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Using a carrier for applying a plurality of packaging lids to the system wafer
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B81C2203/0127
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PERFORMING OPERATIONS TRANSPORTING
B81
Micro-structural technology
B81C
PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS
B81C2203/00
Forming micro-structural systems
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B81C2203/0127
Using a carrier for applying a plurality of packaging lids to the system wafer
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Patents Grants
last 30 patents
Information
Patent Grant
Eutectic bonding with AlGe
Patent number
11,724,933
Issue date
Aug 15, 2023
Rohm Co., Ltd.
Martin Heller
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Optical electronics device
Patent number
11,667,523
Issue date
Jun 6, 2023
Texas Instruments Incorporated
Simon Joshua Jacobs
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Optical electronics device
Patent number
10,894,712
Issue date
Jan 19, 2021
Texas Instruments Incorporated
Simon Joshua Jacobs
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Eutectic bonding with AlGe
Patent number
10,793,427
Issue date
Oct 6, 2020
Kionix, Inc.
Martin Heller
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Eutectic bonding with ALGe
Patent number
10,766,767
Issue date
Sep 8, 2020
Kionix, Inc.
Martin Heller
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for processing product wafers using carrier substrates
Patent number
10,759,660
Issue date
Sep 1, 2020
Qorvo US, Inc.
Jonathan Hammond
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for producing optical components using functional elements
Patent number
10,752,500
Issue date
Aug 25, 2020
FRAUNHOFER-GESELLSCAFT ZUR FÖRDERUNG ANGEWANDTEN FORSCHUNG E.V.
Hans Joachim Quenzer
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Optical electronic device and method of fabrication
Patent number
9,994,441
Issue date
Jun 12, 2018
Texas Instruments Incorporated
Simon Joshua Jacobs
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Temporary mechanical stabilization of semiconductor cavities
Patent number
9,988,262
Issue date
Jun 5, 2018
Infineon Technologies AG
Dominic Maier
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Transfer method, manufacturing method, device and electronic appara...
Patent number
9,908,775
Issue date
Mar 6, 2018
GOERTEK INC.
Quanbo Zou
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for handling a thin substrate and for substrate capping
Patent number
9,266,724
Issue date
Feb 23, 2016
Taiwan Semiconductor Manufacturing Company, Ltd.
Kuei-Sung Chang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Stacked MEMS microphone packaging method
Patent number
9,260,298
Issue date
Feb 16, 2016
Lingsen Precision Industries, Ltd.
Hsien-Ken Liao
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Thin back glass interconnect
Patent number
9,045,332
Issue date
Jun 2, 2015
QUALCOMM MEMS Technologies, Inc.
Ravindra V. Shenoy
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for handling a thin substrate and for substrate capping
Patent number
8,796,110
Issue date
Aug 5, 2014
Taiwan Semiconductor Manufacturing Company, Ltd.
Kuei-Sung Chang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method and device for encapsulating microstructures
Patent number
8,617,413
Issue date
Dec 31, 2013
KFM Technology
Sebastien Brault
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for manufacturing capped MEMS components
Patent number
8,470,631
Issue date
Jun 25, 2013
Robert Bosch GmbH
Torsten Kramer
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS package having formed metal lid
Patent number
8,309,388
Issue date
Nov 13, 2012
Texas Instruments Incorporated
Kurt P. Wachtler
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Protection capsule for MEMS devices
Patent number
7,682,860
Issue date
Mar 23, 2010
DALSA Semiconductor Inc.
Luc Ouellet
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Wafer lever fixture and method for packaging micro-electro-mechanic...
Patent number
7,651,888
Issue date
Jan 26, 2010
Advanced Semiconductor Engineering, Inc.
Hsueh An Yang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method of manufacturing semiconductor sensor
Patent number
7,598,118
Issue date
Oct 6, 2009
Denso Corporation
Kazuhiko Sugiura
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Wafer level package and method for making the same
Patent number
7,491,568
Issue date
Feb 17, 2009
Advanced Semiconductor Engineering, Inc.
