Translation according to an axis perpendicular to the substrate

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B81B2203/053

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Parent Industries

BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81BMICRO-STRUCTURAL DEVICES OR SYSTEMS B81B2203/00Basic micro-electromechanical structures

Current Industry

B81B2203/053Translation according to an axis perpendicular to the substrate

Industries

Patents Grantslast 30 patents

Information Patent Grant
Actuator systems and methods
- Patent number 11,879,524
- Issue date Jan 23, 2024
- C. Anthony Hester
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device comprising a membrane and an actuator
- Patent number 11,807,517
- Issue date Nov 7, 2023
- STMicroelectronics S.r.l.
- Dario Paci
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Cellular array electrostatic actuator
- Patent number 11,713,240
- Issue date Aug 1, 2023
- Board of Regents, The University of Texas System
- Siavash Pourkamali
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Deployable KiriForm flexures
- Patent number 11,697,585
- Issue date Jul 11, 2023
- President and Fellows of Harvard College
- Saurabh Avinash Mhatre
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Out-of-plane hinge for micro and nanoelectromechanical systems with...
- Patent number 11,674,344
- Issue date Jun 13, 2023
- Commissariat a l'Energie Atomique et Aux Energies Alternatives
- Samer Dagher
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Sensor
- Patent number 11,656,110
- Issue date May 23, 2023
- Kabushiki Kaisha Toshiba
- Hiroaki Yamazaki
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Optical non-uniformity correction (NUC) for active mode imaging sen...
- Patent number 11,650,412
- Issue date May 16, 2023
- Raytheon Company
- Gerald P. Uyeno
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Piezoelectric MEMS actuator for compensating unwanted movements and...
- Patent number 11,614,634
- Issue date Mar 28, 2023
- STMicroelectronics S.r.l.
- Domenico Giusti
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Manufacturing method of micro fluid actuator
- Patent number 11,581,483
- Issue date Feb 14, 2023
- Microjet Technology Co., Ltd.
- Hao-Jan Mou
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Post-processing techniques on mems foundry fabricated devices for l...
- Patent number 11,535,511
- Issue date Dec 27, 2022
- United States of America as represented by the Secretary of the Air Force
- LaVern A Starman
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Sensor device and method of fabrication
- Patent number 11,383,973
- Issue date Jul 12, 2022
- NXP USA, INC.
- Peng Shao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Electronically steered inter-satellite optical communication system...
- Patent number 11,333,879
- Issue date May 17, 2022
- Raytheon Company
- Gerald P. Uyeno
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device for large angle beamsteering
- Patent number 11,279,613
- Issue date Mar 22, 2022
- LaVern A. Starman
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Fence structure to prevent stiction in a MEMS motion sensor
- Patent number 11,261,083
- Issue date Mar 1, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd
- Lee-Chuan Tseng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Systems and methods for micro-cantilever actuation by base excitation
- Patent number 11,242,241
- Issue date Feb 8, 2022
- INTREPID VISIONS INC.
- Carlo Menon
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Sidewall stopper for MEMS device
- Patent number 11,203,522
- Issue date Dec 21, 2021
- Taiwan Semiconductor Manufacturing Company, Ltd
- Shih-Wei Lin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectromechanical or/and nanoelectromechanical device with out...
- Patent number 11,156,459
- Issue date Oct 26, 2021
- Commissariat a l'Energie Atomique et Aux Energies Alternatives
- Federico Maspero
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Actuator plate partitioning and control devices and methods
- Patent number 11,124,410
- Issue date Sep 21, 2021
- Wispry, Inc.
- Dana DeReus
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Actuating and sensing module
- Patent number 11,125,224
- Issue date Sep 21, 2021
- Microjet Technology Co., Ltd.
- Hao-Jan Mou
