Wet etching

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CPC
B81C1/00539

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BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS B81C1/00Manufacture or treatment of devices or systems in or on a substrate

Current Industry

B81C1/00539Wet etching

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Manufacture of surface relief structures
- Patent number 12,169,359
- Issue date Dec 17, 2024
- Snap Inc.
- Ian Sturland
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Three-dimensional semiconductor fabrication
- Patent number 12,031,227
- Issue date Jul 9, 2024
- NIELSON SCIENTIFIC, LLC
- Gregory Nolan Nielson
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Device and method for direct printing of microfluidic chip based on...
- Patent number 12,017,213
- Issue date Jun 25, 2024
- CHONGQING INSTITUTE OF EAST CHINA NORMAL UNIVERSITY
- Heping Zeng
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Compositions and methods for selectively etching silicon nitride films
- Patent number 12,012,540
- Issue date Jun 18, 2024
- Entegris, Inc.
- Steven M. Bilodeau
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Bipolar transistor type MEMS pressure sensor and preparation method...
- Patent number 11,965,797
- Issue date Apr 23, 2024
- Wuxi Sencoch Semiconductor Co., Ltd.
- Tongqing Liu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device, manufacturing method of the same, and integrated MEMS...
- Patent number 11,939,212
- Issue date Mar 26, 2024
- Industrial Technology Research Institute
- Heng-chung Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for processing glass by alkaline etching
- Patent number 11,891,326
- Issue date Feb 6, 2024
- Schott AG
- Andreas Ortner
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Support structure for MEMS device with particle filter
- Patent number 11,807,521
- Issue date Nov 7, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chun-Wen Cheng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Etching composition, a method of etching a metal barrier layer and...
- Patent number 11,795,550
- Issue date Oct 24, 2023
- Samsung Electronics Co., Ltd.
- Jungah Kim
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing a plurality of resonators
- Patent number 11,584,639
- Issue date Feb 21, 2023
- Commissariat a l'Energie Atomique et Aux Energies Alternatives
- Bruno Fain
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Manufacturing method of micro fluid actuator
- Patent number 11,581,483
- Issue date Feb 14, 2023
- Microjet Technology Co., Ltd.
- Hao-Jan Mou
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Enhanced microfabrication using electrochemical techniques
- Patent number 11,549,903
- Issue date Jan 10, 2023
- National Technology & Engineering Solutions of Sandia, LLC
- Christian Arrington
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of texturing semiconductor substrate, semiconductor substrat...
- Patent number 11,527,673
- Issue date Dec 13, 2022
- Korea Institute of Science and Technology
- Doh Kwon Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Single crystalline diamond part production method for stand alone s...
- Patent number 11,512,409
- Issue date Nov 29, 2022
- Ecole Polytechnique Federale de Lausanne
- Niels Quack
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor ICF target processing
- Patent number 11,443,937
- Issue date Sep 13, 2022
- INNOVEN ENERGY LLC
- Tyler A. Lowrey
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Three-dimensional semiconductor fabrication
- Patent number 11,421,338
- Issue date Aug 23, 2022
- NIELSON SCIENTIFIC, LLC
- Gregory Nolan Nielson
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Wafer level method for manufacturing integrated infrared (IR) emitt...
- Patent number 11,402,556
- Issue date Aug 2, 2022
- Infineon Technologies AG
- Stephan Pindl
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method and apparatus for manufacturing microfluidic chip with femto...
- Patent number 11,370,657
- Issue date Jun 28, 2022
- CHONGQING INSTITUTE OF EAST CHINA NORMAL UNIVERSITY
- Heping Zeng
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method for forming MEMS cavity structure
- Patent number 11,332,364
- Issue date May 17, 2022
- AAC Technologies Pte. Ltd.
- Wooicheang Goh
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for fabricating microfluidic devices in fused silica by pico...
