using electron beams

Industry

CPC
G01R31/2653

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GPHYSICS G01Measuring instruments G01RMEASURING ELECTRIC VARIABLES MEASURING MAGNETIC VARIABLES G01R31/00Arrangements for testing electric properties Arrangements for locating electric faults Arrangements for electrical testing characterised by what is being tested not provided for elsewhere

Current Industry

G01R31/2653using electron beams

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Inspection method
- Patent number 12,181,513
- Issue date Dec 31, 2024
- HITACHI HIGH-TECH CORPORATION
- Shota Mitsugi
- G01 - MEASURING TESTING
Information Patent Grant
Detection method for sensitive parts of ionization damage in bipola...
- Patent number 12,153,082
- Issue date Nov 26, 2024
- Harbin Institute of Technology
- Xingji Li
- G01 - MEASURING TESTING
Information Patent Grant
Systems, devices, and methods for performing a non-contact electric...
- Patent number 12,038,476
- Issue date Jul 16, 2024
- PDF Solutions, Inc.
- Indranil De
- G01 - MEASURING TESTING
Information Patent Grant
Systems, devices, and methods for aligning a particle beam and perf...
- Patent number 12,020,897
- Issue date Jun 25, 2024
- PDF Solutions, Inc.
- Indranil De
- G01 - MEASURING TESTING
Information Patent Grant
Test structure and test method for online detection of metal via op...
- Patent number 11,906,572
- Issue date Feb 20, 2024
- Shanghai Huali Integrated Circuit Corporation
- Shumiao Sun
- G01 - MEASURING TESTING
Information Patent Grant
Systems, devices, and methods for performing a non-contact electric...
- Patent number 11,668,746
- Issue date Jun 6, 2023
- PDF Solutions, Inc.
- Indranil De
- G01 - MEASURING TESTING
Information Patent Grant
Systems, devices, and methods for aligning a particle beam and perf...
- Patent number 11,605,526
- Issue date Mar 14, 2023
- PDF Solutions, Inc.
- Indranil De
- G01 - MEASURING TESTING
Information Patent Grant
In-line device electrical property estimating method and test struc...
- Patent number 11,480,606
- Issue date Oct 25, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chen-Han Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for performing a non-contact electrical measurement on a ce...
- Patent number 11,340,293
- Issue date May 24, 2022
- PDF Solutions, Inc.
- Indranil De
- G01 - MEASURING TESTING
Information Patent Grant
Methods for aligning a particle beam and performing a non-contact e...
- Patent number 11,328,899
- Issue date May 10, 2022
- PDF Solutions, Inc.
- Indranil De
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for calibrating verticality of particle beam and system appl...
- Patent number 11,112,482
- Issue date Sep 7, 2021
- Yangtze Memory Technologies Co., Ltd.
- Guangdian Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Soft error inspection method, soft error inspection apparatus, and...
- Patent number 11,054,460
- Issue date Jul 6, 2021
- Fujitsu Limited
- Takeshi Soeda
- G01 - MEASURING TESTING
Information Patent Grant
Optical-mode selection for multi-mode semiconductor inspection
- Patent number 11,010,885
- Issue date May 18, 2021
- KLA Corporation
- Bjorn Brauer
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method for inspecting semiconductor device structure
- Patent number 10,345,373
- Issue date Jul 9, 2019
- Taiwan Semiconductor Manufacturing Co., Ltd
- Baohua Niu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Pulsed electron beam current probe and methods of operating the same
- Patent number 10,114,065
- Issue date Oct 30, 2018
- SanDisk Technologies LLC
- Norio Toshima
- G01 - MEASURING TESTING
Information Patent Grant
Testing apparatus and method for testing semiconductor chips
- Patent number 10,060,967
- Issue date Aug 28, 2018
- TOSHIBA MEMORY CORPORATION
- Motoshi Seto
- G01 - MEASURING TESTING
Information Patent Grant
Method for making thin film transistor
- Patent number 9,960,354
- Issue date May 1, 2018
- Tsinghua University
- Dong-Qi Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for detecting defects of wafer by wafer sort
- Patent number 9,869,712
- Issue date Jan 16, 2018
- Macronix International Co., Ltd.
- Tuung Luoh
- G01 - MEASURING TESTING
Information Patent Grant
Multidimensional structural access
- Patent number 9,696,372
- Issue date Jul 4, 2017
- FEI Company
- Jeffrey Blackwood