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device comprising a membrane and an actuator
- Patent number 10,981,778
- Issue date Apr 20, 2021
- STMicroelectronics S.r.l.
- Dario Paci
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Devices for deflecting a laser beam in a two-dimensional manner
- Patent number 10,901,203
- Issue date Jan 26, 2021
- TRUMPF Schweiz AG
- Fabio Jutzi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectronic devices for isolating drive and sense signals of se...
- Patent number 10,845,380
- Issue date Nov 24, 2020
- Intel Corporation
- Feras Eid
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical spring structure
- Patent number 10,836,629
- Issue date Nov 17, 2020
- Robert Bosch GmbH
- Martin Putnik
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS actuator, system having a plurality of MEMS actuators, and met...
- Patent number 10,807,859
- Issue date Oct 20, 2020
- Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.
- Peter Duerr
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectromechanical component
- Patent number 10,794,928
- Issue date Oct 6, 2020
- Robert Bosch GmbH
- Benny Pekka Herzogenrath
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Sidewall stopper for MEMS device
- Patent number 10,766,763
- Issue date Sep 8, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Shih-Wei Lin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Integrated mechanical device with vertical movement
- Patent number 10,748,726
- Issue date Aug 18, 2020
- STMicroelectronics (Rousset) SAS
- Christian Rivero
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS microphone
- Patent number 10,715,925
- Issue date Jul 14, 2020
- AAC Acoustic Technologies (Shenzhen) Co., Ltd.
- Jinyu Zhang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Electrostatic actuator with tri-electrode topology
- Patent number 10,693,393
- Issue date Jun 23, 2020
- University of Manitoba
- Cyrus Shafai
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device comprising a membrane and an actuator
- Patent number 10,683,200
- Issue date Jun 16, 2020
- STMICTOELECTRONICS S.r.l.
- Dario Paci
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
MEMS OPTICAL MICROPHONE
- Publication number 20240101410
- Publication date Mar 28, 2024
- AAC ACOUSTIC TECHNOLOGIES (SHENZHEN) CO., LTD
- Taimoor Ali
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS OPTICAL MICROPHONE
- Publication number 20240101411
- Publication date Mar 28, 2024
- AAC ACOUSTIC TECHNOLOGIES (SHENZHEN) CO., LTD
- Taimoor Ali
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Compliant Structure
- Publication number 20240044388
- Publication date Feb 8, 2024
- Technische Universiteit Delft
- Thijs Willem Albert Blad
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS with cover drive and method of operating the same
- Publication number 20230322546
- Publication date Oct 12, 2023
- Fraunhofer-Gesellschaft zur Forderung der angewandten Forschung e.V.
- Sergiu LANGA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
GRATING REFLECTOR
- Publication number 20230271824
- Publication date Aug 31, 2023
- DANMARKS TEKNISKE UNIVERSITET
- Kresten Yvind
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
LONG STROKE MEMS ACTUATOR RESILIENT TO THE PULL-IN AND ELECTRONIC S...
- Publication number 20230253895
- Publication date Aug 10, 2023
- STMicroelectronics S.r.l.
- Andrea OPRENI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PIEZOELECTRIC MEMS ACTUATOR FOR COMPENSATING UNWANTED MOVEMENTS AND...
- Publication number 20230204974
- Publication date Jun 29, 2023
- STMicroelectronics S.r.l
- Domenico GIUSTI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
COMB-DRIVEN MEMS RESONANT SCANNER WITH FULL-CIRCUMFERENTIAL RANGE A...
- Publication number 20220155584
- Publication date May 19, 2022
- The Regents of the University of Michigan
- Haijun Li
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS Device for Large Angle Beamsteering
- Publication number 20220119244
- Publication date Apr 21, 2022
- Government of the United States, as represented by the Secretary of the Air F...
- LaVern A. Starman
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MULTIAXIAL STRAIN ENGINEERING OF DEFECT DOPED MATERIALS
- Publication number 20220063986
- Publication date Mar 3, 2022
- Massachusetts Institute of Technology
- Subra Suresh
