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Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
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ELECTRICITY
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Electric elements
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SEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
H01L21/00
Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
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H01L21/30
Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
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Patents Grants
last 30 patents
Information
Patent Grant
High voltage device
Patent number
12,224,213
Issue date
Feb 11, 2025
Taiwan Semiconductor Manufacturing Co., Ltd
Sung-Hsin Yang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Chemical mechanical polishing pad and preparation thereof
Patent number
12,220,784
Issue date
Feb 11, 2025
Rohm and Haas Electronic Materials CMP Holdings, Inc.
Bainian Qian
B24 - GRINDING POLISHING
Information
Patent Grant
Method of separating electronic devices having a back layer and app...
Patent number
12,224,208
Issue date
Feb 11, 2025
SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
Gordon M. Grivna
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of forming backside power rails
Patent number
12,224,324
Issue date
Feb 11, 2025
Taiwan Semiconductor Manufacturing Company, Ltd
Po-Yu Huang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Polishing composition and polishing method
Patent number
12,221,557
Issue date
Feb 11, 2025
FUJIMI INCORPORATED
Daiki Ito
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device and manufacturing method thereof
Patent number
12,224,209
Issue date
Feb 11, 2025
Taiwan Semiconductor Manufacturing Company, Ltd
Chia-Cheng Chao
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for forming fin structure in fin field effect transistor pro...
Patent number
12,224,176
Issue date
Feb 11, 2025
Shanghai Huali Integrated Circuit Corporation
Xiaobo Guo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Dual metal silicide structures for advanced integrated circuit stru...
Patent number
12,225,740
Issue date
Feb 11, 2025
Intel Corporation
Jeffrey S. Leib
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Process recipe search apparatus, etching recipe search method and s...
Patent number
12,222,690
Issue date
Feb 11, 2025
HITACHI HIGH-TECH CORPORATION
Takashi Dobashi
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Contact architecture for capacitance reduction and satisfactory con...
Patent number
12,224,326
Issue date
Feb 11, 2025
Intel Corporation
Rishabh Mehandru
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Temperature controlled substrate carrier and polishing components
Patent number
12,217,979
Issue date
Feb 4, 2025
Axus Technology, LLC
Daniel Ray Trojan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Bonding to alignment marks with dummy alignment marks
Patent number
12,218,097
Issue date
Feb 4, 2025
Taiwan Semiconductor Manufacturing Co., Ltd
Hsien-Wei Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of manufacturing semiconductor devices with multiple silicid...
Patent number
12,218,012
Issue date
Feb 4, 2025
Taiwan Semiconductor Manufacturing Company, Ltd
Wei-Yip Loh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Indium phosphide substrate
Patent number
12,217,967
Issue date
Feb 4, 2025
JX Advanced Metals Corporation
Shunsuke Oka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Silicon dry etching method
Patent number
12,217,969
Issue date
Feb 4, 2025
ULVAC, Inc.
Kenta Doi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Deep trench intersections
Patent number
12,218,188
Issue date
Feb 4, 2025
Texas Instruments Incorporated
Binghua Hu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Source/drain silicide for multigate device performance and method o...
Patent number
12,218,214
Issue date
Feb 4, 2025
Taiwan Semiconductor Manufacturing Company, Ltd
Chih-Ching Wang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
FinFET device and method of forming same
Patent number
12,218,222
Issue date
Feb 4, 2025
Taiwan Semiconductor Manufacturing Company, Ltd
Chien-Wei Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of etching film and plasma processing apparatus
Patent number
12,217,973
Issue date
Feb 4, 2025
Tokyo Electron Limited
Kosuke Ogasawara
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus
Patent number
12,217,983
Issue date
Feb 4, 2025
J.E.T. CO., LTD.
Atsuo Kimura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Trench isolation process
Patent number
12,217,999
Issue date
Feb 4, 2025
Taiwan Semiconductor Manufacturing Company, Ltd
Chung-Lei Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing method and substrate processing device
Patent number
12,215,417
Issue date
Feb 4, 2025
Tokyo Electron Limited
Satoshi Toda
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Polishing head retaining ring tilting moment control
Patent number
12,214,469
Issue date
Feb 4, 2025
Applied Materials, Inc.
