3460985

Information

• Patent Grant
• 3460985

• References
• Source

• Patent Number

  3,460,985

• Date Filed

  Not available

• Date Issued

  Tuesday, August 12, 1969
  55 years ago

• CPC

  • C23C14/00 - Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
  • C23C16/00 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating
  • Y10S148/051 - Etching
  • Y10S148/052 - Face to face deposition

• US Classifications

  • 427 - Coating processes
  • 117 - Single-crystal, oriented-crystal, and epitaxy growth processes
  • 148 - Metal treatment
  • 216 - Etching a substrate: processes