with the semiconductor substrates being dipped in baths or vessels

Industry

CPC
H01L21/67057

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Parent Industries

HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/67057with the semiconductor substrates being dipped in baths or vessels

Industries

Patents Grantslast 30 patents

Information Patent Grant
Film processing method
- Patent number 12,119,242
- Issue date Oct 15, 2024
- SCREEN Holdings Co., Ltd.
- Yuji Tanaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 12,094,732
- Issue date Sep 17, 2024
- SCREEN Holdings Co., Ltd.
- Keisuke Miyajima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treating method and substrate treating apparatus
- Patent number 12,094,705
- Issue date Sep 17, 2024
- Semes Co., Ltd.
- Jin Woo Jung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and apparatus cleaning method
- Patent number 12,087,599
- Issue date Sep 10, 2024
- Tokyo Electron Limited
- Hidemasa Aratake
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Bearing assembly for accommodating device for semiconductor apparatus
- Patent number 12,085,124
- Issue date Sep 10, 2024
- ZHICHENG SEMICONDUCTOR EQUIPMENT TECHNOLOGY (KUNSHAN) CO., LTD.
- Bin Hua
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for in-situ Marangoni cleaning
- Patent number 12,080,567
- Issue date Sep 3, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Wei-Chun Hsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wet bench structure
- Patent number 12,074,041
- Issue date Aug 27, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chung-Yu Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Clamping jig and cleaning device
- Patent number 12,057,328
- Issue date Aug 6, 2024
- Kyocera Corporation
- Hiroshi Hamashima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer cleaning device
- Patent number 12,051,598
- Issue date Jul 30, 2024
- SK SILTRON CO., LTD.
- Se Geun Ha
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cleaning method with in-line SPM processing
- Patent number 12,051,599
- Issue date Jul 30, 2024
- Applied Materials, Inc.
- Brian J. Brown
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus for supplying gas of water repellent...
- Patent number 12,042,815
- Issue date Jul 23, 2024
- Tokyo Electron Limited
- Kotaro Tsurusaki
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Integrated ultrasonics and megasonics cleaning
- Patent number 12,042,827
- Issue date Jul 23, 2024
- YIELD ENGINEERING SYSTEMS, INC.
- Louis Navarro
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas tube, gas supply system and manufacturing method of semiconduct...
- Patent number 12,037,687
- Issue date Jul 16, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yi-Shiung Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 12,033,872
- Issue date Jul 9, 2024
- Tokyo Electron Limited
- Keita Hirase
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor manufacturing apparatus and method of manufacturing s...
- Patent number 12,027,380
- Issue date Jul 2, 2024
- TOSHIBA MEMORY CORPORATION
- Tomohiko Sugita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 12,020,954
- Issue date Jun 25, 2024
- Ebara Corporation
- Hirotaka Ohashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of, and an apparatus for, rinsing materialographic samples
- Patent number 11,998,956
- Issue date Jun 4, 2024
- STRUERS APS
- Thomas Matschofsky
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ultrasonic RF generator with automatically controllable output tuning
- Patent number 11,975,358
- Issue date May 7, 2024
- Cleaning Technologies Group, LLC
- Brian D. Bernhardt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wet bench structure
- Patent number 11,961,745
- Issue date Apr 16, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chung-Yu Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Module for chemically processing a substrate
- Patent number 11,938,522
- Issue date Mar 26, 2024
- SEMSYSCO GMBH
- Andreas Gleissner
- B08 - CLEANING
Information Patent Grant
Drying system with integrated substrate alignment stage
- Patent number 11,929,264
- Issue date Mar 12, 2024
- Applied Materials, Inc.
- Justin Ho Kuen Wong
- F26 - DRYING
Information Patent Grant
Substrate processing apparatus, substrate processing method and a s...
- Patent number 11,929,250
- Issue date Mar 12, 2024
- Kioxia Corporation
- Katsuhiro Sato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for in-situ Marangoni cleaning
- Patent number 11,923,210
- Issue date Mar 5, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Wei-Chun Hsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 11,915,947
- Issue date Feb 27, 2024
- Tokyo Electron Limited
- Takumi Honda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Holding jig
- Patent number 11,887,882
- Issue date Jan 30, 2024
- C. Uyemura & Co., Ltd.
- Daisuke Matsuyama
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 11,887,871
- Issue date Jan 30, 2024
- Tokyo Electron Limited
- Kazushige Sano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate liquid processing apparatus
- Patent number 11,869,780
- Issue date Jan 9, 2024
- Tokyo Electron Limited
- Takahiro Kawazu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Space filling device for wet bench
- Patent number 11,854,841
- Issue date Dec 26, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yen-Ji Chen
- B08 - CLEANING
Information Patent Grant
Methods and apparatus for cleaning substrates
- Patent number 11,848,217
- Issue date Dec 19, 2023
- ACM Research (Shanghai) Inc.
- Hui Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor chamber component cleaning systems
- Patent number 11,848,218
- Issue date Dec 19, 2023
- Applied Materials, Inc.
- Katty Guyomard
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING MODULE AND SUBSTRATE PROCESSING DEVICE PROVIDE...
