the wafers being placed on a robot blade, or gripped by a gripper for conveyance

Industry

CPC
H01L21/68707

This industry / category may be too specific. Please go to a parent level for more data

Parent Industries

HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/68707the wafers being placed on a robot blade, or gripped by a gripper for conveyance

Industries

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing system and substrate processing method
- Patent number 12,230,540
- Issue date Feb 18, 2025
- Tokyo Electron Limited
- Yoshihiro Kawaguchi
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Wafer transfer apparatus with aligner
- Patent number 12,224,191
- Issue date Feb 11, 2025
- Samsung Electronics Co., Ltd.
- Beomsoo Hwang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cleanroom compatible robotic end effector exchange system
- Patent number 12,217,997
- Issue date Feb 4, 2025
- KLA Corporation
- Benjamin James Thomas Clarke
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer processing apparatus including EFEM and method of processing...
- Patent number 12,217,984
- Issue date Feb 4, 2025
- Samsung Electronics Co., Ltd.
- Jinhyuk Choi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Reconfigurable mainframe with replaceable interface plate
- Patent number 12,211,714
- Issue date Jan 28, 2025
- Applied Materials, Inc.
- Michael R. Rice
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Distributed-architecture robot with multiple linkages
- Patent number 12,208,517
- Issue date Jan 28, 2025
- Persimmon Technologies Corporation
- Martin Hosek
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for treating a substrate
- Patent number 12,205,837
- Issue date Jan 21, 2025
- Semes Co., Ltd.
- Seong Hyun Yun
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Suction clamp, object handler, stage apparatus and lithographic app...
- Patent number 12,197,141
- Issue date Jan 14, 2025
- ASML Netherlands B.V.
- Gijs Kramer
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Substrate holding hand and substrate transferring robot
- Patent number 12,195,285
- Issue date Jan 14, 2025
- Kawasaki Jukogyo Kabushiki Kaisha
- Satoshi Yamada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate transfer method and substrate transfer system
- Patent number 12,198,955
- Issue date Jan 14, 2025
- Tokyo Electron Limited
- Wataru Matsumoto
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Semiconductor manufacturing apparatus, failure prediction method fo...
- Patent number 12,191,178
- Issue date Jan 7, 2025
- Ebara Corporation
- Jumpei Fujikata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Industrial robot having a mounting mechanism on which a plurality o...
- Patent number 12,191,189
- Issue date Jan 7, 2025
- NIDEC SANKYO CORPORATION
- Tamotsu Kuribayashi
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Reticle gripper damper and isolation system for lithographic appara...
- Patent number 12,189,312
- Issue date Jan 7, 2025
- ASML Holding N.V.
- Roberto B. Wiener
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Air curtain device and workpiece processing tool
- Patent number 12,188,686
- Issue date Jan 7, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chia-Wei Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Tape mounter
- Patent number 12,191,172
- Issue date Jan 7, 2025
- Disco Corporation
- Toshiyasu Rikiishi
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Dual arm with opposed dual end effectors and no vertical wafer overlap
- Patent number 12,191,187
- Issue date Jan 7, 2025
- Persimmon Technologies Corporation
- Scott Wilkas
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Transfer device, transfer system, and end effector
- Patent number 12,191,188
- Issue date Jan 7, 2025
- Tokyo Electron Limited
- Norihiko Amikura
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Substrate transfer apparatus, substrate transfer method, and substr...
- Patent number 12,183,612
- Issue date Dec 31, 2024
- Tokyo Electron Limited
- Tatsuo Hatano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing system and substrate processing method
- Patent number 12,183,613
- Issue date Dec 31, 2024
- Tokyo Electron Limited
- Kouzou Kanagawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for transferring wafer, and apparatus for cont...
- Patent number 12,176,233
- Issue date Dec 24, 2024
- CHANGXIN MEMORY TECHNOLOGIES, INC.
- Fencheng Zheng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Assembly and method for transferring substrate
- Patent number 12,176,234
- Issue date Dec 24, 2024
- Semes Co., Ltd.
- Sung Hyuk Jung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Robot for simultaneous substrate transfer
- Patent number 12,170,220
- Issue date Dec 17, 2024
- Applied Materials, Inc.
- Jason M. Schaller
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate transport apparatus
- Patent number 12,162,698
- Issue date Dec 10, 2024
- BROOKS AUTOMATION US, LLC
- Daniel Babbs
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Process kit enclosure system
- Patent number 12,165,905
- Issue date Dec 10, 2024
- Applied Materials, Inc.
- Helder Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and methods for handling semiconductor part carriers
- Patent number 12,165,906
- Issue date Dec 10, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Ren-Hau Wu
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Substrate conveying robot and substrate conveying robot system
- Patent number 12,162,145
- Issue date Dec 10, 2024
- Kawasaki Jukogyo Kabushiki Kaisha
- Haruhiko Tan
- G05 - CONTROLLING REGULATING
Information Patent Grant
Substrate processing system and transfer method
- Patent number 12,165,893
- Issue date Dec 10, 2024
- Tokyo Electron Limited
- Norihiko Amikura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Automated semiconductor substrate polishing and cleaning
- Patent number 12,154,810
- Issue date Nov 26, 2024
- GlobalWafers Co., Ltd.
- ShinBae Park
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Factory interface robots usable with integrated load locks
- Patent number 12,142,508
- Issue date Nov 12, 2024
- Applied Materials, Inc.
- Sushant S. Koshti
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 12,142,511
- Issue date Nov 12, 2024
- BROOKS AUTOMATION US, LLC
- Alexander Krupyshev
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS

