Thermal actuators

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B81B2201/031

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Parent Industries

BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81BMICRO-STRUCTURAL DEVICES OR SYSTEMS B81B2201/00Specific applications of micro-electromechanical systems

Current Industry

B81B2201/031Thermal actuators

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Virtual valve in a MEMS-based cooling system
- Patent number 12,181,077
- Issue date Dec 31, 2024
- Frore Systems Inc.
- Vikram Mukundan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Integrated circuit packages having stress-relieving features
- Patent number 12,091,310
- Issue date Sep 17, 2024
- Apogee Semiconductor, Inc.
- David A. Grant
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS nanotube based thermal neutron detector
- Patent number 11,994,635
- Issue date May 28, 2024
- The Government of the United States of America, as represented by the Secreta...
- Zishan Hameed
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device manufacturing method, MEMS device, and shutter apparatu...
- Patent number 11,932,535
- Issue date Mar 19, 2024
- Sumitomo Precision Products Co., LTD
- Gen Matsuoka
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Device, system and method for thermal capnography
- Patent number 11,524,130
- Issue date Dec 13, 2022
- Oridion Medical 1987 Ltd.
- Michael Kertser
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Light responsive polymer magnetic microrobots
- Patent number 11,482,950
- Issue date Oct 25, 2022
- Purdue Research Foundation
- David J. Cappelleri
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectronic structure with viscous damping controlled by contro...
- Patent number 11,414,318
- Issue date Aug 16, 2022
- Commissariat a l'Energie Atomique et aux Energies Alternative
- Guillaume Jourdan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Systems and methods for micro-cantilever actuation by base excitation
- Patent number 11,242,241
- Issue date Feb 8, 2022
- INTREPID VISIONS INC.
- Carlo Menon
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Light responsive polymer magnetic microrobots
- Patent number 11,159,105
- Issue date Oct 26, 2021
- Purdue Research Foundation
- David J. Cappelleri
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Large motion latching microelectromechanical displacement structures
- Patent number 10,962,765
- Issue date Mar 30, 2021
- Agiltron, Inc.
- Jing Zhao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectromechanical and/or nanoelectromechanical structure with...
- Patent number 10,917,026
- Issue date Feb 9, 2021
- Commissariat a l'Energie Atomique et Aux Energies Alternatives
- Guillaume Jourdan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Actuator apparatus, electronic device, and control method
- Patent number 10,782,653
- Issue date Sep 22, 2020
- Seiko Epson Corporation
- Nozomu Hirokubo
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Integrated mechanical device with vertical movement
- Patent number 10,748,726
- Issue date Aug 18, 2020
- STMicroelectronics (Rousset) SAS
- Christian Rivero
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Actuator based on carbon nanotubes and actuating system using the same
- Patent number 10,641,252
- Issue date May 5, 2020
- Tsinghua University
- He Ma
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Local haptic actuation system
- Patent number 10,584,689
- Issue date Mar 10, 2020
- Immersion Corporation
- Vahid Khoshkava
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS isolation structures
- Patent number 10,435,291
- Issue date Oct 8, 2019
- DigitalOptics Corporation MEMS
- Ankur Jain
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for making an actuator based on carbon nanotubes
- Patent number 10,259,703
- Issue date Apr 16, 2019
- Tsinghua University
- He Ma
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Integrated mechanical device with vertical movement
- Patent number 10,157,720
- Issue date Dec 18, 2018
- STMicroelectronics (Rousset) SAS
- Christian Rivero
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectromechanical device and system with low-impedance resisti...
- Patent number 9,815,686
- Issue date Nov 14, 2017
- VMICRO
- Benjamin Walter
