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PHYSICS
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Photography
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PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES
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Photomechanical
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G03F7/70616
Wafer pattern monitoring
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Patents Grants
last 30 patents
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Patent Grant
Light sources and methods of controlling; devices and methods for u...
Patent number
11,971,663
Issue date
Apr 30, 2024
ASML Netherlands B.V.
Marinus Petrus Reijnders
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus, metrology systems, phased array illuminatio...
Patent number
11,966,169
Issue date
Apr 23, 2024
ASML Holding N.V.
Mohamed Swillam
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Process monitoring of deep structures with X-ray scatterometry
Patent number
11,955,391
Issue date
Apr 9, 2024
KLA-Tencor Corporation
Antonio Arion Gellineau
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Optical phase measurement system and method
Patent number
11,946,875
Issue date
Apr 2, 2024
Nova Ltd.
Gilad Barak
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Methods and apparatus for obtaining diagnostic information relating...
Patent number
11,940,740
Issue date
Mar 26, 2024
ASML Netherlands B.V.
Alexander Ypma
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Raman spectroscopy based measurement system
Patent number
11,906,434
Issue date
Feb 20, 2024
Nova Ltd.
Yonatan Oren
G01 - MEASURING TESTING
Information
Patent Grant
Verification metrology targets and their design
Patent number
11,874,605
Issue date
Jan 16, 2024
KLA Corporation
Michael E. Adel
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Methods and systems for inspecting integrated circuits based on X-rays
Patent number
11,815,349
Issue date
Nov 14, 2023
Bruker Nano, Inc.
Brennan Lovelace Peterson
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Wavefront sensor and associated metrology apparatus
Patent number
11,815,402
Issue date
Nov 14, 2023
ASML Netherlands B.V.
Sietse Thijmen Van Der Post
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Measurement of overlay error using device inspection system
Patent number
11,784,097
Issue date
Oct 10, 2023
KLA-Tencor Corporation
Choon Hoong Hoo
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Metrology and process control for semiconductor manufacturing
Patent number
11,763,181
Issue date
Sep 19, 2023
Nova Ltd.
Eitan Rothstein
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Method for determining corrections for lithographic apparatus
Patent number
11,754,931
Issue date
Sep 12, 2023
ASML Netherlands B.V.
Roy Werkman
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Optical mode optimization for wafer inspection
Patent number
11,748,551
Issue date
Sep 5, 2023
Taiwan Semiconductor Manufacturing Co., Ltd
Bing-Siang Chao
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Prediction of out of specification based on a spatial characteristi...
Patent number
11,733,613
Issue date
Aug 22, 2023
ASML Netherlands B.V.
Wenjin Huang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Frequency broadening apparatus and method
Patent number
11,733,617
Issue date
Aug 22, 2023
ASML Netherlands B.V.
Patrick Sebastian Uebel
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method and system to monitor a process apparatus
Patent number
11,733,610
Issue date
Aug 22, 2023
ASML Netherlands B.V.
Wim Tjibbo Tel
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method to characterize post-processing data in terms of individual...
Patent number
11,709,432
Issue date
Jul 25, 2023
ASML Netherlands B.V.
Wim Tjibbo Tel
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Methods and apparatus for monitoring a manufacturing process, inspe...
Patent number
11,698,346
Issue date
Jul 11, 2023
ASML Netherlands B.V.
Ioana Sorina Barbu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Preparing a substrate with patterned regions for immersion based in...
Patent number
11,687,005
Issue date
Jun 27, 2023
Applied Materials Israel Ltd.
Tai Kuzniz
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of manufacturing photo masks
Patent number
11,687,006
Issue date
Jun 27, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Chien-Cheng Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for decision making in a semiconductor manufacturing process
Patent number
11,687,007
Issue date
Jun 27, 2023
ASML Netherlands B.V.
Arnaud Hubaux
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Selecting a set of locations associated with a measurement or featu...
Patent number
11,681,231
Issue date
Jun 20, 2023
ASML Netherlands B.V.
Pierluigi Frisco
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Selection of measurement locations for patterning processes
Patent number
11,681,229
Issue date
Jun 20, 2023
ASML Netherlands B.V.