- Patent number 11,203,083
- Issue date Dec 21, 2021
- East China Normal University
- Ya Cheng
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Systems, devices, and/or methods for images
- Patent number 11,198,640
- Issue date Dec 14, 2021
- Dylan Kelley
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Nanostructures fabricated by metal asisted chemical etching for ant...
- Patent number 11,172,680
- Issue date Nov 16, 2021
- International Business Machines Corporation
- Stacey M. Gifford
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Ultrasonic transducer and method for manufacturing the same, displa...
- Patent number 11,088,314
- Issue date Aug 10, 2021
- BOE Technology Group Co., Ltd.
- Lei Zhao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Nanopatterned biosensor electrode for enhanced sensor signal and se...
- Patent number 11,022,577
- Issue date Jun 1, 2021
- International Business Machines Corporation
- Emily R. Kinser
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods and systems for fabricating miniaturized nanotube sensors
- Patent number 11,019,734
- Issue date May 25, 2021
- Tula Health, Inc.
- Robert Davis
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Complementary metal-oxide-semiconductor (CMOS) micro electro-mechan...
- Patent number 11,008,215
- Issue date May 18, 2021
- Chuan-Wei Wang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of manufacturing wiring board
- Patent number 11,001,930
- Issue date May 11, 2021
- SHINKO ELECTRIC INDUSTRIES CO, LTD.
- Tomoyuki Shimodaira
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Support structure for MEMS device with particle filter
- Patent number 10,968,097
- Issue date Apr 6, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chun-Wen Cheng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Production method for fabry-perot interference filter
- Patent number 10,908,022
- Issue date Feb 2, 2021
- Hamamatsu Photonics K.K.
- Takashi Kasahara
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Fabry-Perot interference filter having layer with thinned edge port...
- Patent number 10,900,834
- Issue date Jan 26, 2021
- Hamamatsu Photonics K.K.
- Takashi Kasahara
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
SEMICONDUCTOR CHIP WITH EMBEDDED MICROFLUIDIC CHANNELS AND METHOD O...
- Publication number 20240208806
- Publication date Jun 27, 2024
- National Taiwan University
- Jun-Chau Chien
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR PROCESSING GLASS BY ALKALINE ETCHING
- Publication number 20240116805
- Publication date Apr 11, 2024
- SCHOTT AG
- Andreas Ortner
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Systems, Devices, and/or Methods for Images
- Publication number 20240034668
- Publication date Feb 1, 2024
- Dylan Kelley
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PROCESSES AND APPLICATIONS FOR CATALYST INFLUENCED CHEMICAL ETCHING
- Publication number 20230245996
- Publication date Aug 3, 2023
- Board of Regents, The University of Texas System
- Sidlgata V. Sreenivasan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
THREE-DIMENSIONAL SEMICONDUCTOR FABRICATION
- Publication number 20220349084
- Publication date Nov 3, 2022
- Nielson Scientific, LLC
- Gregory Nolan Nielson
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR TRANSFERRING MICROSTRUCTURES, AND METHOD FOR MOUNTING MI...
- Publication number 20220315418
- Publication date Oct 6, 2022
- Shin-Etsu Chemical Co., Ltd.
- Yoshinori OGAWA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Systems, Devices, and/or Methods for Images
- Publication number 20220064057
- Publication date Mar 3, 2022
- Dylan Kelley
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE, MANUFACTURING METHOD OF THE SAME, AND INTEGRATED MEMS...
- Publication number 20210380404
- Publication date Dec 9, 2021
- Industrial Technology Research Institute
- Heng-chung CHANG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for Fabrication of a Suspended Elongated Structure by Etchin...
- Publication number 20210354982
- Publication date Nov 18, 2021
- Arne Quellmalz
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD AND APPARATUS FOR MANUFACTURING MICROFLUIDIC CHIP WITH FEMTO...
- Publication number 20210323814
- Publication date Oct 21, 2021
- Chongqing Institute of East China Normal University
- Heping ZENG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
DEVICE AND METHOD FOR DIRECT PRINTING OF MICROFLUIDIC CHIP BASED ON...
