with a particular manufacturing method of vertical transistor structures

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H01L21/823885

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HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/823885with a particular manufacturing method of vertical transistor structures

Industries

Patents Grantslast 30 patents

Information Patent Grant
Semiconductor device and method for manufacturing the same
- Patent number 11,923,252
- Issue date Mar 5, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Sai-Hooi Yeong
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Microelectronic devices with isolation trenches in upper portions o...
- Patent number 11,925,037
- Issue date Mar 5, 2024
- Yi Hu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vertical transport field-effect transistor with gate patterning
- Patent number 11,916,143
- Issue date Feb 27, 2024
- International Business Machines Corporation
- Ruilong Xie
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Forming a wrap-around contact to connect a source or drain epitaxia...
- Patent number 11,915,984
- Issue date Feb 27, 2024
- Synopsys, Inc.
- Xi-Wei Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vertical device having a protrusion source
- Patent number 11,916,131
- Issue date Feb 27, 2024
- Taiwan Semiconductor Manufacturing Company Limited
- De-Fang Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Isolation structure for stacked vertical transistors
- Patent number 11,908,890
- Issue date Feb 20, 2024
- International Business Machines Corporation
- Juntao Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
VFET contact formation
- Patent number 11,908,907
- Issue date Feb 20, 2024
- International Business Machines Corporation
- Heng Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Structure and method for vertical tunneling field effect transistor...
- Patent number 11,894,448
- Issue date Feb 6, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Harry-Hak-Lay Chuang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High precision 3D metal stacking for a plurality of 3D devices
- Patent number 11,887,897
- Issue date Jan 30, 2024
- Tokyo Electron Limited
- Mark I. Gardner
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of making a plurality of high density logic elements with ad...
- Patent number 11,876,125
- Issue date Jan 16, 2024
- Tokyo Electron Limited
- Mark I. Gardner
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Memory device and SRAM cell
- Patent number 11,864,369
- Issue date Jan 2, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Hung-Yu Ye
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and method of forming the semiconductor device
- Patent number 11,842,998
- Issue date Dec 12, 2023
- International Business Machines Corporation
- Robin Hsin Kuo Chao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Bottom source/drain for fin field effect transistors
- Patent number 11,830,946
- Issue date Nov 28, 2023
- International Business Machines Corporation
- Heng Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device with u-shaped channel and electronic apparatus...
- Patent number 11,817,480
- Issue date Nov 14, 2023
- Institute of Microelectronics, Chinese Academy of Sciences
- Huilong Zhu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Stacked vertical transport field-effect transistor logic gate struc...
- Patent number 11,810,918
- Issue date Nov 7, 2023
- International Business Machines Corporation
- Tsung-Sheng Kang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thin film transistor random access memory
- Patent number 11,785,756
- Issue date Oct 10, 2023
- Micron Technology, Inc.
- Richard E. Fackenthal
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vertical transport field-effect transistors having germanium channe...
- Patent number 11,784,096
- Issue date Oct 10, 2023
- International Business Machines Corporation
- Choonghyun Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thin film transistor random access memory
- Patent number 11,770,923
- Issue date Sep 26, 2023
- Micron Technology, Inc.
- Richard E. Fackenthal
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Diode structures of stacked devices and methods of forming the same
- Patent number 11,764,207
- Issue date Sep 19, 2023
- Samsung Electronics Co., Ltd.
- Byounghak Hong
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Staggered stacked vertical crystalline semiconducting channels
- Patent number 11,756,961
