Treatments for improving mechanical properties, not provided for in B81C1/00658 - B81C1/0065

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B81C1/00682

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BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS B81C1/00Manufacture or treatment of devices or systems in or on a substrate

Current Industry

B81C1/00682Treatments for improving mechanical properties, not provided for in B81C1/00658 - B81C1/0065

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Anti-stiction process for MEMS device
- Patent number 12,157,667
- Issue date Dec 3, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Jui-Chun Weng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for coating microstructured components
- Patent number 11,701,478
- Issue date Jul 18, 2023
- Boehringer Ingelheim International GmbH
- Daniel Frache
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS devices comprising spring element and comb drive and associate...
- Patent number 11,703,681
- Issue date Jul 18, 2023
- Infineon Technologies AG
- Stephan Gerhard Albert
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS element with increased density
- Patent number 11,603,312
- Issue date Mar 14, 2023
- Murata Manufacturing Co., Ltd.
- Marko Peussa
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Systems and methods for uniform target erosion magnetic assemblies
- Patent number 11,390,520
- Issue date Jul 19, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chen-Fang Chung
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Anti-stiction process for MEMS device
- Patent number 11,305,980
- Issue date Apr 19, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Jui-Chun Weng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods and systems for fabricating miniaturized nanotube sensors
- Patent number 11,019,734
- Issue date May 25, 2021
- Tula Health, Inc.
- Robert Davis
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing a piezoelectric device
- Patent number 10,862,018
- Issue date Dec 8, 2020
- Murata Manufacturing Co., Ltd.
- Takuo Hada
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS gap control structures
- Patent number 10,829,367
- Issue date Nov 10, 2020
- Invensense, Inc.
- Jong Il Shin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Anti-stiction process for MEMS device
- Patent number 10,513,432
- Issue date Dec 24, 2019
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Jui-Chun Weng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS gap control structures
- Patent number 10,308,507
- Issue date Jun 4, 2019
- Invensense, Inc.
- Jong Ii Shin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Multilayer MEMS cantilevers
- Patent number 10,308,500
- Issue date Jun 4, 2019
- Ecole Polytechnique Federale de Lausanne (EPFL)
- Georg Ernest Fantner
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of fabricating an electromechanical structure including at l...
- Patent number 10,290,721
- Issue date May 14, 2019
- Commissariat a l'Energie Atomique et Aux Energies Alternatives
- Vincent Larrey
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS grid for manipulating structural parameters of MEMS devices
- Patent number 10,199,262
- Issue date Feb 5, 2019
- MEMS DRIVE, INC.
- Roman Gutierrez
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Integrated circuit comprising multi-layer micromechanical structure...
- Patent number 10,065,855
- Issue date Sep 4, 2018
- UNIVERISTAT POLITECNICA DE CATALUNYA
- Piotr Jozef Michalik
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Stress decoupled piezoresistive relative pressure sensor and method...
- Patent number 9,938,135
- Issue date Apr 10, 2018
- Infineon Technologies Dresden GmbH
- Steffen Bieselt
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical structure
- Patent number 9,908,770
- Issue date Mar 6, 2018
- Robert Bosch GmbH
- David Bendes
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of manufacturing apparatus for harvesting and storing piezoe...
- Patent number 9,862,599
- Issue date Jan 9, 2018
- Electronics and Telecommunications Research Institute
- Sang Kyun Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for producing a microelectromechanical transducer
- Patent number 9,637,379
- Issue date May 2, 2017
- TDK Corporation
- Marcel Giesen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Encapsulation structure including a mechanically reinforced cap and...
