Tilting or rocking beam around an axis substantially at an angle to optical axis

Industry

CPC
H01J2237/1506

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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J2237/00Discharge tubes exposing object to beam

Current Industry

H01J2237/1506Tilting or rocking beam around an axis substantially at an angle to optical axis

Industries

Patents Grantslast 30 patents

Information Patent Grant
Grid structures of ion beam etching (IBE) systems
- Patent number 11,961,706
- Issue date Apr 16, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chansyun David Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Geometry based three dimensional reconstruction of a semiconductor...
- Patent number 11,953,316
- Issue date Apr 9, 2024
- Applied Materials Israel Ltd.
- Rafael Bistritzer
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus and method for repairing a photolithographic mask
- Patent number 11,256,168
- Issue date Feb 22, 2022
- Carl Zeiss SMT GmbH
- Michael Budach
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Tilting parameters calculating device, sample stage, charged partic...
- Patent number 10,811,218
- Issue date Oct 20, 2020
- Nippon Steel Corporation
- Takashige Mori
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Enabling high throughput electron channeling contrast imaging (ECCI...
- Patent number 10,714,303
- Issue date Jul 14, 2020
- International Business Machines Corporation
- Brent A. Wacaser
- G01 - MEASURING TESTING
Information Patent Grant
Scanning transmission electron microscope
- Patent number 10,636,622
- Issue date Apr 28, 2020
- Tescan Orsay Holding, A.S.
- Petras Stanislav
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Beam alignment method and electron microscope
- Patent number 10,020,162
- Issue date Jul 10, 2018
- Jeol Ltd.
- Yuko Shimizu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Automatic alignment for high throughput electron channeling contras...
- Patent number 9,859,091
- Issue date Jan 2, 2018
- International Business Machines Corporation
- Stephen W. Bedell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam apparatus and trajectory correction method in...
- Patent number 9,484,181
- Issue date Nov 1, 2016
- Hitachi High-Technologies Corporation
- Hideto Dohi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Angular scanning using angular energy filter
- Patent number 9,455,116
- Issue date Sep 27, 2016
- Axcells Technologies, Inc.
- Causon Ko-Chuan Jen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for improving characteristic peak signals in anal...
- Patent number 9,406,496
- Issue date Aug 2, 2016
- Universitat de Barcelona
- Sonia Estrade Albiol
- G01 - MEASURING TESTING
Information Patent Grant
Charged particle beam apparatus
- Patent number 9,384,940
- Issue date Jul 5, 2016
- Hitachi High-Technologies Corporation
- Muneyuki Fukuda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
SACP method and particle optical system for performing the method
- Patent number 9,093,246
- Issue date Jul 28, 2015
- Carl Zeiss Microscopy GmbH
- Dirk Preikszas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scanning electron microscope
- Patent number 8,704,175
- Issue date Apr 22, 2014
- Hitachi High-Technologies Corporation
- Yasunari Sohda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and device for measuring electron diffraction of a sample
- Patent number 8,076,640
- Issue date Dec 13, 2011
- Max-Planck Gesellschaft zur Foerderung der Wissenschaften e.V.
- Christoph T Koch
- G01 - MEASURING TESTING
Information Patent Grant
Charged particle beam device and method for inspecting specimen
- Patent number 8,008,629
- Issue date Aug 30, 2011
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Pavel Adamec
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam apparatus and method for operating a charged...
- Patent number 7,838,830
- Issue date Nov 23, 2010
- ICT, Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
- Juergen Frosien
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Particle-beam exposure apparatus with overall-modulation of a patte...
- Patent number 7,781,748
- Issue date Aug 24, 2010
- IMS Nanofabrication AG
- Elmar Platzgummer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam apparatus and charged particle beam irradiati...
- Patent number 7,408,172
- Issue date Aug 5, 2008
- Hitachi High-Technologies Corporation
- Mitsugu Sato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam apparatus and charged particle beam irradiati...
- Patent number 7,282,722
- Issue date Oct 16, 2007
- Hitachi High-Technologies Corporation
- Mitsugu Sato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam apparatus and charged particle beam irradiati...
- Patent number 6,956,211
- Issue date Oct 18, 2005
- Hitachi High-Technologies Corporation
- Mitsugu Sato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Particle beam apparatus for tilted observation of a specimen
- Patent number 6,627,890
- Issue date Sep 30, 2003
- Advantest Corp.
- Stefan Lanio
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam column
- Patent number 6,614,026
- Issue date Sep 2, 2003
- Applied Materials, Inc.
- Pavel Adamec
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transmission electron microscope apparatus with equipment for inspe...
- Patent number 6,548,811
- Issue date Apr 15, 2003
- Hitachi, Ltd.
- Kuniyasu Nakamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam system and pattern slant observing method
- Patent number 6,534,766
- Issue date Mar 18, 2003
- Kabushiki Kaisha Toshiba
- Hideaki Abe
- G01 - MEASURING TESTING
Information Patent Grant
Column for charged particle beam device
- Patent number 6,452,175
- Issue date Sep 17, 2002
- Applied Materials, Inc.
- Pavel Adamec
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inspection method and apparatus using electron beam
- Patent number 6,265,719
- Issue date Jul 24, 2001
- Kabushiki Kaisha Toshiba
- Yuichiro Yamazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam scanning apparatus