- Issue date Sep 12, 2023
- International Business Machines Corporation
- Tsung-Sheng Kang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Devices including control logic structures, and related methods
- Patent number 11,742,344
- Issue date Aug 29, 2023
- Micron Technology, Inc.
- Kurt D. Beigel
- G11 - INFORMATION STORAGE
Information Patent Grant
Epitaxial growth of source and drain materials in a complementary f...
- Patent number 11,742,247
- Issue date Aug 29, 2023
- Synopsys, Inc.
- Xi-Wei Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vertical semiconductor device with steep subthreshold slope
- Patent number 11,742,352
- Issue date Aug 29, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Hung-Li Chiang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Stacked semiconductor device having mirror-symmetric pattern
- Patent number 11,735,585
- Issue date Aug 22, 2023
- Samsung Electronics Co., Ltd.
- Byounghak Hong
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Assemblies containing PMOS decks vertically-integrated with NMOS de...
- Patent number 11,735,479
- Issue date Aug 22, 2023
- Micron Technology, Inc.
- Scott E. Sills
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vertical transistor with self-aligned gate
- Patent number 11,728,433
- Issue date Aug 15, 2023
- International Business Machines Corporation
- Juntao Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of making vertical semiconductor nanosheets with diffusion b...
- Patent number 11,721,592
- Issue date Aug 8, 2023
- Tokyo Electron Limited
- Mark I. Gardner
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Uniform horizontal spacer
- Patent number 11,715,783
- Issue date Aug 1, 2023
- International Business Machines Corporation
- Michael P. Belyansky
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Complementary FET (CFET) buried sidewall contact with spacer foot
- Patent number 11,710,699
- Issue date Jul 25, 2023
- International Business Machines Corporation
- Ruilong Xie
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Bottom source/drain etch with fin-cut-last-VTFET
- Patent number 11,695,059
- Issue date Jul 4, 2023
- International Business Machines Corporation
- Tao Li
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
OPTIMIZATION OF VERTICAL TRANSPORT FIELD EFFECT TRANSISTOR INTEGRATION
- Publication number 20240136357
- Publication date Apr 25, 2024
- QUALCOMM Incorporated
- Xia LI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
THIN FILM TRANSISTOR RANDOM ACCESS MEMORY
- Publication number 20240081036
- Publication date Mar 7, 2024
- Micron Technology, Inc.
- Richard E. Fackenthal
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VERTICAL FIELD-EFFECT TRANSISTOR WITH ISOLATION PILLARS
- Publication number 20240072051
- Publication date Feb 29, 2024
- International Business Machines Corporation
- Brent A. Anderson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE, MANUFACTURING METHOD THEREOF, AND ELECTRONIC...
- Publication number 20240021483
- Publication date Jan 18, 2024
- Institute of Microelectronics, Chinese Academy of Sciences
- Huilong ZHU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
STACKED VERTICAL TRANSPORT FIELD-EFFECT TRANSISTOR LOGIC GATE STRUC...
- Publication number 20240014211
- Publication date Jan 11, 2024
- International Business Machines Corporation
- Tsung-Sheng Kang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DUMMY FIN CONTACT IN VERTICALLY STACKED TRANSISTORS
- Publication number 20230420458
- Publication date Dec 28, 2023
- International Business Machines Corporation
- Joshua M. Rubin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
- Publication number 20230411467
- Publication date Dec 21, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Cheng-Ting Chung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR FABRICATING VERTICAL CHANNEL NANOWIRE TRANSISTOR WITH AS...
- Publication number 20230387303
- Publication date Nov 30, 2023
- Peking University
- Ming LI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DIODE STRUCTURES OF STACKED DEVICES AND METHODS OF FORMING THE SAME
- Publication number 20230378164
- Publication date Nov 23, 2023
- Samsung Electronics Co., Ltd.
- Byounghak Hong
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE, METHOD OF MANUFACTURING THE SAME AND ELECTRON...
- Publication number 20230369489
- Publication date Nov 16, 2023
- Institute of Microelectronics, Chinese Academy of Sciences
- Huilong Zhu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