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Optical to optical methods enhancing the sensitivity and resolution...
- Patent number 9,366,719
- Issue date Jun 14, 2016
- Attofemto, Inc.
- Paul L. Pfaff
- G01 - MEASURING TESTING
Information Patent Grant
Evaluating transistors with e-beam inspection
- Patent number 9,291,665
- Issue date Mar 22, 2016
- GLOBALFOUNDRIES Inc.
- Oliver D. Patterson
- G01 - MEASURING TESTING
Information Patent Grant
Methods and processes for optical interferometric or holographic te...
- Patent number 8,736,823
- Issue date May 27, 2014
- Attofemto, Inc.
- Paul L. Pfaff
- G01 - MEASURING TESTING
Information Patent Grant
Optical to optical infrared imaging detection system
- Patent number 8,405,823
- Issue date Mar 26, 2013
- Attofemto, Inc.
- Paul L. Pfaff
- G01 - MEASURING TESTING
Information Patent Grant
Holographic condition assessment system for a structure including a...
- Patent number 8,040,521
- Issue date Oct 18, 2011
- Attofemto, Inc.
- Paul L. Pfaff
- G01 - MEASURING TESTING
Information Patent Grant
Interferometric condition assessment system for a microelectronic s...
- Patent number 7,773,230
- Issue date Aug 10, 2010
- Attofemto, Inc.
- Paul Pfaff
- G01 - MEASURING TESTING
Information Patent Grant
Condition assessment method for a structure including a semiconduct...
- Patent number 7,728,958
- Issue date Jun 1, 2010
- Attofemto, Inc.
- Paul L. Pfaff
- G01 - MEASURING TESTING
Information Patent Grant
Condition assessment system for a structure including a semiconduct...
- Patent number 7,420,687
- Issue date Sep 2, 2008
- Attofemto, Inc.
- Paul L. Pfaff
- G01 - MEASURING TESTING
Information Patent Grant
Voltage testing and measurement
- Patent number 7,323,889
- Issue date Jan 29, 2008
- Attofemto, Inc.
- Paul Pfaff
- G01 - MEASURING TESTING
Information Patent Grant
Voltage testing and measurement
- Patent number 6,972,577
- Issue date Dec 6, 2005
- Paul Pfaff
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus and methods of controlling surface charge and focus
- Patent number 6,828,571
- Issue date Dec 7, 2004
- KLA-Tencor Technologies Corporation
- Mark A. McCord
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
SYSTEMS, DEVICES, AND METHODS FOR PERFORMING A NON-CONTACT ELECTRIC...
- Publication number 20240329128
- Publication date Oct 3, 2024
- PDF Solutions, Inc.
- Indranil DE
- G01 - MEASURING TESTING
Information Patent Application
SYSTEMS, DEVICES, AND METHODS FOR ALIGNING A PARTICLE BEAM AND PERF...
- Publication number 20240304414
- Publication date Sep 12, 2024
- PDF Solutions, Inc.
- Indranil DE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OPTIMAL DETERMINATION OF AN OVERLAY TARGET
- Publication number 20240288488
- Publication date Aug 29, 2024
- APPLIED MATERIALS ISRAEL LTD.
- Tal ITZKOVICH
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
INSPECTION APPARATUS AND METHOD
- Publication number 20240027514
- Publication date Jan 25, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chia-Hong Lin
- G01 - MEASURING TESTING
Information Patent Application
SYSTEMS, DEVICES, AND METHODS FOR PERFORMING A NON-CONTACT ELECTRIC...
- Publication number 20230358804
- Publication date Nov 9, 2023
- PDF Solutions, Inc.
- Indranil DE
- G01 - MEASURING TESTING
Information Patent Application
SYSTEMS, DEVICES, AND METHODS FOR ALIGNING A PARTICLE BEAM AND PERF...
- Publication number 20230282444
- Publication date Sep 7, 2023
- PDF Solutions, Inc.
- Indranil DE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Inspection Method
- Publication number 20230273254
- Publication date Aug 31, 2023
- Hitachi High-Tech Corporation
- Shota MITSUGI
- G01 - MEASURING TESTING
Information Patent Application
SEMICONDUCTOR INSPECTION DEVICE AND METHOD FOR INSPECTING SEMICONDU...
- Publication number 20230273253
- Publication date Aug 31, 2023
- HITACHI HIGH-TECH CORPORATION
- Yasuhiro SHIRASAKI
- G01 - MEASURING TESTING
Information Patent Application
AUTOMATED PROBE LANDING
- Publication number 20230258707
- Publication date Aug 17, 2023
- Innovatum Instruments Inc.
- Richard E Stallcup
- G01 - MEASURING TESTING
Information Patent Application
Test Structure and Test Method for Online Detection of Metal Via Op...
- Publication number 20230069433
- Publication date Mar 2, 2023
- Shanghai Huali Integrated Circuit Corporation
- Shumiao Sun
- G01 - MEASURING TESTING
Information Patent Application
IN-LINE DEVICE ELECTRICAL PROPERTY ESTIMATING METHOD AND TEST STRUC...
