Tubes for localised analysis using electron or ion beams

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H01J2237/25

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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J2237/00Discharge tubes exposing object to beam

Current Industry

H01J2237/25Tubes for localised analysis using electron or ion beams

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Methods and systems including pulsed dual-beam charge neutralization
- Patent number 11,915,901
- Issue date Feb 27, 2024
- ULVAC-PHI, INCORPORATED
- Scott R. Bryan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Automated application of drift correction to sample studied under e...
- Patent number 11,902,665
- Issue date Feb 13, 2024
- PROTOCHIPS, INC.
- Franklin Stampley Walden
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
3D metrology from 3D datacube created from stack of registered imag...
- Patent number 11,728,126
- Issue date Aug 15, 2023
- Applied Materials Israel Ltd.
- Ilya Blayvas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multiple beam secondary ion mass spectrometry device
- Patent number 11,545,352
- Issue date Jan 3, 2023
- LUXEMBOURG INSTITUTE OF SCIENCE AND TECHNOLOGY (LIST)
- Marina Verruno
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Automated application of drift correction to sample studied under e...
- Patent number 11,514,586
- Issue date Nov 29, 2022
- PROTOCHIPS, INC.
- Franklin Stampley Walden
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
X-ray imaging in cross-section using un-cut lamella with background...
- Patent number 11,501,951
- Issue date Nov 15, 2022
- Applied Materials Israel Ltd.
- Yehuda Zur
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Operating a particle beam device
- Patent number 11,501,948
- Issue date Nov 15, 2022
- Carl Zeiss Microscopy GmbH
- Luyang Han
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Systems and approaches for semiconductor metrology and surface anal...
- Patent number 11,430,647
- Issue date Aug 30, 2022
- NOVA MEASURING INSTRUMENTS, INC.
- David A. Reed
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Auger electron microscope and analysis method
- Patent number 11,391,682
- Issue date Jul 19, 2022
- Jeol Ltd.
- Kenichi Tsutsumi
- G01 - MEASURING TESTING
Information Patent Grant
Ion generator device supports
- Patent number 11,389,808
- Issue date Jul 19, 2022
- PLASMA AIR INTERNATIONAL, INC
- Lawrence T. Sunshine
- B03 - SEPARATION OF SOLID MATERIALS USING LIQUIDS OR USING PNEUMATIC TABLES O...
Information Patent Grant
Electrochemical measurement of electron beam-induced pH change duri...
- Patent number 11,264,199
- Issue date Mar 1, 2022
- University of Maryland, College Park
- Taylor Woehl
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for SEM-guided AFM scan with dynamically varied scan speed
- Patent number 11,158,486
- Issue date Oct 26, 2021
- JIANGSU JITRI MICRO-NANO AUTOMATION INSTITUTE CO., LTD.
- Yu Sun
- G01 - MEASURING TESTING
Information Patent Grant
Nano vacuum tube
- Patent number 11,152,188
- Issue date Oct 19, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Hsien-Yu Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System for detection of passive voltage contrast
- Patent number 11,035,899
- Issue date Jun 15, 2021
- GLOBALFOUNDRIES Singapore Pte. Ltd.
- Changqing Chen
- G01 - MEASURING TESTING
Information Patent Grant
Hard X-ray photoelectron spectroscopy arrangement and system
- Patent number 11,002,694
- Issue date May 11, 2021
- Scienta Omicron AB
- Tomas Wiell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
X-ray analyzer and method for correcting counting rate
- Patent number 10,748,741
- Issue date Aug 18, 2020
- Jeol Ltd.
- Kazunori Tsukamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of performing electron diffraction pattern analysis upon a s...
- Patent number 10,663,414
- Issue date May 26, 2020
- Oxford Instruments Nanotechnology Tools Limited
- Frank Willi Bauer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Nano vacuum tube
- Patent number 10,566,173
- Issue date Feb 18, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Hsien-Yu Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron probe microanalyzer and storage medium
- Patent number 10,410,825
- Issue date Sep 10, 2019
- Shimadzu Corporation
- Hiroshi Sakamae
