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ELECTRICITY
H01
Electric elements
H01L
SEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
H01L21/00
Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
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H01L21/31144
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Patents Grants
last 30 patents
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Patent Grant
Staircase formation in three-dimensional memory device
Patent number
11,961,760
Issue date
Apr 16, 2024
Yangtze Memory Technologies Co., Ltd.
Yu Ting Zhou
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing method and substrate processing apparatus
Patent number
11,961,746
Issue date
Apr 16, 2024
Tokyo Electron Limited
Sho Kumakura
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Dual metal silicide structures for advanced integrated circuit stru...
Patent number
11,961,767
Issue date
Apr 16, 2024
Intel Corporation
Jeffrey S. Leib
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Dual metal gate structure having portions of metal gate layers in c...
Patent number
11,955,532
Issue date
Apr 9, 2024
Intel Corporation
Jeffrey S. Leib
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Heterogeneous metal line compositions for advanced integrated circu...
Patent number
11,955,534
Issue date
Apr 9, 2024
Intel Corporation
Andrew W. Yeoh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Two-stage bake photoresist with releasable quencher
Patent number
11,955,343
Issue date
Apr 9, 2024
Intel Corporation
Robert L. Bristol
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of fabricating a semiconductor device
Patent number
11,955,387
Issue date
Apr 9, 2024
Samsung Electronics Co., Ltd.
Seongkeun Cho
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing method and substrate processing system
Patent number
11,955,337
Issue date
Apr 9, 2024
Tokyo Electron Limited
Toru Hisamatsu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Differential hardmasks for modulation of electrobucket sensitivity
Patent number
11,955,377
Issue date
Apr 9, 2024
Intel Corporation
Kevin L. Lin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Gate-all-around device with protective dielectric layer and method...
Patent number
11,948,989
Issue date
Apr 2, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Cheng-Ting Chung
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Trench contact structures for advanced integrated circuit structure...
Patent number
11,948,997
Issue date
Apr 2, 2024
Intel Corporation
Subhash M. Joshi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device and method
Patent number
11,948,798
Issue date
Apr 2, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Ching-Yu Chang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Cooling device, substrate treatment device, cooling method, and sub...
Patent number
11,948,812
Issue date
Apr 2, 2024
Shibaura Mechatronics Corporation
Kensuke Demura
B08 - CLEANING
Information
Patent Grant
Method for preparing semiconductor device structure with isolation...
Patent number
11,942,331
Issue date
Mar 26, 2024
NANYA TECHNOLOGY CORPORATION
Ching-Cheng Chuang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Selective deposition of a protective layer to reduce interconnect s...
Patent number
11,942,364
Issue date
Mar 26, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Hsi-Wen Tien
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Memory arrays and methods used in forming a memory array comprising...
Patent number
11,937,428
Issue date
Mar 19, 2024
Micron Technology, Inc.
Matthew J. King
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Boron nitride for mask patterning
Patent number
11,935,751
Issue date
Mar 19, 2024
Applied Materials, Inc.
Siyu Zhu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of manufacturing a semiconductor structure, and a semiconduc...
Patent number
11,935,785
Issue date
Mar 19, 2024
CHANGXIN MEMORY TECHNOLOGIES, INC.
Shuai Guo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of high-density pattern forming
Patent number
11,929,255
Issue date
Mar 12, 2024
CHANGXIN MEMORY TECHNOLOGIES, INC.
Chen En Wu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Three dimensional semiconductor memory device and method for fabric...
Patent number
11,925,023
Issue date
Mar 5, 2024
Samsung Electronics Co., Ltd.
Sang-Yong Park
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device and manufacturing method of the semiconductor...
Patent number
11,925,021
Issue date
Mar 5, 2024
SK hynix Inc.
Young Geun Jang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Double patterning method
Patent number
11,923,202
Issue date
Mar 5, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Chia-Ying Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus and plasma processing method
Patent number
11,923,171
Issue date
Mar 5, 2024
Tokyo Electron Limited
Junichi Sasaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Hard mask-forming composition and method for manufacturing electron...
Patent number
11,921,425
Issue date
Mar 5, 2024
Tokyo Ohka Kogyo Co., Ltd.
Junichi Tsuchiya
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Grant
Extreme ultraviolet lithography patterning method
Patent number
11,915,931
Issue date
Feb 27, 2024
Tokyo Electron Limited
Choong-man Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor devices comprising steps
Patent number
11,916,024
Issue date
Feb 27, 2024
Micron Technology, Inc.
Rohit Kothari
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of depositing a pre-etch protective layer
Patent number
11,915,940
Issue date
Feb 27, 2024
Applied Materials, Inc.
Zhi Gang Wang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Back end of line integration for self-aligned vias
Patent number
11,916,010
Issue date
Feb 27, 2024
Intel Corporation
Guillaume Bouche
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Patterning method and manufacturing method of semiconductor device
Patent number
11,908,701
Issue date
Feb 20, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Christine Y Ouyang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for preparing semiconductor device structure with lining layer
Patent number
11,908,693
Issue date
Feb 20, 2024
NANYA TECHNOLOGY CORPORATION
Ping Hsu
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
Publication number
20240128082
Publication date
Apr 18, 2024
Samsung Electronics Co., Ltd.
Inoue NAOKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR PRODUCING AN INDIVIDUALIZATION ZONE OF AN INTEGRATED CIR...
Publication number
20240128119
Publication date
Apr 18, 2024
Commissariat A L'Energie Atomique et Aux Energies Alternatives
Stefan LANDIS
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DRY ETCHING WITH ETCH BYPRODUCT SELF-CLEANING
Publication number
20240128091
Publication date
Apr 18, 2024
Applied Materials, Inc.
