3477848

Information

• Patent Grant
• 3477848

• References
• Source

• Patent Number

  3,477,848

• Date Filed

  Not available

• Date Issued

  Tuesday, November 11, 1969
  55 years ago

• CPC

  • H01L27/00 - Devices consisting of a plurality of semiconductor or other solid state components formed in or on a common substrate
  • C23F1/02 - Local etching
  • G03F7/70425 - Imaging strategies
  • G03F7/70433 - Layout for increasing efficiency, for compensating imaging errors
  • G11C15/06 - using cryogenic elements
  • H01L21/00 - Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
  • H01L39/24 - Processes or apparatus peculiar to the manufacture or treatment of devices provided for in H01L39/00 or of parts thereof
  • H01L49/02 - Thin-film or thick-film devices

• US Classifications

  • 430 - Radiation imagery chemistry: process, composition, or product thereof