STACKED SEMICONDUCTOR DEVICE HAVING MIRROR-SYMMETRIC PATTERN
- Publication number 20230369317
- Publication date Nov 16, 2023
- Samsung Electronics Co., Ltd.
- Byounghak Hong
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TRANSITION METAL DICHALCOGENIDE (TMD) TRANSISTOR STRUCTURE
- Publication number 20230343833
- Publication date Oct 26, 2023
- International Business Machines Corporation
- Liqiao Qin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TRANSISTOR STACK OF VERTICAL CHANNEL FERROELECTRIC FETS AND METHODS...
- Publication number 20230335555
- Publication date Oct 19, 2023
- TOKYO ELECTRON LIMITED
- Mark I. GARDNER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
THREE-DIMENSIONAL DEVICE AND METHOD OF FORMING THE SAME
- Publication number 20230282643
- Publication date Sep 7, 2023
- TOKYO ELECTRON LIMITED
- Mark I. Gardner
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BOTTOM SOURCE/DRAIN ETCH WITH FIN-CUT-LAST-VTFET
- Publication number 20230275141
- Publication date Aug 31, 2023
- International Business Machines Corporation
- Tao Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
THREE-DIMENSIONAL ASYMMETRICAL VERTICAL TRANSISTOR ARCHITECTURES
- Publication number 20230246031
- Publication date Aug 3, 2023
- TOKYO ELECTRON LIMITED
- Mark I. Gardner
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TWO-DIMENSIONAL SELF-ALIGNED BACKSIDE VIA-TO-BACKSIDE POWER RAIL (V...
- Publication number 20230215767
- Publication date Jul 6, 2023
- International Business Machines Corporation
- Ruilong Xie
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of Forming Transistor
- Publication number 20230187538
- Publication date Jun 15, 2023
- Taiwan Semiconductor Manufacturing Company Limited
- Jean-Pierre Colinge
- B82 - NANO-TECHNOLOGY
Information Patent Application
SEMICONDUCTOR DEVICE WITH CMOS INVERTER
- Publication number 20230178550
- Publication date Jun 8, 2023
- Samsung Electronics Co., Ltd.
- Beomyong Hwang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FORMING A WRAP-AROUND CONTACT TO CONNECT A SOURCE OR DRAIN EPITAXIA...
- Publication number 20230163032
- Publication date May 25, 2023
- Synopsys, Inc.
- Xi-Wei LIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CMOS TOP SOURCE/DRAIN REGION DOPING AND EPITAXIAL GROWTH FOR A VERT...
- Publication number 20230154801
- Publication date May 18, 2023
- International Business Machines Corporation
- Heng Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VERTICAL TRANSISTORS HAVING IMPROVED CONTROL OF PARASITIC CAPACITAN...
- Publication number 20230142760
- Publication date May 11, 2023
- International Business Machines Corporation
- ChoongHyun Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VERTICAL TRANSPORT FIELD EFFECT TRANSISTORS HAVING DIFFERENT THRESH...
- Publication number 20230124673
- Publication date Apr 20, 2023
- International Business Machines Corporation
- Choonghyun Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
REDUCED PITCH MEMORY SUBSYSTEM FOR MEMORY DEVICE
- Publication number 20230123487
- Publication date Apr 20, 2023
- Micron Technology, Inc.
- Michael A. Smith
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Methods for Three-Dimensional CMOS Integrated Circuit Formation
- Publication number 20230104818
- Publication date Apr 6, 2023
- BeSang, Inc.
- Sang-Yun Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VERTICAL TRANSPORT FIELD-EFFECT TRANSISTOR WITH GATE PATTERNING
- Publication number 20230101011
- Publication date Mar 30, 2023
- International Business Machines Corporation
- RUILONG XIE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DIODE STRUCTURES OF STACKED DEVICES AND METHODS OF FORMING THE SAME
- Publication number 20230092061
- Publication date Mar 23, 2023
- Samsung Electronics Co., Ltd.
- Byounghak Hong
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COMPLEMENTARY FET (CFET) BURIED SIDEWALL CONTACT WITH SPACER FOOT
- Publication number 20230062819
- Publication date Mar 2, 2023
- International Business Machines Corporation
- Ruilong Xie
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MAKING A PLURALITY OF 3D SEMICONDUCTOR DEVICES WITH ENHAN...
- Publication number 20230068854
- Publication date Mar 2, 2023
- TOKYO ELECTRON LIMITED
- H. Jim Fulford
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SELF-ALIGNED BLOCK FOR VERTICAL FETS
- Publication number 20230055297
- Publication date Feb 23, 2023
- International Business Machines Corporation
- Ruilong Xie
- H01 - BASIC ELECTRIC ELEMENTS

