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Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
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ELECTRICITY
H01
Electric elements
H01L
SEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
H01L21/00
Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
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H01L21/30
Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
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Patents Grants
last 30 patents
Information
Patent Grant
Chemical mechanical polishing apparatus and method
Patent number
11,964,358
Issue date
Apr 23, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Shang-Yu Wang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Grinding apparatus
Patent number
11,967,506
Issue date
Apr 23, 2024
Disco Corporation
Mato Hattori
B24 - GRINDING POLISHING
Information
Patent Grant
Apparatus and method of forming a polishing article that has a desi...
Patent number
11,964,359
Issue date
Apr 23, 2024
Applied Materials, Inc.
Ashwin Chockalingham
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Surface treatment agent and surface treatment method
Patent number
11,965,111
Issue date
Apr 23, 2024
Tokyo Ohka Kogyo Co., Ltd.
Takumi Namiki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Field effect transistors with gate fins and method of making the same
Patent number
11,967,626
Issue date
Apr 23, 2024
SanDisk Technologies LLC
Mitsuhiro Togo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus
Patent number
11,967,511
Issue date
Apr 23, 2024
Tokyo Electron Limited
Akira Ishikawa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Multiple-stack three-dimensional memory device and fabrication meth...
Patent number
11,968,832
Issue date
Apr 23, 2024
Yangtze Memory Technologies Co., Ltd.
Jun Liu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate holding apparatus, elastic membrane, polishing apparatus,...
Patent number
11,958,163
Issue date
Apr 16, 2024
Ebara Corporation
Osamu Nabeya
B24 - GRINDING POLISHING
Information
Patent Grant
Nanostructure field-effect transistor device and method of forming
Patent number
11,961,919
Issue date
Apr 16, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Cheng-Chung Chang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Manufacturing method for integrating gate dielectric layers of diff...
Patent number
11,961,740
Issue date
Apr 16, 2024
Shanghai Huali Integrated Circuit Corporation
Lian Lu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor package and package-on-package including the same
Patent number
11,961,795
Issue date
Apr 16, 2024
Samsung Electronics Co., Ltd.
Bongken Yu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
RF devices with nanotube particles for enhanced performance and met...
Patent number
11,961,781
Issue date
Apr 16, 2024
Qorvo US, Inc.
Julio C. Costa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of patterning two-dimensional material layer on substrate, a...
Patent number
11,961,898
Issue date
Apr 16, 2024
Samsung Electronics Co., Ltd.
Van Luan Nguyen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor structure having fin structures
Patent number
11,963,345
Issue date
Apr 16, 2024
NANYA TECHNOLOGY CORPORATION
Min-Chung Cheng
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Wet anisotropic etching of silicon
Patent number
11,959,004
Issue date
Apr 16, 2024
Texas Instruments Incorporated
Simon Joshua Jacobs
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing method and substrate processing apparatus
Patent number
11,961,746
Issue date
Apr 16, 2024
Tokyo Electron Limited
Sho Kumakura
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Dual metal silicide structures for advanced integrated circuit stru...
Patent number
11,961,767
Issue date
Apr 16, 2024
Intel Corporation
Jeffrey S. Leib
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Integrated circuit device and manufacturing method thereof
Patent number
11,963,344
Issue date
Apr 16, 2024
Samsung Electronics Co., Ltd.
Jaybok Choi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor etching methods
Patent number
11,961,773
Issue date
Apr 16, 2024
Ligang Deng
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Dual metal gate structure having portions of metal gate layers in c...
Patent number
11,955,532
Issue date
Apr 9, 2024
Intel Corporation
Jeffrey S. Leib
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device
Patent number
11,955,550
Issue date
Apr 9, 2024
Semiconductor Manufacturing International (Shanghai) Corporation
Fei Zhou
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Thin film transistor, display device, and thin film transistor manu...
Patent number
11,955,559
Issue date
Apr 9, 2024
SAKAI DISPLAY PRODUCTS CORPORATION
Yoshiaki Matsushima
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Directional deposition for semiconductor fabrication
Patent number
11,955,338
Issue date
Apr 9, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Shih-Chun Huang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Semiconductor device and method of manufacturing the same
Patent number
11,955,340
Issue date
Apr 9, 2024
SK hynix Inc.
Dae Hee Han
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Heterogeneous metal line compositions for advanced integrated circu...
Patent number
11,955,534
Issue date
Apr 9, 2024
Intel Corporation
Andrew W. Yeoh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of fabricating a multi-gate device
Patent number
11,955,554
Issue date
Apr 9, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Huan-Sheng Wei
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Etching solution and method for selectively removing silicon nitrid...
Patent number
11,955,341
Issue date
Apr 9, 2024
VERSUM MATERIALS US, LLC
Jhih Kuei Ge
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Grant
Memory device and method for forming the same
Patent number
11,956,948
Issue date
Apr 9, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Hsin-Wen Su
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor structure and manufacturing method thereof
Patent number
11,955,428
Issue date
Apr 9, 2024
Taiwan Semiconductor Manufacturing Company Ltd.
Hsin-Hung Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor memory device and method of manufacturing thereof
Patent number
11,956,961
Issue date
Apr 9, 2024
Kioxia Corporation
Shinichi Sotome
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
INTEGRATED STEALTH LASER FOR WAFER EDGE TRIMMING PROCESS
Publication number
20240136174
Publication date
Apr 25, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Ming-Tung Wu
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
METHOD OF PROCESSING WAFER
Publication number
20240136193
Publication date
Apr 25, 2024
Disco Corporation
Kai MINAMIZAKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SELECTIVE TRENCH MODIFICATION USING DIRECTIONAL ETCH
Publication number
20240136194
Publication date
Apr 25, 2024
Applied Materials, Inc.