Andrew Nagengast
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Hard mask trimming in method for manufacturing semiconductor device
Patent number
12,217,961
Issue date
Feb 4, 2025
Taiwan Semiconductor Manufacturing Company, Ltd
Chia-Chien Kuang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Atomic layer etching for smoothing of arbitrary surfaces
Patent number
12,217,968
Issue date
Feb 4, 2025
California Institute of Technology
Harold Frank Greer
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Processing method of wafer, protective sheet, and protective sheet...
Patent number
12,217,966
Issue date
Feb 4, 2025
Disco Corporation
Kazuma Sekiya
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multi-state pulsing for achieving a balance between bow control and...
Patent number
12,217,972
Issue date
Feb 4, 2025
Lam Research Corporation
Nikhil Dole
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Hybrid channel semiconductor device and method
Patent number
12,211,900
Issue date
Jan 28, 2025
Taiwan Semiconductor Manufacturing Company, Ltd
Pei-Yu Wang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor devices and methods of manufacturing thereof
Patent number
12,211,919
Issue date
Jan 28, 2025
Taiwan Semiconductor Manufacturing Company, Ltd
Shih-Yao Lin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Etching method and etching apparatus
Patent number
12,211,695
Issue date
Jan 28, 2025
Tokyo Electron Limited
Nobuhiro Takahashi
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
CONTROLLING FIN-THINNING THROUGH FEEDBACK
Publication number
20250056823
Publication date
Feb 13, 2025
Taiwan Semiconductor Manufacturing Co., Ltd.
Tsu-Hui Su
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS FOR ION ENERGY ANALYSIS OF PLASMA PROCESSES
Publication number
20250054740
Publication date
Feb 13, 2025
Impedans Ltd
Paul SCULLIN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS OF ETCHING CARBON-CONTAINING FEATURES AT LOW TEMPERATURES
Publication number
20250054768
Publication date
Feb 13, 2025
Applied Materials, Inc.
Jiajing Li
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR REDUCING WAFER EDGE DEFECTS
Publication number
20250054807
Publication date
Feb 13, 2025
WINBOND ELECTRONICS CORP.
Cheng-Hsiang Liu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF PREPARING SEMICONDUCTOR CHIP, SEMICONDUCTOR CHIP, AND APP...
Publication number
20250054813
Publication date
Feb 13, 2025
Samsung Electronics Co., Ltd.
Kyungwook HWANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR PRODUCING SEMICONDUCTOR COMPONENTS FROM A WAFER WITH SEL...
Publication number
20250054746
Publication date
Feb 13, 2025
ROBERT BOSCH GmbH
Bernhard Polzinger
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR MANUFACTURING DISASSEMBLABLE SUBSTRATES
Publication number
20250054762
Publication date
Feb 13, 2025
Commissariat A L'Energie Atomique et Aux Energies Alternatives
Thierry SALVETAT
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ION BEAM ETCHING APPARATUS, METHOD FOR MANUFACTURING SEMICONDUCTOR...
Publication number
20250046629
Publication date
Feb 6, 2025
Samsung Electronics Co., Ltd.
Geun Young YEOM
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR DEVICE MANUFACTURING METHOD AND WAFER-ATTACHED STRUCTURE
Publication number
20250046657
Publication date
Feb 6, 2025
ROHM CO., LTD.
Masatoshi AKETA
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
APPARATUS WITH IMPLANTED ALIGNMENT MARK AND METHODS OF MANUFACTURIN...
Publication number
20250046730
Publication date
Feb 6, 2025
Micron Technology, Inc.
Andrew M. Bayless
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
COMPOSITION FOR FORMING SILICON-CONTAINING RESIST UNDERLAYER FILM H...
Publication number
20250044697
Publication date
Feb 6, 2025
NISSAN CHEMICAL CORPORATION
Wataru SHIBAYAMA
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Application
METHOD OF PATTERNING A TARGET LAYER, APPARATUS FOR PATTERNING A TAR...
