Treatments for avoiding stiction of elastic or moving parts of MEMS

Industry

CPC
B81C2201/11

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BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS B81C2201/00Manufacture or treatment of micro-structural devices or systems

Current Industry

B81C2201/11Treatments for avoiding stiction of elastic or moving parts of MEMS

Industries

Patents Grantslast 30 patents

Information Patent Grant
Modification to rough polysilicon using ion implantation and silicide
- Patent number 11,952,267
- Issue date Apr 9, 2024
- Invensense, Inc.
- Alan Cuthbertson
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Mems device having a rugged package and fabrication process thereof
- Patent number 11,873,215
- Issue date Jan 16, 2024
- STMicroelectronics S.r.l.
- Enri Duqi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device and method for making the same
- Patent number 11,851,318
- Issue date Dec 26, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yi-Chuan Teng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method and structure for CMOS-MEMS thin film encapsulation
- Patent number 11,667,517
- Issue date Jun 6, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yu-Chia Liu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Stiction reduction system and method thereof
- Patent number 11,661,332
- Issue date May 30, 2023
- Invensense, Inc.
- Daesung Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Roughness selectivity for MEMS movement stiction reduction
- Patent number 11,655,138
- Issue date May 23, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Hsi-Cheng Hsu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS apparatus with anti-stiction layer
- Patent number 11,542,151
- Issue date Jan 3, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Kuei-Sung Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Dual back-plate and diaphragm microphone
- Patent number 11,533,565
- Issue date Dec 20, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chun-Wen Cheng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS structure and manufacturing method thereof
- Patent number 11,505,454
- Issue date Nov 22, 2022
- Taiwan Semiconductor Manufacturing Company Ltd.
- Kang-Che Huang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Systems and methods for uniform target erosion magnetic assemblies
- Patent number 11,390,520
- Issue date Jul 19, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chen-Fang Chung
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing a semiconductor on insulator type structur...
- Patent number 11,373,898
- Issue date Jun 28, 2022
- Soitec
- Daniel Delprat
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Anti-stiction process for MEMS device
- Patent number 11,305,980
- Issue date Apr 19, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Jui-Chun Weng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for preparing silicon wafer with rough surface and silicon w...
- Patent number 11,305,988
- Issue date Apr 19, 2022
- AAC Acoustic Technologies (Shenzhen) Co., Ltd.
- Wooicheang Goh
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Modification to rough polysilicon using ion implantation and silicide
- Patent number 11,267,699
- Issue date Mar 8, 2022
- Invensense, Inc.
- Alan Cuthbertson
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Fence structure to prevent stiction in a MEMS motion sensor
- Patent number 11,261,083
- Issue date Mar 1, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd
- Lee-Chuan Tseng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Rough layer for better anti-stiction deposition
- Patent number 11,192,775
- Issue date Dec 7, 2021
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chih-Hang Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for preparing silicon wafer with rough surface and silicon w...
- Patent number 11,192,782
- Issue date Dec 7, 2021
- AAC Acoustic Technologies (Shenzhen) Co., Ltd.
- Wooicheang Goh
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing a micromechanical sensor
- Patent number 11,111,137
- Issue date Sep 7, 2021
- Robert Bosch GmbH
- Johannes Classen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of fabricating semiconductor structure
- Patent number 11,097,941
- Issue date Aug 24, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yi-Hsien Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Dual back-plate and diaphragm microphone
