline or polycrystalline tin...
- Patent number 12,000,062
- Issue date Jun 4, 2024
- United States of America as represented by the Secretary of the Air Force
- Bruce B. Claflin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods of forming structures including silicon germanium and silic...
- Patent number 11,996,289
- Issue date May 28, 2024
- ASM IP Holding B.V.
- Amir Kajbafvala
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for growing beta-Ga2O3-based single crystal film, and crysta...
- Patent number 11,982,016
- Issue date May 14, 2024
- Tamura Corporation
- Ken Goto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Group III nitride semiconductor device and production method therefor
- Patent number 11,955,581
- Issue date Apr 9, 2024
- Toyoda Gosei Co., Ltd.
- Koji Okuno
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of forming a source/drain
- Patent number 11,929,401
- Issue date Mar 12, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chien-Wei Lee
- C30 - CRYSTAL GROWTH
Information Patent Grant
Nucleation layer deposition method
- Patent number 11,887,848
- Issue date Jan 30, 2024
- Aixtron SE
- Christof Martin Mauder
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Manufacturing apparatus for a group-III nitride crystal comprising...
- Patent number 11,879,184
- Issue date Jan 23, 2024
- Panasonic Holdings Corporation
- Yusuke Mori
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Epitaxial wafer production system for performing a correction based...
- Patent number 11,873,577
- Issue date Jan 16, 2024
- Sumco Corporation
- Naoyuki Wada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vapor phase epitaxy method
- Patent number 11,859,310
- Issue date Jan 2, 2024
- Azur Space Solar Power GmbH
- Clemens Waechter
- C30 - CRYSTAL GROWTH
Information Patent Grant
Manufacturing method for a group-III nitride crystal that requires...
- Patent number 11,859,311
- Issue date Jan 2, 2024
- Panasonic Holdings Corporation
- Yusuke Mori
- C30 - CRYSTAL GROWTH
Information Patent Grant
Compositions and aggregates comprising boron nitride nanotube struc...
- Patent number 11,851,326
- Issue date Dec 26, 2023
- BNNano, Inc.
- Jason Edward Taylor
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Chemical source vessel with dip tube
- Patent number 11,781,221
- Issue date Oct 10, 2023
- ASM IP Holding B.V.
- Andrew Michael Yednak
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for manufacturing suspended graphene support film by selecti...
- Patent number 11,760,641
- Issue date Sep 19, 2023
- Peking University
- Hailin Peng
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method for processing a substrate by oscillating a boundary layer o...
- Patent number 11,761,080
- Issue date Sep 19, 2023
- Applied Materials, Inc.
- Tsung-Han Yang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for manufacturing a group III-nitride crystal comprising sup...
- Patent number 11,753,739
- Issue date Sep 12, 2023
- Panasonic Holdings Corporation
- Yusuke Mori
- C30 - CRYSTAL GROWTH
Information Patent Grant
Method for applying a carbon layer to a substrate comprising introd...
- Patent number 11,746,415
- Issue date Sep 5, 2023
- CARBONCOMPETENCE GMBH
- Doris Steinmuller-Nethl
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Single crystal chemical vapor deposited synthetic diamond materials...
- Patent number 11,746,436
- Issue date Sep 5, 2023
- Element Six Technologies Limited
- Harpreet Kaur Dhillon
- C30 - CRYSTAL GROWTH
Information Patent Grant
Vapor phase growth apparatus and vapor phase growth method
- Patent number 11,749,525
- Issue date Sep 5, 2023
- NUFLARE TECHNOLOGY, INC.
- Yoshiaki Daigo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vapor delivery device, methods of manufacture and methods of use th...
- Patent number 11,680,318
- Issue date Jun 20, 2023
- Edwards Semiconductor Solutions LLC
- Egbert Woelk