Hans Van Der Laan
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Simulation-assisted alignment between metrology image and design
Patent number
11,669,018
Issue date
Jun 6, 2023
ASML Netherlands B.V.
Te-Sheng Wang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for controlling a manufacturing apparatus and associated app...
Patent number
11,669,017
Issue date
Jun 6, 2023
ASML Netherlands B.V.
Roy Werkman
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Optical arrangement for an inspection apparatus
Patent number
11,662,198
Issue date
May 30, 2023
ASML Holding N.V.
Parag Vinayak Kelkar
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Aperture design and methods thereof
Patent number
11,656,391
Issue date
May 23, 2023
Taiwan Semiconductor Manufacturing Co., Ltd
Hung-Chih Hsieh
G02 - OPTICS
Information
Patent Grant
Metrology method, computer product and system
Patent number
11,640,116
Issue date
May 2, 2023
ASML Netherlands B.V.
Arie Jeffrey Den Boef
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Test structure design for metrology measurements in patterned samples
Patent number
11,639,901
Issue date
May 2, 2023
Nova Ltd.
Gilad Barak
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Systems and methods for feedforward process control in the manufact...
Patent number
11,635,682
Issue date
Apr 25, 2023
KLA Corporation
Roie Volkovich
G01 - MEASURING TESTING
Patents Applications
last 30 patents
Information
Patent Application
METROLOGY AND PROCESS CONTROL FOR SEMICONDUCTOR MANUFACTURING
Publication number
20240078450
Publication date
Mar 7, 2024
NOVA LTD
EITAN ROTHSTEIN
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
MODULAR AUTOENCODER MODEL FOR MANUFACTURING PROCESS PARAMETER ESTIM...
Publication number
20240061347
Publication date
Feb 22, 2024
ASML NETHERLANDS B.V.
Alexandru ONOSE
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
METHODS AND APPARATUS FOR OBTAINING DIAGNOSTIC INFORMATION RELATING...
Publication number
20240019788
Publication date
Jan 18, 2024
ASML NETHERLANDS B.V.
Alexander Ypma
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
METHOD AND SYSTEM TO MONITOR A PROCESS APPARATUS
Publication number
20240004299
Publication date
Jan 4, 2024
ASML NETHERLANDS B.V.
Wim Tjibbo TEL
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICES
Publication number
20230378003
Publication date
Nov 23, 2023
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
Li-Chao YIN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD FOR PRODUCING AN ELECTRONIC COMPONENT ASSEMBLY ON THE FRONT...
Publication number
20230378085
Publication date
Nov 23, 2023
Exagan SAS
Matthieu NONGAILLARD
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Optical Mode Optimization for Wafer Inspection
Publication number
20230367951
Publication date
Nov 16, 2023
Taiwan Semiconductor Manufacturing Co., LTD
Bing-Siang Chao
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
METHOD FOR DECISION MAKING IN A SEMICONDUCTOR MANUFACTURING PROCESS
Publication number
20230333482
Publication date
Oct 19, 2023
ASML NETHERLANDS B.V.
Arnaud HUBAUX
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
SELECTION OF MEASUREMENT LOCATIONS FOR PATTERNING PROCESSES
Publication number
20230333481
Publication date
Oct 19, 2023
ASML NETHERLANDS B.V.
Hans VAN DER LAAN
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
ILLUMINATION APPARATUS AND ASSOCIATED METROLOGY AND LITHOGRAPHIC AP...
Publication number
20230229094
Publication date
Jul 20, 2023
ASML NETHERLANDS B.V.
Simon Reinald HUISMAN
G02 - OPTICS
Information
Patent Application
IMAGE-BASED SEMICONDUCTOR DEVICE PATTERNING METHOD USING DEEP NEURA...
Publication number
20230197460
Publication date
Jun 22, 2023
Samsung Electronics Co., Ltd.
Jaewon YANG
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
METHOD FOR CONTROLLING A MANUFACTURING PROCESS AND ASSOCIATED APPAR...
Publication number
20230161265
Publication date
May 25, 2023
ASML NETHERLANDS B.V.
