3675563

Information

• Patent Grant
• 3675563

• References
• Source

• Patent Number

  3,675,563

• Date Filed

  Not available

• Date Issued

  Tuesday, July 11, 1972
  53 years ago

• CPC

  • H01L21/67196 - characterized by the construction of the transfer chamber
  • B65G29/00 - Rotary conveyors
  • G03F7/3021 - from a wafer supported on a rotating chuck
  • H01L23/293 - Organic
  • B65G2812/14 - Turntables
  • H01L2924/0002 - Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

• US Classifications

  • 396 - Photography
  • 118 - Coating apparatus