Treatments for improving wear resistance

Industry

CPC
B81C1/00674

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BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS B81C1/00Manufacture or treatment of devices or systems in or on a substrate

Current Industry

B81C1/00674Treatments for improving wear resistance

Industries

Patents Grantslast 30 patents

Information Patent Grant
Method of depositing nanotwinned nickel-molybdenum-tungsten alloys
- Patent number 11,851,320
- Issue date Dec 26, 2023
- The Johns Hopkins University
- Gi-Dong Sim
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods of manufacture of microisolators and devices for mechanical...
- Patent number 11,312,619
- Issue date Apr 26, 2022
- ENGENIUSMICRO, LLC
- Brian A. English
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Reliable deposition of thin parylene
- Patent number 11,077,462
- Issue date Aug 3, 2021
- California Institute of Technology
- Yu-Chong Tai
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Impact element for a sensor device and a manufacturing method
- Patent number 10,384,929
- Issue date Aug 20, 2019
- Murata Manufacturing Co., Ltd.
- Risto Mutikainen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical timepiece part comprising a lubricated surface and...
- Patent number 10,281,879
- Issue date May 7, 2019
- Nivarox-Far S.A.
- Philippe Dubois
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
One-piece electroformed metal component
- Patent number 10,214,831
- Issue date Feb 26, 2019
- Nivarox-Far S.A.
- Philippe Dubois
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS grid for manipulating structural parameters of MEMS devices
- Patent number 10,199,262
- Issue date Feb 5, 2019
- MEMS DRIVE, INC.
- Roman Gutierrez
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Electronic device using MEMS technology
- Patent number 9,914,637
- Issue date Mar 13, 2018
- Kabushiki Kaisha Toshiba
- Akira Fujimoto
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS cavity substrate
- Patent number 9,828,238
- Issue date Nov 28, 2017
- Invensense, Inc.
- Ilya Gurin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS grid for manipulating structural parameters of MEMS devices
- Patent number 9,617,142
- Issue date Apr 11, 2017
- MEMS DRIVE, INC.
- Roman Gutierrez
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Metal elastic member, miniature machine, method of manufacturing mi...
- Patent number 9,423,591
- Issue date Aug 23, 2016
- Hokuyo Automatic Co., Ltd.
- Toshihiro Mori
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Edge-reinforced micromechanical component
- Patent number 9,227,834
- Issue date Jan 5, 2016
- Diamaze Microtechnology S.A.
- Peter Gluche
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Hybridly integrated component and method for the production thereof
- Patent number 9,212,048
- Issue date Dec 15, 2015
- Robert Bosch GmbH
- Johannes Classen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro mechanical structure and method for fabricating the same
- Patent number 9,212,045
- Issue date Dec 15, 2015
- Infineon Technologies AG
- Ulrich Schmid
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Pressure sensors and methods of making the same
- Patent number 9,212,054
- Issue date Dec 15, 2015
- DunAn Sensing, LLC
- Tom Kwa
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for making a reinforced silicon micromechanical part
- Patent number 8,992,784
- Issue date Mar 31, 2015
- Montres Breguet SA
- Nakis Karapatis
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Hybrid integrated component and method for the manufacture thereof
- Patent number 8,866,238
- Issue date Oct 21, 2014
- Robert Bosch GmbH
- Johannes Classen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Hybrid intergrated component and method for the manufacture thereof
- Patent number 8,796,791
- Issue date Aug 5, 2014
- Robert Bosch GmbH
- Axel Franke
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Optimization of desiccant usage in a MEMS package
- Patent number 8,435,838
- Issue date May 7, 2013
- QUALCOMM MEMS Technologies, Inc.
- Yen Hua Lin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of manufacturing a micromechanical part
- Patent number 8,398,865
- Issue date Mar 19, 2013
- The Swatch Group Research and Development Ltd.
- Rudolf Dinger
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for lubricating contacting surfaces
- Patent number 8,071,164
- Issue date Dec 6, 2011
- Sandia Corporation
- Michael T. Dugger
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Contact device and method for producing the same
- Patent number 7,800,386
- Issue date Sep 21, 2010
- Advantest Corporation
- Kiyoto Nakamura
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Nanocomposite films
- Patent number 7,758,708
- Issue date Jul 20, 2010
- The Governors of the University of Alberta
- David Mitlin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Atomic layer deposition on micro-mechanical devices
- Patent number 7,426,067
- Issue date Sep 16, 2008
- Regents of the University of Colorado
- Victor M. Bright
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Metallic coatings on silicon substrates, and methods of forming met...
- Patent number 7,341,765
- Issue date Mar 11, 2008
- Battelle Energy Alliance, LLC
- Daniel J. Branagan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method and apparatus for MEMS device nebulizer lubrication system
- Patent number 7,264,179
- Issue date Sep 4, 2007
- Texas Instruments Incorporated
- Roger A. Robbins
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Lifetime improvement in microstructures with deformable elements
- Patent number 7,170,667
- Issue date Jan 30, 2007
- Texas Instruments Incorporated
- Jonathan Doan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method and apparatus for MEMS device nebulizer lubrication system
- Patent number 6,921,680
- Issue date Jul 26, 2005
- Texas Instruments Incorporated
- Roger A. Robbins
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Tungsten coating for improved wear resistance and reliability of mi...
- Patent number 6,290,859
