Membership
Tour
Register
Log in
3597081
Follow
Information
Patent Grant
3597081
References
Source
Patent Number
3,597,081
Date Filed
Not available
Date Issued
Tuesday, August 3, 1971
53 years ago
CPC
G03F7/70691 - Handling of masks or wafers
G03B27/18 - Maintaining or producing contact pressure between original and light-sensitive material
H01L21/6838 - with gripping and holding devices using a vacuum; Bernoulli devices
US Classifications
355 - Photocopying
Information
Content
Industries
Organizations
People
Transactions
Events
Impact
Timeline
Text data is not available. Click on
here
to see the original data.