- Patent number 11,051,109
- Issue date Jun 29, 2021
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chun-Wen Cheng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Component especially for horology with surface topology and method...
- Patent number 10,981,783
- Issue date Apr 20, 2021
- Nivarox-Far S.A.
- Alex Gandelhman
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Vertical stopper for capping MEMS devices
- Patent number 10,882,735
- Issue date Jan 5, 2021
- Analog Devices, Inc.
- Jinbo Kuang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Controlled deposition of metal and metal cluster ions by surface fi...
- Patent number 10,876,202
- Issue date Dec 29, 2020
- University of North Texas
- Guido Fridolin Verbeck
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Capacitive micromachined ultrasonic transducers (CMUTs) and related...
- Patent number 10,850,306
- Issue date Dec 1, 2020
- Butterfly Network, Inc.
- Jonathan M. Rothberg
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS microphone and method of manufacturing the same
- Patent number 10,841,711
- Issue date Nov 17, 2020
- DB HITEK CO., LTD.
- Jong Won Sun
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of stiction prevention by patterned anti-stiction layer
- Patent number 10,745,268
- Issue date Aug 18, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Kuei-Sung Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method and structure for CMOS-MEMS thin film encapsulation
- Patent number 10,689,247
- Issue date Jun 23, 2020
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yu-Chia Liu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of stiction prevention by patterned anti-stiction layer
- Patent number 10,654,707
- Issue date May 19, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Kuei-Sung Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor device and manufacture thereof
- Patent number 10,633,247
- Issue date Apr 28, 2020
- Semiconductor Manufacturing International (Shanghai) Corporation
- GuangCai Fu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Fence structure to prevent stiction in a MEMS motion sensor
- Patent number 10,562,763
- Issue date Feb 18, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Lee-Chuan Tseng
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
ENCAPSULATED MEMS DEVICE AND METHOD FOR MANUFACTURING THE MEMS DEVICE
- Publication number 20240067520
- Publication date Feb 29, 2024
- INFINEON TECHNOLOGIES AG
- Fabian Streb
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method and Structure for CMOS-MEMS Thin Film Encapsulation
- Publication number 20230278856
- Publication date Sep 7, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yu-Chia Liu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ROUGHNESS SELECTIVITY FOR MEMS MOVEMENT STICTION REDUCTION
- Publication number 20230264945
- Publication date Aug 24, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Hsi-Cheng HSU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD AND SYSTEM FOR FABRICATING A MEMS DEVICE CAP
- Publication number 20230045563
- Publication date Feb 9, 2023
- InvenSense, Inc.
- Daesung Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE AND METHOD FOR MAKING THE SAME
- Publication number 20220340407
- Publication date Oct 27, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yi-Chuan TENG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD AND DEVICE FOR LOCALLY REMOVING AND/OR MODIFYING A POLYMER M...
- Publication number 20220306461
- Publication date Sep 29, 2022
- ROBERT BOSCH GmbH
- Barbara Will
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ANTI-STICTION ENHANCEMENT OF RUTHENIUM CONTACT
- Publication number 20220289566
- Publication date Sep 15, 2022
- Qorvo US, Inc.
- James D. HUFFMAN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ANTI-STICTION PROCESS FOR MEMS DEVICE
- Publication number 20220242724
- Publication date Aug 4, 2022
- Taiwan Semiconductor Manufacturing Co.,Ltd
- Jui-Chun WENG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE HAVING A RUGGED PACKAGE AND FABRICATION PROCESS THEREOF
- Publication number 20220185661
- Publication date Jun 16, 2022
- STMicroelectronics S.r.l.
- Enri DUQI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MODIFICATION TO ROUGH POLYSILICON USING ION IMPLANTATION AND SILICIDE
- Publication number 20220144628
- Publication date May 12, 2022
- InvenSense, Inc.
- Alan Cuthbertson