- Issue date Sep 18, 2001
- Sandia Corporation
- James G. Fleming
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of applying a monolayer lubricant to micromachines
- Patent number 5,403,665
- Issue date Apr 4, 1995
- Regents of the University of California
- Rodney L. Alley
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
SEMICONDUCTOR STRUCTURE AND METHOD OF MANUFACTURING THE SAME
- Publication number 20240034617
- Publication date Feb 1, 2024
- Taiwan Semiconductor Manufacturing company Ltd.
- JHENG-HONG JIANG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
A MICROFLUIDIC SENSOR
- Publication number 20230404777
- Publication date Dec 21, 2023
- CAMBRIDGE ENTERPRISE LIMITED
- Sohini KAR-NARAYAN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
FORMING A PASSIVATION COATING FOR MEMS DEVICES
- Publication number 20210371275
- Publication date Dec 2, 2021
- TEXAS INSTRUMENTS INCORPORATED
- Simon Joshua Jacobs
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD OF DEPOSITING NANOTWINNED NICKEL-MOLYBDENUM-TUNGSTEN ALLOYS
- Publication number 20200055725
- Publication date Feb 20, 2020
- The Johns Hopkins University
- Gi-Dong Sim
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
IMPACT ELEMENT FOR A SENSOR DEVICE AND A MANUFACTURING METHOD
- Publication number 20190002276
- Publication date Jan 3, 2019
- Murata Manufacturing Co., Ltd.
- Risto MUTIKAINEN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS GRID FOR MANIPULATING STRUCTURAL PARAMETERS OF MEMS DEVICES
- Publication number 20170320724
- Publication date Nov 9, 2017
- MEMS DRIVE, INC.
- Roman Gutierrez
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ELECTRONIC DEVICE AND METHOD OF MANUFACTURING THE ELECTRONIC DEVICE
- Publication number 20170267517
- Publication date Sep 21, 2017
- Kabushiki Kaisha Toshiba
- Akira FUJIMOTO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
RELIABLE DEPOSITION OF THIN PARYLENE
- Publication number 20170113246
- Publication date Apr 27, 2017
- California Institute of Technology
- Yu-Chong Tai
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS GRID FOR MANIPULATING STRUCTURAL PARAMETERS OF MEMS DEVICES
- Publication number 20170088415
- Publication date Mar 30, 2017
- MEMS DRIVE, INC.
- ROMAN GUTIERREZ
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SENSOR ELEMENT, METHOD FOR MANUFACTURING SENSOR ELEMENT, DETECTION...
- Publication number 20170044010
- Publication date Feb 16, 2017
- MITSUBISHI ELECTRIC CORPORATION
- Tomoya HIRATA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS CAVITY SUBSTRATE
- Publication number 20160244324
- Publication date Aug 25, 2016
- InvenSense, Inc.
- Ilya Gurin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
WAFER LEVEL PACKAGE OF MEMS SENSOR AND METHOD FOR MANUFACTURING THE...
- Publication number 20150166328
- Publication date Jun 18, 2015
- Hyundai Motor Company
- Il Seon Yoo
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METAL ELASTIC MEMBER, MINIATURE MACHINE, METHOD OF MANUFACTURING MI...
- Publication number 20140132187
- Publication date May 15, 2014
- HOKUYO AUTOMATIC CO., LTD.
- Toshihiro Mori
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
HYBRID INTERGRATED COMPONENT AND METHOD FOR THE MANUFACTURE THEREOF
- Publication number 20130299927
- Publication date Nov 14, 2013
- ROBERT BOSCH GmbH
- Axel Franke
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
HYBRIDLY INTEGRATED COMPONENT AND METHOD FOR THE PRODUCTION THEREOF
- Publication number 20130299928
- Publication date Nov 14, 2013
- ROBERT BOSCH GmbH
- Johannes CLASSEN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
HYBRID INTEGRATED COMPONENT AND METHOD FOR THE MANUFACTURE THEREOF
- Publication number 20130285166
- Publication date Oct 31, 2013
- ROBERT BOSCH GmbH
- Johannes Classen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR MAKING A REINFORCED SILICON MICROMECHANICAL PART
- Publication number 20130029157
- Publication date Jan 31, 2013
- Montres Breguet SA
- Nakis Karapatis
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
EDGE-REINFORCED MICROMECHANICAL COMPONENT
- Publication number 20120263909
- Publication date Oct 18, 2012
- Diamaze Microtechnology S.A.
- Peter Gluche
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
OPTIMIZATION OF DESICCANT USAGE IN A MEMS PACKAGE
- Publication number 20110012219
- Publication date Jan 20, 2011
- QUALCOMM MEMS TECHNOLOGIES, INC.
- Yen Hua Lin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD OF MANUFACTURING A MICROMECHANICAL PART
- Publication number 20100006540
- Publication date Jan 14, 2010
- THE SWATCH GROUP RESEARCH AND DEVELOPMENT LTD
- Rudolf Dinger
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
CONTACT DEVICE AND METHOD FOR PRODUCING THE SAME
- Publication number 20090184728
- Publication date Jul 23, 2009
- Advantest Corporation
- Kiyoto Nakamura
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
NANOCOMPOSITE FILMS
- Publication number 20080171219
- Publication date Jul 17, 2008
- The Governors of the University of Alberta
- David MITLIN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METALLIC COATINGS ON SILICON SUBSTRATES
- Publication number 20080160266
- Publication date Jul 3, 2008
- Daniel J. Branagan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Use of tungsten interlayer to enhance the initial nucleation and co...
- Publication number 20070257265
- Publication date Nov 8, 2007
- The University of Chicago
- Nevin N. Naguib
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method and apparatus for MEMS device nebulizer lubrication system
- Publication number 20050178848
- Publication date Aug 18, 2005
- Roger A. Robbins
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Metallic coatings on silicon substrates, and methods of forming met...
- Publication number 20050164016
- Publication date Jul 28, 2005
- Daniel J. Branagan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method and apparatus for MEMS device nebulizer lubrication system
- Publication number 20030129782
- Publication date Jul 10, 2003
- Roger A. Robbins
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Treatments for improving wear resistance

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Method of depositing nanotwinned nickel-molybdenum-tungsten alloys

Methods of manufacture of microisolators and devices for mechanical...

Reliable deposition of thin parylene

Impact element for a sensor device and a manufacturing method

Micromechanical timepiece part comprising a lubricated surface and...

One-piece electroformed metal component

MEMS grid for manipulating structural parameters of MEMS devices

Electronic device using MEMS technology

MEMS cavity substrate

MEMS grid for manipulating structural parameters of MEMS devices

Metal elastic member, miniature machine, method of manufacturing mi...

Edge-reinforced micromechanical component

Hybridly integrated component and method for the production thereof

Micro mechanical structure and method for fabricating the same

Pressure sensors and methods of making the same

Method for making a reinforced silicon micromechanical part

Hybrid integrated component and method for the manufacture thereof

Hybrid intergrated component and method for the manufacture thereof

Optimization of desiccant usage in a MEMS package

Method of manufacturing a micromechanical part

Method for lubricating contacting surfaces

Contact device and method for producing the same

Nanocomposite films

Atomic layer deposition on micro-mechanical devices

Metallic coatings on silicon substrates, and methods of forming met...

Method and apparatus for MEMS device nebulizer lubrication system

Lifetime improvement in microstructures with deformable elements

Method and apparatus for MEMS device nebulizer lubrication system

Tungsten coating for improved wear resistance and reliability of mi...

Method of applying a monolayer lubricant to micromachines

Patents Applicationslast 30 patents

SEMICONDUCTOR STRUCTURE AND METHOD OF MANUFACTURING THE SAME

A MICROFLUIDIC SENSOR

FORMING A PASSIVATION COATING FOR MEMS DEVICES

METHOD OF DEPOSITING NANOTWINNED NICKEL-MOLYBDENUM-TUNGSTEN ALLOYS

IMPACT ELEMENT FOR A SENSOR DEVICE AND A MANUFACTURING METHOD

MEMS GRID FOR MANIPULATING STRUCTURAL PARAMETERS OF MEMS DEVICES

ELECTRONIC DEVICE AND METHOD OF MANUFACTURING THE ELECTRONIC DEVICE

RELIABLE DEPOSITION OF THIN PARYLENE

MEMS GRID FOR MANIPULATING STRUCTURAL PARAMETERS OF MEMS DEVICES

SENSOR ELEMENT, METHOD FOR MANUFACTURING SENSOR ELEMENT, DETECTION...

MEMS CAVITY SUBSTRATE

WAFER LEVEL PACKAGE OF MEMS SENSOR AND METHOD FOR MANUFACTURING THE...

METAL ELASTIC MEMBER, MINIATURE MACHINE, METHOD OF MANUFACTURING MI...

HYBRID INTERGRATED COMPONENT AND METHOD FOR THE MANUFACTURE THEREOF

HYBRIDLY INTEGRATED COMPONENT AND METHOD FOR THE PRODUCTION THEREOF

HYBRID INTEGRATED COMPONENT AND METHOD FOR THE MANUFACTURE THEREOF

METHOD FOR MAKING A REINFORCED SILICON MICROMECHANICAL PART

EDGE-REINFORCED MICROMECHANICAL COMPONENT

OPTIMIZATION OF DESICCANT USAGE IN A MEMS PACKAGE

METHOD OF MANUFACTURING A MICROMECHANICAL PART

CONTACT DEVICE AND METHOD FOR PRODUCING THE SAME

NANOCOMPOSITE FILMS

METALLIC COATINGS ON SILICON SUBSTRATES

Use of tungsten interlayer to enhance the initial nucleation and co...

Method and apparatus for MEMS device nebulizer lubrication system

Metallic coatings on silicon substrates, and methods of forming met...

Method and apparatus for MEMS device nebulizer lubrication system