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H
ELECTRICITY
H01
Electric elements
H01J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J2237/00
Discharge tubes exposing object to beam
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H01J2237/20235
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Patents Grants
last 30 patents
Information
Patent Grant
Plasma processing apparatus
Patent number
11,961,710
Issue date
Apr 16, 2024
Canon Anelva Corporation
Tadashi Inoue
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Substrate processing apparatus having electrostatic chuck and subst...
Patent number
11,929,251
Issue date
Mar 12, 2024
ASM IP Holding B.V.
Toshihisa Nozawa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Wafer supporting device
Patent number
11,929,266
Issue date
Mar 12, 2024
NISSIN ION EQUIPMENT CO., LTD.
Takashi Sakamoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for poling polymer thin films
Patent number
11,910,715
Issue date
Feb 20, 2024
CREESENSE MICROSYSTEMS INC.
Albert Ting
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor processing chambers for deposition and etch
Patent number
11,887,811
Issue date
Jan 30, 2024
Applied Materials, Inc.
Khokan Chandra Paul
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Pre-loaded bowl mechanism for providing a symmetric radio frequency...
Patent number
11,887,884
Issue date
Jan 30, 2024
Applied Materials, Inc.
Ravikumar Patil
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of cleaning stage in plasma processing apparatus, and the pl...
Patent number
11,865,591
Issue date
Jan 9, 2024
Tokyo Electron Limited
Takamitsu Takayama
B08 - CLEANING
Information
Patent Grant
Modular reactor for microwave plasma-assisted deposition
Patent number
11,859,279
Issue date
Jan 2, 2024
DIAM CONCEPT
Alix Gicquel
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Plasma processing apparatus and plasma processing method
Patent number
11,854,772
Issue date
Dec 26, 2023
Tokyo Electron Limited
Masaki Hirayama
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Replaceable and/or collapsible edge ring assemblies for plasma shea...
Patent number
11,798,789
Issue date
Oct 24, 2023
Lam Research Corporation
Alejandro Sanchez
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate holding device
Patent number
11,776,839
Issue date
Oct 3, 2023
NISSIN ION EQUIPMENT CO., LTD.
Ippei Nishimura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Coaxial lift device with dynamic leveling
Patent number
11,742,235
Issue date
Aug 29, 2023
Applied Materials, Inc.
Jason M. Schaller
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Direct lift cathode for lithography mask chamber
Patent number
11,710,621
Issue date
Jul 25, 2023
Applied Materials, Inc.
Khiem Nguyen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Vertically adjustable plasma source
Patent number
11,705,312
Issue date
Jul 18, 2023
Applied Materials, Inc.
Tsutomu Tanaka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor processing chambers for deposition and etch
Patent number
11,699,571
Issue date
Jul 11, 2023
Applied Materials, Inc.
Khokan Chandra Paul
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Lift thimble system, reaction chamber, and semiconductor processing...
Patent number
11,694,880
Issue date
Jul 4, 2023
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
Xingfei Mao
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ion beam cutting calibration system and method
Patent number
11,658,001
Issue date
May 23, 2023
INSTITUTE OF GEOLOGY AND GEOPHYSICS, CHINESE ACADEMY OF SCIENCES
Zhongming Du
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Mounting table, substrate processing apparatus, and control method
Patent number
11,587,820
Issue date
Feb 21, 2023
Tokyo Electron Limited
Masakatsu Kashiwazaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Systems and methods of hysteresis compensation
Patent number
11,538,652
Issue date
Dec 27, 2022
FEI Company
Edwin Verschueren
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Sample holder for electron microscopy
Patent number
11,521,824
Issue date
Dec 6, 2022
ZoNexus LLC
Alpesh Khushalchand Shukla
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Interferometric stage positioning apparatus
Patent number
11,476,077
Issue date
Oct 18, 2022
ASML Netherlands B.V.
Marcel Koenraad Marie Baggen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Linear motor for vacuum and vacuum processing apparatus
Patent number
11,418,101
Issue date
Aug 16, 2022
Hitachi High-Technologies Corporation
Tomotaka Shibazaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multi-source ion beam etch system
Patent number
11,387,071
Issue date
Jul 12, 2022
Applied Materials, Inc.
Qiwei Liang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma etch chamber and method of plasma etching
Patent number
11,387,079
Issue date
Jul 12, 2022
EVATEC AG
Frantisek Balon
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
RF return path for reduction of parasitic plasma
Patent number
11,335,543
Issue date
May 17, 2022
Applied Materials, Inc.
Anantha K. Subramani
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electron beam inspection apparatus stage positioning
Patent number
11,302,512
Issue date
Apr 12, 2022
ASML Netherlands B.V.
Marcel Koenraad Marie Baggen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for poling polymer thin films
Patent number
11,283,004
Issue date
Mar 22, 2022
Areesys Technologies, Inc.
Albert Ting
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus
Patent number
11,276,591
Issue date
Mar 15, 2022
Tokyo Electron Limited
Satoshi Suzuki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Pedestal lift for semiconductor processing chambers
Patent number
11,251,067
Issue date
Feb 15, 2022
Applied Materials, Inc.
Brian T. West
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Sample holder for electron microscopy
Patent number
11,195,689
Issue date
Dec 7, 2021
ZoNexus LLC
Alpesh Khushalchand Shukla
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
SAMPLE HOLDER FOR TRANSMISSION ELECTRON MICROSCOPE, SAMPLE ANALYSIS...
Publication number
20240153734
Publication date
May 9, 2024
Samsung Electronics Co., Ltd.
Yeoseon Choi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
IMPEDANCE CONTROL OF LOCAL AREAS OF A SUBSTRATE DURING PLASMA DEPOS...
