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Micro-structural technology
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PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS
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Forming micro-structural systems
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B81C2203/054
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Patents Grants
last 30 patents
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Patent Grant
Laser-assisted material phase-change and expulsion micro-machining...
Patent number
12,077,432
Issue date
Sep 3, 2024
Massachusetts Institute of Technology
Prashant Patil
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Modular 3-D printed devices for sample delivery and method
Patent number
11,485,632
Issue date
Nov 1, 2022
Arizona Board of Regents on behalf of Arizona State University
Alexandra Ros
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS package with roughend interface
Patent number
11,192,778
Issue date
Dec 7, 2021
Taiwan Semiconductor Manufacturing Co., Ltd.
Yu-Jui Chen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Integrated package structure for MEMS element and ASIC chip and met...
Patent number
11,130,674
Issue date
Sep 28, 2021
J-METRICS TECHNOLOGY CO., LTD.
Sheng-Lin Ma
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Alignment mark and semiconductor device, and fabrication methods th...
Patent number
11,049,816
Issue date
Jun 29, 2021
NINGBO SEMICONDUCTOR INTERNATIONAL CORPORATION
Mengbin Liu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for bonding wafers eutectically, and a wafer composite
Patent number
10,927,004
Issue date
Feb 23, 2021
Robert Bosch GmbH
Axel Grosse
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Methods of achieving universal interfacing using suspended and/or f...
Patent number
10,807,864
Issue date
Oct 20, 2020
The Regents of the University of Colorado, a Body Corporate
Joseph J. Brown
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS package with roughend interface
Patent number
10,710,872
Issue date
Jul 14, 2020
Taiwan Semiconductor Manufacturing Co., Ltd.
Yu-Jui Chen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Transfer head and method for transferring micro devices
Patent number
10,593,582
Issue date
Mar 17, 2020
MIKRO MESA TECHNOLOGY CO., LTD.
Li-Yi Chen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method and device for producing a microfluidic analysis cartridge
Patent number
10,295,441
Issue date
May 21, 2019
Robert Bosch GmbH
Franz Laermer
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Microfluidic device
Patent number
10,160,145
Issue date
Dec 25, 2018
STRATEC Consumables GmbH
Gottfried Reiter
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Die bond design for medium pressure sensor
Patent number
10,035,703
Issue date
Jul 31, 2018
Continental Automotive Systems, Inc.
Joe Pin Wang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Spatial light modulation element module, photolithographing apparat...
Patent number
9,927,712
Issue date
Mar 27, 2018
Nikon Corporation
Yoshihiko Suzuki
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Edge construction on optical devices
Patent number
9,835,801
Issue date
Dec 5, 2017
Mellanox Technologies Silicon Photonics Inc.
Wei Qian
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for manufacturing substrate gap supporter
Patent number
9,748,023
Issue date
Aug 29, 2017
GNE TECH CO., LTD.
Jae Ku Kim
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method and apparatus for a seal ring structure
Patent number
9,650,243
Issue date
May 16, 2017
Taiwan Semiconductor Manufacturing Company, Ltd.
Ting-Ying Chen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Component including two semiconductor elements, which are bonded to...
Patent number
9,650,240
Issue date
May 16, 2017
Robert Bosch GmbH
Mirko Hattass
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Three dimensional assembly of diamagnetic materials using magnetic...
Patent number
9,409,265
Issue date
Aug 9, 2016
President and Fellows of Harvard College
George M. Whitesides
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
MEMS micro-mirror assembly
Patent number
9,405,116
Issue date
Aug 2, 2016
Intel Corporation
Faouzi Khechana
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method of manufacturing a MEMS micro-mirror assembly
Patent number
9,323,047
Issue date
Apr 26, 2016
Intel Corporation
Faouzi Khechana
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS anchor and spacer structure
Patent number
9,213,181
Issue date
Dec 15, 2015
Pixtronix, Inc.
Timothy J. Brosnihan
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Display device
Patent number
9,206,036
Issue date
Dec 8, 2015
Pixtronix, Inc.