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ROUGHNESS SELECTIVITY FOR MEMS MOVEMENT STICTION REDUCTION
- Publication number 20220135397
- Publication date May 5, 2022
- Taiwan Semiconductor Manufacturing Company Limited
- Hsi-Cheng HSU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR PREPARING SILICON WAFER WITH ROUGH SURFACE AND SILICON W...
- Publication number 20220063995
- Publication date Mar 3, 2022
- AAC ACOUSTIC TECHNOLOGIES (SHENZHEN) CO., LTD
- Wooicheang Goh
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
DUAL BACK-PLATE AND DIAPHRAGM MICROPHONE
- Publication number 20210314707
- Publication date Oct 7, 2021
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chun-Wen Cheng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SELECTIVE SELF-ASSEMBLED MONOLAYER PATTERNING WITH SACRIFICIAL LAYE...
- Publication number 20210107785
- Publication date Apr 15, 2021
- InvenSense, Inc.
- Daesung Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS STRUCTURE AND MANUFACTURING METHOD THEREOF
- Publication number 20210087056
- Publication date Mar 25, 2021
- Taiwan Semiconductor Manufacturing company Ltd.
- KANG-CHE HUANG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS APPARATUS WITH ANTI-STICTION LAYER
- Publication number 20200346919
- Publication date Nov 5, 2020
- Taiwan Semiconductor Manufacturing Co., LTD
- Kuei-Sung Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method and Structure for CMOS-MEMS Thin Film Encapsulation
- Publication number 20200317506
- Publication date Oct 8, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yu-Chia Liu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
STICTION REDUCTION SYSTEM AND METHOD THEREOF
- Publication number 20200262697
- Publication date Aug 20, 2020
- InvenSense, Inc.
- Daesung Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ANTI-STICTION PROCESS FOR MEMS DEVICE
- Publication number 20200123003
- Publication date Apr 23, 2020
- Taiwan Semiconductor Manufacturing Co., LTD
- Jui-Chun Weng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE HAVING A RUGGED PACKAGE AND FABRICATION PROCESS THEREOF
- Publication number 20200115224
- Publication date Apr 16, 2020
- STMicroelectronics S.r.l.
- Enri DUQI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
DUAL BACK-PLATE AND DIAPHRAGM MICROPHONE
- Publication number 20200107130
- Publication date Apr 2, 2020
- Taiwan Semiconductor Manufacturing Co., LTD
- Chun-Wen Cheng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ROUGH LAYER FOR BETTER ANTI-STICTION DEPOSITION
- Publication number 20200024125
- Publication date Jan 23, 2020
- Taiwan Semiconductor Manufacturing Co., LTD
- Chih-Hang Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD OF STICTION PREVENTION BY PATTERNED ANTI-STICTION LAYER
- Publication number 20200024124
- Publication date Jan 23, 2020
- Taiwan Semiconductor Manufacturing Co., LTD
- Kuei-Sung Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS MICROPHONE AND METHOD OF MANUFACTURING THE SAME
- Publication number 20200021920
- Publication date Jan 16, 2020
- DB HITEK CO., LTD.
- Jong Won SUN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEMICONDUCTOR DEVICE AND MANUFACTURE THEREOF
- Publication number 20190284044
- Publication date Sep 19, 2019
- Semiconductor Manufacturing International (Shanghai) Corporation
- GuangCai FU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD OF FABRICATING SEMICONDUCTOR STRUCTURE
- Publication number 20190256347
- Publication date Aug 22, 2019
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yi-Hsien CHANG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Comb MEMS Device and Method of Making a Comb MEMS Device
- Publication number 20190185315
- Publication date Jun 20, 2019
- INFINEON TECHNOLOGIES AG
- Alfons Dehe
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR MANUFACTURING A MICROMECHANICAL SENSOR
- Publication number 20190161347
- Publication date May 30, 2019
- ROBERT BOSCH GmbH
- Johannes CLASSEN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
VERTICAL STOPPER FOR CAPPING MEMS DEVICES
- Publication number 20190152766
- Publication date May 23, 2019
- Analog Devices, Inc.
- Jinbo Kuang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ANTI-STICTION PROCESS FOR MEMS DEVICE
- Publication number 20190031503
- Publication date Jan 31, 2019
- Taiwan Semiconductor Manufacturing Co., LTD
- Jui-Chun WENG
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Treatments for avoiding stiction of elastic or moving parts of MEMS