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for inspecting a surface of a sample, using a...
- Patent number 10,395,887
- Issue date Aug 27, 2019
- Technische Universiteit Delft
- Pieter Kruit
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle inspection method and charged particle system
- Patent number 10,354,831
- Issue date Jul 16, 2019
- Carl Zeiss Microscopy GmbH
- Thomas Kemen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron microscope with plural X-ray detectors for acquiring eleme...
- Patent number 10,002,741
- Issue date Jun 19, 2018
- Industrial Technology Research Institute
- Fu-Rong Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for correlating images of a photolithographic...
- Patent number 9,990,737
- Issue date Jun 5, 2018
- Carl Zeiss SMT GmbH
- Dieter Weber
- G02 - OPTICS
Information Patent Grant
Electronic state calculation method, electronic state calculation d...
- Patent number 9,792,255
- Issue date Oct 17, 2017
- Osaka University
- Koichi Kusakabe
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Image type electron spin polarimeter
- Patent number 9,741,533
- Issue date Aug 22, 2017
- Shanghai Institute of Microsystem and Information Technology, Chinese Academy...
- Shan Qiao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Mineral identification using sequential decomposition into elements...
- Patent number 9,734,986
- Issue date Aug 15, 2017
- FEI Company
- Michael James Owen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron beam irradiation method and scanning electron microscope
- Patent number 9,640,366
- Issue date May 2, 2017
- Hitachi High-Technologies Corporation
- Toshiyuki Yokosuka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of acquiring EBSP patterns
- Patent number 9,618,463
- Issue date Apr 11, 2017
- FEI Company
- Marek Uncovský
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Beam separator device, charged particle beam device and methods of...
- Patent number 9,472,373
- Issue date Oct 18, 2016
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Stefan Lanio
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method of applying small-angle electron scattering to...
- Patent number 9,390,888
- Issue date Jul 12, 2016
- Industrial Technology Research Institute
- Wen-Li Wu
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE INSPECTION METHOD
- Publication number 20240412943
- Publication date Dec 12, 2024
- Samsung Electronics Co., LTD
- Jinwoo Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS, SYSTEM AND TECHNIQUES FOR MASS ANALYZED ION BEAM
- Publication number 20240339287
- Publication date Oct 10, 2024
- Applied Materials, Inc.
- Alexandre Likhanskii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HYBRID APPARATUS, SYSTEM AND TECHNIQUES FOR MASS ANALYZED ION BEAM
- Publication number 20240339288
- Publication date Oct 10, 2024
- Applied Materials, Inc.
- Alexandre Likhanskii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
AUTOMATED APPLICATION OF DRIFT CORRECTION TO SAMPLE STUDIED UNDER E...
- Publication number 20240267628
- Publication date Aug 8, 2024
- PROTOCHIPS, INC.
- Franklin Stampley Walden
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
IN-LINE DEPTH MEASUREMENTS BY AFM
- Publication number 20240212976
- Publication date Jun 27, 2024
- APPLIED MATERIALS ISRAEL LTD.
- Yehuda Zur
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged Particle Beam Device and Image Acquisition Method
- Publication number 20230402252
- Publication date Dec 14, 2023
- JEOL Ltd.
- Nobuyuki Ikeo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
3D METROLOGY FROM 3D DATACUBE CREATED FROM STACK OF REGISTERED IMAG...
- Publication number 20230335370
- Publication date Oct 19, 2023
- APPLIED MATERIALS ISRAEL LTD.
- Ilya Blayvas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged Particle Beam Apparatus
- Publication number 20230307206
- Publication date Sep 28, 2023
- JEOL Ltd.
- Kenichi Tsutsumi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND SYSTEMS INCLUDING PULSED DUAL-BEAM CHARGE NEUTRALIZATION
- Publication number 20230245848
- Publication date Aug 3, 2023
- ULVAC-PHI, INCORPORATED
- Scott R. Bryan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND APPROACHES FOR SEMICONDUCTOR METROLOGY AND SURFACE ANAL...
- Publication number 20230091625
- Publication date Mar 23, 2023
- NOVA MEASURING INSTRUMENTS INC.
- David A. REED
- G01 - MEASURING TESTING
Information Patent Application
