Treatments or methods for avoiding stiction of flexible or moving parts of MEMS not provided for in groups B81C1/0092 - B81C1/00984

Industry

CPC
B81C1/00992

This industry / category may be too specific. Please go to a parent level for more data

Parent Industries

BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS B81C1/00Manufacture or treatment of devices or systems in or on a substrate

Current Industry

B81C1/00992Treatments or methods for avoiding stiction of flexible or moving parts of MEMS not provided for in groups B81C1/0092 - B81C1/00984

Industries

Patents Grantslast 30 patents

Information Patent Grant
Systems and methods for uniform target erosion magnetic assemblies
- Patent number 11,390,520
- Issue date Jul 19, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chen-Fang Chung
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Anti-stiction process for MEMS device
- Patent number 11,305,980
- Issue date Apr 19, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Jui-Chun Weng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for preparing silicon wafer with rough surface and silicon w...
- Patent number 11,192,782
- Issue date Dec 7, 2021
- AAC Acoustic Technologies (Shenzhen) Co., Ltd.
- Wooicheang Goh
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method and apparatus for reducing in-process and in-use stiction fo...
- Patent number 10,870,574
- Issue date Dec 22, 2020
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Lee-Chuan Tseng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing a micromechanical timepiece part and said...
- Patent number 10,558,169
- Issue date Feb 11, 2020
- Nivarox-Far S.A.
- Philippe Dubois
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Anti-stiction process for MEMS device
- Patent number 10,513,432
- Issue date Dec 24, 2019
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Jui-Chun Weng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method and apparatus for reducing in-process and in-use stiction fo...
- Patent number 10,273,143
- Issue date Apr 30, 2019
- Taiwan Semiconductor Manufacturing Company, Ltd
- Lee-Chuan Tseng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method and apparatus for reducing in-process and in-use stiction fo...
- Patent number 9,878,899
- Issue date Jan 30, 2018
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Lee-Chuan Tseng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS structure having rounded edge stopper and method of fabricatin...
- Patent number 9,517,927
- Issue date Dec 13, 2016
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chih-Jen Chan
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
METHOD AND SYSTEM FOR FABRICATING A MEMS DEVICE CAP
- Publication number 20230045563
- Publication date Feb 9, 2023
- InvenSense, Inc.
- Daesung Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ANTI-STICTION PROCESS FOR MEMS DEVICE
- Publication number 20220242724
- Publication date Aug 4, 2022
- Taiwan Semiconductor Manufacturing Co.,Ltd
- Jui-Chun WENG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ANTI-STICTION PROCESS FOR MEMS DEVICE
- Publication number 20200123003
- Publication date Apr 23, 2020
- Taiwan Semiconductor Manufacturing Co., LTD
- Jui-Chun Weng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD AND APPARATUS FOR REDUCING IN-PROCESS AND IN-USE STICTION FO...
- Publication number 20190241425
- Publication date Aug 8, 2019
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Lee-Chuan Tseng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD AND APPARATUS FOR REDUCING IN-PROCESS AND IN-USE STICTION FO...
- Publication number 20180134542
- Publication date May 17, 2018
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Lee-Chuan Tseng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD AND APPARATUS FOR REDUCING IN-PROCESS AND IN-USE STICTION FO...
- Publication number 20170096328
- Publication date Apr 6, 2017
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Lee-Chuan Tseng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS STRUCTURE HAVING ROUNDED EDGE STOPPER AND METHOD OF FABRICATIN...
- Publication number 20160318754
- Publication date Nov 3, 2016
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chih-Jen CHAN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR FORMING ANTI STICTION COATING AND ANTI STICTION COATING...
- Publication number 20150346391
- Publication date Dec 3, 2015
- HIMAX DISPLAY, INC.
- Roland V. Gelder
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PACKAGING MICRO DEVICES
- Publication number 20080116554
- Publication date May 22, 2008
- SPATIAL PHOTONICS, INC.
- Shaoher X. Pan
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Treatments or methods for avoiding stiction of flexible or moving parts of MEMS not provided for in groups B81C1/0092 - B81C1/00984

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Systems and methods for uniform target erosion magnetic assemblies

Anti-stiction process for MEMS device

Method for preparing silicon wafer with rough surface and silicon w...

Method and apparatus for reducing in-process and in-use stiction fo...

Method for manufacturing a micromechanical timepiece part and said...

Anti-stiction process for MEMS device

Method and apparatus for reducing in-process and in-use stiction fo...

Method and apparatus for reducing in-process and in-use stiction fo...

MEMS structure having rounded edge stopper and method of fabricatin...

Patents Applicationslast 30 patents

METHOD AND SYSTEM FOR FABRICATING A MEMS DEVICE CAP

ANTI-STICTION PROCESS FOR MEMS DEVICE

ANTI-STICTION PROCESS FOR MEMS DEVICE

METHOD AND APPARATUS FOR REDUCING IN-PROCESS AND IN-USE STICTION FO...

METHOD AND APPARATUS FOR REDUCING IN-PROCESS AND IN-USE STICTION FO...

METHOD AND APPARATUS FOR REDUCING IN-PROCESS AND IN-USE STICTION FO...

MEMS STRUCTURE HAVING ROUNDED EDGE STOPPER AND METHOD OF FABRICATIN...

METHOD FOR FORMING ANTI STICTION COATING AND ANTI STICTION COATING...

PACKAGING MICRO DEVICES