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On-product overlay targets
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Patent number 11,967,535
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Issue date Apr 23, 2024
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KLA Corporation
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Amnon Manassen
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H01 - BASIC ELECTRIC ELEMENTS
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Overlay mark and method of making
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Patent number 11,876,054
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Issue date Jan 16, 2024
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Taiwan Semiconductor Manufacturing Company, Ltd
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Chen-Yu Chen
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H01 - BASIC ELECTRIC ELEMENTS
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Device-like metrology targets
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Patent number 11,709,433
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Issue date Jul 25, 2023
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KLA-Tencor Corporation
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Vladimir Levinski
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Imprint apparatus
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Patent number 11,709,421
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Issue date Jul 25, 2023
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Canon Kabushiki Kaisha
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Ken-ichiro Shinoda
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G02 - OPTICS
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