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ELECTRICITY
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Electric elements
H01L
SEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
H01L21/00
Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
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H01L21/02348
treatment by exposure to UV light
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Patents Grants
last 30 patents
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Patent Grant
Reflector and/or method for ultraviolet curing of semiconductor
Patent number
11,929,267
Issue date
Mar 12, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Chien-Chun Hu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Transistor isolation structures
Patent number
11,908,921
Issue date
Feb 20, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Yu-Yun Peng
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device and method for fabricating the same
Patent number
11,901,437
Issue date
Feb 13, 2024
Marlin Semiconductor Limited
Te-Chang Hsu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Enhanced ignition in inductively coupled plasmas for workpiece proc...
Patent number
11,848,204
Issue date
Dec 19, 2023
Beijing E-Town Semiconductor Technology Co., Ltd.
Stephen E. Savas
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device and method
Patent number
11,837,515
Issue date
Dec 5, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Yin-Jie Pan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for forming semiconductor structure with high aspect ratio
Patent number
11,823,960
Issue date
Nov 21, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Han-Pin Chung
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for forming insulating film, apparatus for processing substr...
Patent number
11,823,897
Issue date
Nov 21, 2023
Tokyo Electron Limited
Makoto Muramatsu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Cyclic spin-on coating process for forming dielectric material
Patent number
11,791,154
Issue date
Oct 17, 2023
Taiwan Semiconductor Manufacturing Co., Ltd
Je-Ming Kuo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Forming high carbon content flowable dielectric film with low proce...
Patent number
11,756,786
Issue date
Sep 12, 2023
International Business Machines Corporation
Benjamin D. Briggs
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Dielectric gap-filling process for semiconductor device
Patent number
11,742,238
Issue date
Aug 29, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Cheng-I Lin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Precursors and flowable CVD methods for making low-k films to fill...
Patent number
11,735,413
Issue date
Aug 22, 2023
VERSUM MATERIALS US, LLC
Manchao Xiao
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Semiconductor device with tilted insulating layers and method for f...
Patent number
11,728,299
Issue date
Aug 15, 2023
NANYA TECHNOLOGY CORPORATION
Tse-Yao Huang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Masking layer with post treatment
Patent number
11,728,173
Issue date
Aug 15, 2023
Taiwan Semiconductor Manufacturing Co., Ltd
Wen-Ju Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Chuck assembly, planarization process, apparatus and method of manu...
Patent number
11,728,203
Issue date
Aug 15, 2023
Canon Kabushiki Kaisha
Seth J. Bamesberger
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device and method for manufacturing the same
Patent number
11,688,647
Issue date
Jun 27, 2023
Taiwan Semiconductor Manufacturing Co., Ltd
Bwo-Ning Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Edge exclusion apparatus and methods of using the same
Patent number
11,664,220
Issue date
May 30, 2023
Canon Kabushiki Kaisha
Byung-Jin Choi
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Insulating film forming method, insulating film forming device, and...
Patent number
11,631,581
Issue date
Apr 18, 2023
Tokyo Electron Limited
Makoto Muramatsu
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Grant
Strain enhancement for FinFETs
Patent number
11,626,328
Issue date
Apr 11, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Tsung-Lin Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Systems and methods for forming UV-cured low-κ dielectric films
Patent number
11,621,162
Issue date
Apr 4, 2023
Applied Materials, Inc.
Bo Xie
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Planarization apparatus including superstrate chuck with bendable p...
Patent number
11,587,795
Issue date
Feb 21, 2023
Canon Kabushiki Kaisha
Xiaoming Lu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing method and substrate processing apparatus
Patent number
11,538,679
Issue date
Dec 27, 2022
Tokyo Electron Limited
Yuji Katagiri
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for forming self-aligned via with selectively...
Patent number
11,532,552
Issue date
Dec 20, 2022
Taiwan Semiconductor Manufacturing Company, Ltd.
Yung-Hsu Wu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of manufacturing an etch stop layer and an inter-layer diele...
