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Thermo-migration of impurities from a solid
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B81C2201/0173
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Micro-structural technology
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PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS
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Manufacture or treatment of micro-structural devices or systems
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B81C2201/0173
Thermo-migration of impurities from a solid
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last 30 patents
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Method of making ohmic contact on low doped bulk silicon for optica...
Patent number
11,530,130
Issue date
Dec 20, 2022
Taiwan Semiconductor Manufacturing Company, Ltd
Kuei-Sung Chang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method of making ohmic contact on low doped bulk silicon for optica...
Patent number
11,485,631
Issue date
Nov 1, 2022
Taiwan Semiconductor Manufacturing Company, Ltd
Kuei-Sung Chang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for producing a nanocrystalline, gas-sensitive layer structure
Patent number
11,414,319
Issue date
Aug 16, 2022
Robert Bosch GmbH
Andreas Krauss
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Patent Grant
Method of making ohmic contact on low doped bulk silicon for optica...
Patent number
10,850,976
Issue date
Dec 1, 2020
Taiwan Semiconductor Manufacturing Co., Ltd
Kuei-Sung Chang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Capacitive micromachined ultrasonic transducers (CMUTs) and related...
Patent number
10,850,306
Issue date
Dec 1, 2020
Butterfly Network, Inc.
Jonathan M. Rothberg
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Patent Grant
Micro-electro-mechanical device and manufacturing process thereof
Patent number
10,626,008
Issue date
Apr 21, 2020
STMicroelectronics S.r.l.
Lorenzo Baldo
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Patent Grant
Differential pressure detection element, flow rate measurement devi...
Patent number
10,175,073
Issue date
Jan 8, 2019
Fujikura Ltd.
Hayato Arai
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Patent Grant
Micro-electro-mechanical device and manufacturing process thereof
Patent number
10,150,666
Issue date
Dec 11, 2018
STMicroelectronics S.r.l.
Lorenzo Baldo
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Patent Grant
Micro-electro-mechanical device having two buried cavities and manu...
Patent number
9,688,531
Issue date
Jun 27, 2017
STMicroelectronics S.r.l.
Lorenzo Baldo
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Patent Grant
Method of manufacturing resonant transducer
Patent number
9,084,067
Issue date
Jul 14, 2015
Yokogawa Electric Corporation
Ryuichiro Noda
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for producing a MEMS device
Patent number
7,718,457
Issue date
May 18, 2010
Analog Devices, Inc.
Thomas Chen
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Patent Grant
Electrostatic drive type MEMS device and manufacturing method there...
Patent number
7,116,462
Issue date
Oct 3, 2006
Sony Corporation
Koichi Ikeda
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Process for producing spatially patterned components
Patent number
5,902,120
Issue date
May 11, 1999
Micronas Intermetall GmbH
Guenter Igel
B81 - MICRO-STRUCTURAL TECHNOLOGY
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last 30 patents
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METHOD FOR PRODUCING A NANOCRYSTALLINE, GAS-SENSITIVE LAYER STRUCTURE
Publication number
20210363004
Publication date
Nov 25, 2021
ROBERT BOSCH GmbH
Andreas Krauss
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD OF MAKING OHMIC CONTACT ON LOW DOPED BULK SILICON FOR OPTICA...
Publication number
20210070611
Publication date
Mar 11, 2021
Taiwan Semiconductor Manufacturing Co., LTD
Kuei-Sung Chang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD OF MAKING OHMIC CONTACT ON LOW DOPED BULK SILICON FOR OPTICA...
Publication number
20210070612
Publication date
Mar 11, 2021
Taiwan Semiconductor Manufacturing Co., LTD
Kuei-Sung Chang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD OF MAKING OHMIC CONTACT ON LOW DOPED BULK SILICON FOR OPTICA...
Publication number
20200095119
Publication date
Mar 26, 2020
Taiwan Semiconductor Manufacturing Co., LTD
Kuei-Sung Chang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICRO-ELECTRO-MECHANICAL DEVICE AND MANUFACTURING PROCESS THEREOF
Publication number
20200024132
Publication date
Jan 23, 2020
STMicroelectronics S.r.l.
Lorenzo Baldo
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCERS (CMUTs) AND RELATED...
Publication number
20180243792
Publication date
Aug 30, 2018
Butterfly Network, Inc.
Jonathan M. Rothberg
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
DIFFERENTIAL PRESSURE DETECTION ELEMENT, FLOW RATE MEASUREMENT DEVI...
Publication number
20180245955
Publication date
Aug 30, 2018
FUJIKURA LTD.
Hayato Arai
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICRO-ELECTRO-MECHANICAL DEVICE AND MANUFACTURING PROCESS THEREOF
Publication number
20170253477
Publication date
Sep 7, 2017
STMicroelectronics S.r.l.
Lorenzo Baldo
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICRO-ELECTRO-MECHANICAL DEVICE HAVING TWO BURIED CAVITIES AND MANU...
Publication number
20170144881
Publication date
May 25, 2017
STMicroelectronics S.r.l.
Lorenzo Baldo
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD OF MANUFACTURING RESONANT TRANSDUCER
Publication number
20130139377
Publication date
Jun 6, 2013
YOKOGAWA ELECTRIC CORPORATION
Ryuichiro NODA
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Methods for Nanostructure Doping
Publication number
20100167512
Publication date
Jul 1, 2010
Nanosys, Inc.
Yaoling Pan
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Method and apparatus for producing a MEMS device
Publication number
20060223291
Publication date
Oct 5, 2006
Analog Devices, Inc.
Thomas Chen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Electrostatic drive type mems element, manufacturing method thereof...
Publication number
20040076008
Publication date
Apr 22, 2004
Koichi Ikeda
B81 - MICRO-STRUCTURAL TECHNOLOGY