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3615466
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Information
Patent Grant
3615466
References
Source
Patent Number
3,615,466
Date Filed
Not available
Date Issued
Tuesday, October 26, 1971
53 years ago
CPC
H01L21/32 - using masks
D06F15/00 - Washing machines having beating, rubbing or squeezing means in receptacles stationary for washing purposes
H01L21/00 - Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
H01L21/82 - to produce devices
Y10S438/942 - Masking
US Classifications
430 - Radiation imagery chemistry: process, composition, or product thereof
365 - Static information storage and retrieval
438 - Semiconductor device manufacturing: process
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