- Publication number 20210299658
- Publication date Sep 30, 2021
- Chongqing Institute of East China Normal University
- Heping ZENG
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
MANUFACTURING METHOD OF MICRO FLUID ACTUATOR
- Publication number 20210296567
- Publication date Sep 23, 2021
- MICROJET TECHNOLOGY CO., LTD.
- Hao-Jan Mou
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SUPPORT STRUCTURE FOR MEMS DEVICE WITH PARTICLE FILTER
- Publication number 20210238030
- Publication date Aug 5, 2021
- Taiwan Semiconductor Manufacturing Co., LTD
- Chun-Wen Cheng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PRODUCTION METHOD FOR FABRY-PEROT INTERFERENCE FILTER
- Publication number 20210131870
- Publication date May 6, 2021
- HAMAMATSU PHOTONICS K. K.
- Takashi KASAHARA
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
INTEGRATED CIRCUIT PACKAGE ASSEMBLIES WITH HIGH-ASPECT RATIO METALL...
- Publication number 20200411317
- Publication date Dec 31, 2020
- Intel Corporation
- Jeremy Ecton
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR MANUFACTURING A PLURALITY OF RESONATORS
- Publication number 20200385262
- Publication date Dec 10, 2020
- Commissariat A L'Energie Atomique et Aux Energies Alternatives
- Bruno FAIN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD OF TEXTURING SEMICONDUCTOR SUBSTRATE, SEMICONDUCTOR SUBSTRAT...
- Publication number 20200343404
- Publication date Oct 29, 2020
- Korea Institute of Science and Technology
- Doh Kwon LEE
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for Manufacturing Integrated Emitter Elements Having an Opti...
- Publication number 20200249380
- Publication date Aug 6, 2020
- INFINEON TECHNOLOGIES AG
- Stephan Pindl
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
COMPLEMENTARY METAL-OXIDE-SEMICONDUCTOR (CMOS) MICRO ELECTRO-MECHAN...
- Publication number 20200207613
- Publication date Jul 2, 2020
- CHUAN-WEI WANG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR FABRICATING MICROFLUIDIC DEVICES IN FUSED SILICA BY PICO...
- Publication number 20200189028
- Publication date Jun 18, 2020
- EAST CHINA NORMAL UNIVERSITY
- Ya CHENG
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20200115227
- Publication date Apr 16, 2020
- Kokusai Electric Corporation
- Naofumi OHASHI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
FABRICATION PROCESS FOR A SYMMETRICAL MEMS ACCELEROMETER
- Publication number 20190382264
- Publication date Dec 19, 2019
- Chinese Academy of Sciences Institute of Geology and Geophysics
- Lianzhong YU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR PRODUCING A MICROSTRUCTURE COMPONENT, MICROSTRUCTURE COM...
- Publication number 20190267149
- Publication date Aug 29, 2019
- Siemens Healthcare GmbH
- Andrea DEUTINGER
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
VERTICALLY STACKED NANOFLUIDIC CHANNEL ARRAY
- Publication number 20190263655
- Publication date Aug 29, 2019
- International Business Machines Corporation
- Juntao Li
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ULTRASONIC TRANSDUCER AND METHOD FOR MANUFACTURING THE SAME, DISPLA...
- Publication number 20190210867
- Publication date Jul 11, 2019
- BOE TECHNOLOGY GROUP CO., LTD.
- Lei ZHAO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
NANOSTRUCTURES FABRICATED BY METAL ASISTED CHEMICAL ETCHING FOR ANT...
- Publication number 20190200608
- Publication date Jul 4, 2019
- International Business Machines Corporation
- STACEY M. GIFFORD
- A01 - AGRICULTURE FORESTRY ANIMAL HUSBANDRY HUNTING TRAPPING FISHING
Information Patent Application
HERMETICALLY SEALED MOLECULAR SPECTROSCOPY CELL
- Publication number 20190071306
- Publication date Mar 7, 2019
- TEXAS INSTRUMENTS INCORPORATED
- Juan Alejandro HERBSOMMER
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PRODUCTION METHOD FOR FABRY-PEROT INTERFERENCE FILTER
- Publication number 20180373021
- Publication date Dec 27, 2018
- Hamamatsu Photonics K.K.
- Takashi KASAHARA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
RELEASE CHEMICAL PROTECTION FOR INTEGRATED COMPLEMENTARY METAL-OXID...
- Publication number 20180346323
- Publication date Dec 6, 2018
- InvenSense, Inc.
- Michael J. Daneman
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR PROTECTING A MEMS UNIT AGAINST INFRARED INVESTIGATIONS A...
- Publication number 20180297835
- Publication date Oct 18, 2018
- ROBERT BOSCH GmbH
- Michael Curcic
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Wet etching