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS isolation structures
- Patent number 9,783,413
- Issue date Oct 10, 2017
- DigitalOptics Corporation MEMS
- Ankur Jain
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Ultra low power thermally-actuated oscillator and driving circuit t...
- Patent number 9,621,105
- Issue date Apr 11, 2017
- National Tsing Hua University
- Sheng-Shian Li
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Device and method for generating a second temperature variation fro...
- Patent number 9,612,040
- Issue date Apr 4, 2017
- Commissariat a l'Energie Atomique et Aux Energies Alternatives
- Fabrice Casset
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS rotary fuze architecture for out-of-line applications
- Patent number 9,441,931
- Issue date Sep 13, 2016
- The United States of America as represented by the Secretary of the Navy
- Troy Caruso
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Reconfigurable lithographic structures
- Patent number 9,108,314
- Issue date Aug 18, 2015
- The Johns Hopkins University
- David H. Gracias
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro rotary machine and methods for using same
- Patent number 8,933,596
- Issue date Jan 13, 2015
- MicroZeus, LLC
- Harold Stalford
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Reconfigurable lithographic structures
- Patent number 8,703,073
- Issue date Apr 22, 2014
- The Johns Hopkins University
- David Hugo Gracias
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS-based micro and nano grippers with two axis force sensors
- Patent number 8,623,222
- Issue date Jan 7, 2014
- Yu Sun
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS-based micro and nano grippers with two-axis force sensors
- Patent number 8,317,245
- Issue date Nov 27, 2012
- Yu Sun
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for producing a multilayer piezoelectric microcomponent usin...
- Patent number 8,287,943
- Issue date Oct 16, 2012
- Centre National de la Recherche Scientifique
- Claude Lucat
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectromechanical (MEM) thermal actuator
- Patent number 8,232,858
- Issue date Jul 31, 2012
- Sandia Corporation
- Ernest J. Garcia
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
LIGHT RESPONSIVE POLYMER MAGNETIC MICROROBOTS
- Publication number 20220038035
- Publication date Feb 3, 2022
- Purdue Research Foundation
- David J. Cappelleri
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Integrated circuit packages having stress-relieving features
- Publication number 20210371271
- Publication date Dec 2, 2021
- TallannQuest LLC DBA Apogee Semiconductor
- David A. Grant
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
VIRTUAL VALVE IN A MEMS-BASED COOLING SYSTEM
- Publication number 20210180723
- Publication date Jun 17, 2021
- Frore Systems Inc.
- Vikram Mukundan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE MANUFACTURING METHOD, MEMS DEVICE, AND SHUTTER APPARATU...
- Publication number 20210024352
- Publication date Jan 28, 2021
- SUMITOMO PRECISION PRODUCTS CO., LTD.
- Gen MATSUOKA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS ISOLATION STRUCTURES
- Publication number 20200055728
- Publication date Feb 20, 2020
- DIGITALOPTICS CORPORATION MEMS
- Ankur JAIN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTRONIC STRUCTURE WITH VISCOUS DAMPING CONTROLLED BY CONTRO...
- Publication number 20190330050
- Publication date Oct 31, 2019
- Commissariat A L'Energie Atomique et Aux Energies Alternatives
- Guillaume JOURDAN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
INTEGRATED MECHANICAL DEVICE WITH VERTICAL MOVEMENT
- Publication number 20190122845
- Publication date Apr 25, 2019
- STMicroelectronics (Rousset) SAS
- Christian Rivero
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
LIGHT RESPONSIVE POLYMER MAGNETIC MICROROBOTS
- Publication number 20190020291
- Publication date Jan 17, 2019
- Purdue Research Foundation
- David J. Cappelleri
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Actuator Apparatus, Electronic Device, And Control Method
- Publication number 20180321643
- Publication date Nov 8, 2018
- SEIKO EPSON CORPORATION
- Nozomu HIROKUBO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SYSTEMS AND METHODS FOR MICRO-CANTILEVER ACTUATION BY BASE EXCITATION
