the substrate being supported substantially vertically

Industry

CPC
C23C16/4587

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CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

Current Industry

C23C16/4587the substrate being supported substantially vertically

Industries

Patents Grantslast 30 patents

Information Patent Grant
Vaporizer, substrate processing apparatus and method for manufactur...
- Patent number 11,970,771
- Issue date Apr 30, 2024
- Kokusai Electric Corporation
- Atsushi Morikawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma generating device, substrate processing apparatus, and metho...
- Patent number 11,967,490
- Issue date Apr 23, 2024
- Kokusai Electric Corporation
- Akihiro Sato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
High power electrostatic chuck design with radio frequency coupling
- Patent number 11,948,826
- Issue date Apr 2, 2024
- Applied Materials, Inc.
- Jaeyong Cho
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Coating method for continuous preparation of diamond thin film with...
- Patent number 11,939,669
- Issue date Mar 26, 2024
- Lusheng Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma boat for receiving wafers with regulated plasma deposition
- Patent number 11,873,559
- Issue date Jan 16, 2024
- Nippon Kornmeyer Carbon Group GmbH
- Torsten Kornmeyer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing semiconductor device and non-transitory com...
- Patent number 11,869,785
- Issue date Jan 9, 2024
- Kokusai Electric Corporation
- Tomoyuki Miyada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma generating device, substrate processing apparatus, and metho...
- Patent number 11,749,510
- Issue date Sep 5, 2023
- Kokusai Electric Corporation
- Akihiro Sato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
In-line coater for vacuum deposition of thin film coatings
- Patent number 11,732,349
- Issue date Aug 22, 2023
- OOO IZOVAK TEHNOLOGII
- Vladimir J. Shiripov
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Mask arrangement for masking a substrate in a processing chamber, a...
- Patent number 11,718,904
- Issue date Aug 8, 2023
- Applied Materials, Inc.
- Stefan Bangert
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Wafer rack and vertical wafer boat having the same
- Patent number 11,574,829
- Issue date Feb 7, 2023
- XIA TAI XIN SEMICONDUCTOR (QING DAO) LTD.
- Eun-Joung Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma generating device, substrate processing apparatus, and metho...
- Patent number 11,551,914
- Issue date Jan 10, 2023
- Kokusai Electric Corporation
- Akihiro Sato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
High power electrostatic chuck design with radio frequency coupling
- Patent number 11,532,497
- Issue date Dec 20, 2022
- Applied Materials, Inc.
- Jaeyong Cho
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate accommodating unit and maintenance method for vacuum tran...
- Patent number 11,476,140
- Issue date Oct 18, 2022
- Tokyo Electron Limited
- Takuya Umise
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma generating device, substrate processing apparatus, and metho...
- Patent number 11,469,083
- Issue date Oct 11, 2022
- Kokusai Electric Corporation
- Akihiro Sato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma generating device, substrate processing apparatus, and metho...
- Patent number 11,469,081
- Issue date Oct 11, 2022
- Kokusai Electric Corporation
- Akihiro Sato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus
- Patent number 11,396,700
- Issue date Jul 26, 2022
- Kokusai Electric Corporation
- Sadao Hisakado
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and heater device
- Patent number 11,384,434
- Issue date Jul 12, 2022
- Kokusai Electric Corporation
- Shuhei Saido
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film-forming device
- Patent number 11,377,731
- Issue date Jul 5, 2022
- Murata Manufacturing Co., Ltd.
- Yasuhiro Chikaishi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
High throughput vacuum deposition sources and system
- Patent number 11,359,284
- Issue date Jun 14, 2022
- Ascentool, Inc.
- George Xinsheng Guo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Inline thin film processing device
- Patent number 11,315,818
- Issue date Apr 26, 2022
- Ying Hong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, method for manufacturing semiconduc...