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Superconducting compounds and methods for making the same
- Patent number 11,683,997
- Issue date Jun 20, 2023
- Quantum Designed Materials Ltd.
- Refael Gatt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
HVPE apparatus and methods for growing indium nitride and indium ni...
- Patent number 11,661,673
- Issue date May 30, 2023
- Ostendo Technologies, Inc.
- Alexander L. Syrkin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of utilizing a degassing chamber to reduce arsenic outgassin...
- Patent number 11,649,559
- Issue date May 16, 2023
- Applied Materials, Inc.
- Xinyu Bao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Metalorganic chemical vapor phase deposition apparatus having bubbl...
- Patent number 11,629,432
- Issue date Apr 18, 2023
- Azur Space Solar Power GmbH
- Clemens Waechter
- C30 - CRYSTAL GROWTH
Information Patent Grant
Deposition of single phase beta-(AlxGa1-x)2O3 thin films with 0.28<...
- Patent number 11,624,126
- Issue date Apr 11, 2023
- OHIO STATE INNOVATION FOUNDATION
- Hongping Zhao
- C30 - CRYSTAL GROWTH
Information Patent Grant
Apparatus including horizontal flow reactor with a central injector...
- Patent number 11,618,968
- Issue date Apr 4, 2023
- AKOUSTIS, INC.
- Craig Moe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Epitaxy Process Control in Semiconductor Manufacturing
- Publication number 20250034753
- Publication date Jan 30, 2025
- ROBERT BOSCH GmbH
- Stella Maris Van Eek
- C30 - CRYSTAL GROWTH
Information Patent Application
VIRTUAL SENSOR FOR PREDICTING AND MONITORING TEMPERATURE OF CHAMBER...
- Publication number 20250003112
- Publication date Jan 2, 2025
- Applied Materials, Inc.
- Ala MORADIAN
- C30 - CRYSTAL GROWTH
Information Patent Application
CVD SINGLE CRYSTAL DIAMOND
- Publication number 20240417884
- Publication date Dec 19, 2024
- ELEMENT SIX TECHNOLOGIES LIMITED
- Benjamin Simon TRUSCOTT
- C30 - CRYSTAL GROWTH
Information Patent Application
PROCESS FOR GROWTH OF ATOMIC LAYER TRANSITION METAL DICHALCOGENIDES
- Publication number 20240410080
- Publication date Dec 12, 2024
- Honda Motor Co., Ltd.
- Xufan LI
- C30 - CRYSTAL GROWTH
Information Patent Application
GROWTH METHOD AND STRUCTURE OF LED EPITAXY
- Publication number 20240405159
- Publication date Dec 5, 2024
- Focus Lightings Tech (Suqian) Co., Ltd.
- Guochang LI
- C30 - CRYSTAL GROWTH
Information Patent Application
SILICON CARBIDE WAFER AND METHOD OF FABRICATING THE SAME
- Publication number 20240401235
- Publication date Dec 5, 2024
- GLOBALWAFERS CO., LTD.
- Ching-Shan Lin
- C30 - CRYSTAL GROWTH
Information Patent Application
LIQUID PRECURSOR CONTAINERS, LIQUID PRECURSOR SYSTEMS AND SEMICONDU...
- Publication number 20240376634
- Publication date Nov 14, 2024
- ASM IP HOLDING B.V.
- Krishnaswamy Mahadevan
- C30 - CRYSTAL GROWTH
Information Patent Application
METHODS FOR SILICON GERMANIUM UNIFORMITY CONTROL USING MULTIPLE PRE...
- Publication number 20240332016
- Publication date Oct 3, 2024
- ASM IP HOLDING B.V.
- Amir Kajbafvala
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR PRODUCING A GALLIUM OXIDE LAYER ON A SUBSTRATE
- Publication number 20240309552
- Publication date Sep 19, 2024
- Siltronic AG
- Walter HAECKL
- C30 - CRYSTAL GROWTH
Information Patent Application
METHOD OF FABRICATING SILICON CARBIDE INGOT
- Publication number 20240271322
- Publication date Aug 15, 2024
- GLOBALWAFERS CO., LTD.
- Ching-Shan Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SiC EPITAXIAL WAFER AND METHOD FOR MANUFACTURING SIC EPITAXIAL WAFER
- Publication number 20240274671
- Publication date Aug 15, 2024
- Resonac Corporation
- Naoto ISHIBASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS OF FORMING STRUCTURES INCLUDING SILICON GERMANIUM AND SILIC...
- Publication number 20240274437
- Publication date Aug 15, 2024
- ASM IP HOLDING B.V.
- Amir Kajbafvala
