Membership
Tour
Register
Log in
using process control mark
Follow
Industry
CPC
G03F7/70683
This industry / category may be too specific. Please go to a parent level for more data
Parent Industries
G
PHYSICS
G03
Photography
G03F
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES
G03F7/00
Photomechanical
Current Industry
G03F7/70683
using process control mark
Industries
Overview
Organizations
People
Information
Impact
Please log in for detailed analytics
Patents Grants
last 30 patents
Information
Patent Grant
Quantum meta-device for ultrasensitive displacement metrology
Patent number
12,326,665
Issue date
Jun 10, 2025
City University of Hong Kong
Yubin Fan
G01 - MEASURING TESTING
Information
Patent Grant
Method and apparatus to determine a patterning process parameter
Patent number
12,322,660
Issue date
Jun 3, 2025
ASML Netherlands B.V.
Adriaan Johan Van Leest
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Metrology tool with position control of projection system
Patent number
12,306,544
Issue date
May 20, 2025
ASML Holding N.V.
Hans Butler
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Alignment mark and method
Patent number
12,292,694
Issue date
May 6, 2025
Taiwan Semiconductor Manufacturing Co., Ltd
Hung-Chung Chien
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods and apparatus for obtaining diagnostic information relating...
Patent number
12,287,584
Issue date
Apr 29, 2025
ASML Netherlands B.V.
Alexander Ypma
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Method and apparatus for calculating a spatial map associated with...
Patent number
12,276,918
Issue date
Apr 15, 2025
ASML Netherlands B.V.
Mauritius Gerardus Elisabeth Schneiders
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Method for avoiding damage to overlay metrology mark
Patent number
12,276,920
Issue date
Apr 15, 2025
Shanghai Huali Integrated Circuit Corporation
Chengchang Wei
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Matching process controllers for improved matching of process
Patent number
12,265,380
Issue date
Apr 1, 2025
Applied Materials, Inc.
James Robert Moyne
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Alignment-overlay mark and method using the same
Patent number
12,265,335
Issue date
Apr 1, 2025
Micron Technology, Inc.
Kazuko Yamashita
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Overlay mark, overlay marking method and overlay measuring method
Patent number
12,259,661
Issue date
Mar 25, 2025
NEXCHIP SEMICONDUCTOR CORPORATION
Kuotung Yang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Methods for manufacturing semiconductor devices using MOIRÉ patterns
Patent number
12,259,662
Issue date
Mar 25, 2025
Samsung Electronics Co., Ltd.
Woohyeok Jeong
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Scatterometry overlay metrology with orthogonal fine-pitch segmenta...
Patent number
12,253,805
Issue date
Mar 18, 2025
KLA Corporation
Vladimir Levinski
G01 - MEASURING TESTING
Information
Patent Grant
Target for measuring a parameter of a lithographic process
Patent number
12,242,203
Issue date
Mar 4, 2025
ASML Netherlands B.V.
Maurits Van Der Schaar
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Process window qualification modulation layouts
Patent number
12,235,224
Issue date
Feb 25, 2025
KLA Corporation
Andrew Cross
G01 - MEASURING TESTING
Information
Patent Grant
Semiconductor marks and forming methods thereof
Patent number
12,218,073
Issue date
Feb 4, 2025
CHANGXIN MEMORY TECHNOLOGIES, INC.
Shengan Zhang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for inspection and metrology
Patent number
12,204,826
Issue date
Jan 21, 2025
ASML Netherlands B.V.
Lotte Marloes Willems
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Multi-layered moiré targets and methods for using the same in measu...
Patent number
12,204,254
Issue date
Jan 21, 2025
KLA Corporation
Yoel Feler
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Machine learning on overlay management
Patent number
12,197,138
Issue date
Jan 14, 2025
Taiwan Semiconductor Manufacturing Co., Ltd
Tzu-Cheng Lin
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Lithography measurement machine and operating method thereof
Patent number
12,197,124
Issue date
Jan 14, 2025
Hon Hai Precision Industry Co., Ltd.
Kuo-Kuei Fu
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Metrology method and associated metrology and lithographic apparatuses
Patent number
12,189,314
Issue date
Jan 7, 2025
ASML Netherlands B.V.
Sebastianus Adrianus Goorden
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Computational metrology
Patent number
12,189,302
Issue date
Jan 7, 2025
ASML Netherlands B.V.