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Modification to rough polysilicon using ion implantation and silicide

Mems device having a rugged package and fabrication process thereof

MEMS device and method for making the same

Method and structure for CMOS-MEMS thin film encapsulation

Stiction reduction system and method thereof

Roughness selectivity for MEMS movement stiction reduction

MEMS apparatus with anti-stiction layer

Dual back-plate and diaphragm microphone

MEMS structure and manufacturing method thereof

Systems and methods for uniform target erosion magnetic assemblies

Method for manufacturing a semiconductor on insulator type structur...

Anti-stiction process for MEMS device

Method for preparing silicon wafer with rough surface and silicon w...

Modification to rough polysilicon using ion implantation and silicide

Fence structure to prevent stiction in a MEMS motion sensor

Rough layer for better anti-stiction deposition

Method for preparing silicon wafer with rough surface and silicon w...

Method for manufacturing a micromechanical sensor

Method of fabricating semiconductor structure

Dual back-plate and diaphragm microphone

Component especially for horology with surface topology and method...

Vertical stopper for capping MEMS devices

Controlled deposition of metal and metal cluster ions by surface fi...

Capacitive micromachined ultrasonic transducers (CMUTs) and related...

MEMS microphone and method of manufacturing the same

Method of stiction prevention by patterned anti-stiction layer

Method and structure for CMOS-MEMS thin film encapsulation

Method of stiction prevention by patterned anti-stiction layer

Semiconductor device and manufacture thereof

Fence structure to prevent stiction in a MEMS motion sensor

Patents Applicationslast 30 patents

ENCAPSULATED MEMS DEVICE AND METHOD FOR MANUFACTURING THE MEMS DEVICE

Method and Structure for CMOS-MEMS Thin Film Encapsulation

ROUGHNESS SELECTIVITY FOR MEMS MOVEMENT STICTION REDUCTION

METHOD AND SYSTEM FOR FABRICATING A MEMS DEVICE CAP

MEMS DEVICE AND METHOD FOR MAKING THE SAME

METHOD AND DEVICE FOR LOCALLY REMOVING AND/OR MODIFYING A POLYMER M...

ANTI-STICTION ENHANCEMENT OF RUTHENIUM CONTACT

ANTI-STICTION PROCESS FOR MEMS DEVICE

MEMS DEVICE HAVING A RUGGED PACKAGE AND FABRICATION PROCESS THEREOF

MODIFICATION TO ROUGH POLYSILICON USING ION IMPLANTATION AND SILICIDE

ROUGHNESS SELECTIVITY FOR MEMS MOVEMENT STICTION REDUCTION

METHOD FOR PREPARING SILICON WAFER WITH ROUGH SURFACE AND SILICON W...

DUAL BACK-PLATE AND DIAPHRAGM MICROPHONE

SELECTIVE SELF-ASSEMBLED MONOLAYER PATTERNING WITH SACRIFICIAL LAYE...

MEMS STRUCTURE AND MANUFACTURING METHOD THEREOF

MEMS APPARATUS WITH ANTI-STICTION LAYER

Method and Structure for CMOS-MEMS Thin Film Encapsulation

STICTION REDUCTION SYSTEM AND METHOD THEREOF

ANTI-STICTION PROCESS FOR MEMS DEVICE

MEMS DEVICE HAVING A RUGGED PACKAGE AND FABRICATION PROCESS THEREOF

DUAL BACK-PLATE AND DIAPHRAGM MICROPHONE

ROUGH LAYER FOR BETTER ANTI-STICTION DEPOSITION

METHOD OF STICTION PREVENTION BY PATTERNED ANTI-STICTION LAYER

MEMS MICROPHONE AND METHOD OF MANUFACTURING THE SAME

SEMICONDUCTOR DEVICE AND MANUFACTURE THEREOF

METHOD OF FABRICATING SEMICONDUCTOR STRUCTURE

Comb MEMS Device and Method of Making a Comb MEMS Device

METHOD FOR MANUFACTURING A MICROMECHANICAL SENSOR

VERTICAL STOPPER FOR CAPPING MEMS DEVICES

ANTI-STICTION PROCESS FOR MEMS DEVICE