- Patent number 4,943,722
- Issue date Jul 24, 1990
- Trialsite Limited
- Bernard C. Breton
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHOD OF DETERMINING AN ENERGY SPECTRUM OR ENERGY WIDTH OF A CHARG...
- Publication number 20240371600
- Publication date Nov 7, 2024
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
- John Breuer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TEM Orientation Mapping via Dark-Field Vector Images
- Publication number 20240272097
- Publication date Aug 15, 2024
- Virginia Commonwealth University
- Carl R. Mayer
- G01 - MEASURING TESTING
Information Patent Application
Grid Structures Of Ion Beam Etching (IBE) Systems
- Publication number 20240222071
- Publication date Jul 4, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chansyun David YANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESSING APPARATUS AND METHOD OF MANUFACTURE
- Publication number 20230326705
- Publication date Oct 12, 2023
- Taiwan Semiconductor Manufacturing Company Limited
- Chansyun David YANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TECHNIQUES AND APPARATUS FOR UNIDIRECTIONAL HOLE ELONGATION USING A...
- Publication number 20230223269
- Publication date Jul 13, 2023
- Applied Materials, Inc.
- Kevin Anglin
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
Method Of Imaging And Milling A Sample
- Publication number 20230162945
- Publication date May 25, 2023
- FEI Company
- Jaroslav Velcovský
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
GRID STRUCTURES OF ION BEAM ETCHING (IBE) SYSTEMS
- Publication number 20220351939
- Publication date Nov 3, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chansyun David YANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
THREE-DIMENSIONAL RECONSTRUCTION OF A SEMICONDUCTOR SPECIMEN
- Publication number 20220082376
- Publication date Mar 17, 2022
- APPLIED MATERIALS ISRAEL LTD.
- Rafael BISTRITZER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TILTING PARAMETERS CALCULATING DEVICE, SAMPLE STAGE, CHARGED PARTIC...
- Publication number 20200066481
- Publication date Feb 27, 2020
- NIPPON STEEL CORPORATION
- Takashige MORI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Enabling High Throughput Electron Channeling Contrast Imaging (ECCI...
- Publication number 20200027690
- Publication date Jan 23, 2020
- International Business Machines Corporation
- Brent A. Wacaser
- G01 - MEASURING TESTING
Information Patent Application
AUTOMATIC ALIGNMENT FOR HIGH THROUGHPUT ELECTRON CHANNELING CONTRAS...
- Publication number 20170365441
- Publication date Dec 21, 2017
- International Business Machines Corporation
- Stephen W. Bedell
- G01 - MEASURING TESTING
Information Patent Application
Beam Alignment Method and Electron Microscope
- Publication number 20170301507
- Publication date Oct 19, 2017
- JEOL Ltd.
- Yuko Shimizu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged Particle Beam Apparatus and Trajectory Correction Method in...
- Publication number 20150357155
- Publication date Dec 10, 2015
- Hitachi High-Technologies Corporation
- Hideto DOHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM APPARATUS
- Publication number 20150294833
- Publication date Oct 15, 2015
- Hitachi High-Technologies Corporation
- Muneyuki Fukuda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND SYSTEM FOR IMPROVING CHARACTERISTIC PEAK SIGNALS IN ANAL...
- Publication number 20130240728
- Publication date Sep 19, 2013
- Universitat De Barcelona
- Sonia Estrade Albiol
- G01 - MEASURING TESTING
Information Patent Application
Scanning Electron Microscope
- Publication number 20130175447
- Publication date Jul 11, 2013
- Hitachi High-Technologies Corporation
- Yasunari Sohda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SCANNING ELECTRON MICROSCOPE AND INSPECTION METHOD USING SAME
- Publication number 20120286158
- Publication date Nov 15, 2012
- Yasunari Sohda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SACP Method and Particle Optical System for Performing the Method
- Publication number 20110108736
- Publication date May 12, 2011
- CARL ZEISS NTS GMBH
- Dirk Preikszas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND DEVICE FOR MEASURING ELECTRON DIFFRACTION OF A SAMPLE
- Publication number 20110049363
- Publication date Mar 3, 2011
- Max-Planck-Gesellschaft zur Foerderung der Wissenschaften e.v
- Christoph T. KOCH
- G01 - MEASURING TESTING
Information Patent Application
PARTICLE-BEAM EXPOSURE APPARATUS WITH OVERALL-MODULATION OF A PATTE...
- Publication number 20090200495
- Publication date Aug 13, 2009
- IMS Nanofabrication AG
- Elmar Platzgummer
- B82 - NANO-TECHNOLOGY
Information Patent Application
CHARGED PARTICLE BEAM APPARATUS AND METHOD FOR OPERATING A CHARGED...
- Publication number 20080258060
- Publication date Oct 23, 2008
- JUERGEN FROSIEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM DEVICE AND METHOD FOR INSPECTING SPECIMEN
- Publication number 20080048116
- Publication date Feb 28, 2008
- PAVEL ADAMEC
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM APPARATUS AND CHARGED PARTICLE BEAM IRRADIATI...
- Publication number 20080042074
- Publication date Feb 21, 2008
- Mitsugu Sato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged particle beam apparatus and charged particle beam irradiati...
- Publication number 20050253083
- Publication date Nov 17, 2005
- Mitsugu Sato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged particle beam apparatus and charged particle beam irradiati...
- Publication number 20040119022
- Publication date Jun 24, 2004
- Mitsugu Sato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Particle beam apparatus for tilted observation of a specimen
- Publication number 20030010926
- Publication date Jan 16, 2003
- Stefan Lanio
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged particle beam system and pattern slant observing method
- Publication number 20010025925
- Publication date Oct 4, 2001
- Kabushiki Kaisha Toshiba
- Hideaki Abe
- G01 - MEASURING TESTING