Pioter NIKOLSKI
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD FOR LITHOGRAPHY IN SEMICONDUCTOR FABRICATION
Publication number
20230152713
Publication date
May 18, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Cheng-Kuan WU
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
APPARATUS AND METHOD FOR PROCESS-WINDOW CHARACTERIZATION
Publication number
20230133487
Publication date
May 4, 2023
ASML NETHERLANDS B.V.
Te-Sheng WANG
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
OPTICAL PHASE MEASUREMENT SYSTEM AND METHOD
Publication number
20230130231
Publication date
Apr 27, 2023
NOVA LTD
Gilad BARAK
G01 - MEASURING TESTING
Information
Patent Application
LITHOGRAPHY MEASUREMENT MACHINE AND OPERATING METHOD THEREOF
Publication number
20230114246
Publication date
Apr 13, 2023
HON HAI PRECISION INDUSTRY CO., LTD.
Kuo-Kuei Fu
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
METHODS AND SYSTEMS FOR MASK ALIGNMENT IN MANUFACTURING PROCESS OF...
Publication number
20230096980
Publication date
Mar 30, 2023
Cowper Sciences Inc.
Robert KUIMELIS
C07 - ORGANIC CHEMISTRY
Information
Patent Application
Method and System for Providing a Quality Metric for Improved Proce...
Publication number
20230051705
Publication date
Feb 16, 2023
KLA Corporation
Daniel Kandel
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD FOR DETERMINING A FIELD-OF-VIEW SETTING
Publication number
20230023153
Publication date
Jan 26, 2023
ASML NETHERLANDS B.V.
Wim Tjibbo TEL
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
MACHINE LEARNING BASED IMAGE GENERATION FOR MODEL BASE ALIGNMENTS
Publication number
20220404712
Publication date
Dec 22, 2022
ASML NETHERLANDS B.V.
Qiang ZHANG
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
UNIVERSAL METROLOGY FILE, PROTOCOL, AND PROCESS FOR MASKLESS LITHOG...
Publication number
20220382171
Publication date
Dec 1, 2022
Applied Materials, Inc.
Tamer COSKUN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
RAMAN SPECTROSCOPY BASED MEASUREMENT SYSTEM
Publication number
20220373465
Publication date
Nov 24, 2022
NOVA MEASURING INSTRUMENTS LTD.
Yonatan OREN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD AND APPARATUS FOR DETERMINING FEATURE CONTRIBUTION TO PERFOR...
Publication number
20220351075
Publication date
Nov 3, 2022
ASML NETHERLANDS B.V.
Vahid BASTANI
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
METHOD FOR DETERMINING CONTRIBUTION TO A FINGERPRINT
Publication number
20220342319
Publication date
Oct 27, 2022
ASML NETHERLANDS B.V.
Davit Harutyunyan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METROLOGY SYSTEMS, COHERENCE SCRAMBLER ILLUMINATION SOURCES AND MET...
Publication number
20220342228
Publication date
Oct 27, 2022
ASML NETHERLANDS B.V.
Irwan Dani SETIJA
G02 - OPTICS
Information
Patent Application
METHODS AND APPARATUS FOR OBTAINING DIAGNOSTIC INFORMATION RELATING...
Publication number
20220326623
Publication date
Oct 13, 2022
ASML NETHERLANDS B.V.
Alexander Ypma
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
WAVELENGTH SELECTION MODULE, ILLUMINATION SYSTEM AND METROLOGY SYSTEM
Publication number
20220299365
Publication date
Sep 22, 2022
ASML NETHERLANDS B.V.
Gerbrand VAN DER ZOUW
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Light Sources and Methods of Controlling; Devices and Methods for U...
Publication number
20220291595
Publication date
Sep 15, 2022
ASML NETHERLANDS B.V.
Marinus Petrus REIJNDERS
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Optical Mode Optimization for Wafer Inspection
Publication number
20220284167
Publication date
Sep 8, 2022
Taiwan Semiconductor Manufacturing Co., Ltd.
Bing-Siang Chao
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
ILLUMINATION AND DETECTION APPARATUS FOR A METROLOGY APPARATUS
Publication number
20220276180
Publication date
Sep 1, 2022
ASML NETHERLANDS B.V.
Nitesh PANDEY
G01 - MEASURING TESTING