Topology for facilitating the monolithic integration not provided for in B81C2203/0764 - B81C2203/0771

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B81C2203/0778

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BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS B81C2203/00Forming micro-structural systems

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B81C2203/0778Topology for facilitating the monolithic integration not provided for in B81C2203/0764 - B81C2203/0771

Industries

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Patents Grantslast 30 patents

Information Patent Grant
MEMS device package and method for manufacturing the same
- Patent number 10,472,228
- Issue date Nov 12, 2019
- Advanced Semiconductor Engineering, Inc.
- Chien-Hua Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Two-port SRAM connection structure
- Patent number 10,163,495
- Issue date Dec 25, 2018
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Jhon Jhy Liaw
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Manufacturing method for a micromechanical pressure sensor device a...
- Patent number 9,878,900
- Issue date Jan 30, 2018
- Robert Bosch GmbH
- Zhenyu Wu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor structure and fabrication method thereof
- Patent number 9,718,682
- Issue date Aug 1, 2017
- Semiconductor Manufacturing International (Shanghai) Corporation
- Peng Ren
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Two-port SRAM connection structure
- Patent number 9,672,903
- Issue date Jun 6, 2017
- Taiwan Semicondutor Manufacturing Co., Ltd.
- Jhon Jhy Liaw
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device with a capping substrate
- Patent number 9,511,997
- Issue date Dec 6, 2016
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chun-Wen Cheng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device and method for manufacturing the same
- Patent number 9,365,411
- Issue date Jun 14, 2016
- Seiko Epson Corporation
- Akihiko Ebina
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of fabricating integrated semiconductor device and structure...
- Patent number 9,302,904
- Issue date Apr 5, 2016
- Macronix International Co., Ltd.
- Hsueh-I Huang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device with a capping substrate
- Patent number 9,254,998
- Issue date Feb 9, 2016
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chun-Wen Cheng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Stress-controlled formation of TiN hard mask
- Patent number 9,218,970
- Issue date Dec 22, 2015
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Rueijer Lin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Thin-film transistors incorporated into three dimensional MEMS stru...
- Patent number 9,202,821
- Issue date Dec 1, 2015
- Pixtronix, Inc.
- Patrick F. Brinkley
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of fabricating integrated semiconductor device with MOS, NPN...
- Patent number 8,897,470
- Issue date Nov 25, 2014
- Macronix International Co., Ltd.
- Hsueh-I Huang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Epitaxial silicon CMOS-MEMS microphones and method for manufacturing
- Patent number 8,629,011
- Issue date Jan 14, 2014
- Robert Bosch GmbH
- Brett M. Diamond
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor device with integrated circuit electrically connected...
- Patent number 7,919,814
- Issue date Apr 5, 2011
- Hitachi, Ltd.
- Yasushi Goto
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Monolithic MEMS and integrated circuit device having a barrier and...
- Patent number 7,863,714
- Issue date Jan 4, 2011
- Akustica, Inc.
- Brett M. Diamond
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Integrated driver process flow
- Patent number 7,288,424
- Issue date Oct 30, 2007
- Silicon Light Machines Corporation
- James A. Hunter
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical sensor
- Patent number 7,213,465
- Issue date May 8, 2007
- Robert Bosch GmbH
- Hubert Benzel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Integrated driver process flow
- Patent number 6,967,760
- Issue date Nov 22, 2005
- Silicon Light Machines Corporation
- James A. Hunter
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of fabricating a microfabricated high aspect ratio device wi...
- Patent number 6,960,488
- Issue date Nov 1, 2005
- The Regents of the University of California
- Timothy J. Brosnihan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Integrated driver process flow
- Patent number 6,767,751
- Issue date Jul 27, 2004
- Silicon Light Machines, Inc.
- James A. Hunter
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Electronic component
- Patent number 6,720,635
- Issue date Apr 13, 2004
- Motorola, Inc.
- Daniel J. Koch
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Monolithic fully-integrated vacuum sealed BiCMOS pressure sensor
- Patent number 6,713,828
- Issue date Mar 30, 2004
- Delphi Technologies, Inc.
- Abhijeet V. Chavan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor pressure sensor having strain gauge and circuit porti...
- Patent number 6,653,702
- Issue date Nov 25, 2003
- Denso Corporation
- Seiichiro Ishio
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Plasma etch techniques for fabricating silicon structures from a su...
- Patent number 6,399,516
- Issue date Jun 4, 2002
- Massachusetts Institute of Technology
- Arturo A. Ayon