Patents Applicationslast 30 patents

Information Patent Application
AUTOMATED SEMICONDUCTOR SUBSTRATE POLISHING AND CLEANING METHODS
- Publication number 20250062148
- Publication date Feb 20, 2025
- GLOBALWAFERS CO., LTD.
- ShinBae Park
- B08 - CLEANING
Information Patent Application
HEXAPOD-BASED PEDESTAL SYSTEMS FOR USE IN SEMICONDUCTOR PROCESSING...
- Publication number 20250062156
- Publication date Feb 20, 2025
- LAM RESEARCH CORPORATION
- Jacob Lee Hiester
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSFER APPARATUS INCLUDING MULTILAYER EFEM
- Publication number 20250054792
- Publication date Feb 13, 2025
- VM Inc.
- Sang Woo Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM AND TRANSFER METHOD
- Publication number 20250054793
- Publication date Feb 13, 2025
- TOKYO ELECTRON LIMITED
- Norihiko AMIKURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DIRECT-PICK ROBOT FOR MULTI-STATION SEMICONDUCTOR PROCESSING CHAMBERS
- Publication number 20250046643
- Publication date Feb 6, 2025
- LAM RESEARCH CORPORATION
- Richard M. Blank
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ROBOTIC ARM WITH VIBRATION DETECTION AND IMAGE RECOGNITION
- Publication number 20250046636
- Publication date Feb 6, 2025
- JUN-FU TECHNOLOGY INC
- Cheng-Hsiang LU
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
AUTOMATIC CORRECTION DEVICE OF ROBOTIC ARM AND METHOD THEREOF
- Publication number 20250046637
- Publication date Feb 6, 2025
- JUN-FU TECHNOLOGY INC
- Cheng-Hsiang LU
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
WAFER TRANSFER PADDLES WITH MINIMUM CONTACT AREA STRUCTURES FOR RED...
- Publication number 20250046644
- Publication date Feb 6, 2025
- LAM RESEARCH CORPORATION
- Andrew Borth
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TRANSFER UNIT AND TRANSFER ROBOT SYSTEM INCLUDING TRANSFER ROBOT
- Publication number 20250038032
- Publication date Jan 30, 2025
- SEMES CO., LTD.
- Donghoon Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
High Throughput Substrate Processing Cluster Tool With Factory Inte...
- Publication number 20250038021
- Publication date Jan 30, 2025
- Applied Materials, Inc.
- Upendra UMMETHALA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER LAMINATION SYSTEMS AND METHODS THEREOF FOR SEMICONDUCTOR WAFERS
- Publication number 20250038037
- Publication date Jan 30, 2025
- UTAC Headquarters Pte. Ltd.
- IL KWON SHIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONTROL DEVICE FOR SUBSTRATE TRANSFER ROBOT AND CONTROL METHOD FOR...
- Publication number 20250026013
- Publication date Jan 23, 2025
- KAWASAKI JUKOGYO KABUSHIKI KAISHA
- Hiroki IMANISHI
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
OVERHEAD CONVEYING VEHICLE
- Publication number 20250022735
- Publication date Jan 16, 2025
- MURATA MACHINERY, LTD.
- Makoto Kobayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSPORT SYSTEM AND TRANSFER ROBOT
- Publication number 20250018578
- Publication date Jan 16, 2025
- Hirata Corporation
- Keiji KANAZAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING SYSTEM, METHOD...
- Publication number 20250014924
- Publication date Jan 9, 2025
- Kokusai Electric Corporation
- Tsukasa KAMAKURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF PROCESSING SUBSTRATE, MET...
- Publication number 20250014930
- Publication date Jan 9, 2025
- Kokusai Electric Corporation
- Tsukasa KAMAKURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSFER APPARATUS
- Publication number 20250001583
- Publication date Jan 2, 2025
- VM Inc.
- Tae Jin Kwon
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
APPARATUS, SYSTEM AND METHOD FOR PROVIDING AN END EFFECTOR
- Publication number 20240424688
- Publication date Dec 26, 2024
- Jabil Inc.
- Jeroen Bosboom
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ROBOT BLADE
- Publication number 20240416529
- Publication date Dec 19, 2024
- Samsung Electronics Co., Ltd.
- Kyunghoon Joo
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
DEDICATED SULFURIC-PEROXIDE PROCESS MODULE FOR POST-CMP CLEANING PL...
- Publication number 20240412985
- Publication date Dec 12, 2024
- Applied Materials, Inc.
- Clinton SAKATA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Transfer Apparatus And Processing System
- Publication number 20240404858
- Publication date Dec 5, 2024
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Mengyang Xin
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
SEMICONDUCTOR PROCESSING APPARATUS
- Publication number 20240404780
- Publication date Dec 5, 2024
- HITACHI HIGH-TECH CORPORATION
- Masahiro KAMIGAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER HANDLING ASSEMBLY
- Publication number 20240395586
- Publication date Nov 28, 2024
- ASM IP HOLDING B.V.
- Adriaan Garssen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSFER APPARATUS AND SUBSTRATE TRANSFER METHOD
- Publication number 20240391706
- Publication date Nov 28, 2024
- TOKYO ELECTRON LIMITED
- Hitoshi HASHIMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-STATION PROCESSING MODULE AND REACTOR ARCHITECTURE
- Publication number 20240395580
- Publication date Nov 28, 2024
- LAM RESEARCH CORPORATION
- Karl Frederick Leeser
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20240393705
- Publication date Nov 28, 2024
- SEMES CO., LTD.
- Sang Hyun PARK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20240379396
- Publication date Nov 14, 2024
- BROOKS AUTOMATION US, LLC
- Levid E. Hanley
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CLEANING AND TRANSFER EQUIPMENT, WAFER TREATMENT EQUIPMENT, TRANSFE...
- Publication number 20240379405
- Publication date Nov 14, 2024
- EBARA CORPORATION
- KOTARO TOYOSAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESSING SYSTEM AND TEACHING METHOD
- Publication number 20240379392
- Publication date Nov 14, 2024
- TOKYO ELECTRON LIMITED
- Toshiaki TOYOMAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SONAR SENSOR IN PROCESSING CHAMBER
- Publication number 20240371668
- Publication date Nov 7, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Lee-Chuan Tseng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

the wafers being placed on a robot blade, or gripped by a gripper for conveyance

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Substrate processing system and substrate processing method

Wafer transfer apparatus with aligner

Cleanroom compatible robotic end effector exchange system

Wafer processing apparatus including EFEM and method of processing...