- Publication number 20230043999
- Publication date Feb 9, 2023
- Taiwan Semiconductor Manufacturing Company Limited
- Chen-Han Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS, DEVICES, AND METHODS FOR PERFORMING A NON-CONTACT ELECTRIC...
- Publication number 20220365134
- Publication date Nov 17, 2022
- PDF SOLUTIONS, INC.
- Indranil DE
- G01 - MEASURING TESTING
Information Patent Application
Detection Method for Sensitive Parts of Ionization Damage in Bipola...
- Publication number 20220349934
- Publication date Nov 3, 2022
- HARBIN INSTITUTE OF TECHNOLOGY
- Xingji Li
- G01 - MEASURING TESTING
Information Patent Application
SYSTEMS, DEVICES, AND METHODS FOR ALIGNING A PARTICLE BEAM AND PERF...
- Publication number 20220336187
- Publication date Oct 20, 2022
- PDF Solutions, Inc.
- Indranil DE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR CALIBRATING VERTICALITY OF PARTICLE BEAM AND SYSTEM APPL...
- Publication number 20210132174
- Publication date May 6, 2021
- Yangtze Memory Technologies Co., Ltd.
- Guangdian Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS, DEVICES, AND METHODS FOR PERFORMING A NON-CONTACT ELECTRIC...
- Publication number 20210096179
- Publication date Apr 1, 2021
- Indranil DE
- G01 - MEASURING TESTING
Information Patent Application
Optical-Mode Selection for Multi-Mode Semiconductor Inspection
- Publication number 20200193588
- Publication date Jun 18, 2020
- KLA-Tencor Corporation
- Bjorn Brauer
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SOFT ERROR INSPECTION METHOD, SOFT ERROR INSPECTION APPARATUS, AND...
- Publication number 20200081056
- Publication date Mar 12, 2020
- Fujitsu Limited
- Takeshi Soeda
- G01 - MEASURING TESTING
Information Patent Application
METHOD FOR INSPECTING SEMICONDUCTOR DEVICE STRUCTURE
- Publication number 20190101586
- Publication date Apr 4, 2019
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Baohua NIU
- G01 - MEASURING TESTING
Information Patent Application
Method of ROI Encapsulation During Axis Conversion of Cross-Section...
- Publication number 20180122652
- Publication date May 3, 2018
- QUALCOMM Incorporated
- Corey Senowitz
- G01 - MEASURING TESTING
Information Patent Application
METHOD FOR MAKING THIN FILM TRANSISTOR
- Publication number 20180123046
- Publication date May 3, 2018
- TSINGHUA UNIVERSITY
- DONG-QI LI
- G01 - MEASURING TESTING
Information Patent Application
IN-LINE DEVICE ELECTRICAL PROPERTY ESTIMATING METHOD AND TEST STRUC...
- Publication number 20170356953
- Publication date Dec 14, 2017
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chen-Han WANG
- G01 - MEASURING TESTING
Information Patent Application
PROCESS AND ASSEMBLY FOR TESTING ELECTRICAL AND OPTICAL PARAMETERS...
- Publication number 20170276721
- Publication date Sep 28, 2017
- RASCO GMBH
- Massimo SCARPELLA
- G01 - MEASURING TESTING
Information Patent Application
Non-Contact Sheet Resistance Measurement of Barrier and/or Seed Lay...
- Publication number 20170226655
- Publication date Aug 10, 2017
- Applied Materials, Inc.
- Abraham Ravid
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
PULSED ELECTRON BEAM CURRENT PROBE AND METHODS OF OPERATING THE SAME
- Publication number 20170176513
- Publication date Jun 22, 2017
- SanDisk Technologies LLC
- Norio TOSHIMA
- G01 - MEASURING TESTING
Information Patent Application
APPARATUS OF INSPECTING RESISTIVE DEFECTS OF SEMICONDUCTOR DEVICES...
- Publication number 20160084901
- Publication date Mar 24, 2016
- Samsung Electronics Co., Ltd.
- Mi-Ra PARK
- G01 - MEASURING TESTING
Information Patent Application
METHOD, SYSTEMS, AND DEVICES FOR INSPECTING SEMICONDUCTOR DEVICES
- Publication number 20150293169
- Publication date Oct 15, 2015
- Macronix International Co., Ltd.
- Yen Chuang
- G01 - MEASURING TESTING
Information Patent Application
Multidimensional Structural Access
- Publication number 20150260784
- Publication date Sep 17, 2015
- FEI Company
- Jeffrey Blackwood
- G01 - MEASURING TESTING
Information Patent Application
TESTING APPARATUS AND METHOD FOR TESTING SEMICONDUCTOR CHIPS
- Publication number 20150212147
- Publication date Jul 30, 2015
- Kabushiki Kaisha Toshiba
- Motoshi SETO
- G01 - MEASURING TESTING
Information Patent Application
OPTICAL TO OPTICAL TIME AND SPATIAL RESOLUTION ENHANCEMENTS FOR IMP...
- Publication number 20140103935
- Publication date Apr 17, 2014
- Attofemto, Inc.
- Paul L. Pfaff
- G01 - MEASURING TESTING

using electron beams

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Inspection method

Detection method for sensitive parts of ionization damage in bipola...

Systems, devices, and methods for performing a non-contact electric...

Systems, devices, and methods for aligning a particle beam and perf...

Test structure and test method for online detection of metal via op...

Systems, devices, and methods for performing a non-contact electric...

Systems, devices, and methods for aligning a particle beam and perf...

In-line device electrical property estimating method and test struc...

Methods for performing a non-contact electrical measurement on a ce...

Methods for aligning a particle beam and performing a non-contact e...

Method for calibrating verticality of particle beam and system appl...

Soft error inspection method, soft error inspection apparatus, and...

Optical-mode selection for multi-mode semiconductor inspection

Method for inspecting semiconductor device structure

Pulsed electron beam current probe and methods of operating the same

Testing apparatus and method for testing semiconductor chips

Method for making thin film transistor

Method and system for detecting defects of wafer by wafer sort

Multidimensional structural access

Optical to optical methods enhancing the sensitivity and resolution...

Evaluating transistors with e-beam inspection

Methods and processes for optical interferometric or holographic te...

Optical to optical infrared imaging detection system

Holographic condition assessment system for a structure including a...

Interferometric condition assessment system for a microelectronic s...

Condition assessment method for a structure including a semiconduct...

Condition assessment system for a structure including a semiconduct...

Voltage testing and measurement

Voltage testing and measurement

Apparatus and methods of controlling surface charge and focus

Patents Applicationslast 30 patents

SYSTEMS, DEVICES, AND METHODS FOR PERFORMING A NON-CONTACT ELECTRIC...

SYSTEMS, DEVICES, AND METHODS FOR ALIGNING A PARTICLE BEAM AND PERF...

OPTIMAL DETERMINATION OF AN OVERLAY TARGET

INSPECTION APPARATUS AND METHOD

SYSTEMS, DEVICES, AND METHODS FOR PERFORMING A NON-CONTACT ELECTRIC...

SYSTEMS, DEVICES, AND METHODS FOR ALIGNING A PARTICLE BEAM AND PERF...

Inspection Method

SEMICONDUCTOR INSPECTION DEVICE AND METHOD FOR INSPECTING SEMICONDU...

AUTOMATED PROBE LANDING

Test Structure and Test Method for Online Detection of Metal Via Op...

IN-LINE DEVICE ELECTRICAL PROPERTY ESTIMATING METHOD AND TEST STRUC...

SYSTEMS, DEVICES, AND METHODS FOR PERFORMING A NON-CONTACT ELECTRIC...

Detection Method for Sensitive Parts of Ionization Damage in Bipola...

SYSTEMS, DEVICES, AND METHODS FOR ALIGNING A PARTICLE BEAM AND PERF...

METHOD FOR CALIBRATING VERTICALITY OF PARTICLE BEAM AND SYSTEM APPL...

SYSTEMS, DEVICES, AND METHODS FOR PERFORMING A NON-CONTACT ELECTRIC...

Optical-Mode Selection for Multi-Mode Semiconductor Inspection

SOFT ERROR INSPECTION METHOD, SOFT ERROR INSPECTION APPARATUS, AND...

METHOD FOR INSPECTING SEMICONDUCTOR DEVICE STRUCTURE

Method of ROI Encapsulation During Axis Conversion of Cross-Section...

METHOD FOR MAKING THIN FILM TRANSISTOR

IN-LINE DEVICE ELECTRICAL PROPERTY ESTIMATING METHOD AND TEST STRUC...

PROCESS AND ASSEMBLY FOR TESTING ELECTRICAL AND OPTICAL PARAMETERS...

Non-Contact Sheet Resistance Measurement of Barrier and/or Seed Lay...

PULSED ELECTRON BEAM CURRENT PROBE AND METHODS OF OPERATING THE SAME

APPARATUS OF INSPECTING RESISTIVE DEFECTS OF SEMICONDUCTOR DEVICES...

METHOD, SYSTEMS, AND DEVICES FOR INSPECTING SEMICONDUCTOR DEVICES

Multidimensional Structural Access

TESTING APPARATUS AND METHOD FOR TESTING SEMICONDUCTOR CHIPS

OPTICAL TO OPTICAL TIME AND SPATIAL RESOLUTION ENHANCEMENTS FOR IMP...