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microfabricated structures with electrical isolation and interconne...
- Patent number 6,291,875
- Issue date Sep 18, 2001
- Analog Devices IMI, Inc.
- William A. Clark
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Process for manufacturing high-sensitivity accelerometric and gyros...
- Patent number 6,184,051
- Issue date Feb 6, 2001
- STMicroelectronics S.r.l.
- Paolo Ferrari
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microfabricated high aspect ratio device with an electrical isolati...
- Patent number 6,121,552
- Issue date Sep 19, 2000
- The Regents of the University of Caliofornia
- Timothy J. Brosnihan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Process for manufacturing high-sensitivity accelerometric and gyros...
- Patent number 6,109,106
- Issue date Aug 29, 2000
- STMicroelectronics S.r.l.
- Paolo Ferrari
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
MEMS DEVICE PACKAGE AND METHOD FOR MANUFACTURING THE SAME
- Publication number 20190055118
- Publication date Feb 21, 2019
- Advanced Semiconductor Engineering, Inc.
- Chien-Hua CHEN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Two-Port SRAM Connection Structure
- Publication number 20180061487
- Publication date Mar 1, 2018
- Taiwan Semiconductor Manufacturing Co., LTD
- Jhon Jhy Liaw
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Vertical system integration
- Publication number 20170330876
- Publication date Nov 16, 2017
- Glenn J. Leedy
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MANUFACTURING METHOD FOR A MICROMECHANICAL PRESSURE SENSOR DEVICE A...
- Publication number 20170166436
- Publication date Jun 15, 2017
- ROBERT BOSCH GmbH
- Zhenyu Wu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEMICONDUCTOR STRUCTURE AND FABRICATION METHOD THEREOF
- Publication number 20170029272
- Publication date Feb 2, 2017
- Semiconductor Manufacturing International (Shanghai) Corporation
- PENG REN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Stress-Controlled Formation of Tin Hard Mask
- Publication number 20140273470
- Publication date Sep 18, 2014
- Rueijer Lin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD OF FORMING MONOLITHIC CMOS-MEMS HYBRID INTEGRATED, PACKAGED...
- Publication number 20140264647
- Publication date Sep 18, 2014
- Rakesh Katragadda
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE STRUCTURE WITH A CAPPING STRUCTURE
- Publication number 20140264475
- Publication date Sep 18, 2014
- Rueijer Lin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS Device with a Capping Substrate
- Publication number 20140252508
- Publication date Sep 11, 2014
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chun-Wen Cheng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEMICONDUCTOR PRESSURE SENSOR AND FABRICATION METHOD THEREOF
- Publication number 20140159122
- Publication date Jun 12, 2014
- Mitsubishi Electric Corporation
- Kimitoshi SATO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
EPITAXIAL SILICON CMOS-MEMS MICROPHONES AND METHOD FOR MANUFACTURING
- Publication number 20120319219
- Publication date Dec 20, 2012
- ROBERT BOSCH GmbH
- Brett M. Diamond
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD OF FABRICATING INTEGRATED SEMICONDUCTOR DEVICE AND STRUCTURE...
- Publication number 20110026742
- Publication date Feb 3, 2011
- Macronix International Co., Ltd.
- Hsueh-I Huang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Semiconductor device and method of manufacturing the same
- Publication number 20090134459
- Publication date May 28, 2009
- Yasushi GOTO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Micromechanical component having a monolithically integrated circui...
- Publication number 20080093690
- Publication date Apr 24, 2008
- Frank Reichenbach
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Monolithic MEMS and integrated circuit device having a barrier and...
- Publication number 20080006889
- Publication date Jan 10, 2008
- Akustica, Inc.
- Brett M. Diamond
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Hybrid type semiconductor integrated circuit and method of manufact...
- Publication number 20060180898
- Publication date Aug 17, 2006
- KABUSHIKI KAISHA TOSHIBA
- Hideyuki Funaki
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Micromechanical sensor
- Publication number 20050115321
- Publication date Jun 2, 2005
- Hubert Benzel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PHOTOELECTRIC CONVERSION DEVICE AND MANUFACTURING MEHTOD THEREFOR
- Publication number 20040147055
- Publication date Jul 29, 2004
- TIMOTHY J. BROSNIHAN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Integrated driver process flow
- Publication number 20040109215
- Publication date Jun 10, 2004
- James A. Hunter
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Integrated driver process flow
- Publication number 20040106221
- Publication date Jun 3, 2004
- James A. Hunter
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
INTEGRATED DRIVER PROCESS FLOW
- Publication number 20030235932
- Publication date Dec 25, 2003
- Silicon Light Machines
- James A. Hunter
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Semiconductor pressure sensor having strain gauge and circuit porti...
- Publication number 20010052628
- Publication date Dec 20, 2001
- Seiichiro Ishio
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Topology for facilitating the monolithic integration not provided for in B81C2203/0764 - B81C2203/0771

