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3607468
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Information
Patent Grant
3607468
References
Source
Patent Number
3,607,468
Date Filed
Not available
Date Issued
Tuesday, September 21, 1971
53 years ago
CPC
H01L29/36 - characterised by the concentration or distribution of impurities in the bulk material
A47L15/42 - Details
G01D5/244 - influencing characteristics of pulses or pulse trains generating pulses or pulse trains
H01L21/00 - Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
H01L21/22 - Diffusion of impurity materials
H01L21/265 - producing ion implantation
H01L27/00 - Devices consisting of a plurality of semiconductor or other solid state components formed in or on a common substrate
H01L29/73 - Bipolar junction transistors
Y10S148/037 - Diffusion-deposition
Y10S148/04 - Dopants, special
Y10S148/085 - Isolated-integrated
Y10S148/151 - Simultaneous diffusion
Y10S148/157 - Special diffusion and profiles
US Classifications
438 - Semiconductor device manufacturing: process
148 - Metal treatment
257 - Active solid-state devices
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