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS OF PROCESSING EPITAXIAL SEMICONDUCTOR WAFERS
- Publication number 20240218562
- Publication date Jul 4, 2024
- GLOBALWAFERS CO., LTD.
- Manabu Hamano
- C30 - CRYSTAL GROWTH
Information Patent Application
METHOD FOR DEPOSITING PHOSPHORUS CONTAINING SILICON LAYER
- Publication number 20240213022
- Publication date Jun 27, 2024
- ASM IP HOLDING B.V.
- Brendan Marozas
- C30 - CRYSTAL GROWTH
Information Patent Application
Method of Forming a Source/Drain
- Publication number 20240213330
- Publication date Jun 27, 2024
- Taiwan Semiconductor Manfacturing Co., Ltd.
- Chien-Wei Lee
- C30 - CRYSTAL GROWTH
Information Patent Application
PROCESS FOR MANUFACTURING SEMICONDUCTOR WAFERS CONTAINING A GAS-PHA...
- Publication number 20240200226
- Publication date Jun 20, 2024
- Siltronic AG
- Ronny Hengst
- C30 - CRYSTAL GROWTH
Information Patent Application
METHOD FOR PREPARING LARGE-SCALE TWO-DIMENSIONAL SINGLE CRYSTAL STA...
- Publication number 20240183064
- Publication date Jun 6, 2024
- Peking University
- Kaihui LIU
- C30 - CRYSTAL GROWTH
Information Patent Application
METHOD OF MANUFACTURING SILICON CARBIDE SINGLE CRYSTAL AND SILICON...
- Publication number 20240183073
- Publication date Jun 6, 2024
- Denso Corporation
- Soma SAKAKIBARA
- C01 - INORGANIC CHEMISTRY
Information Patent Application
ALPHA GALLIUM OXIDE THIN-FILM STRUCTURE HAVING HIGH CONDUCTIVITY OB...
- Publication number 20240158953
- Publication date May 16, 2024
- KOREA INSTITUTE OF CERAMIC ENGINEERING AND TECHNOLOGY
- Dae-Woo JEON
- C30 - CRYSTAL GROWTH
Information Patent Application
METHOD OF PRODUCING EPITAXIAL LAYER WAFERS IN A CHAMBER OF A DEPOSI...
- Publication number 20240150932
- Publication date May 9, 2024
- Siltronic AG
- Hannes Hecht
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LOW TEMPERATURE CO-FLOW EPITAXIAL DEPOSITION PROCESS
- Publication number 20240145240
- Publication date May 2, 2024
- Applied Materials, Inc.
- Chen-Ying WU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR DEPOSITION OF A LAYER OF PEROVSKITE ON A S...
- Publication number 20240117524
- Publication date Apr 11, 2024
- Consiglio Nazionale Delle Ricerche
- Alessandra ALBERTI
- C30 - CRYSTAL GROWTH
Information Patent Application
METHODS, SYSTEMS, AND APPARATUS FOR FORMING LAYERS HAVING SINGLE CR...
- Publication number 20240035195
- Publication date Feb 1, 2024
- Applied Materials, Inc.
- Qinghua ZHAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND A SUBSTRATE PROCESSING APPARATUS FOR FORMING AN EPITAXIA...
- Publication number 20240026567
- Publication date Jan 25, 2024
- ASM IP HOLDING, B.V.
- Rami Khazaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR WAFER MANUFACTURING APPARATUS
- Publication number 20240018687
- Publication date Jan 18, 2024
- DENSO CORPORATION
- Hiroaki FUJIBAYASHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF GROWING SILICON CARBIDE CRYSTALS
- Publication number 20240011188
- Publication date Jan 11, 2024
- GLOBALWAFERS CO., LTD.
- Ching-Shan Lin
- C30 - CRYSTAL GROWTH
Information Patent Application
CHEMICAL SOURCE VESSEL WITH DIP TUBE
- Publication number 20230407480
- Publication date Dec 21, 2023
- ASM IP HOLDING B.V.
- Andrew Michael Yednak
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Apparatus and Method for Use with a Substrate Chamber
- Publication number 20230383435
- Publication date Nov 30, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Li-Ting Wang
- C30 - CRYSTAL GROWTH
Information Patent Application
STRUCTURES WITH BORON- AND GALLIUM-DOPED SILICON GERMANIUM LAYERS A...
- Publication number 20230349069
- Publication date Nov 2, 2023
- ASM IP HOLDING, B.V.
- Wonjong Kim
- C30 - CRYSTAL GROWTH
Information Patent Application
METHODS OF FORMING SUPERLATTICE STRUCTURES USING NANOPARTICLES
- Publication number 20230352300
- Publication date Nov 2, 2023
- ASM IP HOLDING, B.V.
- Jan Deckers
- C30 - CRYSTAL GROWTH

the flow of the reactive gases

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Method of fabricating hexagonal boron nitride

SiC epitaxial wafer and method for manufacturing SIC epitaxial wafer

Temperature-controlled chemical delivery system and reactor system...

Superlattice layer, LED epitaxial structure, display device, and me...

Methods for silicon germanium uniformity control using multiple pre...

Method for the deposition of monocrystalline or polycrystalline tin...

Methods of forming structures including silicon germanium and silic...

Method for growing beta-Ga2O3-based single crystal film, and crysta...

Group III nitride semiconductor device and production method therefor

Method of forming a source/drain

Nucleation layer deposition method

Manufacturing apparatus for a group-III nitride crystal comprising...

Epitaxial wafer production system for performing a correction based...

Vapor phase epitaxy method

Manufacturing method for a group-III nitride crystal that requires...

Compositions and aggregates comprising boron nitride nanotube struc...

Chemical source vessel with dip tube

Method for manufacturing suspended graphene support film by selecti...

Method for processing a substrate by oscillating a boundary layer o...

Method for manufacturing a group III-nitride crystal comprising sup...

Method for applying a carbon layer to a substrate comprising introd...

Single crystal chemical vapor deposited synthetic diamond materials...

Vapor phase growth apparatus and vapor phase growth method

Vapor delivery device, methods of manufacture and methods of use th...

Superconducting compounds and methods for making the same

HVPE apparatus and methods for growing indium nitride and indium ni...

Method of utilizing a degassing chamber to reduce arsenic outgassin...

Metalorganic chemical vapor phase deposition apparatus having bubbl...

Deposition of single phase beta-(AlxGa1-x)2O3 thin films with 0.28<...

Apparatus including horizontal flow reactor with a central injector...

Patents Applicationslast 30 patents

Epitaxy Process Control in Semiconductor Manufacturing

VIRTUAL SENSOR FOR PREDICTING AND MONITORING TEMPERATURE OF CHAMBER...

CVD SINGLE CRYSTAL DIAMOND

PROCESS FOR GROWTH OF ATOMIC LAYER TRANSITION METAL DICHALCOGENIDES

GROWTH METHOD AND STRUCTURE OF LED EPITAXY

SILICON CARBIDE WAFER AND METHOD OF FABRICATING THE SAME

LIQUID PRECURSOR CONTAINERS, LIQUID PRECURSOR SYSTEMS AND SEMICONDU...

METHODS FOR SILICON GERMANIUM UNIFORMITY CONTROL USING MULTIPLE PRE...

METHOD FOR PRODUCING A GALLIUM OXIDE LAYER ON A SUBSTRATE

METHOD OF FABRICATING SILICON CARBIDE INGOT

SiC EPITAXIAL WAFER AND METHOD FOR MANUFACTURING SIC EPITAXIAL WAFER

METHODS OF FORMING STRUCTURES INCLUDING SILICON GERMANIUM AND SILIC...

METHODS OF PROCESSING EPITAXIAL SEMICONDUCTOR WAFERS

METHOD FOR DEPOSITING PHOSPHORUS CONTAINING SILICON LAYER

Method of Forming a Source/Drain

PROCESS FOR MANUFACTURING SEMICONDUCTOR WAFERS CONTAINING A GAS-PHA...

METHOD FOR PREPARING LARGE-SCALE TWO-DIMENSIONAL SINGLE CRYSTAL STA...

METHOD OF MANUFACTURING SILICON CARBIDE SINGLE CRYSTAL AND SILICON...

ALPHA GALLIUM OXIDE THIN-FILM STRUCTURE HAVING HIGH CONDUCTIVITY OB...

METHOD OF PRODUCING EPITAXIAL LAYER WAFERS IN A CHAMBER OF A DEPOSI...

LOW TEMPERATURE CO-FLOW EPITAXIAL DEPOSITION PROCESS

METHOD AND APPARATUS FOR DEPOSITION OF A LAYER OF PEROVSKITE ON A S...

METHODS, SYSTEMS, AND APPARATUS FOR FORMING LAYERS HAVING SINGLE CR...

METHOD AND A SUBSTRATE PROCESSING APPARATUS FOR FORMING AN EPITAXIA...

SEMICONDUCTOR WAFER MANUFACTURING APPARATUS

METHOD OF GROWING SILICON CARBIDE CRYSTALS

CHEMICAL SOURCE VESSEL WITH DIP TUBE

Apparatus and Method for Use with a Substrate Chamber

STRUCTURES WITH BORON- AND GALLIUM-DOPED SILICON GERMANIUM LAYERS A...

METHODS OF FORMING SUPERLATTICE STRUCTURES USING NANOPARTICLES