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROMECHANICAL STRUCTURE AND METHOD OF PROVIDING THE SAME
- Publication number 20210387851
- Publication date Dec 16, 2021
- FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG e.V.
- Christian DRABE
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEMICONDUCTOR DEVICE, DISPLAY UNIT, AND ELECTRONIC APPARATUS
- Publication number 20210286170
- Publication date Sep 16, 2021
- Sony Semiconductor Solutions Corporation
- KUNIHIKO MORI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SENSOR DEVICE AND METHOD OF FABRICATION
- Publication number 20210221677
- Publication date Jul 22, 2021
- NXP USA, Inc.
- Peng Shao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE COMPRISING A MEMBRANE AND AN ACTUATOR
- Publication number 20210206625
- Publication date Jul 8, 2021
- STMicroelectronics S.r.l.
- Dario PACI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Cellular Array Electrostatic Actuator
- Publication number 20210171339
- Publication date Jun 10, 2021
- Board of Regents, The University of Texas System
- Siavash Pourkamali
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Vehicle Operator Awareness System
- Publication number 20210094820
- Publication date Apr 1, 2021
- UATC, LLC
- Richard Brian Donnelly
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
OPTICAL NON-UNIFORMITY CORRECTION (NUC) FOR ACTIVE MODE IMAGING SEN...
- Publication number 20210092260
- Publication date Mar 25, 2021
- Raytheon Company
- Gerald P. Uyeno
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SIDEWALL STOPPER FOR MEMS DEVICE
- Publication number 20200369512
- Publication date Nov 26, 2020
- Taiwan Semiconductor Manufacturing Co., LTD
- Shih-Wei Lin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SIDEWALL STOPPER FOR MEMS DEVICE
- Publication number 20200369511
- Publication date Nov 26, 2020
- Taiwan Semiconductor Manufacturing Co., LTD
- Shih-Wei Lin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Post-Processing Techniques on MEMS Foundry Fabricated Devices for L...
- Publication number 20200283289
- Publication date Sep 10, 2020
- Government of the United States, as represented by the Secretary of the Air F...
- LaVern A Starman
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE COMPRISING A MEMBRANE AND AN ACTUATOR
- Publication number 20200156929
- Publication date May 21, 2020
- STMicroelectronics S.r.l.
- Dario Paci
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS ACTUATOR PACKAGE ARCHITECTURE
- Publication number 20200144936
- Publication date May 7, 2020
- MEMS DRIVE, INC.
- Xiaolei Liu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS Actuation Systems and Methods
- Publication number 20200136527
- Publication date Apr 30, 2020
- MEMS Drive, Inc.
- Matthew Ng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ACTUATOR PLATE PARTITIONING AND CONTROL DEVICES AND METHODS
- Publication number 20190144263
- Publication date May 16, 2019
- wiSpry, Inc.
- Dana DeReus
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
INTEGRATED MECHANICAL DEVICE WITH VERTICAL MOVEMENT
- Publication number 20190122845
- Publication date Apr 25, 2019
- STMicroelectronics (Rousset) SAS
- Christian Rivero
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Electrostatic Actuator with Tri-Electrode Topology
- Publication number 20190036463
- Publication date Jan 31, 2019
- University of Manitoba
- Cyrus Shafai
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS PRESSURE SENSING ELEMENT
- Publication number 20180335358
- Publication date Nov 22, 2018
- GOERTEK INC
- Guoguang ZHENG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTRONIC DEVICES FOR ISOLATING DRIVE AND SENSE SIGNALS OF SE...
- Publication number 20180328957
- Publication date Nov 15, 2018
- Intel Corporation
- Feras EID
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
DEVICES FOR DEFLECTING A LASER BEAM IN A TWO-DIMENSIONAL MANNER
- Publication number 20180329202
- Publication date Nov 15, 2018
- TRUMPF Schweiz AG
- Fabio Jutzi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SYSTEMS AND METHODS FOR MICRO-CANTILEVER ACTUATION BY BASE EXCITATION
- Publication number 20180201497
- Publication date Jul 19, 2018
- INTREPID VISIONS INC.
- Carlo MENON
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Translation according to an axis perpendicular to the substrate

