3627590

Information

• Patent Grant
• 3627590

• References
• Source

• Patent Number

  3,627,590

• Date Filed

  Not available

• Date Issued

  Tuesday, December 14, 1971
  53 years ago

• CPC

  • C30B31/14 - Substrate holders or susceptors
  • C30B31/12 - Heating of the reaction chamber
  • H05B3/0047 - for semi-conductors manufacture
  • Y10S117/901 - Levitation, reduced gravity, microgravity, space
  • Y10S148/006 - Apparatus
  • Y10S148/062 - Gold diffusion
  • Y10S148/071 - Heating, selective

• US Classifications

  • 438 - Semiconductor device manufacturing: process
  • 117 - Single-crystal, oriented-crystal, and epitaxy growth processes
  • 118 - Coating apparatus
  • 148 - Metal treatment
  • 392 - Electric resistance heating devices
  • 427 - Coating processes