- Publication number 20240383015
- Publication date Nov 21, 2024
- DAIKIN FINTECH, LTD.
- Yasunori DEGUCHI
- B08 - CLEANING
Information Patent Application
APPARATUS AND METHODS FOR CHEMICAL MECHANICAL POLISHING
- Publication number 20240383093
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Te-Chien HOU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR IN-SITU MARANGONI CLEANING
- Publication number 20240363373
- Publication date Oct 31, 2024
- TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Wei-Chun HSU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20240351074
- Publication date Oct 24, 2024
- SCREEN Holdings Co., Ltd.
- Tadashi MAEGAWA
- B08 - CLEANING
Information Patent Application
GAS TUBE, GAS SUPPLY SYSTEM AND MANUFACTURING METHOD OF SEMICONDUCT...
- Publication number 20240327985
- Publication date Oct 3, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yi-Shiung Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CLEANING BASKET
- Publication number 20240332038
- Publication date Oct 3, 2024
- Tokuyama Corporation
- Koki ICHITSUBO
- B08 - CLEANING
Information Patent Application
SUBSTRATE TRANSFERRING APPARATUS, AND LIQUID PROCESSING APPARATUS A...
- Publication number 20240222174
- Publication date Jul 4, 2024
- SEMES CO., LTD.
- Seul Gi CHOI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BEARING ASSEMBLY FOR ACCOMMODATING DEVICE FOR SEMICONDUCTOR APPARATUS
- Publication number 20240209893
- Publication date Jun 27, 2024
- ZHICHENG SEMICONDUCTOR EQUIPMENT TECHNOLOGY (KUNSHAN) CO., LTD.
- Bin HUA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATING APPARATUS AND SUBSTRATE TREATING SYSTEM INCLUDIN...
- Publication number 20240203761
- Publication date Jun 20, 2024
- SEMES CO., LTD.
- Jun Young CHOI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR IN-SITU MARANGONI CLEANING
- Publication number 20240178013
- Publication date May 30, 2024
- TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Wei-Chun HSU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER STORAGE CONTAINER CLEANING APPARATUS, AND WAFER STORAGE CONTA...
- Publication number 20240128095
- Publication date Apr 18, 2024
- SUMCO CORPORATION
- Fumitoshi IWASAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATING APPARATUS
- Publication number 20240105484
- Publication date Mar 28, 2024
- SCREEN Holdings Co., Ltd.
- Ichiro MITSUYOSHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATING APPARATUS
- Publication number 20240105486
- Publication date Mar 28, 2024
- SCREEN Holdings Co., Ltd.
- Kenji AMAHISA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SPACE FILLING DEVICE FOR WET BENCH
- Publication number 20240087917
- Publication date Mar 14, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yen-Ji Chen
- B08 - CLEANING
Information Patent Application
BATCH SUBSTRATE TREATMENT APPARATUS
- Publication number 20240030048
- Publication date Jan 25, 2024
- SCREEN Holdings Co., Ltd.
- Mitsutoshi SASAKI
- B08 - CLEANING
Information Patent Application
SUBSTRATE TREATING APPARATUS
- Publication number 20230420280
- Publication date Dec 28, 2023
- SCREEN Holdings Co., Ltd.
- Tadashi MAEGAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR CLEANING A BACK SIDE OF A SUBSTRATE AND METHOD OF CLE...
- Publication number 20230415207
- Publication date Dec 28, 2023
- SEMES CO., LTD.
- Sunghun EOM
- B08 - CLEANING
Information Patent Application
METHOD FOR MANUFACTURING A SEMICONDUCTOR PACKAGE ASSEMBLY AS WELL A...
- Publication number 20230411175
- Publication date Dec 21, 2023
- NEXPERIA B.V.
- Wai Wai Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OPTICAL SENSOR FOR REMOTE TEMPERATURE MEASUREMENTS
- Publication number 20230395408
- Publication date Dec 7, 2023
- TOKYO ELECTRON LIMITED
- Ivan MALEEV
- G01 - MEASURING TESTING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND A METHOD OF PROCESSING A SUBSTRA...
- Publication number 20230360931
- Publication date Nov 9, 2023
- Samsung Electronics Co., Ltd.
- JUNGHYUN SONG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEM AND METHOD FOR OPERATING THE SAME
- Publication number 20230343617
- Publication date Oct 26, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Jia-Rong XIAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CLEANING METHOD WITH IN-LINE SPM PROCESSING
- Publication number 20230290652
- Publication date Sep 14, 2023
- Applied Materials, Inc.
- Brian J. Brown
- B08 - CLEANING
Information Patent Application
METHOD OF CLEANING WORK AND CLEANING SYSTEM FOR WORK
- Publication number 20230271229
- Publication date Aug 31, 2023
- SUMCO CORPORATION
- Kaito NODA
- B08 - CLEANING
Information Patent Application
METHOD FOR CLEANING SEMICONDUCTOR DEVICES
- Publication number 20230130419
- Publication date Apr 27, 2023
- ASMPT NEXX, INC.
- William SOLARI
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
UNIT FOR SUPPLYING LIQUID, APPARATUS AND METHOD FOR TREATING SUBSTR...
- Publication number 20230131576
- Publication date Apr 27, 2023
- SEMES CO., LTD.
- Do Gyeong HA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD OF TREATING SUBSTRATE
- Publication number 20230110780
- Publication date Apr 13, 2023
- SEMES CO., LTD.
- Jun Young CHOI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND A S...
- Publication number 20230089765
- Publication date Mar 23, 2023
- KIOXIA Corporation
- Katsuhiro SATO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER PROCESSING METHOD AND CARRIER
- Publication number 20230079627
- Publication date Mar 16, 2023
- SCIENTECH CORPORATION
- Chuan-Chang FENG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATING METHOD AND SUBSTRATE TREATING APPARATUS
- Publication number 20230081833
- Publication date Mar 16, 2023
- SEMES CO., LTD.
- Jin Woo JUNG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20230038445
- Publication date Feb 9, 2023
- EBARA CORPORATION
- Itsuki KOBATA
- H01 - BASIC ELECTRIC ELEMENTS