Patent number
11,522,062
Issue date
Dec 6, 2022
Taiwan Semiconductor Manufacturing Co., Ltd
Shahaji B. More
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Cryogenic atomic layer etch with noble gases
Patent number
11,515,166
Issue date
Nov 29, 2022
Applied Materials, Inc.
Alvaro Garcia De Gorordo
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Dielectric gap-filling process for semiconductor device
Patent number
11,488,855
Issue date
Nov 1, 2022
Taiwan Semiconductor Manufacturing Company, Ltd
Cheng-I Lin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multi-layer mask and method of forming same
Patent number
11,488,825
Issue date
Nov 1, 2022
Taiwan Semiconductor Manufacturing Company, Ltd
Joung-Wei Liou
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device with tilted insulating layers and method for f...
Patent number
11,469,195
Issue date
Oct 11, 2022
NANYA TECHNOLOGY CORPORATION
Tse-Yao Huang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Cyclic spin-on coating process for forming dielectric material
Patent number
11,450,526
Issue date
Sep 20, 2022
Taiwan Semiconductor Manufacturing Co., Ltd
Je-Ming Kuo
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Grant
Apparatus for uniform light intensity and methods of using the same
Patent number
11,443,940
Issue date
Sep 13, 2022
Canon Kabushiki Kaisha
Nilabh K. Roy
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device and method for fabricating the same
Patent number
11,355,619
Issue date
Jun 7, 2022
Marlin Semiconductor Limited
Te-Chang Hsu
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
SYSTEMS AND METHODS FOR DEPOSITING LOW-K DIELECTRIC FILMS
Publication number
20240087881
Publication date
Mar 14, 2024
Applied Materials, Inc.
Michael Haverty
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Enhanced Ignition in Inductively Coupled Plasmas For Workpiece Proc...
Publication number
20240071754
Publication date
Feb 29, 2024
Beijing E-Town Semiconductor Technology Co., Ltd.
Stephen E. Savas
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
REFLECTOR AND/OR METHOD FOR ULTRAVIOLET CURING OF SEMICONDUCTOR
Publication number
20240063035
Publication date
Feb 22, 2024
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY
Chien-Chun Hu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SACRIFICIAL PROTECTION LAYER FOR ENVIRONMENTALLY SENSITIVE SURFACES...
Publication number
20240030023
Publication date
Jan 25, 2024
LAM RESEARCH CORPORATION
Stephen M. Sirard
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Cyclic Spin-On Coating Process for Forming Dielectric Material
Publication number
20230411150
Publication date
Dec 21, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Je-Ming Kuo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR DEVICE AND METHOD
Publication number
20230386947
Publication date
Nov 30, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Yin-Jie Pan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR DEVICE STRUCTURE AND METHOD FOR FABRICATING THE SAME
Publication number
20230369151
Publication date
Nov 16, 2023
XINTEC INC.
Hsiao-Lan YEH
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Dielectric Gap-Filling Process for Semiconductor Device
Publication number
20230360960
Publication date
Nov 9, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Cheng-I Lin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Masking Layer with Post Treatment
Publication number
20230335406
Publication date
Oct 19, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Wen-Ju Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHUCK ASSEMBLY, PLANARIZATION PROCESS, APPARATUS AND METHOD OF MANU...
Publication number
20230335428
Publication date
Oct 19, 2023
Canon Kabushiki Kaisha
SETH J. BAMESBERGER
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DEPOSITION OF FLOWABLE SICN FILMS BY PLASMA ENHANCED ATOMIC LAYER D...
Publication number
20230335392
Publication date
Oct 19, 2023
ASM IP HOLDING B.V.
Shinya Yoshimoto
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SEMICONDUCTOR ASSEMBLIES WITH SYSTEM AND METHOD FOR SMOOTHING SURFA...
Publication number
20230317511
Publication date
Oct 5, 2023
Micron Technology, Inc.