- Patent number 9,511,991
- Issue date Dec 6, 2016
- Commissariat a l'Energie Atomique et Aux Energies Alternatives
- Xavier Baillin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS pressure sensor with improved insensitivity to thermo-mechanic...
- Patent number 9,352,955
- Issue date May 31, 2016
- Maxim Integrated Products, Inc.
- Antonio Molfese
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Implantation of gaseous chemicals into cavities formed in intermedi...
- Patent number 9,171,966
- Issue date Oct 27, 2015
- Cavendish Kinetics, Inc.
- Willibrordus Gerardus Van Den Hoek
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical component and manufacturing method for a micromecha...
- Patent number 9,156,675
- Issue date Oct 13, 2015
- Robert Bosch GmbH
- Arnd Kaelberer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS resonator, sensor having the same and manufacturing method for...
- Patent number 9,032,795
- Issue date May 19, 2015
- Agency for Defense Development
- Geunbae Lim
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for making a reinforced silicon micromechanical part
- Patent number 8,992,784
- Issue date Mar 31, 2015
- Montres Breguet SA
- Nakis Karapatis
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Low frequency response microphone diaphragm structures and methods...
- Patent number 8,946,831
- Issue date Feb 3, 2015
- Invensense, Inc.
- Fang Liu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for fabricating an integrated device
- Patent number 8,936,960
- Issue date Jan 20, 2015
- United Microelectronics Corp.
- Kuan-Yu Wang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for fabricating micro-electro-mechanical systems (MEMS) device
- Patent number 8,673,732
- Issue date Mar 18, 2014
- Solid State System Co., Ltd.
- Tsung-Min Hsieh
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-electro-mechanical systems (MEMS) device and method for fabri...
- Patent number 8,502,329
- Issue date Aug 6, 2013
- Solid State System Co., Ltd.
- Tsung-Min Hsieh
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of accurately spacing Z-axis electrode
- Patent number 8,430,255
- Issue date Apr 30, 2013
- Robert Bosch GmbH
- Robert N. Candler
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
ANTI-STICTION PROCESS FOR MEMS DEVICE
- Publication number 20220242724
- Publication date Aug 4, 2022
- Taiwan Semiconductor Manufacturing Co.,Ltd
- Jui-Chun WENG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICES COMPRISING SPRING ELEMENT AND COMB DRIVE AND ASSOCIATE...
- Publication number 20210373322
- Publication date Dec 2, 2021
- INFINEON TECHNOLOGIES AG
- Stephan Gerhard ALBERT
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS ELEMENT WITH INCREASED DENSITY
- Publication number 20210122628
- Publication date Apr 29, 2021
- Murata Manufacturing Co., Ltd.
- Marko PEUSSA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ANTI-STICTION PROCESS FOR MEMS DEVICE
- Publication number 20200123003
- Publication date Apr 23, 2020
- Taiwan Semiconductor Manufacturing Co., LTD
- Jui-Chun Weng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS GAP CONTROL STRUCTURES
- Publication number 20190241432
- Publication date Aug 8, 2019
- InvenSense, Inc.
- Jong Il SHIN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ANTI-STICTION PROCESS FOR MEMS DEVICE
- Publication number 20190031503
- Publication date Jan 31, 2019
- Taiwan Semiconductor Manufacturing Co., LTD
- Jui-Chun WENG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
INTEGRATED CIRCUIT COMPRISING MULTI-LAYER MICROMECHANICAL STRUCTURE...
- Publication number 20180148329
- Publication date May 31, 2018
- UNIVERSITAT POLITECNICA DE CATALUNYA
- Piotr Jozef MICHALIK
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
STRESS DECOUPLED PIEZORESISTIVE RELATIVE PRESSURE SENSOR AND METHOD...
- Publication number 20170369306
- Publication date Dec 28, 2017
- INFINEON TECHNOLOGIES DRESDEN GMBH
- Steffen BIESELT
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS GAP CONTROL STRUCTURES
- Publication number 20170297911
- Publication date Oct 19, 2017
- InvenSense, Inc.
- Jong II SHIN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROMECHANICAL STRUCTURE
- Publication number 20170225943
- Publication date Aug 10, 2017
- David Bendes
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Semiconductor Device and Method for Manufacturing the Same
- Publication number 20160355398
