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PHYSICS
G03
Photography
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PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES
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Photomechanical
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G03F7/70608
Wafer resist monitoring
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Patents Grants
last 30 patents
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Patent Grant
Lithographic apparatus, metrology systems, phased array illuminatio...
Patent number
11,966,169
Issue date
Apr 23, 2024
ASML Holding N.V.
Mohamed Swillam
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Advanced load port for photolithography mask inspection tool
Patent number
11,921,431
Issue date
Mar 5, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Tung-Jung Chang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Optical metrology tool equipped with modulated illumination sources
Patent number
11,913,874
Issue date
Feb 27, 2024
KLA Corporation
Andrei V. Shchegrov
G01 - MEASURING TESTING
Information
Patent Grant
Method for predicting resist deformation
Patent number
11,914,942
Issue date
Feb 27, 2024
ASML Netherlands B.V.
Chrysostomos Batistakis
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Method for detecting an object structure and apparatus for carrying...
Patent number
11,892,769
Issue date
Feb 6, 2024
Carl Zeiss SMT GmbH
Beat Marco Mout
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Metrology apparatus and a method of determining a characteristic of...
Patent number
11,822,254
Issue date
Nov 21, 2023
ASML Netherlands B.V.
Arie Jeffrey Den Boef
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Composite overlay metrology target
Patent number
11,809,090
Issue date
Nov 7, 2023
KLA Corporation
Anna Golotsvan
G01 - MEASURING TESTING
Information
Patent Grant
Method for predicting resist deformation
Patent number
11,709,988
Issue date
Jul 25, 2023
ASML Netherlands B.V.
Chrysostomos Batistakis
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Method of manufacturing photo masks
Patent number
11,687,006
Issue date
Jun 27, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Chien-Cheng Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Selection of measurement locations for patterning processes
Patent number
11,681,229
Issue date
Jun 20, 2023
ASML Netherlands B.V.
Hans Van Der Laan
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Positioning method and apparatus for particles on reticle, storage...
Patent number
11,675,275
Issue date
Jun 13, 2023
CHANGXIN MEMORY TECHNOLOGIES, INC.
Shuang Xia
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Inspection tool and inspection method
Patent number
11,668,661
Issue date
Jun 6, 2023
ASML Netherlands B.V.
Thomas Jarik Huisman
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Lithography method using multiscale simulation, and method of manuf...
Patent number
11,662,665
Issue date
May 30, 2023
Samsung Electronics Co., Ltd.
Byunghoon Lee
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Method and apparatus for EUV mask inspection
Patent number
11,635,700
Issue date
Apr 25, 2023
Erel Milshtein
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Photomask inspection method and apparatus thereof
Patent number
11,614,684
Issue date
Mar 28, 2023
Taiwan Semiconductor Manufacturing Company Ltd.
Chih-Wei Wen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
High throughput and high position accurate method for particle insp...
Patent number
11,614,691
Issue date
Mar 28, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Shih-Jui Huang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Advanced load port for photolithography mask inspection tool
Patent number
11,592,754
Issue date
Feb 28, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Tung-Jung Chang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Substrate inspection system, substrate inspection method and record...
Patent number
11,555,691
Issue date
Jan 17, 2023
Tokyo Electron Limited
Hiroshi Nakamura
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Extreme ultraviolet light generation system and electronic device m...
Patent number
11,553,583
Issue date
Jan 10, 2023
Gigaphoton Inc.
Takayuki Yabu
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Scatterometer and method of scatterometry using acoustic radiation
Patent number
11,536,654
Issue date
Dec 27, 2022
ASML Netherlands B.V.
Maxim Pisarenco
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Extreme ultraviolet light generation system and electronic device m...
Patent number
11,366,394
Issue date
Jun 21, 2022
Gigaphoton Inc.
Koichiro Koge
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Metrology apparatus and a method of determining a characteristic of...
Patent number
11,327,410
Issue date
May 10, 2022
ASML Netherlands B.V.
Arie Jeffrey Den Boef
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of manufacturing photo masks
Patent number
11,327,405
Issue date
May 10, 2022
Taiwan Semiconductor Manufacturing Co., Ltd
Chien-Cheng Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for polishing a workpiece in the production of an optical el...