Wei-Chung Wang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for fabricating protective caps for protecting elements on a...
Patent number
7,410,886
Issue date
Aug 12, 2008
Advanced Semiconductor Engineering, Inc.
Wei-Chung Wang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for forming at least one protective cap
Patent number
7,407,614
Issue date
Aug 5, 2008
Silverbrook Research Pty Ltd
Kia Silverbrook
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for wafer-level package
Patent number
7,361,284
Issue date
Apr 22, 2008
Touch Micro-System Technology Inc.
Chih-Hsien Chen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Moulding assembly for forming at least one protective cap
Patent number
7,284,976
Issue date
Oct 23, 2007
Silverbrook Research Pty Ltd
Kia Silverbrook
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Placement tool for wafer scale caps
Patent number
7,173,332
Issue date
Feb 6, 2007
Silverbrook Research Pty Ltd
Kia Silverbrook
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Two part mold for wafer scale caps
Patent number
7,126,216
Issue date
Oct 24, 2006
Silverbrook Research Pty Ltd
Kia Silverbrook
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Mold making method for wafer scale caps
Patent number
7,026,176
Issue date
Apr 11, 2006
Silverbrook Research Pty Ltd
Kia Silverbrook
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method of fabricating an array of wafer scale polymeric caps
Patent number
7,008,819
Issue date
Mar 7, 2006
Silverbrook Research Pty Ltd
Kia Silverbrook
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method of protecting microfabricated devices with protective caps
Patent number
7,001,793
Issue date
Feb 21, 2006
Silverbrook Research Pty Ltd
Kia Silverbrook
B81 - MICRO-STRUCTURAL TECHNOLOGY
Patents Applications
last 30 patents
Information
Patent Application
MEMS DEVICE HAVING AN IMPROVED CAP AND MANUFACTURING PROCESS THEREOF
Publication number
20240239648
Publication date
Jul 18, 2024
STMicroelectronics S.r.l.
Silvia NICOLI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
PACKAGING STRUCTURES AND PACKAGING METHODS FOR ULTRASOUND-ON-CHIP D...
Publication number
20230034707
Publication date
Feb 2, 2023
BFLY Operations, Inc
Jianwei Liu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR PRODUCING A PLURALITY OF SENSOR DEVICES, AND SENSOR DEVICE
Publication number
20220041436
Publication date
Feb 10, 2022
ROBERT BOSCH GmbH
Daniel Haug
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
OPTICAL ELECTRONICS DEVICE
Publication number
20210139320
Publication date
May 13, 2021
TEXAS INSTRUMENTS INCORPORATED
Simon Joshua Jacobs
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
PACKAGING STRUCTURES AND PACKAGING METHODS FOR ULTRASOUND-ON-CHIP D...
Publication number
20200239299
Publication date
Jul 30, 2020
Butterfly Network, Inc.
Jianwei Liu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
EUTECTIC BONDING WITH ALGe
Publication number
20200048078
Publication date
Feb 13, 2020
Kionix, Inc.
Martin Heller
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Eutectic Bonding With ALGe
Publication number
20190263656
Publication date
Aug 29, 2019
Kionix, Inc.
Martin Heller
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
OPTICAL ELECTRONICS DEVICE
Publication number
20180257930
Publication date
Sep 13, 2018
TEXAS INSTRUMENTS INCORPORATED
Simon Joshua Jacobs
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
TEMPORARY MECHANICAL STABILIZATION OF SEMICONDUCTOR CAVITIES
Publication number
20180086632
Publication date
Mar 29, 2018
INFINEON TECHNOLOGIES AG
Dominic Maier
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
LOW COST WAFER LEVEL PROCESS FOR PACKAGING MEMS THREE DIMENSIONAL D...