- Publication date Dec 8, 2016
- UNITED MICROELECTRONICS CORPORATION
- YAN-DA CHEN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ELECTRONIC DEVICE AND METHOD OF MANUFACTURING THE SAME
- Publication number 20160272484
- Publication date Sep 22, 2016
- Kabushiki Kaisha Toshiba
- Tomohiro SAITO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE WITH OVER-TRAVEL STOP STRUCTURE AND METHOD OF FABRICATION
- Publication number 20160216290
- Publication date Jul 28, 2016
- FREESCALE SEMICONDUCTOR, INC.
- JUN TANG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SUBSTRATE STRUCTURE, SEMICONDUCTOR STRUCTURE AND METHOD FOR FABRICA...
- Publication number 20160207756
- Publication date Jul 21, 2016
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yi-Hsien CHANG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for Producing a Microelectromechanical Transducer
- Publication number 20160167960
- Publication date Jun 16, 2016
- EPCOS AG
- Marcel GIESEN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
REDUCING MEMS STICTION BY DEPOSITION OF NANOCLUSTERS
- Publication number 20160031698
- Publication date Feb 4, 2016
- Robert F. Steimle
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
APPARATUS FOR HARVESTING AND STORING PIEZOELECTRIC ENERGY AND MANUF...
- Publication number 20150353352
- Publication date Dec 10, 2015
- ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE
- Sang Kyun LEE
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS PRESSURE SENSOR WITH IMPROVED INSENSITIVITY TO THERMO-MECHANIC...
- Publication number 20150274505
- Publication date Oct 1, 2015
- Maxim Integrated Products, Inc.
- Antonio Molfese
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE AND METHOD FOR PRODUCING AN MEMS DEVICE OPERATING WITH...
- Publication number 20150225231
- Publication date Aug 13, 2015
- EPCOS AG
- Gudrun Henn
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ENCAPSULATION STRUCTURE INCLUDING A MECHANICALLY REINFORCED CAP AND...
- Publication number 20150028433
- Publication date Jan 29, 2015
- COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENE. ALT.
- Xavier BAILLIN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR FABRICATING AN INTEGRATED DEVICE
- Publication number 20150011035
- Publication date Jan 8, 2015
- UNITED MICROELECTRONICS CORP.
- Kuan-Yu Wang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Micromechanical component and manufacturing method for a micromecha...
- Publication number 20150008542
- Publication date Jan 8, 2015
- ROBERT BOSCH GmbH
- Arnd KAELBERER
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS APPARATUS
- Publication number 20140252511
- Publication date Sep 11, 2014
- SenseTech Co., Ltd
- Mao-Chen LIU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
IMPLANTATION OF GASEOUS CHEMICALS INTO CAVITIES FORMED IN INTERMEDI...
- Publication number 20140246740
- Publication date Sep 4, 2014
- CAVENDISH KINETICS, INC. a Corporation
- Willibrordus Gerardus Van Den Hoek
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method of Fabricating An Electromechanical Structure Including at L...
- Publication number 20130273683
- Publication date Oct 17, 2013
- Vincent Larrey
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR FABRICATING MICRO-ELECTRO-MECHANICAL SYSTEMS (MEMS) DEVICE
- Publication number 20130260504
- Publication date Oct 3, 2013
- Tsung-Min Hsieh
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTRO-MECHANICAL SYSTEMS (MEMS) DEVICE AND METHOD FOR FABRI...
- Publication number 20130056841
- Publication date Mar 7, 2013
- SOLID STATE SYSTEM CO., LTD.
- Tsung-Min Hsieh
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
APPARATUS FOR HARVESTING AND STORING PIEZOELECTRIC ENERGY AND MANUF...
- Publication number 20130049539
- Publication date Feb 28, 2013
- ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE
- Sang Kyun LEE
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR MAKING A REINFORCED SILICON MICROMECHANICAL PART
- Publication number 20130029157
- Publication date Jan 31, 2013
- Montres Breguet SA
- Nakis Karapatis
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS RESONATOR, SENSOR HAVING THE SAME AND MANUFACUTRING METHOD FOR...
- Publication number 20120279302
- Publication date Nov 8, 2012
- AGENCY FOR DEFENSE DEVELOPMENT
- Geunbae Lim
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Treatments for improving mechanical properties, not provided for in B81C1/00658 - B81C1/0065