Jun Fujiyoshi
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method and system for improving alignment precision of parts in MEMS
Patent number
9,055,701
Issue date
Jun 9, 2015
International Business Machines Corporation
Stefano S. Oggioni
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Manufacturing method for a porous microneedle array and correspondi...
Patent number
8,986,256
Issue date
Mar 24, 2015
Robert Bosch GmbH
Dick Scholten
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Angle control of multi-cavity molded components for MEMS and NEMS g...
Patent number
8,877,071
Issue date
Nov 4, 2014
Metadigm LLC
Victor B. Kley
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method and system for improving alignment precision of parts in MEMS
Patent number
8,707,553
Issue date
Apr 29, 2014
International Business Machines Corporation
Stefano S. Oggioni
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method of fabricating a micro-mechanical component
Patent number
8,661,681
Issue date
Mar 4, 2014
Nivarox-Far S.A.
Alexandre Fussinger
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Package structure having MEMS elements and fabrication method thereof
Patent number
8,399,940
Issue date
Mar 19, 2013
Siliconware Precision Industries Co., Ltd.
Chen-Han Lin
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Semiconductor device and manufacturing method thereof
Patent number
8,344,489
Issue date
Jan 1, 2013
Yamaha Corporation
Hiroshi Saitoh
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Semiconductor device and manufacturing method thereof
Patent number
7,646,092
Issue date
Jan 12, 2010
Yamaha Corporation
Hiroshi Saitoh
B81 - MICRO-STRUCTURAL TECHNOLOGY
Patents Applications
last 30 patents
Information
Patent Application
WAFER LEVEL PROXIMITY SENSOR AND METHOD OF MAKING SAME
Publication number
20250002333
Publication date
Jan 2, 2025
STMicroelectronics International N.V.
Eric SAUGIER
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
DIE STACKING WITH CONTROLLED ANGULAR ALIGNMENT
Publication number
20240425367
Publication date
Dec 26, 2024
NXP USA, Inc.
Chayathorn Saklang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
DIE STACKING WITH CONTROLLED TILT AND ANGULAR ALIGNMENT
Publication number
20240425364
Publication date
Dec 26, 2024
NXP USA, Inc.
Chayathorn Saklang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
HIGH-PRECISION ALIGNMENT METHOD FOR PRODUCING A DEVICE, AND DEVICE
Publication number
20240262683
Publication date
Aug 8, 2024
ams-OSRAM International GmbH
Nicole Berner
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Anchor Structure
Publication number
20240017987
Publication date
Jan 18, 2024
SensorTek technology Corp.
Shih-Wei Lee
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
PACKAGING FOR A SENSOR AND METHODS OF MANUFACTURING THEREOF
Publication number
20230314197
Publication date
Oct 5, 2023
Applied Materials, Inc.
Arvinder Manmohan Singh Chadha
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SEMICONDUCTOR DEVICE
Publication number
20210280527
Publication date
Sep 9, 2021
NINGBO SEMICONDUCTOR INTERNATIONAL CORPORATION
Mengbin LIU
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Laser-Assisted Material Phase-Change and Expulsion Micro-Machining...
Publication number
20210139321
Publication date
May 13, 2021
Massachusetts Institute of Technology
Prashant Patil
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
MEMS PACKAGE WITH ROUGHEND INTERFACE
Publication number
20200339413
Publication date
Oct 29, 2020
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
Yu-Jui Chen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
INTEGRATED PACKAGE STRUCTURE FOR MEMS ELEMENT AND ASIC CHIP AND MET...
Publication number
20200262700
Publication date
Aug 20, 2020
J-METRICS TECHNOLOGY Co., Ltd.
Sheng-Lin Ma
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ALIGNMENT MARK AND SEMICONDUCTOR DEVICE, AND FABRICATION METHODS TH...
Publication number
20200161251
Publication date
May 21, 2020
NINGBO SEMICONDUCTOR INTERNATIONAL CORPORATION
Mengbin LIU
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
TRANSFER HEAD AND METHOD FOR TRANSFERRING MICRO DEVICES
Publication number
20190267272
Publication date
Aug 29, 2019
MIKRO MESA TECHNOLOGY CO., LTD.
