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ELECTRICITY
H01
Electric elements
H01L
SEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
H01L21/00
Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
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H01L21/263
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Patents Grants
last 30 patents
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Patent Grant
Etching platinum-containing thin film using protective cap layer
Patent number
11,929,423
Issue date
Mar 12, 2024
Texas Instruments Incorporated
Sebastian Meier
C01 - INORGANIC CHEMISTRY
Information
Patent Grant
Method for extreme ultraviolet lithography mask treatment
Patent number
11,906,897
Issue date
Feb 20, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Pei-Cheng Hsu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device and manufacturing method of semiconductor device
Patent number
11,901,419
Issue date
Feb 13, 2024
Fuji Electric Co., Ltd.
Yasunori Agata
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of forming a semiconductor device
Patent number
11,888,024
Issue date
Jan 30, 2024
Infineon Technologies AG
Reinhard Ploss
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Heat treatment method and heat treatment apparatus of light irradia...
Patent number
11,876,006
Issue date
Jan 16, 2024
SCREEN Holdings Co., Ltd.
Tomohiro Ueno
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
RF substrate structure and method of production
Patent number
11,848,191
Issue date
Dec 19, 2023
Commissariat a l'Energie Atomique et Aux Energies Alternatives
Emmanuel Augendre
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Enhanced ignition in inductively coupled plasmas for workpiece proc...
Patent number
11,848,204
Issue date
Dec 19, 2023
Beijing E-Town Semiconductor Technology Co., Ltd.
Stephen E. Savas
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Artificial intelligence-enabled preparation end-pointing
Patent number
11,847,813
Issue date
Dec 19, 2023
FEI Company
Thomas Gary Miller
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Semiconductor device and method for manufacturing the same
Patent number
11,823,898
Issue date
Nov 21, 2023
Fuji Electric Co., Ltd.
Yuichi Onozawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Optical image capturing system, image capturing device and electron...
Patent number
11,815,667
Issue date
Nov 14, 2023
LARGAN PRECISION CO., LTD
Lin-Yao Liao
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Depositive shielding for fiducial protection from redeposition
Patent number
11,817,395
Issue date
Nov 14, 2023
FEI Company
Sean Morgan-Jones
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Semiconductor device including transistor with doped oxide semicond...
Patent number
11,810,858
Issue date
Nov 7, 2023
Semiconductor Energy Laboratory Co., Ltd.
Junichi Koezuka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Heating device for heating object material using laser beam and ind...
Patent number
11,798,824
Issue date
Oct 24, 2023
RNR LAB INC.
Jeong Do Ryu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus including laser heating for etching thin layer
Patent number
11,772,198
Issue date
Oct 3, 2023
Semes Co., Ltd.
Won Geun Kim
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Process apparatus including a non-contact thermo-sensor
Patent number
11,764,087
Issue date
Sep 19, 2023
Samsung Electronics Co., Ltd.
Chaemook Lim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
RF capacitive coupled etch reactor
Patent number
11,742,187
Issue date
Aug 29, 2023
EVATEC AG
Johannes Weichart
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of forming a semiconductor device
Patent number
11,735,469
Issue date
Aug 22, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Yi-Nien Su
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for plasma processing
Patent number
11,688,586
Issue date
Jun 27, 2023
Tokyo Electron Limited
Peter Ventzek
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrates including useful layers
Patent number
11,670,540
Issue date
Jun 6, 2023
Soitec
Didier Landru
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate treating apparatus and liquid supplying method
Patent number
11,664,212
Issue date
May 30, 2023
Semes Co., Ltd.
Yong Hoon Hong
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor substrate crack mitigation systems and related methods
Patent number
11,652,010
Issue date
May 16, 2023
SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
Michael J. Seddon
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for non line-of-sight doping
Patent number
11,631,588
Issue date
Apr 18, 2023
Varian Semiconductor Equipment Associates, Inc.
Christopher R. Hatem
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for manufacturing semiconductor device, method for packaging...
Patent number
11,626,320
Issue date
Apr 11, 2023
Taiwan Semiconductor Manufacturing Co., Ltd
Che-Wei Yang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods and apparatus for predicting performance of a measurement m...
Patent number
11,626,704
Issue date
Apr 11, 2023
ASML Netherlands B.V.
Sietse Thijmen Van Der Post
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for removing re-sputtered material from patterned sidewalls
Patent number
11,615,960
Issue date
Mar 28, 2023
Cornell University
David G. Lishan
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Controlled hardmask shaping to create tapered slanted fins
Patent number
11,581,189
Issue date
Feb 14, 2023
Applied Materials, Inc.
Ludovic Godet
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Heat treatment method including low temperature degassing before fl...
Patent number
11,574,824
Issue date
Feb 7, 2023
SCREEN Holdings Co., Ltd.
Takayuki Aoyama
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Optical image capturing system, image capturing device and electron...
Patent number
11,555,987
Issue date
Jan 17, 2023
LARGAN PRECISION CO., LTD
Lin-Yao Liao
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle source module
Patent number
11,557,455
Issue date
Jan 17, 2023
ASML Netherlands B.V.
Laura Dinu-Gurtler
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Phosphorus fugitive emission control
Patent number
11,545,368
Issue date
Jan 3, 2023
Applied Materials, Inc.
Cuiyang Wang
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
METHOD FOR CREATING A SMOOTH DIAGONAL SURFACE USING A FOCUSED ION B...
Publication number
20240136150
Publication date
Apr 25, 2024
APPLIED MATERIALS ISRAEL LTD.
Yehuda Zur
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Carbon Assisted Semiconductor Dicing And Method
Publication number
20240120284
Publication date
Apr 11, 2024
ThinSiC Inc.