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Manufacture of surface relief structures

Three-dimensional semiconductor fabrication

Device and method for direct printing of microfluidic chip based on...

Compositions and methods for selectively etching silicon nitride films

Bipolar transistor type MEMS pressure sensor and preparation method...

MEMS device, manufacturing method of the same, and integrated MEMS...

Method for processing glass by alkaline etching

Support structure for MEMS device with particle filter

Etching composition, a method of etching a metal barrier layer and...

Method for manufacturing a plurality of resonators

Manufacturing method of micro fluid actuator

Enhanced microfabrication using electrochemical techniques

Method of texturing semiconductor substrate, semiconductor substrat...

Single crystalline diamond part production method for stand alone s...

Semiconductor ICF target processing

Three-dimensional semiconductor fabrication

Wafer level method for manufacturing integrated infrared (IR) emitt...

Method and apparatus for manufacturing microfluidic chip with femto...

Method for forming MEMS cavity structure

Method for fabricating microfluidic devices in fused silica by pico...

Systems, devices, and/or methods for images

Nanostructures fabricated by metal asisted chemical etching for ant...

Ultrasonic transducer and method for manufacturing the same, displa...

Nanopatterned biosensor electrode for enhanced sensor signal and se...

Methods and systems for fabricating miniaturized nanotube sensors

Complementary metal-oxide-semiconductor (CMOS) micro electro-mechan...

Method of manufacturing wiring board

Support structure for MEMS device with particle filter

Production method for fabry-perot interference filter

Fabry-Perot interference filter having layer with thinned edge port...

Patents Applicationslast 30 patents

SEMICONDUCTOR CHIP WITH EMBEDDED MICROFLUIDIC CHANNELS AND METHOD O...

METHOD FOR PROCESSING GLASS BY ALKALINE ETCHING

Systems, Devices, and/or Methods for Images

PROCESSES AND APPLICATIONS FOR CATALYST INFLUENCED CHEMICAL ETCHING

THREE-DIMENSIONAL SEMICONDUCTOR FABRICATION

METHOD FOR TRANSFERRING MICROSTRUCTURES, AND METHOD FOR MOUNTING MI...

Systems, Devices, and/or Methods for Images

MEMS DEVICE, MANUFACTURING METHOD OF THE SAME, AND INTEGRATED MEMS...

Method for Fabrication of a Suspended Elongated Structure by Etchin...

METHOD AND APPARATUS FOR MANUFACTURING MICROFLUIDIC CHIP WITH FEMTO...

DEVICE AND METHOD FOR DIRECT PRINTING OF MICROFLUIDIC CHIP BASED ON...

MANUFACTURING METHOD OF MICRO FLUID ACTUATOR

SUPPORT STRUCTURE FOR MEMS DEVICE WITH PARTICLE FILTER

PRODUCTION METHOD FOR FABRY-PEROT INTERFERENCE FILTER

INTEGRATED CIRCUIT PACKAGE ASSEMBLIES WITH HIGH-ASPECT RATIO METALL...

METHOD FOR MANUFACTURING A PLURALITY OF RESONATORS

METHOD OF TEXTURING SEMICONDUCTOR SUBSTRATE, SEMICONDUCTOR SUBSTRAT...

Method for Manufacturing Integrated Emitter Elements Having an Opti...

COMPLEMENTARY METAL-OXIDE-SEMICONDUCTOR (CMOS) MICRO ELECTRO-MECHAN...

METHOD FOR FABRICATING MICROFLUIDIC DEVICES IN FUSED SILICA BY PICO...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

FABRICATION PROCESS FOR A SYMMETRICAL MEMS ACCELEROMETER

METHOD FOR PRODUCING A MICROSTRUCTURE COMPONENT, MICROSTRUCTURE COM...

VERTICALLY STACKED NANOFLUIDIC CHANNEL ARRAY

ULTRASONIC TRANSDUCER AND METHOD FOR MANUFACTURING THE SAME, DISPLA...

NANOSTRUCTURES FABRICATED BY METAL ASISTED CHEMICAL ETCHING FOR ANT...

HERMETICALLY SEALED MOLECULAR SPECTROSCOPY CELL

PRODUCTION METHOD FOR FABRY-PEROT INTERFERENCE FILTER

RELEASE CHEMICAL PROTECTION FOR INTEGRATED COMPLEMENTARY METAL-OXID...

METHOD FOR PROTECTING A MEMS UNIT AGAINST INFRARED INVESTIGATIONS A...