TREA

Tilting or rocking beam around an axis substantially at an angle to optical axis

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Industry

  • CPC
  • H01J2237/1506
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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J2237/00Discharge tubes exposing object to beam

Current Industry

H01J2237/1506Tilting or rocking beam around an axis substantially at an angle to optical axis
Industries