Tirunelveli Subramaniam Ravi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ARTIFICIAL INTELLIGENCE-ENABLED PREPARATION END-POINTING
Publication number
20240071040
Publication date
Feb 29, 2024
FEI Company
Thomas Gary Miller
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Enhanced Ignition in Inductively Coupled Plasmas For Workpiece Proc...
Publication number
20240071754
Publication date
Feb 29, 2024
Beijing E-Town Semiconductor Technology Co., Ltd.
Stephen E. Savas
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME
Publication number
20240047200
Publication date
Feb 8, 2024
Fuji Electric Co., Ltd.
Yuichi Onozawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
OPTICAL IMAGE CAPTURING SYSTEM, IMAGE CAPTURING DEVICE AND ELECTRON...
Publication number
20240027738
Publication date
Jan 25, 2024
LARGAN PRECISION CO., LTD.
Lin-Yao Liao
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE TREATING APPARATUS AND SUBSTRATE TREATING METHOD
Publication number
20230411184
Publication date
Dec 21, 2023
SEMES CO., LTD.
Kwang Ryul KIM
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS FOR SEMICONDUCTOR WAFER PROCESSING USING A RADIANT HEAT CAP...
Publication number
20230354478
Publication date
Nov 2, 2023
GLOBALWAFERS CO., LTD.
Chieh Hu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method of Forming a Semiconductor Device
Publication number
20230343636
Publication date
Oct 26, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Yi-Nien Su
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FORMING AN ELECTRONIC DEVICE, SUCH AS A JBS OR MPS DIODE, BASED ON...
Publication number
20230299173
Publication date
Sep 21, 2023
STMicroelectronics S.r.l.
Simone RASCUNA'
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Dynamic Laser-Assisted Etching
Publication number
20230253207
Publication date
Aug 10, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Han-Yu Tang
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
COMBINING FOCUSED ION BEAM MILLING AND SCANNING ELECTRON MICROSCOPE...
Publication number
20230245933
Publication date
Aug 3, 2023
KLA Corporation
Youfei JIANG
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Method and Apparatus for Plasma Processing
Publication number
20230230814
Publication date
Jul 20, 2023
TOKYO ELECTRON LIMITED
Peter Ventzek
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE SOURCE MODULE
Publication number
20230154719
Publication date
May 18, 2023
ASML NETHERLANDS B.V.
Laura DINU-GURTLER
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
RAPID AND PRECISE TEMPERATURE CONTROL FOR THERMAL ETCHING
Publication number
20230131233
Publication date
Apr 27, 2023
LAM RESEARCH CORPORATION
Nathan Lavdovsky
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
OPTICAL IMAGE CAPTURING SYSTEM, IMAGE CAPTURING DEVICE AND ELECTRON...
Publication number
20230112466
Publication date
Apr 13, 2023
LARGAN PRECISION CO., LTD.
Lin-Yao Liao
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PROCESSING METHOD FOR SEMICONDUCTOR SURFACE DEFECTS AND PREPARATION...
Publication number
20230054142
Publication date
Feb 23, 2023
CHANGXIN MEMORY TECHNOLOGIES, INC.
Xianghong JIANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ION BEAM ETCHING APPARATUS AND METHOD
Publication number
20230050650
Publication date
Feb 16, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Jung-Hao CHANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SELECTIVE CARBON DEPOSITION ON TOP AND BOTTOM SURFACES OF SEMICONDU...
Publication number
20220415648
Publication date
Dec 29, 2022
Applied Materials, Inc.
Abhijeet S. Bagal
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR STRUCTURE
Publication number
20220416114
Publication date
Dec 29, 2022
ENKRIS SEMICONDUCTOR, INC.
Kai Cheng
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
HEATING DEVICE FOR HEATING OBJECT MATERIAL USING LASER BEAM AND IND...
Publication number
20220392788
Publication date
Dec 8, 2022
RNR LAB INC.
Jeong Do RYU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TRANSISTORS INCLUDING SEMICONDUCTOR SURFACE MODIFICATION AND RELATE...
Publication number
20220376104
Publication date
Nov 24, 2022
Cree, Inc.
Joshua Bisges
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR MANUFACTURING ELECTRONIC DEVICE
Publication number
20220319918
Publication date
Oct 6, 2022
MITSUI CHEMICALS TOHCELLO, INC.
Toru MIURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SEMICONDUCTOR...
Publication number
20220310517
Publication date
Sep 29, 2022
Semiconductor Energy Laboratory Co., Ltd.
Junichi KOEZUKA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND ION BEAM IRRADIATI...
Publication number
20220301809
Publication date
Sep 22, 2022
KIOXIA Corporation
Junichi HASHIMOTO
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS
Publication number
20220293398
Publication date
Sep 15, 2022
ASM IP HOLDING B.V.
WonKi Jeong
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR DEVICE AND METHOD FOR PRODUCING SAME
Publication number
20220278207
Publication date
Sep 1, 2022
Rohm Co., Ltd.
Yuu ENOMOTO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, PLASMA GENERATING DEVICE, METHOD OF...
Publication number
20220277938
Publication date
Sep 1, 2022
Kokusai Electric Corporation
Tomoki IMAMURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF FORMING A SEMICONDUCTOR DEVICE
Publication number
20220262674
Publication date
Aug 18, 2022
Taiwan Semiconductor Manufacturing Co., Ltd.
Yi-Nien Su
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Laser-Assisted Epitaxy and Etching for Manufacturing Integrated Cir...
Publication number
20220238337
Publication date
Jul 28, 2022
Taiwan Semiconductor Manufacturing Co., Ltd.
Yee-Chia Yeo
H01 - BASIC ELECTRIC ELEMENTS