TREA

the radio frequency energy being capacitively coupled to the plasma

Follow

Industry

  • CPC
  • H01J37/32091
This industry / category may be too specific. Please go to a parent level for more data

Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge

Current Industry

H01J37/32091the radio frequency energy being capacitively coupled to the plasma
Industries