Tassie Andersen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Polymer Removal via Multiple Flash Steps during Plasma Etch
Publication number
20240136195
Publication date
Apr 25, 2024
TOKYO ELECTRON LIMITED
Alec Dorfner
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Different Isolation Liners for Different Type FinFETs and Associate...
Publication number
20240136222
Publication date
Apr 25, 2024
Taiwan Semiconductor Manufacturing Co., LTD
Tzung-Yi Tsai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR CREATING A SMOOTH DIAGONAL SURFACE USING A FOCUSED ION B...
Publication number
20240136150
Publication date
Apr 25, 2024
APPLIED MATERIALS ISRAEL LTD.
Yehuda Zur
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
VERTICAL SEMICONDUCTOR COMPONENT ON THE BASIS OF GALLIUM NITRIDE...
Publication number
20240136407
Publication date
Apr 25, 2024
ROBERT BOSCH GmbH
Kevin Dannecker
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SILICON CARBIDE SUBSTRATE AND METHOD OF MANUFACTURING SILICON CARBI...
Publication number
20240136403
Publication date
Apr 25, 2024
Sumitomo Electric Industries, Ltd.
Kyoko OKITA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR CLEANING SEMICONDUCTOR SUBSTRATE, METHOD FOR MANUFACTURI...
Publication number
20240132806
Publication date
Apr 25, 2024
NISSAN CHEMICAL CORPORATION
Masafumi YAGYU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PHOTORESIST AND METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE
Publication number
20240134279
Publication date
Apr 25, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Chieh-Hsin HSIEH
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
Publication number
20240136301
Publication date
Apr 25, 2024
Power Master Semiconductor Co., Ltd.
Sangwoo PAK
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF BREAKING THROUGH ETCH STOP LAYER
Publication number
20240136183
Publication date
Apr 25, 2024
Taiwan Semiconductor Manufacturing Co., Ltd.
Yu-Shih Wang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PROCESSING CONDITION SETTING APPARATUS, PROCESSING CONDITION SETTIN...
Publication number
20240123566
Publication date
Apr 18, 2024
SUMCO CORPORATION
Yuji MIYAZAKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING AND PACKAGING
Publication number
20240128199
Publication date
Apr 18, 2024
TEXAS INSTRUMENTS INCORPORATED
Jane Qian Liu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHIP SIZE PACKAGE AND SYSTEM
Publication number
20240128203
Publication date
Apr 18, 2024
STMicroelectronics Pte Ltd
Jing-En LUAN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
HIGH PERFORMANCE SEMICONDUCTOR GRADE DIMETHYLALUMINUM CHLORIDE
Publication number
20240124776
Publication date
Apr 18, 2024
Laurence E. Spurgeon
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Application
SURFACE TREATMENT COMPOSITION, SURFACE TREATMENT METHOD, AND METHOD...
Publication number
20240124810
Publication date
Apr 18, 2024
FUJIMI INCORPORATED
Hideyuki TOKUSHIMA
C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information
Patent Application
METHODS OF FORMING SEMICONDUCTOR STRUCTURES AND RESULTING SEMICONDU...
Publication number
20240128336
Publication date
Apr 18, 2024
Wolfspeed, Inc.
Christer Hallin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF PROCESSING WAFER
Publication number
20240128086
Publication date
Apr 18, 2024
Disco Corporation
Hiroshi MORIKAZU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SELECTIVE GAS PHASE ETCH OF SILICON GERMANIUM ALLOYS
Publication number
20240128088
Publication date
Apr 18, 2024
TOKYO ELECTRON LIMITED
Toshiki KANAKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TSV-BUMP STRUCTURE, SEMICONDUCTOR DEVICE, AND METHOD OF FORMING THE...
Publication number
20240128158
Publication date
Apr 18, 2024
Micron Technology, Inc.
YUTAKA NAKAE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SENSOR PACKAGE STRUCTURE AND MANUFACTURING METHOD THREROF
Publication number
20240128233
Publication date
Apr 18, 2024
TONG HSING ELECTRONIC INDUSTRIES, LTD.
CHIA-SHUAI CHANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PACKAGE STRUCTURE AND METHOD FOR FABRICATING THE SAME
Publication number
20240128120
Publication date
Apr 18, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Hsiang-Wei Liu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR PACKAGES AND METHOD FOR FABRICATING THE SAME
Publication number
20240128145
Publication date
Apr 18, 2024
Samsung Electronics Co., Ltd.
HYEONSEOK LEE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SILICON ETCHING LIQUID, AND METHOD FOR PRODUCING SILICON DEVICES AN...
Publication number
20240124775
Publication date
Apr 18, 2024
Tokuyama Corporation
Yoshiki Seike
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Application
SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
Publication number
20240128326
Publication date
Apr 18, 2024
Sumitomo Electric Industries, Ltd.
Takahide HIRASAKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD TO SELECTIVELY ETCH SILICON NITRIDE TO SILICON OXIDE USING W...
Publication number
20240128089
Publication date
Apr 18, 2024
TOKYO ELECTRON LIMITED
Yu-Hao Tsai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
WAFER PROCESSING METHOD
Publication number
20240128087
Publication date
Apr 18, 2024
Disco Corporation
Hayato IGA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF MANUFACTURING A SEMICONDUCTOR DEVCE
Publication number
20240128126
Publication date
Apr 18, 2024
Taiwan Semiconductor Manufacturing Co., Ltd.
Shu-Uei Jang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Apparatus and Method for Reducing Substrate Thickness and Surface R...
Publication number
20240128066
Publication date
Apr 18, 2024
SPTS TECHNOLOGIES LIMITED
Roland Mumford
H01 - BASIC ELECTRIC ELEMENTS