X-RAY IMAGING IN CROSS-SECTION USING UN-CUT LAMELLA WITH BACKGROUND...
- Publication number 20220367146
- Publication date Nov 17, 2022
- APPLIED MATERIALS ISRAEL LTD.
- Yehuda Zur
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Auger Electron Microscope and Analysis Method
- Publication number 20210255124
- Publication date Aug 19, 2021
- JEOL Ltd.
- Kenichi Tsutsumi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROCHEMICAL MEASUREMENT OF ELECTRON BEAM-INDUCED PH CHANGE DURI...
- Publication number 20210249219
- Publication date Aug 12, 2021
- University of Maryland, College Park
- Taylor Woehl
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
A METHOD FOR SEM-GUIDED AFM SCAN WITH DYNAMICALLY VARIED SCAN SPEED
- Publication number 20210125809
- Publication date Apr 29, 2021
- JIANGSU JITRI MICRO-NANO AUTOMATION INSTITUTE CO., LTD.
- Yu SUN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INSPECTION METHOD AND INSPECTION APPARATUS
- Publication number 20210043417
- Publication date Feb 11, 2021
- Kioxia Corporation
- Osamu NAGANO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM FOR DETECTION OF PASSIVE VOLTAGE CONTRAST
- Publication number 20200363469
- Publication date Nov 19, 2020
- GLOBALFOUNDRIES SINGAPORE PTE. LTD.
- Changqing CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
NANO VACUUM TUBE
- Publication number 20200161085
- Publication date May 21, 2020
- Taiwan Semiconductor Manufacturing Co., LTD
- Hsien-Yu CHANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HARD X-RAY PHOTOELECTRON SPECTROSCOPY ARRANGEMENT AND SYSTEM
- Publication number 20200103358
- Publication date Apr 2, 2020
- SCIENTA OMICRON AB
- Tomas WIELL
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
X-Ray Analyzer and Method for Correcting Counting Rate
- Publication number 20200058464
- Publication date Feb 20, 2020
- JEOL Ltd.
- Kazunori Tsukamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Apparatus and method for inspecting a surface of a sample, using a...
- Publication number 20190259570
- Publication date Aug 22, 2019
- Technische Universiteit Delft
- Pieter KRUIT
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
NANO VACUUM TUBE
- Publication number 20190035598
- Publication date Jan 31, 2019
- Taiwan Semiconductor Manufacturing Co., LTD
- Hsien-Yu CHANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON PROBE MICROANALYZER AND STORAGE MEDIUM
- Publication number 20190006146
- Publication date Jan 3, 2019
- Shimadzu Corporation
- Hiroshi SAKAMAE
- G01 - MEASURING TESTING
Information Patent Application
SAMPLE HOLDER FOR CHARGED PARTICLE BEAM DEVICE, AND CHARGED PARTICL...
- Publication number 20170018397
- Publication date Jan 19, 2017
- Hitachi High-Technologies Corporation
- Yuya SUZUKI
- G01 - MEASURING TESTING
Information Patent Application
METHOD OF PERFORMING ELECTRON DIFFRACTION PATTERN ANALYSIS UPON A S...
- Publication number 20160356729
- Publication date Dec 8, 2016
- OXFORD INSTRUMENTS NANOTECHNOLOGY TOOLS LIMITED
- Frank Willi BAUER
- G01 - MEASURING TESTING
Information Patent Application
IMAGE TYPE ELECTRON SPIN POLARIMETER
- Publication number 20160172157
- Publication date Jun 16, 2016
- SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY, CHINESE ACADEMY...
- SHAN QIAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electron Beam Interference Device and Electron Beam Interferometry
- Publication number 20140332684
- Publication date Nov 13, 2014
- Hitachi, Ltd
- Ken Harada
- G01 - MEASURING TESTING
Information Patent Application
PRINTED CIRCUIT BOARD MULTIPOLE UNITS USED FOR ION TRANSPORTATION
- Publication number 20140326874
- Publication date Nov 6, 2014
- CARL ZEISS MICROSCOPY GMBH
- Albrecht Glasmachers
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION SOURCES, SYSTEMS AND METHODS
- Publication number 20140306121
- Publication date Oct 16, 2014
- Carl Zeiss Microscopy, LLC
- Billy W. Ward
- B82 - NANO-TECHNOLOGY
Information Patent Application
CONTROL IMAGING METHODS IN ADVANCED ULTRAFAST ELECTRON MICROSCOPY
- Publication number 20140131574
- Publication date May 15, 2014
- California Institute of Technology
- Ahmed H. Zewail
- G01 - MEASURING TESTING
Information Patent Application
MINERAL IDENTIFICATION USING SEQUENTIAL DECOMPOSITION INTO ELEMENTS...
- Publication number 20140117229
- Publication date May 1, 2014
- FEI Company
- Michael James Owen
- G01 - MEASURING TESTING