with the semiconductor substrates being dipped in baths or vessels

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Film processing method

Substrate processing method and substrate processing apparatus

Substrate treating method and substrate treating apparatus

Substrate processing apparatus and apparatus cleaning method

Bearing assembly for accommodating device for semiconductor apparatus

Systems and methods for in-situ Marangoni cleaning

Wet bench structure

Clamping jig and cleaning device

Wafer cleaning device

Cleaning method with in-line SPM processing

Substrate processing apparatus for supplying gas of water repellent...

Integrated ultrasonics and megasonics cleaning

Gas tube, gas supply system and manufacturing method of semiconduct...

Substrate processing apparatus and substrate processing method

Semiconductor manufacturing apparatus and method of manufacturing s...

Substrate processing apparatus

Method of, and an apparatus for, rinsing materialographic samples

Ultrasonic RF generator with automatically controllable output tuning

Wet bench structure

Module for chemically processing a substrate

Drying system with integrated substrate alignment stage

Substrate processing apparatus, substrate processing method and a s...

Systems and methods for in-situ Marangoni cleaning

Substrate processing apparatus and substrate processing method

Holding jig

Substrate processing apparatus and substrate processing method

Substrate liquid processing apparatus

Space filling device for wet bench

Methods and apparatus for cleaning substrates

Semiconductor chamber component cleaning systems

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING MODULE AND SUBSTRATE PROCESSING DEVICE PROVIDE...

APPARATUS AND METHODS FOR CHEMICAL MECHANICAL POLISHING

SYSTEMS AND METHODS FOR IN-SITU MARANGONI CLEANING

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

GAS TUBE, GAS SUPPLY SYSTEM AND MANUFACTURING METHOD OF SEMICONDUCT...

CLEANING BASKET

SUBSTRATE TRANSFERRING APPARATUS, AND LIQUID PROCESSING APPARATUS A...

BEARING ASSEMBLY FOR ACCOMMODATING DEVICE FOR SEMICONDUCTOR APPARATUS

SUBSTRATE TREATING APPARATUS AND SUBSTRATE TREATING SYSTEM INCLUDIN...

SYSTEMS AND METHODS FOR IN-SITU MARANGONI CLEANING

WAFER STORAGE CONTAINER CLEANING APPARATUS, AND WAFER STORAGE CONTA...

SUBSTRATE TREATING APPARATUS

SUBSTRATE TREATING APPARATUS

SPACE FILLING DEVICE FOR WET BENCH

BATCH SUBSTRATE TREATMENT APPARATUS

SUBSTRATE TREATING APPARATUS

APPARATUS FOR CLEANING A BACK SIDE OF A SUBSTRATE AND METHOD OF CLE...

METHOD FOR MANUFACTURING A SEMICONDUCTOR PACKAGE ASSEMBLY AS WELL A...

OPTICAL SENSOR FOR REMOTE TEMPERATURE MEASUREMENTS

SUBSTRATE PROCESSING APPARATUS AND A METHOD OF PROCESSING A SUBSTRA...

SYSTEM AND METHOD FOR OPERATING THE SAME

CLEANING METHOD WITH IN-LINE SPM PROCESSING

METHOD OF CLEANING WORK AND CLEANING SYSTEM FOR WORK

METHOD FOR CLEANING SEMICONDUCTOR DEVICES

UNIT FOR SUPPLYING LIQUID, APPARATUS AND METHOD FOR TREATING SUBSTR...

APPARATUS AND METHOD OF TREATING SUBSTRATE

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND A S...

WAFER PROCESSING METHOD AND CARRIER

SUBSTRATE TREATING METHOD AND SUBSTRATE TREATING APPARATUS

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS