3108919

Information

• Patent Grant
• 3108919

• References
• Source

• Patent Number

  3,108,919

• Date Filed

  Not available

• Date Issued

  Tuesday, October 29, 1963
  61 years ago

• CPC

  • C09K13/08 - containing a fluorine compound
  • C23F1/26 - for etching refractory metals
  • H01L21/2033 - Epitaxial deposition of elements of the Fourth Group of the Periodic System
  • H01L21/30604 - Chemical etching

• US Classifications

  • 216 - Etching a substrate: processes
  • 134 - Cleaning and liquid contact with solids
  • 252 - Compositions
  • 257 - Active solid-state devices
  • 438 - Semiconductor device manufacturing: process