- Patent number 11,293,096
- Issue date Apr 5, 2022
- Kokusai Electric Corporation
- Atsushi Morikawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing semiconductor device and non-transitory com...
- Patent number 11,257,699
- Issue date Feb 22, 2022
- Kokusai Electric Corporation
- Tomoyuki Miyada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Batch type plasma substrate processing apparatus
- Patent number 11,183,372
- Issue date Nov 23, 2021
- EUGENE TECHNOLOGY CO., LTD.
- Sung Ho Kang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Device and method for vacuum coating
- Patent number 11,155,921
- Issue date Oct 26, 2021
- Bühler Alzenau GmbH
- Torsten Schmauder
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for forming films on wafers separated by different distances
- Patent number 11,133,207
- Issue date Sep 28, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd
- Wen-Bin Yang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process chamber with resistive heating
- Patent number 11,111,600
- Issue date Sep 7, 2021
- Svagos Technik, Inc.
- Tirunelveli S. Ravi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for etching one side of a semiconductor substrate
- Patent number 10,975,490
- Issue date Apr 13, 2021
- NexWafe GmbH
- Stefan Reber
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chemical vapor deposition equipment for solar cell and deposition m...
- Patent number 10,971,646
- Issue date Apr 6, 2021
- LG Electronics Inc.
- Wonjae Chang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
CVD reactor chamber with resistive heating and substrate holder
- Patent number 10,961,621
- Issue date Mar 30, 2021
- Svagos Technik, Inc.
- Visweswaren Sivaramakrishnan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
High throughput vacuum deposition sources and system
- Patent number 10,954,598
- Issue date Mar 23, 2021
- George Xinsheng Guo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
ACOUSTIC WAVE ASSISTED CHEMICAL VAPOR IINFILTRATION
- Publication number 20240141479
- Publication date May 2, 2024
- RTX Corporation
- JinQuan Xu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
NOVEL COATING METHOD OF COMPLEX 3D STRUCTURES USING LOW PRESSURE CH...
- Publication number 20240102167
- Publication date Mar 28, 2024
- California Institute of Technology
- Matthew R. Dickie
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of Manufacturing Semiconductor Device and Non-transitory Com...
- Publication number 20240087929
- Publication date Mar 14, 2024
- Kokusai Electric Corporation
- Tomoyuki MIYADA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VACUUM CHAMBER AND ARRANGEMENT FOR ATOMIC LAYER DEPOSITION
- Publication number 20240026535
- Publication date Jan 25, 2024
- BENEQ OY
- Johannes WESSLIN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FABRICATING APPARATUS OF SIC EPITAXIAL WAFER AND FABRICATION METHOD...
- Publication number 20230374698
- Publication date Nov 23, 2023
- ROHM CO., LTD.
- Makoto TAKAMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUPPORT FOR SEMICONDUCTOR SUBSTRATES FOR PECVD TREATMENT WITH HIGH...
- Publication number 20230357930
- Publication date Nov 9, 2023
- SEMCO SMARTECH FRANCE
- Bachir SEMMACHE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA GENERATING DEVICE, SUBSTRATE PROCESSING APPARATUS, AND METHO...
- Publication number 20230238222
- Publication date Jul 27, 2023
- Kokusai Electric Corporation
- Akihiro SATO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS INJECTOR FOR A VERTICAL FURNACE
- Publication number 20230111229
- Publication date Apr 13, 2023
- ASM IP HOLDING B.V.
- Theodorus G.M. Oosterlaken
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HIGH POWER ELECTROSTATIC CHUCK DESIGN WITH RADIO FREQUENCY COUPLING
- Publication number 20230072594
- Publication date Mar 9, 2023
- Applied Materials, Inc.
- Jaeyong Cho
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Holding System for Holding Substrates during a Processing of the Su...
- Publication number 20230026860
- Publication date Jan 26, 2023
- OERLIKON SURFACE SOLUTIONS AG, PFÄFFIKON
- Max Siebert
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA GENERATING DEVICE, SUBSTRATE PROCESSING APPARATUS, AND METHO...
- Publication number 20230020318
- Publication date Jan 19, 2023
- Kokusai Electric Corporation
- Akihiro SATO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING APPARATUS
- Publication number 20220411933
- Publication date Dec 29, 2022
- TOKYO ELECTRON LIMITED
- Yuya TAKAMURA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HFCVD DEVICE USED FOR CONTINUOUS PREPARATION OF DIAMOND THIN FILM,...
- Publication number 20220316053
- Publication date Oct 6, 2022
- Institute of Metal Research Chinese Academy of Scienes
- Lusheng LIU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MAGNETIC LEVITATION SYSTEM, BASE AND CARRIER OF A MAGNETIC LEVITATI...
- Publication number 20220208426
- Publication date Jun 30, 2022
- Applied Materials, Inc.
- Henning AUST
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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SEMICONDUCTOR MANUFACTURING APPARATUS AND METHOD OF MANUFACTURING S...
- Publication number 20220195594
- Publication date Jun 23, 2022
- KIOXIA Corporation
- Masayuki KITAMURA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD FOR MANUFACTURING SEMICONDUC...
- Publication number 20220186368
- Publication date Jun 16, 2022
- Hitachi Kokusai Electric Inc.
- Atsushi MORIKAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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SUBSTRATE PROCESSING APPARATUS, SUBSTRATE SUPPPORT AND METHOD OF MA...
- Publication number 20220157628
- Publication date May 19, 2022
- Kokusai Electric Corporation
- Yusaku OKAJIMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of Manufacturing Semiconductor Device and Non-transitory Com...
- Publication number 20220139745
- Publication date May 5, 2022
- Kokusai Electric Corporation
- Tomoyuki MIYADA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CVD REACTOR CHAMBER WITH RESISTIVE HEATING FOR SILICON CARBIDE DEPO...
- Publication number 20220064819
- Publication date Mar 3, 2022
- Svagos Technik, Inc.
- Tirunelveli S. Ravi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA BOAT FOR RECEIVING WAFERS WITH REGULATED PLASMA DEPOSITION
- Publication number 20210363636
- Publication date Nov 25, 2021
- Nippon Kornmeyer Carbon Group GmbH
- Torsten KORNMEYER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Pedestal Geometry for Fast Gas Exchange
- Publication number 20210292898
- Publication date Sep 23, 2021
- Applied Materials, Inc.
- Sanjeev Baluja
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA TREATMENT APPARATUS
- Publication number 20210233751
- Publication date Jul 29, 2021
- Plasma Ion Assist Co., Ltd.
- Yasuo SUZUKI
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PLASMA GENERATING DEVICE, SUBSTRATE PROCESSING APPARATUS, AND METHO...
- Publication number 20210202215
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- Kokusai Electric Corporation
- Akihiro SATO
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Information Patent Application
PLASMA GENERATING DEVICE, SUBSTRATE PROCESSING APPARATUS, AND METHO...
- Publication number 20210202216
- Publication date Jul 1, 2021
- Kokusai Electric Corporation
- Akihiro SATO
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Information Patent Application
High throughput Vacuum Deposition Sources and System
- Publication number 20210164099
- Publication date Jun 3, 2021
- Ascentool, Inc.
- George Xinsheng Guo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCK WITH MULTIPLE RADIO FREQUENCY MESHES TO CONTROL...
- Publication number 20210166915
- Publication date Jun 3, 2021
- Applied Materials, Inc.
- Edward P. HAMMOND
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Information Patent Application
Substrate Processing Apparatus
- Publication number 20210147978
- Publication date May 20, 2021
- Kokusai Electric Corporation
- Sadao HISAKADO
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Information Patent Application
WAFER RACK AND VERTICAL WAFER BOAT HAVING THE SAME
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- Publication date May 13, 2021
- XIA TAI XIN SEMICONDUCTOR (QING DAO) LTD.
- EUN-JOUNG LEE
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SUBSTRATE ACCOMMODATING UNIT AND MAINTENANCE METHOD FOR VACUUM TRAN...
- Publication number 20210134634
- Publication date May 6, 2021
- TOKYO ELECTRON LIMITED
- Takuya UMISE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INLINE THIN FILM PROCESSING DEVICE
- Publication number 20210005474
- Publication date Jan 7, 2021
- Ying HONG
- H01 - BASIC ELECTRIC ELEMENTS