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Actuator systems and methods

MEMS device comprising a membrane and an actuator

Cellular array electrostatic actuator

Deployable KiriForm flexures

Out-of-plane hinge for micro and nanoelectromechanical systems with...

Sensor

Optical non-uniformity correction (NUC) for active mode imaging sen...

Piezoelectric MEMS actuator for compensating unwanted movements and...

Manufacturing method of micro fluid actuator

Post-processing techniques on mems foundry fabricated devices for l...

Sensor device and method of fabrication

Electronically steered inter-satellite optical communication system...

MEMS device for large angle beamsteering

Fence structure to prevent stiction in a MEMS motion sensor

Systems and methods for micro-cantilever actuation by base excitation

Sidewall stopper for MEMS device

Microelectromechanical or/and nanoelectromechanical device with out...

Actuator plate partitioning and control devices and methods

Actuating and sensing module

MEMS device comprising a membrane and an actuator

Devices for deflecting a laser beam in a two-dimensional manner

Microelectronic devices for isolating drive and sense signals of se...

Micromechanical spring structure

MEMS actuator, system having a plurality of MEMS actuators, and met...

Microelectromechanical component

Sidewall stopper for MEMS device

Integrated mechanical device with vertical movement

MEMS microphone

Electrostatic actuator with tri-electrode topology

MEMS device comprising a membrane and an actuator

Patents Applicationslast 30 patents

MEMS OPTICAL MICROPHONE

MEMS OPTICAL MICROPHONE

Compliant Structure

MEMS with cover drive and method of operating the same

GRATING REFLECTOR

LONG STROKE MEMS ACTUATOR RESILIENT TO THE PULL-IN AND ELECTRONIC S...

PIEZOELECTRIC MEMS ACTUATOR FOR COMPENSATING UNWANTED MOVEMENTS AND...

COMB-DRIVEN MEMS RESONANT SCANNER WITH FULL-CIRCUMFERENTIAL RANGE A...

MEMS Device for Large Angle Beamsteering

MULTIAXIAL STRAIN ENGINEERING OF DEFECT DOPED MATERIALS

MICROMECHANICAL STRUCTURE AND METHOD OF PROVIDING THE SAME

SEMICONDUCTOR DEVICE, DISPLAY UNIT, AND ELECTRONIC APPARATUS

SENSOR DEVICE AND METHOD OF FABRICATION

MEMS DEVICE COMPRISING A MEMBRANE AND AN ACTUATOR

Cellular Array Electrostatic Actuator

Vehicle Operator Awareness System

OPTICAL NON-UNIFORMITY CORRECTION (NUC) FOR ACTIVE MODE IMAGING SEN...

SIDEWALL STOPPER FOR MEMS DEVICE

SIDEWALL STOPPER FOR MEMS DEVICE

Post-Processing Techniques on MEMS Foundry Fabricated Devices for L...

MEMS DEVICE COMPRISING A MEMBRANE AND AN ACTUATOR

MEMS ACTUATOR PACKAGE ARCHITECTURE

MEMS Actuation Systems and Methods

ACTUATOR PLATE PARTITIONING AND CONTROL DEVICES AND METHODS

INTEGRATED MECHANICAL DEVICE WITH VERTICAL MOVEMENT

Electrostatic Actuator with Tri-Electrode Topology

MEMS PRESSURE SENSING ELEMENT

MICROELECTRONIC DEVICES FOR ISOLATING DRIVE AND SENSE SIGNALS OF SE...

DEVICES FOR DEFLECTING A LASER BEAM IN A TWO-DIMENSIONAL MANNER

SYSTEMS AND METHODS FOR MICRO-CANTILEVER ACTUATION BY BASE EXCITATION