3293074

Information

• Patent Grant
• 3293074

• References
• Source

• Patent Number

  3,293,074

• Date Filed

  Not available

• Date Issued

  Tuesday, December 20, 1966
  58 years ago

• CPC

  • C30B25/14 - Feed and outlet means for the gases Modifying the flow of the reactive gases
  • Y10S148/006 - Apparatus
  • Y10S148/056 - Gallium arsenide
  • Y10S148/079 - Inert carrier gas
  • Y10S438/935 - Gas flow control

• US Classifications

  • 117 - Single-crystal, oriented-crystal, and epitaxy growth processes
  • 065 - Glass manufacturing
  • 118 - Coating apparatus
  • 148 - Metal treatment
  • 423 - Chemistry of inorganic compounds
  • 438 - Semiconductor device manufacturing: process