the substrate being supported substantially vertically

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Vaporizer, substrate processing apparatus and method for manufactur...

Plasma generating device, substrate processing apparatus, and metho...

High power electrostatic chuck design with radio frequency coupling

Coating method for continuous preparation of diamond thin film with...

Plasma boat for receiving wafers with regulated plasma deposition

Method of manufacturing semiconductor device and non-transitory com...

Plasma generating device, substrate processing apparatus, and metho...

In-line coater for vacuum deposition of thin film coatings

Mask arrangement for masking a substrate in a processing chamber, a...

Wafer rack and vertical wafer boat having the same

Plasma generating device, substrate processing apparatus, and metho...

High power electrostatic chuck design with radio frequency coupling

Substrate accommodating unit and maintenance method for vacuum tran...

Plasma generating device, substrate processing apparatus, and metho...

Plasma generating device, substrate processing apparatus, and metho...

Substrate processing apparatus

Substrate processing apparatus and heater device

Film-forming device

High throughput vacuum deposition sources and system

Inline thin film processing device

Substrate processing apparatus, method for manufacturing semiconduc...

Method of manufacturing semiconductor device and non-transitory com...

Batch type plasma substrate processing apparatus

Device and method for vacuum coating

Method for forming films on wafers separated by different distances

Process chamber with resistive heating

Apparatus and method for etching one side of a semiconductor substrate

Chemical vapor deposition equipment for solar cell and deposition m...

CVD reactor chamber with resistive heating and substrate holder

High throughput vacuum deposition sources and system

Patents Applicationslast 30 patents

ACOUSTIC WAVE ASSISTED CHEMICAL VAPOR IINFILTRATION

NOVEL COATING METHOD OF COMPLEX 3D STRUCTURES USING LOW PRESSURE CH...

Method of Manufacturing Semiconductor Device and Non-transitory Com...

VACUUM CHAMBER AND ARRANGEMENT FOR ATOMIC LAYER DEPOSITION

FABRICATING APPARATUS OF SIC EPITAXIAL WAFER AND FABRICATION METHOD...

SUPPORT FOR SEMICONDUCTOR SUBSTRATES FOR PECVD TREATMENT WITH HIGH...

PLASMA GENERATING DEVICE, SUBSTRATE PROCESSING APPARATUS, AND METHO...

GAS INJECTOR FOR A VERTICAL FURNACE

HIGH POWER ELECTROSTATIC CHUCK DESIGN WITH RADIO FREQUENCY COUPLING

Holding System for Holding Substrates during a Processing of the Su...

PLASMA GENERATING DEVICE, SUBSTRATE PROCESSING APPARATUS, AND METHO...

FILM FORMING APPARATUS

HFCVD DEVICE USED FOR CONTINUOUS PREPARATION OF DIAMOND THIN FILM,...

MAGNETIC LEVITATION SYSTEM, BASE AND CARRIER OF A MAGNETIC LEVITATI...

SEMICONDUCTOR MANUFACTURING APPARATUS AND METHOD OF MANUFACTURING S...

SUBSTRATE PROCESSING APPARATUS, METHOD FOR MANUFACTURING SEMICONDUC...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE SUPPPORT AND METHOD OF MA...

Method of Manufacturing Semiconductor Device and Non-transitory Com...

CVD REACTOR CHAMBER WITH RESISTIVE HEATING FOR SILICON CARBIDE DEPO...

PLASMA BOAT FOR RECEIVING WAFERS WITH REGULATED PLASMA DEPOSITION

Pedestal Geometry for Fast Gas Exchange

PLASMA TREATMENT APPARATUS

PLASMA GENERATING DEVICE, SUBSTRATE PROCESSING APPARATUS, AND METHO...

PLASMA GENERATING DEVICE, SUBSTRATE PROCESSING APPARATUS, AND METHO...

High throughput Vacuum Deposition Sources and System

ELECTROSTATIC CHUCK WITH MULTIPLE RADIO FREQUENCY MESHES TO CONTROL...

Substrate Processing Apparatus

WAFER RACK AND VERTICAL WAFER BOAT HAVING THE SAME

SUBSTRATE ACCOMMODATING UNIT AND MAINTENANCE METHOD FOR VACUUM TRAN...

INLINE THIN FILM PROCESSING DEVICE