Patent number
11,213,926
Issue date
Jan 4, 2022
Carl Zeiss SMT GmbH
Andreas Wolpert
B24 - GRINDING POLISHING
Information
Patent Grant
Beam splitting prism systems
Patent number
11,126,007
Issue date
Sep 21, 2021
ASML Holding N.V.
Douglas C. Cappelli
G01 - MEASURING TESTING
Information
Patent Grant
Inspection sensitivity improvements for optical and electron beam i...
Patent number
11,092,893
Issue date
Aug 17, 2021
KLA Corporation
Andrew Cross
G01 - MEASURING TESTING
Information
Patent Grant
Calibration of azimuth angle for optical metrology stage using grat...
Patent number
11,079,220
Issue date
Aug 3, 2021
Onto Innovation Inc.
Nicholas James Keller
G01 - MEASURING TESTING
Information
Patent Grant
Method, substrate and apparatus to measure performance of optical m...
Patent number
11,016,396
Issue date
May 25, 2021
ASML Holding N.V.
Leonardo Gabriel Montilla
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Optical metrology tool equipped with modulated illumination sources
Patent number
10,969,328
Issue date
Apr 6, 2021
KLA Corporation
Andrei V. Shchegrov
G01 - MEASURING TESTING
Information
Patent Grant
Selection of measurement locations for patterning processes
Patent number
10,962,886
Issue date
Mar 30, 2021
ASML Netherlands B.V.
Hans Van Der Laan
G06 - COMPUTING CALCULATING COUNTING
Patents Applications
last 30 patents
Information
Patent Application
State Transition Temperature of Resist Structures
Publication number
20240125721
Publication date
Apr 18, 2024
IMEC vzw
Joren Severi
G01 - MEASURING TESTING
Information
Patent Application
Metrology Apparatus and a Method of Determining a Characteristic of...
Publication number
20230393490
Publication date
Dec 7, 2023
ASML NETHERLANDS B.V.
Arie Jeffrey DEN BOEF
G01 - MEASURING TESTING
Information
Patent Application
SUBSTRATE WEIGHT MEASUREMENT APPARATUS, A SUBSTRATE PROCESSING APPA...
Publication number
20230384681
Publication date
Nov 30, 2023
Samsung Electronics Co., Ltd.
Sangjine PARK
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SELECTION OF MEASUREMENT LOCATIONS FOR PATTERNING PROCESSES
Publication number
20230333481
Publication date
Oct 19, 2023
ASML NETHERLANDS B.V.
Hans VAN DER LAAN
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
INSPECTION METHOD, METHOD FOR PRODUCING COMPOSITION, AND METHOD FOR...
Publication number
20230266675
Publication date
Aug 24, 2023
FUJIFILM CORPORATION
Shinichi SUGIYAMA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
HIGH THROUGHPUT AND HIGH POSITION ACCURATE METHOD FOR PARTICLE INSP...
Publication number
20230251581
Publication date
Aug 10, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Shih-Jui HUANG
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD FOR MEASURING CRITICAL DIMENSION
Publication number
20230236513
Publication date
Jul 27, 2023
NANYA TECHNOLOGY CORPORATION
CHIA-CHUNG LIN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD FOR MEASURING CRITICAL DIMENSION
Publication number
20230236514
Publication date
Jul 27, 2023
NANYA TECHNOLOGY CORPORATION
CHIA-CHUNG LIN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PHOTOMASK INSPECTION METHOD AND APPARATUS THEREOF
Publication number
20230213853
Publication date
Jul 6, 2023
Taiwan Semiconductor Manufacturing company Ltd.
CHIH-WEI WEN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
ADVANCED LOAD PORT FOR PHOTOLITHOGRAPHY MASK INSPECTION TOOL
Publication number
20230176488
Publication date
Jun 8, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Tung-Jung CHANG
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD FOR CORRECTING CRITICAL DIMENSION MEASUREMENTS OF LITHOGRAPH...
Publication number
20230152714
Publication date
May 18, 2023
United Microelectronics Corp.
Hsin-Yu HSIEH
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
EUV LIGHT GENERATION APPARATUS, ELECTRONIC DEVICE MANUFACTURING MET...
Publication number
20230142875
Publication date
May 11, 2023
Gigaphoton Inc.
Fumio IWAMOTO
G01 - MEASURING TESTING
Information
Patent Application
EUV MICROSCOPE
Publication number
20230121350
Publication date
Apr 20, 2023
EUV TECH, INC.
CHAMI N. PERERA
G01 - MEASURING TESTING
Information
Patent Application
APPARATUS FOR PARTICLE MONITORING IN THE CHEMICAL LIQUID AND THE ME...
Publication number
20230096330
Publication date
Mar 30, 2023
SEMICON TECH GLOBAL LIMITED
Soon Suk HONG
G01 - MEASURING TESTING
Information
Patent Application
METHOD FOR PARTICLE BEAM-INDUCED PROCESSING OF A DEFECT OF A MICROL...
Publication number
20230081844
Publication date
Mar 16, 2023
Carl Zeiss SMT GMBH
Thorsten Hofmann
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
HIGH THROUGHPUT AND HIGH POSITION ACCURATE METHOD FOR PARTICLE INSP...
Publication number
20230049308
Publication date
Feb 16, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Shih-Jui HUANG
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
EVALUATION METHOD, SUBSTRATE PROCESSING APPARATUS, MANUFACTURING ME...
Publication number
20220364972
Publication date
Nov 17, 2022
Canon Kabushiki Kaisha
Masami Yonekawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LITHOGRAPHY METHOD USING MULTISCALE SIMULATION, AND METHOD OF MANUF...
Publication number
20220350256
Publication date
Nov 3, 2022
Samsung Electronics Co., Ltd.
Byunghoon LEE
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
ADVANCED LOAD PORT FOR PHOTOLITHOGRAPHY MASK INSPECTION TOOL
Publication number
20220342321
Publication date
Oct 27, 2022
Taiwan Semiconductor Manufacturing Co., Ltd.
Tung-Jung CHANG
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method and Apparatus for EUV Mask Inspection
Publication number
20220260928
Publication date
Aug 18, 2022
KLA Corporation
Erel Milshtein
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHODS FOR DETERMINING FOCUS SPOT WINDOW AND JUDGING WHETHER WAFER...
Publication number
20220236196
Publication date
Jul 28, 2022
CHANGXIN MEMORY TECHNOLOGIES, INC
MENG-HSUAN TSAI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR MEASURING A REFLECTIVITY OF AN OBJECT FOR MEASUREMENT LI...
Publication number
20220236648
Publication date
Jul 28, 2022
Carl Zeiss SMT GMBH
Renzo Capelli
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM AND ELECTRONIC DEVICE M...
Publication number
20220146943
Publication date
May 12, 2022
Gigaphoton Inc.
Koichiro KOGE
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
POSITIONING METHOD AND APPARATUS FOR PARTICLES ON RETICLE, STORAGE...
Publication number
20220137521
Publication date
May 5, 2022
CHANGXIN MEMORY TECHNOLOGIES, INC
Shuang XIA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM AND ELECTRONIC DEVICE M...
Publication number
20220110205
Publication date
Apr 7, 2022
Gigaphoton Inc.
Takayuki YABU
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Application
PHOTOMASK INSPECTION METHOD AND APPARATUS THEREOF
Publication number
20220075262
Publication date
Mar 10, 2022
Taiwan Semiconductor Manufacturing company Ltd.
CHIH-WEI WEN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
MEASUREMENT TOOL AND METHOD FOR LITHOGRAPHY MASKS
Publication number
20220011679
Publication date
Jan 13, 2022
Intel Corporation
Yoshihiro TEZUKA
G01 - MEASURING TESTING
Information
Patent Application
MEASUREMENT TOOL AND METHODS FOR EUV LITHOGRAPHY MASKS
Publication number
20220004106
Publication date
Jan 6, 2022
Intel Corporation
Yoshihiro Tezuka
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
COMPOSITE OVERLAY METROLOGY TARGET
Publication number
20210240089
Publication date
Aug 5, 2021
KLA Corporation
Anna Golotsvan
G01 - MEASURING TESTING
Information
Patent Application
OPTICAL METROLOGY TOOL EQUIPPED WITH MODULATED ILLUMINATION SOURCES
Publication number
20210223166
Publication date
Jul 22, 2021
Andrei V. Shchegrov
G01 - MEASURING TESTING