Tilting or rocking beam around an axis substantially at an angle to optical axis

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Grid structures of ion beam etching (IBE) systems

Geometry based three dimensional reconstruction of a semiconductor...

Apparatus and method for repairing a photolithographic mask

Tilting parameters calculating device, sample stage, charged partic...

Enabling high throughput electron channeling contrast imaging (ECCI...

Scanning transmission electron microscope

Beam alignment method and electron microscope

Automatic alignment for high throughput electron channeling contras...

Charged particle beam apparatus and trajectory correction method in...

Angular scanning using angular energy filter

Method and system for improving characteristic peak signals in anal...

Charged particle beam apparatus

SACP method and particle optical system for performing the method

Scanning electron microscope

Method and device for measuring electron diffraction of a sample

Charged particle beam device and method for inspecting specimen

Charged particle beam apparatus and method for operating a charged...

Particle-beam exposure apparatus with overall-modulation of a patte...

Charged particle beam apparatus and charged particle beam irradiati...

Charged particle beam apparatus and charged particle beam irradiati...

Charged particle beam apparatus and charged particle beam irradiati...

Particle beam apparatus for tilted observation of a specimen

Charged particle beam column

Transmission electron microscope apparatus with equipment for inspe...

Charged particle beam system and pattern slant observing method

Column for charged particle beam device

Inspection method and apparatus using electron beam

Charged particle beam scanning apparatus

Patents Applicationslast 30 patents

METHOD OF DETERMINING AN ENERGY SPECTRUM OR ENERGY WIDTH OF A CHARG...

TEM Orientation Mapping via Dark-Field Vector Images

Grid Structures Of Ion Beam Etching (IBE) Systems

PROCESSING APPARATUS AND METHOD OF MANUFACTURE

TECHNIQUES AND APPARATUS FOR UNIDIRECTIONAL HOLE ELONGATION USING A...

Method Of Imaging And Milling A Sample

GRID STRUCTURES OF ION BEAM ETCHING (IBE) SYSTEMS

THREE-DIMENSIONAL RECONSTRUCTION OF A SEMICONDUCTOR SPECIMEN

TILTING PARAMETERS CALCULATING DEVICE, SAMPLE STAGE, CHARGED PARTIC...

Enabling High Throughput Electron Channeling Contrast Imaging (ECCI...

AUTOMATIC ALIGNMENT FOR HIGH THROUGHPUT ELECTRON CHANNELING CONTRAS...

Beam Alignment Method and Electron Microscope

Charged Particle Beam Apparatus and Trajectory Correction Method in...

CHARGED PARTICLE BEAM APPARATUS

METHOD AND SYSTEM FOR IMPROVING CHARACTERISTIC PEAK SIGNALS IN ANAL...

Scanning Electron Microscope

SCANNING ELECTRON MICROSCOPE AND INSPECTION METHOD USING SAME

SACP Method and Particle Optical System for Performing the Method

METHOD AND DEVICE FOR MEASURING ELECTRON DIFFRACTION OF A SAMPLE

PARTICLE-BEAM EXPOSURE APPARATUS WITH OVERALL-MODULATION OF A PATTE...

CHARGED PARTICLE BEAM APPARATUS AND METHOD FOR OPERATING A CHARGED...

CHARGED PARTICLE BEAM DEVICE AND METHOD FOR INSPECTING SPECIMEN

CHARGED PARTICLE BEAM APPARATUS AND CHARGED PARTICLE BEAM IRRADIATI...

Charged particle beam apparatus and charged particle beam irradiati...

Charged particle beam apparatus and charged particle beam irradiati...

Particle beam apparatus for tilted observation of a specimen

Charged particle beam system and pattern slant observing method