with the electric potential of an electrochemical etching

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CPC
B81C2201/0139

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BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS B81C2201/00Manufacture or treatment of micro-structural devices or systems

Current Industry

B81C2201/0139with the electric potential of an electrochemical etching

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Enhanced microfabrication using electrochemical techniques
- Patent number 11,549,903
- Issue date Jan 10, 2023
- National Technology & Engineering Solutions of Sandia, LLC
- Christian Arrington
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Spectrally and temporally engineered processing using photoelectroc...
- Patent number 10,734,237
- Issue date Aug 4, 2020
- The Board of Trustees of the University of Illinois
- Lynford Goddard
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method and system for fabricating a microelectromechanical system d...
- Patent number 10,570,011
- Issue date Feb 25, 2020
- United States of America as represented by Secretary of the Navy
- Paul D. Swanson
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of production of semiconductor device having semiconductor l...
- Patent number 10,479,675
- Issue date Nov 19, 2019
- Denso Corporation
- Akira Ogawa
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Spectrally and temporally engineered processing using photoelectroc...
- Patent number 10,115,599
- Issue date Oct 30, 2018
- The Board of Trustees of the University of Illinois
- Lynford Goddard
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods for producing a cavity within a semiconductor substrate
- Patent number 9,708,182
- Issue date Jul 18, 2017
- Infineon Technologies AG
- Andreas Behrendt
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods for producing a cavity within a semiconductor substrate
- Patent number 9,139,427
- Issue date Sep 22, 2015
- Infineon Technologies AG
- Andreas Behrendt
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing capacitive electromechanical transducer
- Patent number 8,426,235
- Issue date Apr 23, 2013
- Canon Kabushiki Kaisha
- Chienliu Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Surfactant-enhanced protection of micromechanical components from g...
- Patent number 7,560,037
- Issue date Jul 14, 2009
- Altera Corporation
- Bevan Staple
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of producing a semiconductor sensor component
- Patent number 7,160,750
- Issue date Jan 9, 2007
- Robert Bosch GmbH
- Hubert Benzel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Surfactant-enhanced protection of micromechanical components from g...
- Patent number 7,153,440
- Issue date Dec 26, 2006
- PTS Corporation
- Bevan Staple
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for producing diaphragm sensor unit and diaphragm sensor unit
- Patent number 6,759,265
- Issue date Jul 6, 2004
- Robert Bosch GmbH
- Hans Artmann
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Deposited thin film void-column network materials
- Patent number 6,399,177
- Issue date Jun 4, 2002
- The Penn State Research Foundation
- Stephen J. Fonash
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
Method and System for Fabricating a Microelectromechanical System D...
- Publication number 20200071161
- Publication date Mar 5, 2020
- Paul D. Swanson
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEMICONDUCTOR DEVICE PRODUCTION METHOD
- Publication number 20190023563
- Publication date Jan 24, 2019
- DENSO CORPORATION
- Akira OGAWA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHODS FOR PRODUCING A CAVITY WITHIN A SEMICONDUCTOR SUBSTRATE
- Publication number 20130270658
- Publication date Oct 17, 2013
- INFINEON TECHNOLOGIES AG
- Andreas Behrendt
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR MANUFACTURING CAPACITIVE ELECTROMECHANICAL TRANSDUCER
- Publication number 20120058587
- Publication date Mar 8, 2012
- Canon Kabushiki Kaisha
- Chienliu Chang
- B06 - GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
Information Patent Application
SYSTEM AND METHOD FOR OBTAINING ANISOTROPIC ETCHING OF PATTERNED SU...
- Publication number 20080245674
- Publication date Oct 9, 2008
- Robert J. von Gutfeld
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Surfactant-enhanced protection of micromechanical components from g...
- Publication number 20070289940
- Publication date Dec 20, 2007
- PTS Corporation
- Bevan Staple
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for producing a semiconductor component and a semiconductor...
- Publication number 20040147057
- Publication date Jul 29, 2004
- Hubert Benzel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Surfactant-enhanced protection of micromechanical components from g...
- Publication number 20040065637
- Publication date Apr 8, 2004
- Network Photonics, Inc.
- Bevan Staple
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for producing a diaphragm sensor unit and diaphragm sensor unit
- Publication number 20030127699
- Publication date Jul 10, 2003
- Hans Artmann
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for producing diaphragm sensor unit and diaphragm sensor unit
- Publication number 20030110867
- Publication date Jun 19, 2003
- Hans Artmann
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Deposited thin film void-column network materials
- Publication number 20020132101
- Publication date Sep 19, 2002
- The Penn State Research Foundation
- Stephen J. Fonash
- B81 - MICRO-STRUCTURAL TECHNOLOGY

with the electric potential of an electrochemical etching

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Enhanced microfabrication using electrochemical techniques

Spectrally and temporally engineered processing using photoelectroc...

Method and system for fabricating a microelectromechanical system d...

Method of production of semiconductor device having semiconductor l...

Spectrally and temporally engineered processing using photoelectroc...

Methods for producing a cavity within a semiconductor substrate

Methods for producing a cavity within a semiconductor substrate

Method for manufacturing capacitive electromechanical transducer

Surfactant-enhanced protection of micromechanical components from g...

Method of producing a semiconductor sensor component

Surfactant-enhanced protection of micromechanical components from g...

Method for producing diaphragm sensor unit and diaphragm sensor unit

Deposited thin film void-column network materials

Patents Applicationslast 30 patents

Method and System for Fabricating a Microelectromechanical System D...

SEMICONDUCTOR DEVICE PRODUCTION METHOD

METHODS FOR PRODUCING A CAVITY WITHIN A SEMICONDUCTOR SUBSTRATE

METHOD FOR MANUFACTURING CAPACITIVE ELECTROMECHANICAL TRANSDUCER

SYSTEM AND METHOD FOR OBTAINING ANISOTROPIC ETCHING OF PATTERNED SU...

Surfactant-enhanced protection of micromechanical components from g...

Method for producing a semiconductor component and a semiconductor...

Surfactant-enhanced protection of micromechanical components from g...

Method for producing a diaphragm sensor unit and diaphragm sensor unit

Method for producing diaphragm sensor unit and diaphragm sensor unit

Deposited thin film void-column network materials