Wim Tjibbo Tel
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Voltage contrast metrology mark
Patent number
12,169,366
Issue date
Dec 17, 2024
ASML Netherlands B.V.
Cyrus Emil Tabery
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Overlay target design for improved target placement accuracy
Patent number
12,140,859
Issue date
Nov 12, 2024
KLA Corporation
Vladimir Levinski
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus to determine a patterning process parameter us...
Patent number
12,142,535
Issue date
Nov 12, 2024
ASML Netherlands B.V.
Adriaan Johan Van Leest
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Metrology target design for tilted device designs
Patent number
12,117,347
Issue date
Oct 15, 2024
KLA Corporation
Myungjun Lee
G01 - MEASURING TESTING
Information
Patent Grant
Optical metrology utilizing short-wave infrared wavelengths
Patent number
12,111,580
Issue date
Oct 8, 2024
KLA Corporation
Amnon Manassen
G01 - MEASURING TESTING
Information
Patent Grant
Overlay mark forming Moire pattern, overlay measurement method usin...
Patent number
12,107,052
Issue date
Oct 1, 2024
AUROS TECHNOLOGY, INC.
Hyun Chul Lee
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Targets for diffraction-based overlay error metrology
Patent number
12,105,414
Issue date
Oct 1, 2024
KLA Corporation
Itay Gdor
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Target and algorithm to measure overlay by modeling back scattering...
Patent number
12,100,574
Issue date
Sep 24, 2024
KLA Corporation
Nadav Gutman
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Wavelet system and method for ameliorating misregistration and asym...
Patent number
12,080,610
Issue date
Sep 3, 2024
KLA Corporation
Lilach Saltoun
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
A METHOD FOR DETERMINING A VERTICAL POSITION OF A STRUCTURE ON A SU...
Publication number
20250208520
Publication date
Jun 26, 2025
ASML NETHERLANDS B.V.
Arie Jeffrey DEN BOEF
G01 - MEASURING TESTING
Information
Patent Application
ILLUMINATION MODULE AND ASSOCIATED METHODS AND METROLOGY APPARATUS
Publication number
20250208522
Publication date
Jun 26, 2025
ASML NETHERLANDS B.V.
Patrick WARNAAR
G01 - MEASURING TESTING
Information
Patent Application
METHOD, LITHOGRAPHY MASK, USE OF A LITHOGRAPHY MASK, AND PROCESSING...
Publication number
20250208499
Publication date
Jun 26, 2025
Carl Zeiss SMT GMBH
Daniel Rhinow
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
MATCHING PROCESS CONTROLLERS FOR IMPROVED MATCHING OF PROCESS
Publication number
20250199521
Publication date
Jun 19, 2025
Applied Materials, Inc.
James Robert Moyne
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
MEASURING CONTRAST AND CRITICAL DIMENSION USING AN ALIGNMENT SENSOR
Publication number
20250199418
Publication date
Jun 19, 2025
ASML NETHERLANDS B.V.
Edouard André Marie Louis DURIAU
G01 - MEASURING TESTING
Information
Patent Application
METHOD FOR CORRECTING MEASUREMENTS IN THE MANUFACTURE OF INTEGRATED...
Publication number
20250189904
Publication date
Jun 12, 2025
ASML NETHERLANDS B.V.
Han-Kwang NIENHUYS
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method for evaluating at least one marker on a physical object for...
Publication number
20250172882
Publication date
May 29, 2025
ROBERT BOSCH GmbH
Cedric Donie
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
DETECTION DEVICE AND METHOD FOR OPERATING THE SAME
Publication number
20250172520
Publication date
May 29, 2025
Taiwan Semiconductor Manufacturing Company, Ltd.
Ya-Chin KING
G01 - MEASURING TESTING
Information
Patent Application
DETERMINING A MEASUREMENT RECIPE IN A METROLOGY METHOD
Publication number
20250147429
Publication date
May 8, 2025
ASML NETHERLANDS B.V.
Sebastianus Adrianus GOORDEN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METROLOGY METHOD AND ASSOCIATED METROLOGY DEVICE
Publication number
20250147437
Publication date
May 8, 2025
ASML NETHERLANDS B.V.
Armand Eugene Albert KOOLEN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHODS OF METROLOGY
Publication number
20250147436
Publication date
May 8, 2025
ASML NETHERLANDS B.V.