Zhonghua Yao
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF FABRICATING A CAPACITOR
Publication number
20240128311
Publication date
Apr 18, 2024
STMicroelectronics (Tours) SAS
Mohamed Boufnichel
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR NON-RESIST NANOLITHOGRAPHY
Publication number
20240120409
Publication date
Apr 11, 2024
Taiwan Semiconductor Manufacturing Co., Ltd.
Miin-Jang Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS
Publication number
20240120187
Publication date
Apr 11, 2024
TOKYO ELECTRON LIMITED
Hironari SASAGAWA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR PRODUCING AN INDIVIDUALIZATION ZONE OF AN INTEGRATED CIR...
Publication number
20240113040
Publication date
Apr 4, 2024
Commissariat A L'Energie Atomique et Aux Energies Alternatives
Stefan LANDIS
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
VARIABLE SELECTIVE ETCHING TECHNOLOGY FOR THICK SOI DEVICES
Publication number
20240112914
Publication date
Apr 4, 2024
University of Electronic Science and Technology of China
Bo ZHANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
In-Situ Adsorbate Formation for Dielectric Etch
Publication number
20240112888
Publication date
Apr 4, 2024
TOKYO ELECTRON LIMITED
Du Zhang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING SYSTEM, PLASMA PROCESSING APPARATUS, AND ETCHING...
Publication number
20240112918
Publication date
Apr 4, 2024
TOKYO ELECTRON LIMITED
Noboru SAITO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ETCHING METHOD AND PLASMA PROCESSING SYSTEM
Publication number
20240112922
Publication date
Apr 4, 2024
TOKYO ELECTRON LIMITED
Ryo MATSUBARA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
HIGH ELECTRON MOBILITY TRANSISTOR AND METHOD FOR FABRICATING THE SAME
Publication number
20240113215
Publication date
Apr 4, 2024
UNITED MICROELECTRONICS CORP.
Po-Yu Yang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF FABRICATING SEMICONDUCTOR DEVICE
Publication number
20240112915
Publication date
Apr 4, 2024
Samsung Electronics Co., Ltd.
Janghoon Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PHOTORESIST AND FORMATION METHOD THEREOF
Publication number
20240112912
Publication date
Apr 4, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Jui-Hsiung LIU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ETCHING METHOD WITH METAL HARD MASK
Publication number
20240112923
Publication date
Apr 4, 2024
Beijing NAURA Microelectronics Equipment Co., Ltd.
Yu ZHANG
B08 - CLEANING
Information
Patent Application
TRENCH PLUG HARDMASK FOR ADVANCED INTEGRATED CIRCUIT STRUCTURE FABR...
Publication number
20240105520
Publication date
Mar 28, 2024
Intel Corporation
Anthony ST. AMOUR
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SAME
Publication number
20240105720
Publication date
Mar 28, 2024
UNITED MICROELECTRONICS CORP.
Chun-Hao Lin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FORMATION OF SELF-ASSEMBLED MONOLAYER FOR SELECTIVE ETCHING PROCESS
Publication number
20240105462
Publication date
Mar 28, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Yi-Hsiu CHEN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
HARDMASK STRUCTURE AND METHOD OF FORMING SEMICONDUCTOR STRUCTURE
Publication number
20240096625
Publication date
Mar 21, 2024
NANYA TECHNOLOGY CORPORATION
WEI-CHUAN FANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FLEXIBLE MERGE SCHEME FOR SOURCE/DRAIN EPITAXY REGIONS
Publication number
20240098959
Publication date
Mar 21, 2024
Taiwan Semiconductor Manufacturing Co., Ltd.
Kai-Hsuan Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE
Publication number
20240096623
Publication date
Mar 21, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Chieh-Hsin HSIEH
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
HARDMASK STRUCTURE AND METHOD OF FORMING SEMICONDUCTOR STRUCTURE
Publication number
20240096624
Publication date
Mar 21, 2024
NANYA TECHNOLOGY CORPORATION
WEI-CHUAN FANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR DEVICE HAVING EDGE SEAL AND METHOD OF MAKING THEREOF...
Publication number
20240096694
Publication date
Mar 21, 2024
SANDISK TECHNOLOGIES LLC
Kazuto WATANABE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FILM DEPOSITION APPARATUS FOR FINE PATTERN FORMING
Publication number
20240096595
Publication date
Mar 21, 2024
TOKYO ELECTRON LIMITED
Kazuhide HASEBE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SELF ALIGNED PATTERN FORMATION POST SPACER ETCHBACK IN TIGHT PITCH...
Publication number
20240096627
Publication date
Mar 21, 2024
TESSERA LLC
Sean D. Burns
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
NITRIDE SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING NITRIDE S...
Publication number
20240096968
Publication date
Mar 21, 2024
Mitsubishi Electric Corporation
Ken IMAMURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
High Aspect Ratio Contact (HARC) Etch
Publication number
20240096640
Publication date
Mar 21, 2024
TOKYO ELECTRON LIMITED
Pingshan Luan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
Publication number
20240096626
Publication date
Mar 21, 2024
KIOXIA Corporation
Toshiyuki SASAKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR DEVICE HAVING EDGE SEAL AND METHOD OF MAKING THEREOF...
Publication number
20240096695
Publication date
Mar 21, 2024
SANDISK TECHNOLOGIES LLC
Michiaki SANO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS FOR FORMING MULTI-LAYER VERTICAL NOR-TYPE MEMORY STRING ARRAYS
Publication number
20240099003
Publication date
Mar 21, 2024
Sunrise Memory Corporation
Scott Brad Herner
H01 - BASIC ELECTRIC ELEMENTS