Reconfigurable mainframe with replaceable interface plate

Distributed-architecture robot with multiple linkages

Apparatus for treating a substrate

Suction clamp, object handler, stage apparatus and lithographic app...

Substrate holding hand and substrate transferring robot

Substrate transfer method and substrate transfer system

Semiconductor manufacturing apparatus, failure prediction method fo...

Industrial robot having a mounting mechanism on which a plurality o...

Reticle gripper damper and isolation system for lithographic appara...

Air curtain device and workpiece processing tool

Tape mounter

Dual arm with opposed dual end effectors and no vertical wafer overlap

Transfer device, transfer system, and end effector

Substrate transfer apparatus, substrate transfer method, and substr...

Substrate processing system and substrate processing method

Apparatus and method for transferring wafer, and apparatus for cont...

Assembly and method for transferring substrate

Robot for simultaneous substrate transfer

Substrate transport apparatus

Process kit enclosure system

Apparatus and methods for handling semiconductor part carriers

Substrate conveying robot and substrate conveying robot system

Substrate processing system and transfer method

Automated semiconductor substrate polishing and cleaning

Factory interface robots usable with integrated load locks

Substrate processing apparatus

Patents Applicationslast 30 patents

AUTOMATED SEMICONDUCTOR SUBSTRATE POLISHING AND CLEANING METHODS

HEXAPOD-BASED PEDESTAL SYSTEMS FOR USE IN SEMICONDUCTOR PROCESSING...

SUBSTRATE TRANSFER APPARATUS INCLUDING MULTILAYER EFEM

SUBSTRATE PROCESSING SYSTEM AND TRANSFER METHOD

DIRECT-PICK ROBOT FOR MULTI-STATION SEMICONDUCTOR PROCESSING CHAMBERS

ROBOTIC ARM WITH VIBRATION DETECTION AND IMAGE RECOGNITION

AUTOMATIC CORRECTION DEVICE OF ROBOTIC ARM AND METHOD THEREOF

WAFER TRANSFER PADDLES WITH MINIMUM CONTACT AREA STRUCTURES FOR RED...

TRANSFER UNIT AND TRANSFER ROBOT SYSTEM INCLUDING TRANSFER ROBOT

High Throughput Substrate Processing Cluster Tool With Factory Inte...

WAFER LAMINATION SYSTEMS AND METHODS THEREOF FOR SEMICONDUCTOR WAFERS

CONTROL DEVICE FOR SUBSTRATE TRANSFER ROBOT AND CONTROL METHOD FOR...

OVERHEAD CONVEYING VEHICLE

SUBSTRATE TRANSPORT SYSTEM AND TRANSFER ROBOT

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING SYSTEM, METHOD...

SUBSTRATE PROCESSING APPARATUS, METHOD OF PROCESSING SUBSTRATE, MET...

SUBSTRATE TRANSFER APPARATUS

APPARATUS, SYSTEM AND METHOD FOR PROVIDING AN END EFFECTOR

ROBOT BLADE

DEDICATED SULFURIC-PEROXIDE PROCESS MODULE FOR POST-CMP CLEANING PL...

Transfer Apparatus And Processing System

SEMICONDUCTOR PROCESSING APPARATUS

WAFER HANDLING ASSEMBLY

SUBSTRATE TRANSFER APPARATUS AND SUBSTRATE TRANSFER METHOD

MULTI-STATION PROCESSING MODULE AND REACTOR ARCHITECTURE

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS

CLEANING AND TRANSFER EQUIPMENT, WAFER TREATMENT EQUIPMENT, TRANSFE...

PROCESSING SYSTEM AND TEACHING METHOD

SONAR SENSOR IN PROCESSING CHAMBER