Publication number
20250046577
Publication date
Feb 6, 2025
ASML NETHERLANDS B.V.
Syam Parayil VENUGOPALAN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ETCHING METHOD
Publication number
20250046615
Publication date
Feb 6, 2025
TOKYO ELECTRON LIMITED
Takahiro YOKOYAMA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Atomic Layer Deposition of Passivation Layer
Publication number
20250046603
Publication date
Feb 6, 2025
TOKYO ELECTRON LIMITED
Du Zhang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SELECTIVE ATOMIC LAYER ETCH OF Si-BASED MATERIALS
Publication number
20250046614
Publication date
Feb 6, 2025
TOKYO ELECTRON LIMITED
Mehrdad Rostami
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS WITH THINNING-BASED ALIGNMENT MARK AND METHODS OF MANUFAC...
Publication number
20250046731
Publication date
Feb 6, 2025
Micron Technology, Inc.
Andrew M. Bayless
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF PROCESSING WAFER
Publication number
20250046624
Publication date
Feb 6, 2025
Disco Corporation
Akira MIZUTANI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR PACKAGE
Publication number
20250046747
Publication date
Feb 6, 2025
Samsung Electronics Co., Ltd.
Junyun KWEON
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS WITH HEATED FILTER AND OPERATION METHOD OF THE SAME
Publication number
20250046584
Publication date
Feb 6, 2025
Taiwan Semiconductor Manufacturing Company, Ltd.
Chih-Lun LU
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
DOPED DIAMOND-LIKE CARBON
Publication number
20250046610
Publication date
Feb 6, 2025
Applied Materials, Inc.
Jialiang WANG
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
MULTI-GATE FET WITH SELF-ALIGNED TAPERED ACTIVE REGION EDGE
Publication number
20250048695
Publication date
Feb 6, 2025
International Business Machines Corporation
Reinaldo Vega
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR WAFER PROCESSING METHOD
Publication number
20250038033
Publication date
Jan 30, 2025
Hitachi High-Tech Corporation
Nozomu YOSHIOKA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE STRUCTURE, SEMICONDUCTOR STRUCTURE AND METHOD OF MANUFACT...
Publication number
20250038062
Publication date
Jan 30, 2025
Enkris Semiconductor (Wuxi), Ltd.
Kai CHENG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
POLISHING PAD WITH REDUCED DEFECT AND METHOD OF PREPARING A SEMICON...
Publication number
20250033160
Publication date
Jan 30, 2025
SK enpulse Co., Ltd.
Yujin SHIN
B24 - GRINDING POLISHING
Information
Patent Application
FORMATION OF ANTIREFLECTIVE SURFACES
Publication number
20250033955
Publication date
Jan 30, 2025
Brookhaven Science Associates, LLC
Charles T. Black
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
CHEMICAL-RESISTANT PROTECTIVE FILM-FORMING COMPOSITION HAVING CATEC...
Publication number
20250034427
Publication date
Jan 30, 2025
NISSAN CHEMICAL CORPORATION
Shun KUBODERA
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Application
Method For Forming Resist Underlayer Film And Patterning Process
Publication number
20250036029
Publication date
Jan 30, 2025
Shin-Etsu Chemical Co., Ltd.
Naoki KOBAYASHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
EPITAXIAL GROWTH OF STRAINED Si/SiGe SUPERLATTICE
Publication number
20250037997
Publication date
Jan 30, 2025
Applied Materials, Inc.
Ruiying HAO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
COMPOSITION FOR FORMING RESIST UNDERLAYER FILM
Publication number
20250036027
Publication date
Jan 30, 2025
NISSAN CHEMICAL CORPORATION
Kosuke IGATA
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Application
SiC TRENCH BOTTOM CORNER ROUNDING
Publication number
20250038000
Publication date
Jan 30, 2025
Applied Materials, Inc.
Qintao ZHANG
H01 - BASIC ELECTRIC ELEMENTS