Li-Yi CHEN
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR BONDING WAFERS EUTECTICALLY, AND A WAFER COMPOSITE
Publication number
20190135617
Publication date
May 9, 2019
ROBERT BOSCH GmbH
Axel GROSSE
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Method and Apparatus for a Seal Ring Structure
Publication number
20160194199
Publication date
Jul 7, 2016
Taiwan Semiconductor Manufacturing Company, Ltd.
Ting-Ying Chen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
DIE BOND DESIGN FOR MEDIUM PRESSURE SENSOR
Publication number
20150091107
Publication date
Apr 2, 2015
CONTINENTAL AUTOMOTIVE SYSTEMS, INC.
Joe Pin Wang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Method and Device for Producing a Microfluidic Analysis Cartridge
Publication number
20140322100
Publication date
Oct 30, 2014
ROBERT BOSCH GmbH
Franz Laermer
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Method and Apparatus for a Seal Ring Structure
Publication number
20140217557
Publication date
Aug 7, 2014
Taiwan Semiconductor Manufacturing Company, Ltd.
Ting-Ying Chen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
THREE DIMENSIONAL ASSEMBLY OF DIAMAGNETIC MATERIALS USING MAGNETIC...
Publication number
20140123461
Publication date
May 8, 2014
President and Fellows of Harvard College
George M. Whitesids
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Nano/micro roller bearing having tolerance compensation function an...
Publication number
20140003746
Publication date
Jan 2, 2014
INDUSTRY-ACADEMIC COOPERATION FOUNDATION YONSEI UNIVERSITY
Dae Eun Kim
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD AND SYSTEM FOR WAFER AND STRIP LEVEL BATCH DIE ATTACH ASSEMBLY
Publication number
20130285259
Publication date
Oct 31, 2013
Caleb C. Han
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Method and System for Improving Alignment Precision of Parts in MEMS
Publication number
20130205588
Publication date
Aug 15, 2013
International Business Machines Corporation
Stefano S. Oggioni
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ANGLE CONTROL OF MULTI-CAVITY MOLDED COMPONENTS FOR MEMS AND NEMS G...
Publication number
20130098865
Publication date
Apr 25, 2013
Metadigm LLC
Victor B. Kley
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
DISPLAY DEVICE AND METHOD FOR MANUFACTURING THE SAME
Publication number
20120300283
Publication date
Nov 29, 2012
Hitachi Displays, Ltd.
Jun FUJIYOSHI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS ANCHOR AND SPACER STRUCTURE
Publication number
20120295058
Publication date
Nov 22, 2012
Pixtronix, Inc.
Timothy J. Brosnihan
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
PACKAGE STRUCTURE HAVING MEMS ELEMENTS AND FABRICATION METHOD THEREOF
Publication number
20120292722
Publication date
Nov 22, 2012
Siliconware Precision Industries Co., Ltd.
Chen-Han Lin
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
STRUCTURE INCLUDING HOLDER UNIT AND DEVICE UNIT AND FIXING METHOD F...
Publication number
20120024453
Publication date
Feb 2, 2012
Canon Kabushiki Kaisha
Takahisa Kato
B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information
Patent Application
METHOD OF FABRICATING A MICRO-MECHANICAL COMPONENT
Publication number
20110225801
Publication date
Sep 22, 2011
Nivarox-Far S.A.
Alexandre Fussinger
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Manufacturing method for a porous microneedle array and correspondi...
Publication number
20110137254
Publication date
Jun 9, 2011
Dick Scholten
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
Publication number
20100072564
Publication date
Mar 25, 2010
Yamaha Corporation
Hiroshi Saitoh
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD AND SYSTEM FOR IMPROVING ALIGNMENT PRECISION OF PARTS IN MEMS
Publication number
20090211087
Publication date
Aug 27, 2009
International Business Machines Corporation
Stefano S. Oggioni
B81 - MICRO-STRUCTURAL TECHNOLOGY