- Publication number 20180201497
- Publication date Jul 19, 2018
- INTREPID VISIONS INC.
- Carlo MENON
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR MAKING AN ACTUATOR BASED ON CARBON NANOTUBES
- Publication number 20180099866
- Publication date Apr 12, 2018
- TSINGHUA UNIVERSITY
- HE MA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS isolation structures
- Publication number 20180029879
- Publication date Feb 1, 2018
- DIGITALOPTICS CORPORATION MEMS
- Ankur JAIN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTROMECHANICAL AND/OR NANOELECTROMECHANICAL STRUCTURE WITH...
- Publication number 20170117825
- Publication date Apr 27, 2017
- Commissariat A L'Energie Atomique et Aux Energies Alternatives
- Guillaume JOURDAN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTROMECHANICAL DEVICE AND SYSTEM WITH LOW-IMPEDANCE RESISTI...
- Publication number 20170113918
- Publication date Apr 27, 2017
- Vmicro
- Benjamin WALTER
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS isolation structures
- Publication number 20160272485
- Publication date Sep 22, 2016
- DIGITALOPTICS CORPORATION MEMS
- Ankur JAIN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
DEVICE AND METHOD FOR GENERATING A SECOND TEMPERATURE VARIATION FRO...
- Publication number 20140295365
- Publication date Oct 2, 2014
- Commissariat à l'énerfie atomique et aux énergies alternatives
- Fabrice Casset
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
RECONFIGURABLE LITHOGRAPHIC STRUCTURES
- Publication number 20140191524
- Publication date Jul 10, 2014
- The Johns Hopkins University
- DAVID H. GRACIAS
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
MEMS-BASED MICRO AND NANO GRIPPERS WITH TWO AXIS FORCE SENSORS
- Publication number 20130037512
- Publication date Feb 14, 2013
- Yu Sun
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
Micro Rotary Machine and Methods for Using Same
- Publication number 20130005955
- Publication date Jan 3, 2013
- MicroZeus LLC
- Harold Stalford
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
THERMALLY ACTUATED RF MICROELECTROMECHANICAL SYSTEMS SWITCH
- Publication number 20110063068
- Publication date Mar 17, 2011
- THE GEORGE WASHINGTON UNIVERSITY
- Shumin Zhang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROMECHANICAL ACTUATOR
- Publication number 20110006874
- Publication date Jan 13, 2011
- NB Technologies GmbH
- Mike Becker
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
RECONFIGURABLE LITHOGRAPHIC STRUCTURES
- Publication number 20100326071
- Publication date Dec 30, 2010
- The John Hopkins University
- David Hugo Gracias
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS-BASED MICRO AND NANO GRIPPERS WITH TWO-AXIS FORCE SENSORS
- Publication number 20100207411
- Publication date Aug 19, 2010
- Yu Sun
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE WITH BI-DIRECTIONAL ELEMENT
- Publication number 20100182120
- Publication date Jul 22, 2010
- Lucent Technologies Inc.
- Arman Gasparyan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PRODUCTION OF A MATERIAL MULTILAYER MICROCOMPONENTS BY THE SACRIFIC...
- Publication number 20090197061
- Publication date Aug 6, 2009
- Claude Lucat
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS ACTUATOR
- Publication number 20090085699
- Publication date Apr 2, 2009
- Lucent Technologies, Inc.
- Vladimir Anatolyevich Aksyuk
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
THERMAL ACTUATOR FOR A MEMS-BASED RELAY SWITCH
- Publication number 20090040008
- Publication date Feb 12, 2009
- Lucent Technologies Inc.
- Vladimir Anatolyevich Aksyuk
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE WITH BI-DIRECTIONAL ELEMENT
- Publication number 20090002118
- Publication date Jan 1, 2009
- Lucent Technologies Inc.
- Arman Gasparyan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Singly attached MEMS thermal device and method of manufacture
- Publication number 20080061913
- Publication date Mar 13, 2008
- Innovative Micro Technology
- Paul J. Rubel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
NANO-GRIPPER AND METHOD OF PRODUCING SAME
- Publication number 20080061031
- Publication date Mar 13, 2008
- Techno Network Shikoku Co., Ltd.
- Gen Hashiguchi
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Thermal actuators

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Virtual valve in a MEMS-based cooling system

Integrated circuit packages having stress-relieving features

MEMS nanotube based thermal neutron detector

MEMS device manufacturing method, MEMS device, and shutter apparatu...

Device, system and method for thermal capnography

Light responsive polymer magnetic microrobots

Microelectronic structure with viscous damping controlled by contro...

Systems and methods for micro-cantilever actuation by base excitation

Light responsive polymer magnetic microrobots

Large motion latching microelectromechanical displacement structures

Microelectromechanical and/or nanoelectromechanical structure with...

Actuator apparatus, electronic device, and control method

Integrated mechanical device with vertical movement

Actuator based on carbon nanotubes and actuating system using the same

Local haptic actuation system

MEMS isolation structures

Method for making an actuator based on carbon nanotubes

Integrated mechanical device with vertical movement

Microelectromechanical device and system with low-impedance resisti...

MEMS isolation structures

Ultra low power thermally-actuated oscillator and driving circuit t...

Device and method for generating a second temperature variation fro...

MEMS rotary fuze architecture for out-of-line applications

Reconfigurable lithographic structures

Micro rotary machine and methods for using same

Reconfigurable lithographic structures

MEMS-based micro and nano grippers with two axis force sensors

MEMS-based micro and nano grippers with two-axis force sensors

Method for producing a multilayer piezoelectric microcomponent usin...

Microelectromechanical (MEM) thermal actuator

Patents Applicationslast 30 patents

LIGHT RESPONSIVE POLYMER MAGNETIC MICROROBOTS

Integrated circuit packages having stress-relieving features

VIRTUAL VALVE IN A MEMS-BASED COOLING SYSTEM

MEMS DEVICE MANUFACTURING METHOD, MEMS DEVICE, AND SHUTTER APPARATU...

MEMS ISOLATION STRUCTURES

MICROELECTRONIC STRUCTURE WITH VISCOUS DAMPING CONTROLLED BY CONTRO...

INTEGRATED MECHANICAL DEVICE WITH VERTICAL MOVEMENT

LIGHT RESPONSIVE POLYMER MAGNETIC MICROROBOTS

Actuator Apparatus, Electronic Device, And Control Method

SYSTEMS AND METHODS FOR MICRO-CANTILEVER ACTUATION BY BASE EXCITATION

METHOD FOR MAKING AN ACTUATOR BASED ON CARBON NANOTUBES

MEMS isolation structures

MICROELECTROMECHANICAL AND/OR NANOELECTROMECHANICAL STRUCTURE WITH...

MICROELECTROMECHANICAL DEVICE AND SYSTEM WITH LOW-IMPEDANCE RESISTI...

MEMS isolation structures

DEVICE AND METHOD FOR GENERATING A SECOND TEMPERATURE VARIATION FRO...

RECONFIGURABLE LITHOGRAPHIC STRUCTURES

MEMS-BASED MICRO AND NANO GRIPPERS WITH TWO AXIS FORCE SENSORS

Micro Rotary Machine and Methods for Using Same

THERMALLY ACTUATED RF MICROELECTROMECHANICAL SYSTEMS SWITCH

MICROMECHANICAL ACTUATOR

RECONFIGURABLE LITHOGRAPHIC STRUCTURES

MEMS-BASED MICRO AND NANO GRIPPERS WITH TWO-AXIS FORCE SENSORS

MEMS DEVICE WITH BI-DIRECTIONAL ELEMENT

PRODUCTION OF A MATERIAL MULTILAYER MICROCOMPONENTS BY THE SACRIFIC...

MEMS ACTUATOR

THERMAL ACTUATOR FOR A MEMS-BASED RELAY SWITCH

MEMS DEVICE WITH BI-DIRECTIONAL ELEMENT

Singly attached MEMS thermal device and method of manufacture

NANO-GRIPPER AND METHOD OF PRODUCING SAME