Chrysostomos BATISTAKIS
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
OVERLAY MARK DESIGN ENABLING LARGE OVERLAY MEASUREMENT
Publication number
20250139814
Publication date
May 1, 2025
KLA Corporation
Mark Ghinovker
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
INTENSITY MEASUREMENTS USING OFF-AXIS ILLUMINATION
Publication number
20250130512
Publication date
Apr 24, 2025
ASML NETHERLANDS B.V.
Mohamed SWILLAM
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
MACHINE LEARNING ON OVERLAY MANAGEMENT
Publication number
20250123572
Publication date
Apr 17, 2025
Taiwan Semiconductor Manufacturing Co., Ltd.
Tzu-Cheng LIN
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
FULL-WAFER METROLOGY UP-SAMPLING
Publication number
20250123571
Publication date
Apr 17, 2025
NOVA LTD
Eitan A. ROTHSTEIN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SMALL IN-DIE TARGET DESIGN FOR OVERLAY MEASUREMENT
Publication number
20250110412
Publication date
Apr 3, 2025
KLA Corporation
Vladimir Levinski
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
A FRAMEWORK FOR CONDITION TUNING AND IMAGE PROCESSING FOR METROLOGY...
Publication number
20250102923
Publication date
Mar 27, 2025
ASML NETHERLANDS B.V.
Lingling PU
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD OF GENERATING DRAWING DATA, DRAWING DATA GENERATION DEVICE,...
Publication number
20250093785
Publication date
Mar 20, 2025
Nikon Corporation
Yuho KANAYA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
MIRROR FOLDED ILLUMINATION FOR COMPACT OPTICAL METROLOGY SYSTEM
Publication number
20250068087
Publication date
Feb 27, 2025
Applied Materials, Inc.
Yangyang SUN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
GENERATING AN ALIGNMENT SIGNAL WITHOUT DEDICATED ALIGNMENT STRUCTURES
Publication number
20250060680
Publication date
Feb 20, 2025
ASML NETHERLANDS B.V.
Aabid PATEL
G01 - MEASURING TESTING
Information
Patent Application
SUBSTRATE COMPRISING A TARGET ARRANGEMENT, ASSOCIATED PATTERNING DE...
Publication number
20250060661
Publication date
Feb 20, 2025
ASML NETHERLANDS B.V.
Hugo Augustinus Joseph CRAMER
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Flexible Measurement Models For Model Based Measurements Of Semicon...
Publication number
20250053096
Publication date
Feb 13, 2025
KLA Corporation
Houssam Chouaib
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
OVERLAY METROLOGY TARGET FOR DIE-TO-WAFER OVERLAY METROLOGY
Publication number
20250054872
Publication date
Feb 13, 2025
KLA Corporation
Shlomo Eisenbach
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND APPARATUS TO DETERMINE OVERLAY
Publication number
20250044709
Publication date
Feb 6, 2025
ASML NETHERLANDS B.V.
Willem Louis VAN MIERLO
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
OVERLAY METROLOGY BASED ON TEMPLATE MATCHING WITH ADAPTIVE WEIGHTING
Publication number
20250044710
Publication date
Feb 6, 2025
ASML NETHERLANDS B.V.
Jiyou FU
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
TARGET ASYMMETRY MEASUREMENT FOR SUBSTRATE ALIGNMENT IN LITHOGRAPHY...
Publication number
20250036031
Publication date
Jan 30, 2025
ASML NETHERLANDS B.V.
Aniruddha Ramakrishna SONDE
G01 - MEASURING TESTING
Information
Patent Application
METROLOGY TARGET DESIGN FOR TILTED DEVICE DESIGNS
Publication number
20250035489
Publication date
Jan 30, 2025
KLA Corporation
Myungjun Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS OF DETERMINING A MECHANICAL PROPERTY OF A LAYER APPLIED TO...
Publication number
20250028254
Publication date
Jan 23, 2025
ASML NETHERLANDS B.V.
Huaichen ZHANG
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SYSTEMS AND METHODS FOR OPTIMIZING LITHOGRAPHIC DESIGN VARIABLES US...
Publication number
20250028255
Publication date
Jan 23, 2025
ASML NETHERLANDS B.V.
Chenxi LIN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SYSTEMS AND METHODS FOR REDUCING PATTERN SHIFT IN A LITHOGRAPHIC AP...
Publication number
20250021018
Publication date
Jan 16, 2025
ASML NETHERLANDS B.V.
Joost Cyrillus Lambert HAGEMAN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY