the material being a silicon nitride not containing oxygen

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HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

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H01L21/0217the material being a silicon nitride not containing oxygen

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Patents Grantslast 30 patents

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the material being a silicon nitride not containing oxygen

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Transistor with dielectric spacers and field plate and method of fa...

Method of processing substrate, method of manufacturing semiconduct...

Precursors and processes for deposition of Si-containing films usin...

Vertical semiconductor device and method for fabricating the same

Method of manufacturing semiconductor device, substrate processing...

Semiconductor device and manufacturing method thereof

Semiconductor device

Deposition of oxides and nitrides

Methods and apparatus for low temperature silicon nitride films

Gate and locos dielectrics grown using locos processing

Deposition of films using molybdenum precursors

Multilayer stacking wafer bonding structure and method of manufactu...

Amorphous layers for reducing copper diffusion and method forming same

Method for forming semiconductor device and resulting device

Manufacturing method for semiconductor device

Substrate processing method and substrate processing system

MOCVD method for growing INALGAN/GAN heterostructure

Film formation method and film formation apparatus

Semiconductor device with fin structures

Method for preparing a surface for direct-bonding

Substrate processing method and substrate processing apparatus

Methods for patterning a silicon oxide-silicon nitride-silicon oxid...

Inner spacers for gate-all-around semiconductor devices

Structures and methods for fabricating staircase regions of a three...

Methods and apparatus for selective etch stop capping and selective...

Etching gas mixture and method of manufacturing integrated circuit...

Ultraviolet radiation activated atomic layer deposition

Method of processing substrate, substrate processing apparatus, rec...

Semiconductor device and method for manufacturing semiconductor device

Thin film deposition process

Patents Applicationslast 30 patents

INTEGRATED ASSEMBLIES AND METHODS OF FORMING INTEGRATED ASSEMBLIES

VERTICAL THIN-FILM TRANSISTOR AND APPLICATION AS BIT-LINE CONNECTOR...

SEMICONDUCTOR DEVICE WITH A SEMICONDUCTOR BODY HAVING A TYPE III-NI...

ETCHING GAS MIXTURE AND METHOD OF MANUFACTURING INTEGRATED CIRCUIT...

INTEGRATED ASSEMBLIES AND METHODS OF FORMING INTEGRATED ASSEMBLIES

METHODS OF SELECTIVE ATOMIC LAYER DEPOSITION

DEPOSITION APPARATUS WITH DETECTION SYSTEM AND METHODS

METHOD FOR MANUFACTURING MODIFIED SUBSTRATE AND METHOD FOR MANUFACT...

GAP-FILLING METHOD FOR A SEMICONDUCTOR DEVICE AND METHOD OF MANUFAC...

METHOD FOR SELECTIVE DEPOSITION ON DIELECTRIC MATERIALS

GATE-ALL-AROUND INTEGRATED CIRCUIT STRUCTURES HAVING INSULATOR FIN...

STRESS MODULATION OF NITRIDE LAYERS USING CHEMICAL VAPOR DEPOSITION...

FILM DEPOSITION APPARATUS FOR FINE PATTERN FORMING

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...

METHODS AND APPARATUSES FOR FILLING A GAP

Substrate Processing Apparatus, Heat Insulating Structure, Method o...

HIGH ELECTRON MOBILITY TRANSISTOR AND METHOD OF MANUFACTURING THE SAME

METHOD FOR MANUFACTURING SEMICONDUCTOR MEMORY DEVICE AND SEMICONDUC...

ENCAPSULATED FLEXIBLE ELECTRONICS FOR LONG-TERM IMPLANTATION

METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE

THIN FILM MODIFICATION COMPOSITION, METHOD OF FORMING THIN FILM USI...

TREATING SILICON NITRIDE BASED DIELECTRIC FILMS

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...

METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...

FILLING METHOD AND SUBSTRATE PROCESSING SYSTEM

FIN FIELD-EFFECT TRANSISTOR AND METHOD OF FORMING THE SAME

SEMICONDUCTOR DEVICE WITH HELMET STRUCTURE BETWEEN TWO SEMICONDUCTO...

TEMPERATURE CONTROL MODULE FOR A FURNACE REACTOR AND METHOD OF CONT...

METHODS OF DEPOSITING SILICON-CONTAINING DIELECTRIC LAYERS FOR SEMI...

SEMICONDUCTOR PACKAGE SUBSTRATE DICING AND EDGE PASSIVATION