Publication number
20240136160
Publication date
Apr 25, 2024
Applied Materials, Inc.
Zheng John YE
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
TARGET PROCESSING DEVICE AND TARGET PROCESSING METHOD
Publication number
20240096601
Publication date
Mar 21, 2024
KIOXIA Corporation
Takeharu MOTOKAWA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS FOR TREATING SUBSTRATE AND METHOD FOR TREATING SUBSTRATE
Publication number
20240087854
Publication date
Mar 14, 2024
PSK INC.
Kwang Sung YOO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DUAL FOCUS SOLUTON FOR SEM METROLOGY TOOLS
Publication number
20240071713
Publication date
Feb 29, 2024
ASML NETHERLANDS B.V.
Niels Johannes Maria BOSCH
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
REPLACEABLE AND/OR COLLAPSIBLE EDGE RING ASSEMBLIES FOR PLASMA SHEA...
Publication number
20240038504
Publication date
Feb 1, 2024
LAM RESEARCH CORPORATION
Alejandro SANCHEZ
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
HIGH SELECTIVITY, LOW STRESS, AND LOW HYDROGEN CARBON HARDMASKS IN...
Publication number
20240030028
Publication date
Jan 25, 2024
LAM RESEARCH CORPORATION
Abbin Antony
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS
Publication number
20240021419
Publication date
Jan 18, 2024
TOKYO ELECTRON LIMITED
Tatsuya YAMAGUCHI
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
Publication number
20230420294
Publication date
Dec 28, 2023
Tokyo Electron Limited
Makoto WADA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PLASMA CHAMBER WITH GAS CROSS-FLOW, MICROWAVE RESONATORS AND A ROTA...
Publication number
20230395356
Publication date
Dec 7, 2023
Applied Materials, Inc.
Anantha Subramani
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
COOLING PLATE
Publication number
20230377854
Publication date
Nov 23, 2023
TOKYO ELECTRON LIMITED
Yoichi YAMADA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
COAXIAL LIFT DEVICE WITH DYNAMIC LEVELING
Publication number
20230360956
Publication date
Nov 9, 2023
Applied Materials, Inc.
Jason M. SCHALLER
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
COAXIAL LIFT DEVICE WITH DYNAMIC LEVELING
Publication number
20230360955
Publication date
Nov 9, 2023
Applied Materials, Inc.
Jason M. SCHALLER
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR PROCESSING CHAMBERS AND METHODS FOR DEPOSITION AND ETCH
Publication number
20230343552
Publication date
Oct 26, 2023
Applied Materials, Inc.
Khokan Chandra Paul
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
ION BEAM ETCHING MACHINE AND LIFTING AND ROTATING PLATFORM DEVICE T...
Publication number
20230326709
Publication date
Oct 12, 2023
JIANGSU LEUVEN INSTRUMENTS CO. LTD
Haiyang LIU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
VERTICALLY ADJUSTABLE PLASMA SOURCE
Publication number
20230307213
Publication date
Sep 28, 2023
Applied Materials, Inc.
Tsutomu Tanaka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS
Publication number
20230282456
Publication date
Sep 7, 2023
KIOXIA Corporation
Tomohiro TAMURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
BIASABLE ROTATING PEDESTAL
Publication number
20230282506
Publication date
Sep 7, 2023
Applied Materials, Inc.
Anantha Subramani
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SYSTEM FOR DEPOSITING PIEZOELECTRIC MATERIALS, METHODS FOR USING TH...
Publication number
20230257869
Publication date
Aug 17, 2023
QORVO BIOTECHNOLOGIES, LLC
Derya Deniz
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
Publication number
20230245869
Publication date
Aug 3, 2023
Kokusai Electric Corporation
Tetsuaki INADA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
Publication number
20230245870
Publication date
Aug 3, 2023
TOKYO ELECTRON LIMITED
Taro IKEDA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SEMICONDUCTOR MACHINE SYSTEM AND MANUFACTURING METHOD USING THEREOF
Publication number
20230229133
Publication date
Jul 20, 2023
TENGXI TECHNOLOGY CO. LTD.
WEI-HAN LO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE TRANSFER METHOD
Publication number
20230215754
Publication date
Jul 6, 2023
Tokyo Electron Limited
Satoru KAWAKAMI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
LIFT PIN UNIT AND UNIT FOR SUPPORTING SUBSTRATE AND SUBSTRATE TREAT...
Publication number
20230215706
Publication date
Jul 6, 2023
SEMES CO., LTD.
Yoon Seok CHOI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING SYSTEM
Publication number
20230212735
Publication date
Jul 6, 2023
Applied Materials, Inc.
Nagabhushana NANJUNDAPPA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
LIFT PIN ASSEMBLY AND SUBSTRATE TREATING APPARATUS
Publication number
20230215705
Publication date
Jul 6, 2023
SEMES CO., LTD.
Wan Hee JEONG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LIFT PIN ASSEMBLY AND SUBSTRATE PROCESSING APPARATUS HAVING SAME
Publication number
20230207378
Publication date
Jun 29, 2023
SEMES CO., LTD.
Kuk Saeng KIM
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE TREATMENT APPARATUS
Publication number
20230207288
Publication date
Jun 29, 2023
SEMES CO. LTD.
Sang-Kee LEE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MID-CHAMBER FLOW OPTIMIZER
Publication number
20230178342
Publication date
Jun 8, 2023
LAM RESEARCH CORPORATION
Craig Rosslee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF CLEANING STAGE IN PLASMA PROCESSING APPARATUS, AND THE PL...
Publication number
20230173558
Publication date
Jun 8, 2023
TOKYO ELECTRON LIMITED
Takamitsu TAKAYAMA
B08 - CLEANING