Andrew M. Bayless
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS FOR DEPOSITING GAP-FILLING FLUIDS AND RELATED SYSTEMS AND D...
Publication number
20230298885
Publication date
Sep 21, 2023
ASM IP HOLDING, B.V.
Ranjit Borude
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
IMPRINT METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND I...
Publication number
20230288797
Publication date
Sep 14, 2023
KIOXIA Corporation
Hirokazu MIYOSHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PHOTORESISTS CONTAINING TANTALUM
Publication number
20230288798
Publication date
Sep 14, 2023
LAM RESEARCH CORPORATION
Eric Calvin Hansen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS OF MANUFACTURING SEMICONDUCTOR DEVICES
Publication number
20230154797
Publication date
May 18, 2023
Samsung Electronics Co., Ltd.
Seonghyun Yoo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Single Precursor Low-K Film Deposition and UV Cure for Advanced Tec...
Publication number
20230142684
Publication date
May 11, 2023
Applied Materials, Inc.
Bo Xie
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD OF BONDING THIN SUBSTRATES
Publication number
20230115122
Publication date
Apr 13, 2023
ADEIA SEMICONDUCTOR BONDING TECHNOLOGIES INC.
Cyprian Emeka Uzoh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
RF PULSING ASSISTED LOW-K FILM DEPOSITION WITH HIGH MECHANICAL STRE...
Publication number
20230094012
Publication date
Mar 30, 2023
Applied Materials, Inc.
Ruitong Xiong
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
CRYOGENIC ATOMIC LAYER ETCH WITH NOBLE GASES
Publication number
20230071505
Publication date
Mar 9, 2023
Applied Materials, Inc.
Alvaro GARCIA DE GORORDO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
UV CURE FOR LOCAL STRESS MODULATION
Publication number
20230038611
Publication date
Feb 9, 2023
LAM RESEARCH CORPORATION
Anirvan SIRCAR
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
WARPAGE-REDUCING SEMICONDUCTOR STRUCTURE AND FABRICATING METHOD OF...
Publication number
20220392850
Publication date
Dec 8, 2022
UNITED MICROELECTRONICS CORP.
Da-Jun Lin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Dielectric Gap-Filling Process for Semiconductor Device
Publication number
20220384248
Publication date
Dec 1, 2022
Taiwan Semiconductor Manufacturing Co., Ltd.
Cheng-I Lin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Inter-Layer Dielectrics and Etch Stop Layers for Transistor Source/...
Publication number
20220384593
Publication date
Dec 1, 2022
Taiwan Semiconductor Manufacturing Co., Ltd.
Shahaji B. More
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Cyclic Spin-On Coating Process for Forming Dielectric Material
Publication number
20220367180
Publication date
Nov 17, 2022
Taiwan Semiconductor Manufacturing Co., Ltd.
Je-Ming Kuo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLANARIZATION SYSTEM, PLANARIZATION PROCESS, AND METHOD OF MANUFACT...
Publication number
20220352014
Publication date
Nov 3, 2022
Canon Kabushiki Kaisha
Byung-Jin Choi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SILICON COMPOUNDS AND METHODS FOR DEPOSITING FILMS USING SAME
Publication number
20220293417
Publication date
Sep 15, 2022
VERSUM MATERIALS US, LLC
RAYMOND NICHOLAS VRTIS
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SEMICONDUCTOR DEVICE WITH TILTED INSULATING LAYERS AND METHOD FOR F...
Publication number
20220278025
Publication date
Sep 1, 2022
NANYA TECHNOLOGY CORPORATION
TSE-YAO HUANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SAME
Publication number
20220278225
Publication date
Sep 1, 2022
Marlin Semiconductor Limited
Te-Chang Hsu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR FORMING INSULATING FILM, APPARATUS FOR PROCESSING SUBSTR...
Publication number
20220208547
Publication date
Jun 30, 2022
TOKYO ELECTRON LIMITED
Makoto Muramatsu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...