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

MEMS device package and method for manufacturing the same

Two-port SRAM connection structure

Manufacturing method for a micromechanical pressure sensor device a...

Semiconductor structure and fabrication method thereof

Two-port SRAM connection structure

MEMS device with a capping substrate

MEMS device and method for manufacturing the same

Method of fabricating integrated semiconductor device and structure...

MEMS device with a capping substrate

Stress-controlled formation of TiN hard mask

Thin-film transistors incorporated into three dimensional MEMS stru...

Method of fabricating integrated semiconductor device with MOS, NPN...

Epitaxial silicon CMOS-MEMS microphones and method for manufacturing

Semiconductor device with integrated circuit electrically connected...

Monolithic MEMS and integrated circuit device having a barrier and...

Integrated driver process flow

Micromechanical sensor

Integrated driver process flow

Method of fabricating a microfabricated high aspect ratio device wi...

Integrated driver process flow

Electronic component

Monolithic fully-integrated vacuum sealed BiCMOS pressure sensor

Semiconductor pressure sensor having strain gauge and circuit porti...

Plasma etch techniques for fabricating silicon structures from a su...

Microfabricated structures with electrical isolation and interconne...

Process for manufacturing high-sensitivity accelerometric and gyros...

Microfabricated high aspect ratio device with an electrical isolati...

Process for manufacturing high-sensitivity accelerometric and gyros...

Patents Applicationslast 30 patents

MEMS DEVICE PACKAGE AND METHOD FOR MANUFACTURING THE SAME

Two-Port SRAM Connection Structure

Vertical system integration

MANUFACTURING METHOD FOR A MICROMECHANICAL PRESSURE SENSOR DEVICE A...

SEMICONDUCTOR STRUCTURE AND FABRICATION METHOD THEREOF

Stress-Controlled Formation of Tin Hard Mask

METHOD OF FORMING MONOLITHIC CMOS-MEMS HYBRID INTEGRATED, PACKAGED...

MEMS DEVICE STRUCTURE WITH A CAPPING STRUCTURE

MEMS Device with a Capping Substrate

SEMICONDUCTOR PRESSURE SENSOR AND FABRICATION METHOD THEREOF

EPITAXIAL SILICON CMOS-MEMS MICROPHONES AND METHOD FOR MANUFACTURING

METHOD OF FABRICATING INTEGRATED SEMICONDUCTOR DEVICE AND STRUCTURE...

Semiconductor device and method of manufacturing the same

Micromechanical component having a monolithically integrated circui...

Monolithic MEMS and integrated circuit device having a barrier and...

Hybrid type semiconductor integrated circuit and method of manufact...

Micromechanical sensor

PHOTOELECTRIC CONVERSION DEVICE AND MANUFACTURING MEHTOD THEREFOR

Integrated driver process flow

Integrated driver process flow

INTEGRATED DRIVER PROCESS FLOW

Semiconductor pressure sensor having strain gauge and circuit porti...