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Anti-stiction process for MEMS device

Method for coating microstructured components

MEMS devices comprising spring element and comb drive and associate...

MEMS element with increased density

Systems and methods for uniform target erosion magnetic assemblies

Anti-stiction process for MEMS device

Methods and systems for fabricating miniaturized nanotube sensors

Method for manufacturing a piezoelectric device

MEMS gap control structures

Anti-stiction process for MEMS device

MEMS gap control structures

Multilayer MEMS cantilevers

Method of fabricating an electromechanical structure including at l...

MEMS grid for manipulating structural parameters of MEMS devices

Integrated circuit comprising multi-layer micromechanical structure...

Stress decoupled piezoresistive relative pressure sensor and method...

Micromechanical structure

Method of manufacturing apparatus for harvesting and storing piezoe...

Method for producing a microelectromechanical transducer

Encapsulation structure including a mechanically reinforced cap and...

MEMS pressure sensor with improved insensitivity to thermo-mechanic...

Implantation of gaseous chemicals into cavities formed in intermedi...

Micromechanical component and manufacturing method for a micromecha...

MEMS resonator, sensor having the same and manufacturing method for...

Method for making a reinforced silicon micromechanical part

Low frequency response microphone diaphragm structures and methods...

Method for fabricating an integrated device

Method for fabricating micro-electro-mechanical systems (MEMS) device

Micro-electro-mechanical systems (MEMS) device and method for fabri...

Method of accurately spacing Z-axis electrode

Patents Applicationslast 30 patents

ANTI-STICTION PROCESS FOR MEMS DEVICE

MEMS DEVICES COMPRISING SPRING ELEMENT AND COMB DRIVE AND ASSOCIATE...

MEMS ELEMENT WITH INCREASED DENSITY

ANTI-STICTION PROCESS FOR MEMS DEVICE

MEMS GAP CONTROL STRUCTURES

ANTI-STICTION PROCESS FOR MEMS DEVICE

INTEGRATED CIRCUIT COMPRISING MULTI-LAYER MICROMECHANICAL STRUCTURE...

STRESS DECOUPLED PIEZORESISTIVE RELATIVE PRESSURE SENSOR AND METHOD...

MEMS GAP CONTROL STRUCTURES

MICROMECHANICAL STRUCTURE

Semiconductor Device and Method for Manufacturing the Same

ELECTRONIC DEVICE AND METHOD OF MANUFACTURING THE SAME

MEMS DEVICE WITH OVER-TRAVEL STOP STRUCTURE AND METHOD OF FABRICATION

SUBSTRATE STRUCTURE, SEMICONDUCTOR STRUCTURE AND METHOD FOR FABRICA...

Method for Producing a Microelectromechanical Transducer

REDUCING MEMS STICTION BY DEPOSITION OF NANOCLUSTERS

APPARATUS FOR HARVESTING AND STORING PIEZOELECTRIC ENERGY AND MANUF...

MEMS PRESSURE SENSOR WITH IMPROVED INSENSITIVITY TO THERMO-MECHANIC...

MEMS DEVICE AND METHOD FOR PRODUCING AN MEMS DEVICE OPERATING WITH...

ENCAPSULATION STRUCTURE INCLUDING A MECHANICALLY REINFORCED CAP AND...

METHOD FOR FABRICATING AN INTEGRATED DEVICE

Micromechanical component and manufacturing method for a micromecha...

MEMS APPARATUS

IMPLANTATION OF GASEOUS CHEMICALS INTO CAVITIES FORMED IN INTERMEDI...

Method of Fabricating An Electromechanical Structure Including at L...

METHOD FOR FABRICATING MICRO-ELECTRO-MECHANICAL SYSTEMS (MEMS) DEVICE

MICRO-ELECTRO-MECHANICAL SYSTEMS (MEMS) DEVICE AND METHOD FOR FABRI...

APPARATUS FOR HARVESTING AND STORING PIEZOELECTRIC ENERGY AND MANUF...

METHOD FOR MAKING A REINFORCED SILICON MICROMECHANICAL PART

MEMS RESONATOR, SENSOR HAVING THE SAME AND MANUFACUTRING METHOD FOR...