with a particular manufacturing method of vertical transistor structures

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Semiconductor device and method for manufacturing the same

Microelectronic devices with isolation trenches in upper portions o...

Vertical transport field-effect transistor with gate patterning

Forming a wrap-around contact to connect a source or drain epitaxia...

Vertical device having a protrusion source

Isolation structure for stacked vertical transistors

VFET contact formation

Structure and method for vertical tunneling field effect transistor...

High precision 3D metal stacking for a plurality of 3D devices

Method of making a plurality of high density logic elements with ad...

Memory device and SRAM cell

Semiconductor device and method of forming the semiconductor device

Bottom source/drain for fin field effect transistors

Semiconductor device with u-shaped channel and electronic apparatus...

Stacked vertical transport field-effect transistor logic gate struc...

Thin film transistor random access memory

Vertical transport field-effect transistors having germanium channe...

Thin film transistor random access memory

Diode structures of stacked devices and methods of forming the same

Staggered stacked vertical crystalline semiconducting channels

Devices including control logic structures, and related methods

Epitaxial growth of source and drain materials in a complementary f...

Vertical semiconductor device with steep subthreshold slope

Stacked semiconductor device having mirror-symmetric pattern

Assemblies containing PMOS decks vertically-integrated with NMOS de...

Vertical transistor with self-aligned gate

Method of making vertical semiconductor nanosheets with diffusion b...

Uniform horizontal spacer

Complementary FET (CFET) buried sidewall contact with spacer foot

Bottom source/drain etch with fin-cut-last-VTFET

Patents Applicationslast 30 patents

OPTIMIZATION OF VERTICAL TRANSPORT FIELD EFFECT TRANSISTOR INTEGRATION

THIN FILM TRANSISTOR RANDOM ACCESS MEMORY

VERTICAL FIELD-EFFECT TRANSISTOR WITH ISOLATION PILLARS

SEMICONDUCTOR DEVICE, MANUFACTURING METHOD THEREOF, AND ELECTRONIC...

STACKED VERTICAL TRANSPORT FIELD-EFFECT TRANSISTOR LOGIC GATE STRUC...

DUMMY FIN CONTACT IN VERTICALLY STACKED TRANSISTORS

SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF

METHOD FOR FABRICATING VERTICAL CHANNEL NANOWIRE TRANSISTOR WITH AS...

DIODE STRUCTURES OF STACKED DEVICES AND METHODS OF FORMING THE SAME

SEMICONDUCTOR DEVICE, METHOD OF MANUFACTURING THE SAME AND ELECTRON...

STACKED SEMICONDUCTOR DEVICE HAVING MIRROR-SYMMETRIC PATTERN

TRANSITION METAL DICHALCOGENIDE (TMD) TRANSISTOR STRUCTURE

TRANSISTOR STACK OF VERTICAL CHANNEL FERROELECTRIC FETS AND METHODS...

THREE-DIMENSIONAL DEVICE AND METHOD OF FORMING THE SAME

BOTTOM SOURCE/DRAIN ETCH WITH FIN-CUT-LAST-VTFET

THREE-DIMENSIONAL ASYMMETRICAL VERTICAL TRANSISTOR ARCHITECTURES

TWO-DIMENSIONAL SELF-ALIGNED BACKSIDE VIA-TO-BACKSIDE POWER RAIL (V...

Method of Forming Transistor

SEMICONDUCTOR DEVICE WITH CMOS INVERTER

FORMING A WRAP-AROUND CONTACT TO CONNECT A SOURCE OR DRAIN EPITAXIA...

CMOS TOP SOURCE/DRAIN REGION DOPING AND EPITAXIAL GROWTH FOR A VERT...

VERTICAL TRANSISTORS HAVING IMPROVED CONTROL OF PARASITIC CAPACITAN...

VERTICAL TRANSPORT FIELD EFFECT TRANSISTORS HAVING DIFFERENT THRESH...

REDUCED PITCH MEMORY SUBSYSTEM FOR MEMORY DEVICE

Methods for Three-Dimensional CMOS Integrated Circuit Formation

VERTICAL TRANSPORT FIELD-EFFECT TRANSISTOR WITH GATE PATTERNING

DIODE STRUCTURES OF STACKED DEVICES AND METHODS OF FORMING THE SAME

COMPLEMENTARY FET (CFET) BURIED SIDEWALL CONTACT WITH SPACER FOOT

METHOD OF MAKING A PLURALITY OF 3D SEMICONDUCTOR DEVICES WITH ENHAN...

SELF-ALIGNED BLOCK FOR VERTICAL FETS