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2886502
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Information
Patent Grant
2886502
References
Source
Patent Number
2,886,502
Date Filed
Not available
Date Issued
Tuesday, May 12, 1959
65 years ago
CPC
H01J37/34 - operating with cathodic sputtering
C23C14/04 - Coating on selected surface areas
C23C14/22 - characterised by the process of coating
C23C14/3464 - using more than one target
Y10S148/146 - Sheet resistance, dopant parameters
Y10S148/158 - Sputtering
Y10S148/169 - Vacuum deposition
US Classifications
204 - Chemistry: electrical and wave energy
148 - Metal treatment
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