Tubes for localised analysis using electron or ion beams

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Methods and systems including pulsed dual-beam charge neutralization

Automated application of drift correction to sample studied under e...

3D metrology from 3D datacube created from stack of registered imag...

Multiple beam secondary ion mass spectrometry device

Automated application of drift correction to sample studied under e...

X-ray imaging in cross-section using un-cut lamella with background...

Operating a particle beam device

Systems and approaches for semiconductor metrology and surface anal...

Auger electron microscope and analysis method

Ion generator device supports

Electrochemical measurement of electron beam-induced pH change duri...

Method for SEM-guided AFM scan with dynamically varied scan speed

Nano vacuum tube

System for detection of passive voltage contrast

Hard X-ray photoelectron spectroscopy arrangement and system

X-ray analyzer and method for correcting counting rate

Method of performing electron diffraction pattern analysis upon a s...

Nano vacuum tube

Electron probe microanalyzer and storage medium

Apparatus and method for inspecting a surface of a sample, using a...

Charged particle inspection method and charged particle system

Electron microscope with plural X-ray detectors for acquiring eleme...

Apparatus and method for correlating images of a photolithographic...

Electronic state calculation method, electronic state calculation d...

Image type electron spin polarimeter

Mineral identification using sequential decomposition into elements...

Electron beam irradiation method and scanning electron microscope

Method of acquiring EBSP patterns

Beam separator device, charged particle beam device and methods of...

Apparatus and method of applying small-angle electron scattering to...

Patents Applicationslast 30 patents

SUBSTRATE INSPECTION METHOD

APPARATUS, SYSTEM AND TECHNIQUES FOR MASS ANALYZED ION BEAM

HYBRID APPARATUS, SYSTEM AND TECHNIQUES FOR MASS ANALYZED ION BEAM

AUTOMATED APPLICATION OF DRIFT CORRECTION TO SAMPLE STUDIED UNDER E...

IN-LINE DEPTH MEASUREMENTS BY AFM

Charged Particle Beam Device and Image Acquisition Method

3D METROLOGY FROM 3D DATACUBE CREATED FROM STACK OF REGISTERED IMAG...

Charged Particle Beam Apparatus

METHODS AND SYSTEMS INCLUDING PULSED DUAL-BEAM CHARGE NEUTRALIZATION

SYSTEMS AND APPROACHES FOR SEMICONDUCTOR METROLOGY AND SURFACE ANAL...

X-RAY IMAGING IN CROSS-SECTION USING UN-CUT LAMELLA WITH BACKGROUND...

Auger Electron Microscope and Analysis Method

ELECTROCHEMICAL MEASUREMENT OF ELECTRON BEAM-INDUCED PH CHANGE DURI...

A METHOD FOR SEM-GUIDED AFM SCAN WITH DYNAMICALLY VARIED SCAN SPEED

INSPECTION METHOD AND INSPECTION APPARATUS

SYSTEM FOR DETECTION OF PASSIVE VOLTAGE CONTRAST

NANO VACUUM TUBE

HARD X-RAY PHOTOELECTRON SPECTROSCOPY ARRANGEMENT AND SYSTEM

X-Ray Analyzer and Method for Correcting Counting Rate

Apparatus and method for inspecting a surface of a sample, using a...

NANO VACUUM TUBE

ELECTRON PROBE MICROANALYZER AND STORAGE MEDIUM

SAMPLE HOLDER FOR CHARGED PARTICLE BEAM DEVICE, AND CHARGED PARTICL...

METHOD OF PERFORMING ELECTRON DIFFRACTION PATTERN ANALYSIS UPON A S...

IMAGE TYPE ELECTRON SPIN POLARIMETER

Electron Beam Interference Device and Electron Beam Interferometry

PRINTED CIRCUIT BOARD MULTIPOLE UNITS USED FOR ION TRANSPORTATION

ION SOURCES, SYSTEMS AND METHODS

CONTROL IMAGING METHODS IN ADVANCED ULTRAFAST ELECTRON MICROSCOPY

MINERAL IDENTIFICATION USING SEQUENTIAL DECOMPOSITION INTO ELEMENTS...