Publication number
20170233247
Publication date
Aug 17, 2017
The Regents of the University of California
Andrei A. Shkel
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
STACKED MEMS MICROPHONE PACKAGING METHOD
Publication number
20160052780
Publication date
Feb 25, 2016
LINGSEN PRECISION INDUSTRIES, LTD.
Hsien-Ken LIAO
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR PROCESSING PRODUCT WAFERS USING CARRIER SUBSTRATES
Publication number
20150329355
Publication date
Nov 19, 2015
RF Micro Devices, Inc.
Jonathan Hammond
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Method for Handling a Thin Substrate and for Substrate Capping
Publication number
20140322894
Publication date
Oct 30, 2014
Kuei-Sung Chang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
THIN BACK GLASS INTERCONNECT
Publication number
20130135317
Publication date
May 30, 2013
QUALCOMM MEMS TECHNOLOGIES, INC.
Ravindra V. Shenoy
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ENCAPSULATION OF EMS DEVICES ON GLASS
Publication number
20130106868
Publication date
May 2, 2013
QUALCOMM MEMS TECHNOLOGIES, INC.
Ravindra V. Shenoy
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Method for Handling a Thin Substrate and for Substrate Capping
Publication number
20130052797
Publication date
Feb 28, 2013
Taiwan Semiconductor Manufacturing Company, Ltd.
Kuei-Sung Chang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Wafer Level Package and Manufacturing Method Using Photodefinable P...
Publication number
20120094418
Publication date
Apr 19, 2012
TriQuint Semiconductor, Inc.
George Grama
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD AND DEVICE FOR ENCAPSULATING MICROSTRUCTURES
Publication number
20110165365
Publication date
Jul 7, 2011
KFM TECHNOLOGY
Sebastien Brault
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
DEVICE PACKAGES AND METHODS OF FABRICATING THE SAME
Publication number
20110115036
Publication date
May 19, 2011
ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE
Jong Tae MOON
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR MANUFACTURING CAPPED MEMS COMPONENTS
Publication number
20100267183
Publication date
Oct 21, 2010
Torsten Kramer
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS Package Having Formed Metal Lid
Publication number
20090267223
Publication date
Oct 29, 2009
TEXAS INSTRUMENTS INCORPORATED
Kurt P. WACHTLER
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
WAFER LEVER FIXTURE AND METHOD FOR PACKAGING MICRO-ELECTRO-MECHANIC...
Publication number
20090215228
Publication date
Aug 27, 2009
ADVANCED SEMICONDUCTOR ENGINEERING INC.
Hsueh An YANG
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR MANUFACTURING A SEMICONDUCTOR PACKAGE STRUCTURE HAVING M...
Publication number
20080188026
Publication date
Aug 7, 2008
Advanced Semiconductor Engineering, Inc.
Meng-Jen Wang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
PROTECTION CAPSULE FOR MEMS DEVICES
Publication number
20070231943
Publication date
Oct 4, 2007
DALSA Semiconductor Inc.
Luc Ouellet
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR WAFER-LEVEL PACKAGE
Publication number
20070218584
Publication date
Sep 20, 2007
Chih-Hsien Chen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Method of manufacturing semiconductor sensor
Publication number
20070117260
Publication date
May 24, 2007
DENSO CORPORATION
Kazuhiko Sugiura
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Wafer level package and method for making the same
Publication number
20070048899
Publication date
Mar 1, 2007
Wei-Chung Wang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Method for Fabricating Protective Caps for Protecting Elements on a...
Publication number
20070031994
Publication date
Feb 8, 2007
Wei-Chung Wang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Method for forming at least one protective cap
Publication number
20050142686
Publication date
Jun 30, 2005
Kia Silverbrook
Kia Silverbrook
B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information
Patent Application
Moulding assembly for forming at least one protective cap
Publication number
20050142242
Publication date
Jun 30, 2005
Kia Silverbrook
Kia Silverbrook
B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL