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ELECTRICITY
H01
Electric elements
H01L
SEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
H01L21/00
Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
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H01L21/68707
the wafers being placed on a robot blade, or gripped by a gripper for conveyance
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Patents Grants
last 30 patents
Information
Patent Grant
Apparatus for filling wafer with glass powder
Patent number
11,972,959
Issue date
Apr 30, 2024
SHANDONG CAIJU ELECTRONIC TECHNOLOGY CO. LTD
Xiangdong Li
B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information
Patent Grant
Apparatus and method for controlling process
Patent number
11,967,514
Issue date
Apr 23, 2024
Semes Co., Ltd.
Sung Min Lim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus for processing substrate and method of transferring subst...
Patent number
11,961,758
Issue date
Apr 16, 2024
Tokyo Electron Limited
Takehiro Shindo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Telescoping linear extension robot
Patent number
11,955,364
Issue date
Apr 9, 2024
Kimball Electronics Indiana, Inc.
Lawrence A. Wise
B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information
Patent Grant
Reverse selective etch stop layer
Patent number
11,955,382
Issue date
Apr 9, 2024
Applied Materials, Inc.
Kevin Kashefi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate treating apparatus
Patent number
11,948,823
Issue date
Apr 2, 2024
SCREEN Holdings Co., Ltd.
Yuichi Takayama
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Pin-less substrate transfer apparatus and method for a processing c...
Patent number
11,948,828
Issue date
Apr 2, 2024
Applied Materials, Inc.
Sultan Malik
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Robot for simultaneous substrate transfer
Patent number
11,948,817
Issue date
Apr 2, 2024
Applied Materials, Inc.
Charles T. Carlson
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate transfer device and substrate processing system
Patent number
11,948,822
Issue date
Apr 2, 2024
Tokyo Electron Limited
Dongwei Li
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Processing apparatus
Patent number
11,945,074
Issue date
Apr 2, 2024
Disco Corporation
Nobuyuki Fukushi
B24 - GRINDING POLISHING
Information
Patent Grant
Automated substrate placement to chamber center
Patent number
11,942,345
Issue date
Mar 26, 2024
Applied Materials, Inc.
Wolfgang Aderhold
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
System and method for performing semiconductor processes with coate...
Patent number
11,939,664
Issue date
Mar 26, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Meng-Chun Hsieh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Clipping mechanism for fastening a substrate for a surface treatmen...
Patent number
11,942,356
Issue date
Mar 26, 2024
SEMSYSCO GMBH
Andreas Gleissner
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Transfer hand and substrate processing apparatus with conductive ri...
Patent number
11,935,779
Issue date
Mar 19, 2024
Semes Co., Ltd.
Tae Hoon Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Modular mainframe layout for supporting multiple semiconductor proc...
Patent number
11,935,771
Issue date
Mar 19, 2024
Applied Materials, Inc.
Randy A. Harris
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Modular mainframe layout for supporting multiple semiconductor proc...
Patent number
11,935,770
Issue date
Mar 19, 2024
Applied Materials, Inc.
Randy A. Harris
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Drying system with integrated substrate alignment stage
Patent number
11,929,264
Issue date
Mar 12, 2024
Applied Materials, Inc.
Justin Ho Kuen Wong
F26 - DRYING
Information
Patent Grant
Confined charge trap layer
Patent number
11,930,637
Issue date
Mar 12, 2024
Applied Materials, Inc.
Chang Seok Kang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus and method of fabricating semiconduc...
Patent number
11,927,890
Issue date
Mar 12, 2024
Samsung Electronics Co., Ltd.
Seok Heo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing system, substrate processing method and comput...
Patent number
11,929,268
Issue date
Mar 12, 2024
Tokyo Electron Limited
Munehisa Kodama
B24 - GRINDING POLISHING
Information
Patent Grant
Diagnostic disc with a high vacuum and temperature tolerant power s...
Patent number
11,924,972
Issue date
Mar 5, 2024
Applied Materials, Inc.
Phillip A. Criminale
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate transfer device and substrate gripping determination method
Patent number
11,923,222
Issue date
Mar 5, 2024
Tokyo Electron Limited
Toshiaki Kodama
B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information
Patent Grant
Cleaning method and apparatus
Patent number
11,923,187
Issue date
Mar 5, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Min-Cheng Wu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Position feedback for sealed environments
Patent number
11,923,729
Issue date
Mar 5, 2024
Brook Automation US, LLC
Jairo T. Moura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
CMP wafer cleaning equipment, wafer transfer robot and wafer flippi...
Patent number
11,908,720
Issue date
Feb 20, 2024
HANGZHOU SIZONE ELECTRONIC TECHNOLOGY INC.
Linghan Shen
B08 - CLEANING
Information
Patent Grant
Automatic teaching of substrate handling for production and process...
Patent number
11,908,722
Issue date
Feb 20, 2024
KLA Corporation
Avner Safrani
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for measuring placement of a substrate on a he...
Patent number
11,908,724
Issue date
Feb 20, 2024
Applied Materials, Inc.
Charles G. Potter
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Light irradiation type heat treatment method
Patent number
11,908,703
Issue date
Feb 20, 2024
SCREEN Holdings Co., Ltd.
Mao Omori
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Tool auto-teach method and apparatus
Patent number
11,908,721
Issue date
Feb 20, 2024
BROOKS AUTOMATION US, LLC
Jairo T. Moura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Vapor deposition device
Patent number
11,898,246
Issue date
Feb 13, 2024
Sumco Corporation
Naoyuki Wada
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
WORKPIECE HANDLING ARCHITECTURE FOR HIGH WORKPIECE THROUGHPUT
Publication number
20240145270
Publication date
May 2, 2024
Applied Materials, Inc.
Jason M. Schaller
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
WORKPIECE HANDLING ARCHITECTURE FOR HIGH WORKPIECE THROUGHPUT
Publication number
20240145271
Publication date
May 2, 2024
Applied Materials, Inc.
Jason M. Schaller
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE CLEANING APPARATUS, SUBSTRATE DRYING APPARATUS, SUBSTRATE...
Publication number
20240145276
Publication date
May 2, 2024
EBARA CORPORATION
Yosuke HIMORI
B08 - CLEANING
Information
Patent Application
WIRELESS POWER APPARATUS FOR SUBSTRATES TREATING APPARATUS AND MANU...
Publication number
20240146103
Publication date
May 2, 2024
SEMES CO., LTD.
Chan Young Choi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEM AND METHOD FOR MANUFACTURING PLURALITY OF INTEGRATED CIRCUITS
Publication number
20240136211
Publication date
Apr 25, 2024
Pragmatic Printing Ltd.
Richard David PRICE
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Publication number
20240128111
Publication date
Apr 18, 2024
SEMES CO., LTD.
Byungin AN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
GRIPPING APPARATUS AND AUTONOMOUS MOBILE ROBOT
Publication number
20240123630
Publication date
Apr 18, 2024
SEMES CO., LTD.
Seung Chan LEE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE HANDLING APPARATUS AND METHOD OF HANDLING SUBSTRATE
Publication number
20240120227
Publication date
Apr 11, 2024
KAWASAKI JUKOGYO KABUSHIKI KAISHA
Haruhiko TAN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE TRANSFER UNIT AND SUBSTRATE TRANSFER CONTROL METHOD
Publication number
20240120228
Publication date
Apr 11, 2024
TOKYO ELECTRON LIMITED
Isamu TAODA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE TRANSFERRING UNIT, SUBSTRATE PROCESSING APPARATUS, AND SU...
Publication number
20240120232
Publication date
Apr 11, 2024
Samsung Electronics Co., Ltd.
Sangjine Park
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHIP INSTALLATION AND REMOVAL TOOL
Publication number
20240109206
Publication date
Apr 4, 2024
Quantinuum LLC
Garrett Zerba
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ON THE FLY AUTOMATIC WAFER CENTERING METHOD AND APPARATUS
Publication number
20240112937
Publication date
Apr 4, 2024
BROOKS AUTOMATION US, LLC
Bing YIN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND APPARATUS FOR ALIGNING WAFER USING LASER SCANNER, SEMICO...
Publication number
20240112938
Publication date
Apr 4, 2024
SEMES CO., LTD.
Hee Jae BYUN
B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information
Patent Application
SUBSTRATE TRANSFER SYSTEM AND IMAGE CORRECTION METHOD
Publication number
20240105487
Publication date
Mar 28, 2024
TOKYO ELECTRON LIMITED
Isamu TAODA
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS
Publication number
20240105493
Publication date
Mar 28, 2024
BROOKS AUTOMATION US, LLC
Vincent W. TSANG
B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information
Patent Application
SUSCEPTOR TRANSFER FOR PROCESS CHAMBER
Publication number
20240105485
Publication date
Mar 28, 2024
Applied Materials, Inc.
Ribhu GAUTAM
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PROBER CONTROLLING DEVICE, PROBER CONTROLLING METHOD, AND PROBER
Publication number
20240094254
Publication date
Mar 21, 2024
TOKYO SEIMITSU CO., LTD.
Tetsuo YOSHIDA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE HANDLING DEVICE WITH ADJUSTABLE JOINTS
Publication number
20240096685
Publication date
Mar 21, 2024
ASM IP HOLDING B.V.
KiHyun Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
INTERFACE TOOL
Publication number
20240087935
Publication date
Mar 14, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Jyh-Shiou Hsu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
AUTOMATIC WAFER CENTERING METHOD AND APPARATUS
Publication number
20240087938
Publication date
Mar 14, 2024
BROOKS AUTOMATION US, LLC
Alexander KRUPYSHEV
B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information
Patent Application
ASYMMETRY CORRECTION VIA ORIENTED WAFER LOADING
Publication number
20240087965
Publication date
Mar 14, 2024
Applied Materials, Inc.
Eric Lau
B24 - GRINDING POLISHING
Information
Patent Application
SPACE FILLING DEVICE FOR WET BENCH
Publication number
20240087917
Publication date
Mar 14, 2024
Taiwan Semiconductor Manufacturing Co., Ltd.
Yen-Ji Chen
B08 - CLEANING
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ST...
Publication number
20240087926
Publication date
Mar 14, 2024
TOKYO ELECTRON LIMITED
Youngtai KANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTI-TURN DRIVE ASSEMBLY AND SYSTEMS AND METHODS OF USE THEREOF
Publication number
20240075613
Publication date
Mar 7, 2024
Applied Materials, Inc.
Jeff Hudgens
B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information
Patent Application
OPERATIONS OF ROBOT APPARATUSES WITHIN RECTANGULAR MAINFRAMES
Publication number
20240071802
Publication date
Feb 29, 2024
Applied Materials, Inc.
Paul Z. Wirth
B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information
Patent Application
APPARATUS AND METHOD FOR MANUFACTURING DISPLAY APPARATUS
Publication number
20240063032
Publication date
Feb 22, 2024
SAMSUNG DISPLAY CO., LTD.
Sehun Choi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS AND METHOD OF DETECTING WAFER EDGE USING LASER SCANNER, A...
Publication number
20240063039
Publication date
Feb 22, 2024
SEMES CO., LTD.
Hee Jae BYUN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MANUFACTURING EQUIPMENT FOR LIGHT-EMITTING DEVICE
Publication number
20240057464
Publication date
Feb 15, 2024
SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
Shingo EGUCHI
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SUBSTRATE TRANSFER SYSTEM AND ATMOSPHERIC TRANSFER MODULE
Publication number
20240047254
Publication date
Feb 8, 2024
TOKYO ELECTRON LIMITED
Norihiko AMIKURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TRANSFER CHAMBER
Publication number
20240038554
Publication date
Feb 1, 2024
SINFONIA TECHNOLOGY CO., LTD.
Toshihiro Kawai
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL